Absolute Testing of the Profiles of Large-Size Plane Optical Surfaces
Abstract We show the results obtained from the measurements of surface profiles of various optical elements using a wide-aperture white-light interferometer. The developed measurement method eliminates fundamental constraints on the size and mass of the samples tested. This method, used along with t...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Kozhevatov, I. E. [verfasserIn] |
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| Format: |
Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2001 |
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| Schlagwörter: |
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| Anmerkung: |
© Plenum Publishing Corporation 2001 |
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| Übergeordnetes Werk: |
Enthalten in: Radiophysics and quantum electronics - Kluwer Academic Publishers-Plenum Publishers, 1969, 44(2001), 7 vom: Juli, Seite 575-581 |
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| Übergeordnetes Werk: |
volume:44 ; year:2001 ; number:7 ; month:07 ; pages:575-581 |
| Links: |
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| DOI / URN: |
10.1023/A:1017970119292 |
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OLC2063575452 |
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| 520 | |a Abstract We show the results obtained from the measurements of surface profiles of various optical elements using a wide-aperture white-light interferometer. The developed measurement method eliminates fundamental constraints on the size and mass of the samples tested. This method, used along with the high-order white-light interferometry and the original calibration of the reference plate of the interferometer, permit real-time testing of surface profiles with an accuracy of up to 1 Å in a wide technological range. | ||
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| 650 | 4 | |a Surface Profile | |
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| 650 | 4 | |a Optical Surface | |
| 650 | 4 | |a Plane Optical | |
| 700 | 1 | |a Rudenchik, E. A. |4 aut | |
| 700 | 1 | |a Cheragin, N. P. |4 aut | |
| 700 | 1 | |a Kulikova, E. Kh. |4 aut | |
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10.1023/A:1017970119292 doi (DE-627)OLC2063575452 (DE-He213)A:1017970119292-p DE-627 ger DE-627 rakwb eng 530 620 VZ Kozhevatov, I. E. verfasserin aut Absolute Testing of the Profiles of Large-Size Plane Optical Surfaces 2001 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Plenum Publishing Corporation 2001 Abstract We show the results obtained from the measurements of surface profiles of various optical elements using a wide-aperture white-light interferometer. The developed measurement method eliminates fundamental constraints on the size and mass of the samples tested. This method, used along with the high-order white-light interferometry and the original calibration of the reference plate of the interferometer, permit real-time testing of surface profiles with an accuracy of up to 1 Å in a wide technological range. Measurement Method Surface Profile Optical Element Optical Surface Plane Optical Rudenchik, E. A. aut Cheragin, N. P. aut Kulikova, E. Kh. aut Enthalten in Radiophysics and quantum electronics Kluwer Academic Publishers-Plenum Publishers, 1969 44(2001), 7 vom: Juli, Seite 575-581 (DE-627)130499560 (DE-600)760167-0 (DE-576)016080793 0033-8443 nnns volume:44 year:2001 number:7 month:07 pages:575-581 https://doi.org/10.1023/A:1017970119292 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY SSG-OPC-AST GBV_ILN_70 AR 44 2001 7 07 575-581 |
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10.1023/A:1017970119292 doi (DE-627)OLC2063575452 (DE-He213)A:1017970119292-p DE-627 ger DE-627 rakwb eng 530 620 VZ Kozhevatov, I. E. verfasserin aut Absolute Testing of the Profiles of Large-Size Plane Optical Surfaces 2001 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Plenum Publishing Corporation 2001 Abstract We show the results obtained from the measurements of surface profiles of various optical elements using a wide-aperture white-light interferometer. The developed measurement method eliminates fundamental constraints on the size and mass of the samples tested. This method, used along with the high-order white-light interferometry and the original calibration of the reference plate of the interferometer, permit real-time testing of surface profiles with an accuracy of up to 1 Å in a wide technological range. Measurement Method Surface Profile Optical Element Optical Surface Plane Optical Rudenchik, E. A. aut Cheragin, N. P. aut Kulikova, E. Kh. aut Enthalten in Radiophysics and quantum electronics Kluwer Academic Publishers-Plenum Publishers, 1969 44(2001), 7 vom: Juli, Seite 575-581 (DE-627)130499560 (DE-600)760167-0 (DE-576)016080793 0033-8443 nnns volume:44 year:2001 number:7 month:07 pages:575-581 https://doi.org/10.1023/A:1017970119292 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY SSG-OPC-AST GBV_ILN_70 AR 44 2001 7 07 575-581 |
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10.1023/A:1017970119292 doi (DE-627)OLC2063575452 (DE-He213)A:1017970119292-p DE-627 ger DE-627 rakwb eng 530 620 VZ Kozhevatov, I. E. verfasserin aut Absolute Testing of the Profiles of Large-Size Plane Optical Surfaces 2001 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Plenum Publishing Corporation 2001 Abstract We show the results obtained from the measurements of surface profiles of various optical elements using a wide-aperture white-light interferometer. The developed measurement method eliminates fundamental constraints on the size and mass of the samples tested. This method, used along with the high-order white-light interferometry and the original calibration of the reference plate of the interferometer, permit real-time testing of surface profiles with an accuracy of up to 1 Å in a wide technological range. Measurement Method Surface Profile Optical Element Optical Surface Plane Optical Rudenchik, E. A. aut Cheragin, N. P. aut Kulikova, E. Kh. aut Enthalten in Radiophysics and quantum electronics Kluwer Academic Publishers-Plenum Publishers, 1969 44(2001), 7 vom: Juli, Seite 575-581 (DE-627)130499560 (DE-600)760167-0 (DE-576)016080793 0033-8443 nnns volume:44 year:2001 number:7 month:07 pages:575-581 https://doi.org/10.1023/A:1017970119292 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY SSG-OPC-AST GBV_ILN_70 AR 44 2001 7 07 575-581 |
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10.1023/A:1017970119292 doi (DE-627)OLC2063575452 (DE-He213)A:1017970119292-p DE-627 ger DE-627 rakwb eng 530 620 VZ Kozhevatov, I. E. verfasserin aut Absolute Testing of the Profiles of Large-Size Plane Optical Surfaces 2001 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Plenum Publishing Corporation 2001 Abstract We show the results obtained from the measurements of surface profiles of various optical elements using a wide-aperture white-light interferometer. The developed measurement method eliminates fundamental constraints on the size and mass of the samples tested. This method, used along with the high-order white-light interferometry and the original calibration of the reference plate of the interferometer, permit real-time testing of surface profiles with an accuracy of up to 1 Å in a wide technological range. Measurement Method Surface Profile Optical Element Optical Surface Plane Optical Rudenchik, E. A. aut Cheragin, N. P. aut Kulikova, E. Kh. aut Enthalten in Radiophysics and quantum electronics Kluwer Academic Publishers-Plenum Publishers, 1969 44(2001), 7 vom: Juli, Seite 575-581 (DE-627)130499560 (DE-600)760167-0 (DE-576)016080793 0033-8443 nnns volume:44 year:2001 number:7 month:07 pages:575-581 https://doi.org/10.1023/A:1017970119292 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY SSG-OPC-AST GBV_ILN_70 AR 44 2001 7 07 575-581 |
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Abstract We show the results obtained from the measurements of surface profiles of various optical elements using a wide-aperture white-light interferometer. The developed measurement method eliminates fundamental constraints on the size and mass of the samples tested. This method, used along with the high-order white-light interferometry and the original calibration of the reference plate of the interferometer, permit real-time testing of surface profiles with an accuracy of up to 1 Å in a wide technological range. © Plenum Publishing Corporation 2001 |
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Abstract We show the results obtained from the measurements of surface profiles of various optical elements using a wide-aperture white-light interferometer. The developed measurement method eliminates fundamental constraints on the size and mass of the samples tested. This method, used along with the high-order white-light interferometry and the original calibration of the reference plate of the interferometer, permit real-time testing of surface profiles with an accuracy of up to 1 Å in a wide technological range. © Plenum Publishing Corporation 2001 |
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Abstract We show the results obtained from the measurements of surface profiles of various optical elements using a wide-aperture white-light interferometer. The developed measurement method eliminates fundamental constraints on the size and mass of the samples tested. This method, used along with the high-order white-light interferometry and the original calibration of the reference plate of the interferometer, permit real-time testing of surface profiles with an accuracy of up to 1 Å in a wide technological range. © Plenum Publishing Corporation 2001 |
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E.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Absolute Testing of the Profiles of Large-Size Plane Optical Surfaces</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2001</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">© Plenum Publishing Corporation 2001</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Abstract We show the results obtained from the measurements of surface profiles of various optical elements using a wide-aperture white-light interferometer. The developed measurement method eliminates fundamental constraints on the size and mass of the samples tested. This method, used along with the high-order white-light interferometry and the original calibration of the reference plate of the interferometer, permit real-time testing of surface profiles with an accuracy of up to 1 Å in a wide technological range.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Measurement Method</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Surface Profile</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Optical Element</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Optical Surface</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Plane Optical</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Rudenchik, E. 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