Generation of fast neutral beams based on closed drift ion sources
Abstract This paper demonstrates the possibility of the creation of a fast neutral beam source based on Radikal ion sources of a different configuration. Our measurements indicate that the output beam of such a source is 100%-neutral independently of the energy of particles and their composition. Th...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Maishev, Yu. P. [verfasserIn] |
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| Format: |
Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2014 |
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| Schlagwörter: |
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| Anmerkung: |
© Pleiades Publishing, Ltd. 2014 |
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| Übergeordnetes Werk: |
Enthalten in: Russian microelectronics - Pleiades Publishing, 1992, 43(2014), 5 vom: Sept., Seite 345-351 |
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| Übergeordnetes Werk: |
volume:43 ; year:2014 ; number:5 ; month:09 ; pages:345-351 |
| Links: |
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| DOI / URN: |
10.1134/S1063739714040052 |
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OLC2067576216 |
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| 520 | |a Abstract This paper demonstrates the possibility of the creation of a fast neutral beam source based on Radikal ion sources of a different configuration. Our measurements indicate that the output beam of such a source is 100%-neutral independently of the energy of particles and their composition. This effect is achieved with a neutralization channel and an electrostatic deflection system. The high directionality of a beam and the possibility of its long-distance transport have also been demonstrated. Some results of studying the rate of the sputtering of different materials with a neutral Ar0 beam are given. | ||
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10.1134/S1063739714040052 doi (DE-627)OLC2067576216 (DE-He213)S1063739714040052-p DE-627 ger DE-627 rakwb eng 620 VZ Maishev, Yu. P. verfasserin aut Generation of fast neutral beams based on closed drift ion sources 2014 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Pleiades Publishing, Ltd. 2014 Abstract This paper demonstrates the possibility of the creation of a fast neutral beam source based on Radikal ion sources of a different configuration. Our measurements indicate that the output beam of such a source is 100%-neutral independently of the energy of particles and their composition. This effect is achieved with a neutralization channel and an electrostatic deflection system. The high directionality of a beam and the possibility of its long-distance transport have also been demonstrated. Some results of studying the rate of the sputtering of different materials with a neutral Ar0 beam are given. RUSSIAN Microelectronics Output Beam Neutral Beam Neutrality Degree Neutralization Channel Shevchuk, S. L. aut Kudrya, V. P. aut Enthalten in Russian microelectronics Pleiades Publishing, 1992 43(2014), 5 vom: Sept., Seite 345-351 (DE-627)131158309 (DE-600)1133385-6 (DE-576)285629654 1063-7397 nnns volume:43 year:2014 number:5 month:09 pages:345-351 https://doi.org/10.1134/S1063739714040052 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 AR 43 2014 5 09 345-351 |
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10.1134/S1063739714040052 doi (DE-627)OLC2067576216 (DE-He213)S1063739714040052-p DE-627 ger DE-627 rakwb eng 620 VZ Maishev, Yu. P. verfasserin aut Generation of fast neutral beams based on closed drift ion sources 2014 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Pleiades Publishing, Ltd. 2014 Abstract This paper demonstrates the possibility of the creation of a fast neutral beam source based on Radikal ion sources of a different configuration. Our measurements indicate that the output beam of such a source is 100%-neutral independently of the energy of particles and their composition. This effect is achieved with a neutralization channel and an electrostatic deflection system. The high directionality of a beam and the possibility of its long-distance transport have also been demonstrated. Some results of studying the rate of the sputtering of different materials with a neutral Ar0 beam are given. RUSSIAN Microelectronics Output Beam Neutral Beam Neutrality Degree Neutralization Channel Shevchuk, S. L. aut Kudrya, V. P. aut Enthalten in Russian microelectronics Pleiades Publishing, 1992 43(2014), 5 vom: Sept., Seite 345-351 (DE-627)131158309 (DE-600)1133385-6 (DE-576)285629654 1063-7397 nnns volume:43 year:2014 number:5 month:09 pages:345-351 https://doi.org/10.1134/S1063739714040052 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 AR 43 2014 5 09 345-351 |
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10.1134/S1063739714040052 doi (DE-627)OLC2067576216 (DE-He213)S1063739714040052-p DE-627 ger DE-627 rakwb eng 620 VZ Maishev, Yu. P. verfasserin aut Generation of fast neutral beams based on closed drift ion sources 2014 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Pleiades Publishing, Ltd. 2014 Abstract This paper demonstrates the possibility of the creation of a fast neutral beam source based on Radikal ion sources of a different configuration. Our measurements indicate that the output beam of such a source is 100%-neutral independently of the energy of particles and their composition. This effect is achieved with a neutralization channel and an electrostatic deflection system. The high directionality of a beam and the possibility of its long-distance transport have also been demonstrated. Some results of studying the rate of the sputtering of different materials with a neutral Ar0 beam are given. RUSSIAN Microelectronics Output Beam Neutral Beam Neutrality Degree Neutralization Channel Shevchuk, S. L. aut Kudrya, V. P. aut Enthalten in Russian microelectronics Pleiades Publishing, 1992 43(2014), 5 vom: Sept., Seite 345-351 (DE-627)131158309 (DE-600)1133385-6 (DE-576)285629654 1063-7397 nnns volume:43 year:2014 number:5 month:09 pages:345-351 https://doi.org/10.1134/S1063739714040052 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 AR 43 2014 5 09 345-351 |
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10.1134/S1063739714040052 doi (DE-627)OLC2067576216 (DE-He213)S1063739714040052-p DE-627 ger DE-627 rakwb eng 620 VZ Maishev, Yu. P. verfasserin aut Generation of fast neutral beams based on closed drift ion sources 2014 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Pleiades Publishing, Ltd. 2014 Abstract This paper demonstrates the possibility of the creation of a fast neutral beam source based on Radikal ion sources of a different configuration. Our measurements indicate that the output beam of such a source is 100%-neutral independently of the energy of particles and their composition. This effect is achieved with a neutralization channel and an electrostatic deflection system. The high directionality of a beam and the possibility of its long-distance transport have also been demonstrated. Some results of studying the rate of the sputtering of different materials with a neutral Ar0 beam are given. RUSSIAN Microelectronics Output Beam Neutral Beam Neutrality Degree Neutralization Channel Shevchuk, S. L. aut Kudrya, V. P. aut Enthalten in Russian microelectronics Pleiades Publishing, 1992 43(2014), 5 vom: Sept., Seite 345-351 (DE-627)131158309 (DE-600)1133385-6 (DE-576)285629654 1063-7397 nnns volume:43 year:2014 number:5 month:09 pages:345-351 https://doi.org/10.1134/S1063739714040052 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 AR 43 2014 5 09 345-351 |
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10.1134/S1063739714040052 doi (DE-627)OLC2067576216 (DE-He213)S1063739714040052-p DE-627 ger DE-627 rakwb eng 620 VZ Maishev, Yu. P. verfasserin aut Generation of fast neutral beams based on closed drift ion sources 2014 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Pleiades Publishing, Ltd. 2014 Abstract This paper demonstrates the possibility of the creation of a fast neutral beam source based on Radikal ion sources of a different configuration. Our measurements indicate that the output beam of such a source is 100%-neutral independently of the energy of particles and their composition. This effect is achieved with a neutralization channel and an electrostatic deflection system. The high directionality of a beam and the possibility of its long-distance transport have also been demonstrated. Some results of studying the rate of the sputtering of different materials with a neutral Ar0 beam are given. RUSSIAN Microelectronics Output Beam Neutral Beam Neutrality Degree Neutralization Channel Shevchuk, S. L. aut Kudrya, V. P. aut Enthalten in Russian microelectronics Pleiades Publishing, 1992 43(2014), 5 vom: Sept., Seite 345-351 (DE-627)131158309 (DE-600)1133385-6 (DE-576)285629654 1063-7397 nnns volume:43 year:2014 number:5 month:09 pages:345-351 https://doi.org/10.1134/S1063739714040052 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 AR 43 2014 5 09 345-351 |
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Generation of fast neutral beams based on closed drift ion sources |
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Abstract This paper demonstrates the possibility of the creation of a fast neutral beam source based on Radikal ion sources of a different configuration. Our measurements indicate that the output beam of such a source is 100%-neutral independently of the energy of particles and their composition. This effect is achieved with a neutralization channel and an electrostatic deflection system. The high directionality of a beam and the possibility of its long-distance transport have also been demonstrated. Some results of studying the rate of the sputtering of different materials with a neutral Ar0 beam are given. © Pleiades Publishing, Ltd. 2014 |
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Abstract This paper demonstrates the possibility of the creation of a fast neutral beam source based on Radikal ion sources of a different configuration. Our measurements indicate that the output beam of such a source is 100%-neutral independently of the energy of particles and their composition. This effect is achieved with a neutralization channel and an electrostatic deflection system. The high directionality of a beam and the possibility of its long-distance transport have also been demonstrated. Some results of studying the rate of the sputtering of different materials with a neutral Ar0 beam are given. © Pleiades Publishing, Ltd. 2014 |
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Abstract This paper demonstrates the possibility of the creation of a fast neutral beam source based on Radikal ion sources of a different configuration. Our measurements indicate that the output beam of such a source is 100%-neutral independently of the energy of particles and their composition. This effect is achieved with a neutralization channel and an electrostatic deflection system. The high directionality of a beam and the possibility of its long-distance transport have also been demonstrated. Some results of studying the rate of the sputtering of different materials with a neutral Ar0 beam are given. © Pleiades Publishing, Ltd. 2014 |
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P.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Generation of fast neutral beams based on closed drift ion sources</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2014</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">© Pleiades Publishing, Ltd. 2014</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Abstract This paper demonstrates the possibility of the creation of a fast neutral beam source based on Radikal ion sources of a different configuration. Our measurements indicate that the output beam of such a source is 100%-neutral independently of the energy of particles and their composition. This effect is achieved with a neutralization channel and an electrostatic deflection system. The high directionality of a beam and the possibility of its long-distance transport have also been demonstrated. Some results of studying the rate of the sputtering of different materials with a neutral Ar0 beam are given.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">RUSSIAN Microelectronics</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Output Beam</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Neutral Beam</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Neutrality Degree</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Neutralization Channel</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Shevchuk, S. L.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kudrya, V. P.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Russian microelectronics</subfield><subfield code="d">Pleiades Publishing, 1992</subfield><subfield code="g">43(2014), 5 vom: Sept., Seite 345-351</subfield><subfield code="w">(DE-627)131158309</subfield><subfield code="w">(DE-600)1133385-6</subfield><subfield code="w">(DE-576)285629654</subfield><subfield code="x">1063-7397</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:43</subfield><subfield code="g">year:2014</subfield><subfield code="g">number:5</subfield><subfield code="g">month:09</subfield><subfield code="g">pages:345-351</subfield></datafield><datafield tag="856" ind1="4" ind2="1"><subfield code="u">https://doi.org/10.1134/S1063739714040052</subfield><subfield code="z">lizenzpflichtig</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-TEC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">43</subfield><subfield code="j">2014</subfield><subfield code="e">5</subfield><subfield code="c">09</subfield><subfield code="h">345-351</subfield></datafield></record></collection>
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