Mathematical simulation of the influence of a focusing channel surface on the angle characteristics of a bundle of rapid neutral particles
Abstract The model of the channel of the neutralization of the plasma source of bundles of rapid neutral particles (RNPs), which was developed earlier, is expanded for the case of rough surfaces forming the neutralization channel. With the help of mathematical modeling, the dependences of the main c...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Degtyarev, A. V. [verfasserIn] |
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| Format: |
Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2010 |
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| Schlagwörter: |
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| Anmerkung: |
© Pleiades Publishing, Ltd. 2010 |
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| Übergeordnetes Werk: |
Enthalten in: Russian microelectronics - SP MAIK Nauka/Interperiodica, 1992, 39(2010), 6 vom: Nov., Seite 405-410 |
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| Übergeordnetes Werk: |
volume:39 ; year:2010 ; number:6 ; month:11 ; pages:405-410 |
| Links: |
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| DOI / URN: |
10.1134/S1063739710060053 |
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OLC2067573519 |
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| 520 | |a Abstract The model of the channel of the neutralization of the plasma source of bundles of rapid neutral particles (RNPs), which was developed earlier, is expanded for the case of rough surfaces forming the neutralization channel. With the help of mathematical modeling, the dependences of the main characteristics, as well as the spatial distribution of the RNP bundle from values of the roughness parameter, are obtained. It was found that the maximum values of the RNP bundle in the focusing plane when K > 30 practically stops depending on the values of roughness. These results may be used for the determination of the requirements for the purity of the processing surfaces of a source of RNP flows. | ||
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10.1134/S1063739710060053 doi (DE-627)OLC2067573519 (DE-He213)S1063739710060053-p DE-627 ger DE-627 rakwb eng 620 VZ Degtyarev, A. V. verfasserin aut Mathematical simulation of the influence of a focusing channel surface on the angle characteristics of a bundle of rapid neutral particles 2010 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Pleiades Publishing, Ltd. 2010 Abstract The model of the channel of the neutralization of the plasma source of bundles of rapid neutral particles (RNPs), which was developed earlier, is expanded for the case of rough surfaces forming the neutralization channel. With the help of mathematical modeling, the dependences of the main characteristics, as well as the spatial distribution of the RNP bundle from values of the roughness parameter, are obtained. It was found that the maximum values of the RNP bundle in the focusing plane when K > 30 practically stops depending on the values of roughness. These results may be used for the determination of the requirements for the purity of the processing surfaces of a source of RNP flows. Mathematical Simulation Roughness Parameter RUSSIAN Microelectronics Mirror Reflection Reflection Angle Kudrya, V. P. aut Maishev, Yu. P. aut Enthalten in Russian microelectronics SP MAIK Nauka/Interperiodica, 1992 39(2010), 6 vom: Nov., Seite 405-410 (DE-627)131158309 (DE-600)1133385-6 (DE-576)285629654 1063-7397 nnns volume:39 year:2010 number:6 month:11 pages:405-410 https://doi.org/10.1134/S1063739710060053 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 AR 39 2010 6 11 405-410 |
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10.1134/S1063739710060053 doi (DE-627)OLC2067573519 (DE-He213)S1063739710060053-p DE-627 ger DE-627 rakwb eng 620 VZ Degtyarev, A. V. verfasserin aut Mathematical simulation of the influence of a focusing channel surface on the angle characteristics of a bundle of rapid neutral particles 2010 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Pleiades Publishing, Ltd. 2010 Abstract The model of the channel of the neutralization of the plasma source of bundles of rapid neutral particles (RNPs), which was developed earlier, is expanded for the case of rough surfaces forming the neutralization channel. With the help of mathematical modeling, the dependences of the main characteristics, as well as the spatial distribution of the RNP bundle from values of the roughness parameter, are obtained. It was found that the maximum values of the RNP bundle in the focusing plane when K > 30 practically stops depending on the values of roughness. These results may be used for the determination of the requirements for the purity of the processing surfaces of a source of RNP flows. Mathematical Simulation Roughness Parameter RUSSIAN Microelectronics Mirror Reflection Reflection Angle Kudrya, V. P. aut Maishev, Yu. P. aut Enthalten in Russian microelectronics SP MAIK Nauka/Interperiodica, 1992 39(2010), 6 vom: Nov., Seite 405-410 (DE-627)131158309 (DE-600)1133385-6 (DE-576)285629654 1063-7397 nnns volume:39 year:2010 number:6 month:11 pages:405-410 https://doi.org/10.1134/S1063739710060053 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 AR 39 2010 6 11 405-410 |
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10.1134/S1063739710060053 doi (DE-627)OLC2067573519 (DE-He213)S1063739710060053-p DE-627 ger DE-627 rakwb eng 620 VZ Degtyarev, A. V. verfasserin aut Mathematical simulation of the influence of a focusing channel surface on the angle characteristics of a bundle of rapid neutral particles 2010 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Pleiades Publishing, Ltd. 2010 Abstract The model of the channel of the neutralization of the plasma source of bundles of rapid neutral particles (RNPs), which was developed earlier, is expanded for the case of rough surfaces forming the neutralization channel. With the help of mathematical modeling, the dependences of the main characteristics, as well as the spatial distribution of the RNP bundle from values of the roughness parameter, are obtained. It was found that the maximum values of the RNP bundle in the focusing plane when K > 30 practically stops depending on the values of roughness. These results may be used for the determination of the requirements for the purity of the processing surfaces of a source of RNP flows. Mathematical Simulation Roughness Parameter RUSSIAN Microelectronics Mirror Reflection Reflection Angle Kudrya, V. P. aut Maishev, Yu. P. aut Enthalten in Russian microelectronics SP MAIK Nauka/Interperiodica, 1992 39(2010), 6 vom: Nov., Seite 405-410 (DE-627)131158309 (DE-600)1133385-6 (DE-576)285629654 1063-7397 nnns volume:39 year:2010 number:6 month:11 pages:405-410 https://doi.org/10.1134/S1063739710060053 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 AR 39 2010 6 11 405-410 |
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10.1134/S1063739710060053 doi (DE-627)OLC2067573519 (DE-He213)S1063739710060053-p DE-627 ger DE-627 rakwb eng 620 VZ Degtyarev, A. V. verfasserin aut Mathematical simulation of the influence of a focusing channel surface on the angle characteristics of a bundle of rapid neutral particles 2010 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Pleiades Publishing, Ltd. 2010 Abstract The model of the channel of the neutralization of the plasma source of bundles of rapid neutral particles (RNPs), which was developed earlier, is expanded for the case of rough surfaces forming the neutralization channel. With the help of mathematical modeling, the dependences of the main characteristics, as well as the spatial distribution of the RNP bundle from values of the roughness parameter, are obtained. It was found that the maximum values of the RNP bundle in the focusing plane when K > 30 practically stops depending on the values of roughness. These results may be used for the determination of the requirements for the purity of the processing surfaces of a source of RNP flows. Mathematical Simulation Roughness Parameter RUSSIAN Microelectronics Mirror Reflection Reflection Angle Kudrya, V. P. aut Maishev, Yu. P. aut Enthalten in Russian microelectronics SP MAIK Nauka/Interperiodica, 1992 39(2010), 6 vom: Nov., Seite 405-410 (DE-627)131158309 (DE-600)1133385-6 (DE-576)285629654 1063-7397 nnns volume:39 year:2010 number:6 month:11 pages:405-410 https://doi.org/10.1134/S1063739710060053 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 AR 39 2010 6 11 405-410 |
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Abstract The model of the channel of the neutralization of the plasma source of bundles of rapid neutral particles (RNPs), which was developed earlier, is expanded for the case of rough surfaces forming the neutralization channel. With the help of mathematical modeling, the dependences of the main characteristics, as well as the spatial distribution of the RNP bundle from values of the roughness parameter, are obtained. It was found that the maximum values of the RNP bundle in the focusing plane when K > 30 practically stops depending on the values of roughness. These results may be used for the determination of the requirements for the purity of the processing surfaces of a source of RNP flows. © Pleiades Publishing, Ltd. 2010 |
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Abstract The model of the channel of the neutralization of the plasma source of bundles of rapid neutral particles (RNPs), which was developed earlier, is expanded for the case of rough surfaces forming the neutralization channel. With the help of mathematical modeling, the dependences of the main characteristics, as well as the spatial distribution of the RNP bundle from values of the roughness parameter, are obtained. It was found that the maximum values of the RNP bundle in the focusing plane when K > 30 practically stops depending on the values of roughness. These results may be used for the determination of the requirements for the purity of the processing surfaces of a source of RNP flows. © Pleiades Publishing, Ltd. 2010 |
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Abstract The model of the channel of the neutralization of the plasma source of bundles of rapid neutral particles (RNPs), which was developed earlier, is expanded for the case of rough surfaces forming the neutralization channel. With the help of mathematical modeling, the dependences of the main characteristics, as well as the spatial distribution of the RNP bundle from values of the roughness parameter, are obtained. It was found that the maximum values of the RNP bundle in the focusing plane when K > 30 practically stops depending on the values of roughness. These results may be used for the determination of the requirements for the purity of the processing surfaces of a source of RNP flows. © Pleiades Publishing, Ltd. 2010 |
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V.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Mathematical simulation of the influence of a focusing channel surface on the angle characteristics of a bundle of rapid neutral particles</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2010</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">© Pleiades Publishing, Ltd. 2010</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Abstract The model of the channel of the neutralization of the plasma source of bundles of rapid neutral particles (RNPs), which was developed earlier, is expanded for the case of rough surfaces forming the neutralization channel. With the help of mathematical modeling, the dependences of the main characteristics, as well as the spatial distribution of the RNP bundle from values of the roughness parameter, are obtained. It was found that the maximum values of the RNP bundle in the focusing plane when K > 30 practically stops depending on the values of roughness. These results may be used for the determination of the requirements for the purity of the processing surfaces of a source of RNP flows.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Mathematical Simulation</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Roughness Parameter</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">RUSSIAN Microelectronics</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Mirror Reflection</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Reflection Angle</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kudrya, V. P.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Maishev, Yu. P.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Russian microelectronics</subfield><subfield code="d">SP MAIK Nauka/Interperiodica, 1992</subfield><subfield code="g">39(2010), 6 vom: Nov., Seite 405-410</subfield><subfield code="w">(DE-627)131158309</subfield><subfield code="w">(DE-600)1133385-6</subfield><subfield code="w">(DE-576)285629654</subfield><subfield code="x">1063-7397</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:39</subfield><subfield code="g">year:2010</subfield><subfield code="g">number:6</subfield><subfield code="g">month:11</subfield><subfield code="g">pages:405-410</subfield></datafield><datafield tag="856" ind1="4" ind2="1"><subfield code="u">https://doi.org/10.1134/S1063739710060053</subfield><subfield code="z">lizenzpflichtig</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-TEC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">39</subfield><subfield code="j">2010</subfield><subfield code="e">6</subfield><subfield code="c">11</subfield><subfield code="h">405-410</subfield></datafield></record></collection>
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