Identification and Excitation Mechanisms of the Lines and Bands of Boron-Containing Components in the Optical Emission Spectra of Low-Temperature $ BF_{3} $/Ar Plasmas
Abstract B and $ B^{+} $ emission lines and the identification of BF emission bands in the spectra of technological $ BF_{3} $/Ar plasmas are analyzed. The bands identified correspond to the electron-vibrational transitions b 3$ Σ^{+} $(ν'') → a3Π(ν'), ν'' = 0–2, and lie in...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Kudrya, V. P. [verfasserIn] |
|---|
| Format: |
Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2019 |
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| Anmerkung: |
© Pleiades Publishing, Ltd. 2019 |
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| Übergeordnetes Werk: |
Enthalten in: Russian microelectronics - Pleiades Publishing, 1992, 48(2019), 1 vom: Jan., Seite 37-42 |
|---|---|
| Übergeordnetes Werk: |
volume:48 ; year:2019 ; number:1 ; month:01 ; pages:37-42 |
| Links: |
|---|
| DOI / URN: |
10.1134/S1063739719010050 |
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OLC2067579991 |
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| 520 | |a Abstract B and $ B^{+} $ emission lines and the identification of BF emission bands in the spectra of technological $ BF_{3} $/Ar plasmas are analyzed. The bands identified correspond to the electron-vibrational transitions b 3$ Σ^{+} $(ν'') → a3Π(ν'), ν'' = 0–2, and lie in the range 310–340 nm. In the spectra, no emission lines belonging to other boron-containing compounds are observed. | ||
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10.1134/S1063739719010050 doi (DE-627)OLC2067579991 (DE-He213)S1063739719010050-p DE-627 ger DE-627 rakwb eng 620 VZ Kudrya, V. P. verfasserin aut Identification and Excitation Mechanisms of the Lines and Bands of Boron-Containing Components in the Optical Emission Spectra of Low-Temperature $ BF_{3} $/Ar Plasmas 2019 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Pleiades Publishing, Ltd. 2019 Abstract B and $ B^{+} $ emission lines and the identification of BF emission bands in the spectra of technological $ BF_{3} $/Ar plasmas are analyzed. The bands identified correspond to the electron-vibrational transitions b 3$ Σ^{+} $(ν'') → a3Π(ν'), ν'' = 0–2, and lie in the range 310–340 nm. In the spectra, no emission lines belonging to other boron-containing compounds are observed. Enthalten in Russian microelectronics Pleiades Publishing, 1992 48(2019), 1 vom: Jan., Seite 37-42 (DE-627)131158309 (DE-600)1133385-6 (DE-576)285629654 1063-7397 nnns volume:48 year:2019 number:1 month:01 pages:37-42 https://doi.org/10.1134/S1063739719010050 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 AR 48 2019 1 01 37-42 |
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10.1134/S1063739719010050 doi (DE-627)OLC2067579991 (DE-He213)S1063739719010050-p DE-627 ger DE-627 rakwb eng 620 VZ Kudrya, V. P. verfasserin aut Identification and Excitation Mechanisms of the Lines and Bands of Boron-Containing Components in the Optical Emission Spectra of Low-Temperature $ BF_{3} $/Ar Plasmas 2019 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Pleiades Publishing, Ltd. 2019 Abstract B and $ B^{+} $ emission lines and the identification of BF emission bands in the spectra of technological $ BF_{3} $/Ar plasmas are analyzed. The bands identified correspond to the electron-vibrational transitions b 3$ Σ^{+} $(ν'') → a3Π(ν'), ν'' = 0–2, and lie in the range 310–340 nm. In the spectra, no emission lines belonging to other boron-containing compounds are observed. Enthalten in Russian microelectronics Pleiades Publishing, 1992 48(2019), 1 vom: Jan., Seite 37-42 (DE-627)131158309 (DE-600)1133385-6 (DE-576)285629654 1063-7397 nnns volume:48 year:2019 number:1 month:01 pages:37-42 https://doi.org/10.1134/S1063739719010050 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 AR 48 2019 1 01 37-42 |
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10.1134/S1063739719010050 doi (DE-627)OLC2067579991 (DE-He213)S1063739719010050-p DE-627 ger DE-627 rakwb eng 620 VZ Kudrya, V. P. verfasserin aut Identification and Excitation Mechanisms of the Lines and Bands of Boron-Containing Components in the Optical Emission Spectra of Low-Temperature $ BF_{3} $/Ar Plasmas 2019 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Pleiades Publishing, Ltd. 2019 Abstract B and $ B^{+} $ emission lines and the identification of BF emission bands in the spectra of technological $ BF_{3} $/Ar plasmas are analyzed. The bands identified correspond to the electron-vibrational transitions b 3$ Σ^{+} $(ν'') → a3Π(ν'), ν'' = 0–2, and lie in the range 310–340 nm. In the spectra, no emission lines belonging to other boron-containing compounds are observed. Enthalten in Russian microelectronics Pleiades Publishing, 1992 48(2019), 1 vom: Jan., Seite 37-42 (DE-627)131158309 (DE-600)1133385-6 (DE-576)285629654 1063-7397 nnns volume:48 year:2019 number:1 month:01 pages:37-42 https://doi.org/10.1134/S1063739719010050 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 AR 48 2019 1 01 37-42 |
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10.1134/S1063739719010050 doi (DE-627)OLC2067579991 (DE-He213)S1063739719010050-p DE-627 ger DE-627 rakwb eng 620 VZ Kudrya, V. P. verfasserin aut Identification and Excitation Mechanisms of the Lines and Bands of Boron-Containing Components in the Optical Emission Spectra of Low-Temperature $ BF_{3} $/Ar Plasmas 2019 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Pleiades Publishing, Ltd. 2019 Abstract B and $ B^{+} $ emission lines and the identification of BF emission bands in the spectra of technological $ BF_{3} $/Ar plasmas are analyzed. The bands identified correspond to the electron-vibrational transitions b 3$ Σ^{+} $(ν'') → a3Π(ν'), ν'' = 0–2, and lie in the range 310–340 nm. In the spectra, no emission lines belonging to other boron-containing compounds are observed. Enthalten in Russian microelectronics Pleiades Publishing, 1992 48(2019), 1 vom: Jan., Seite 37-42 (DE-627)131158309 (DE-600)1133385-6 (DE-576)285629654 1063-7397 nnns volume:48 year:2019 number:1 month:01 pages:37-42 https://doi.org/10.1134/S1063739719010050 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 AR 48 2019 1 01 37-42 |
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10.1134/S1063739719010050 doi (DE-627)OLC2067579991 (DE-He213)S1063739719010050-p DE-627 ger DE-627 rakwb eng 620 VZ Kudrya, V. P. verfasserin aut Identification and Excitation Mechanisms of the Lines and Bands of Boron-Containing Components in the Optical Emission Spectra of Low-Temperature $ BF_{3} $/Ar Plasmas 2019 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Pleiades Publishing, Ltd. 2019 Abstract B and $ B^{+} $ emission lines and the identification of BF emission bands in the spectra of technological $ BF_{3} $/Ar plasmas are analyzed. The bands identified correspond to the electron-vibrational transitions b 3$ Σ^{+} $(ν'') → a3Π(ν'), ν'' = 0–2, and lie in the range 310–340 nm. In the spectra, no emission lines belonging to other boron-containing compounds are observed. Enthalten in Russian microelectronics Pleiades Publishing, 1992 48(2019), 1 vom: Jan., Seite 37-42 (DE-627)131158309 (DE-600)1133385-6 (DE-576)285629654 1063-7397 nnns volume:48 year:2019 number:1 month:01 pages:37-42 https://doi.org/10.1134/S1063739719010050 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_70 AR 48 2019 1 01 37-42 |
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identification and excitation mechanisms of the lines and bands of boron-containing components in the optical emission spectra of low-temperature $ bf_{3} $/ar plasmas |
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Identification and Excitation Mechanisms of the Lines and Bands of Boron-Containing Components in the Optical Emission Spectra of Low-Temperature $ BF_{3} $/Ar Plasmas |
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Abstract B and $ B^{+} $ emission lines and the identification of BF emission bands in the spectra of technological $ BF_{3} $/Ar plasmas are analyzed. The bands identified correspond to the electron-vibrational transitions b 3$ Σ^{+} $(ν'') → a3Π(ν'), ν'' = 0–2, and lie in the range 310–340 nm. In the spectra, no emission lines belonging to other boron-containing compounds are observed. © Pleiades Publishing, Ltd. 2019 |
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Abstract B and $ B^{+} $ emission lines and the identification of BF emission bands in the spectra of technological $ BF_{3} $/Ar plasmas are analyzed. The bands identified correspond to the electron-vibrational transitions b 3$ Σ^{+} $(ν'') → a3Π(ν'), ν'' = 0–2, and lie in the range 310–340 nm. In the spectra, no emission lines belonging to other boron-containing compounds are observed. © Pleiades Publishing, Ltd. 2019 |
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Abstract B and $ B^{+} $ emission lines and the identification of BF emission bands in the spectra of technological $ BF_{3} $/Ar plasmas are analyzed. The bands identified correspond to the electron-vibrational transitions b 3$ Σ^{+} $(ν'') → a3Π(ν'), ν'' = 0–2, and lie in the range 310–340 nm. In the spectra, no emission lines belonging to other boron-containing compounds are observed. © Pleiades Publishing, Ltd. 2019 |
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Identification and Excitation Mechanisms of the Lines and Bands of Boron-Containing Components in the Optical Emission Spectra of Low-Temperature $ BF_{3} $/Ar Plasmas |
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