Preparation of orientated aluminium nitride films by radio-frequency reactive sputtering

Gespeichert in:

Autor*in:	Sugiyama, K. [verfasserIn] Taniguchi, K. Kuwabara, K.

Format:	Artikel
Sprache:	Englisch

Erschienen:	1990

Schlagwörter:	Polymer Aluminium Nitride Nitride Film Reactive Sputtering

Anmerkung:	© Chapman and Hall Ltd. 1990

Übergeordnetes Werk:	Enthalten in: Journal of materials science / Letters - Kluwer Academic Publishers, 1982, 9(1990), 4 vom: Apr., Seite 489-492
Übergeordnetes Werk:	volume:9 ; year:1990 ; number:4 ; month:04 ; pages:489-492

Links:	Volltext

DOI / URN:	10.1007/BF00721039

Katalog-ID:	OLC2072959748

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author	Sugiyama, K.
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title_auth	Preparation of orientated aluminium nitride films by radio-frequency reactive sputtering
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Preparation of orientated aluminium nitride films by radio-frequency reactive sputtering

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