On the applicability of the sharp interface model in modelling the kinetics of the direct nitridation of silicon
Autor*in: |
Jovanovic, Z. R. [verfasserIn] |
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Format: |
Artikel |
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Sprache: |
Englisch |
Erschienen: |
1995 |
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Schlagwörter: |
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Anmerkung: |
© Chapman & Hall 1995 |
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Übergeordnetes Werk: |
Enthalten in: Journal of materials science / Letters - Kluwer Academic Publishers, 1982, 14(1995), 18 vom: Sept., Seite 1263-1267 |
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Übergeordnetes Werk: |
volume:14 ; year:1995 ; number:18 ; month:09 ; pages:1263-1267 |
Links: |
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DOI / URN: |
10.1007/BF01262262 |
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Katalog-ID: |
OLC2072991579 |
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10.1007/BF01262262 doi (DE-627)OLC2072991579 (DE-He213)BF01262262-p DE-627 ger DE-627 rakwb eng 670 VZ Jovanovic, Z. R. verfasserin aut On the applicability of the sharp interface model in modelling the kinetics of the direct nitridation of silicon 1995 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Chapman & Hall 1995 Polymer Silicon Interface Model Sharp Interface Sharp Interface Model Enthalten in Journal of materials science / Letters Kluwer Academic Publishers, 1982 14(1995), 18 vom: Sept., Seite 1263-1267 (DE-627)130626473 (DE-600)797184-9 (DE-576)016132890 0261-8028 nnns volume:14 year:1995 number:18 month:09 pages:1263-1267 https://doi.org/10.1007/BF01262262 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_23 GBV_ILN_24 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_65 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_4046 GBV_ILN_4082 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4314 GBV_ILN_4316 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 14 1995 18 09 1263-1267 |
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10.1007/BF01262262 doi (DE-627)OLC2072991579 (DE-He213)BF01262262-p DE-627 ger DE-627 rakwb eng 670 VZ Jovanovic, Z. R. verfasserin aut On the applicability of the sharp interface model in modelling the kinetics of the direct nitridation of silicon 1995 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Chapman & Hall 1995 Polymer Silicon Interface Model Sharp Interface Sharp Interface Model Enthalten in Journal of materials science / Letters Kluwer Academic Publishers, 1982 14(1995), 18 vom: Sept., Seite 1263-1267 (DE-627)130626473 (DE-600)797184-9 (DE-576)016132890 0261-8028 nnns volume:14 year:1995 number:18 month:09 pages:1263-1267 https://doi.org/10.1007/BF01262262 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_23 GBV_ILN_24 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_65 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_4046 GBV_ILN_4082 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4314 GBV_ILN_4316 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 14 1995 18 09 1263-1267 |
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10.1007/BF01262262 doi (DE-627)OLC2072991579 (DE-He213)BF01262262-p DE-627 ger DE-627 rakwb eng 670 VZ Jovanovic, Z. R. verfasserin aut On the applicability of the sharp interface model in modelling the kinetics of the direct nitridation of silicon 1995 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Chapman & Hall 1995 Polymer Silicon Interface Model Sharp Interface Sharp Interface Model Enthalten in Journal of materials science / Letters Kluwer Academic Publishers, 1982 14(1995), 18 vom: Sept., Seite 1263-1267 (DE-627)130626473 (DE-600)797184-9 (DE-576)016132890 0261-8028 nnns volume:14 year:1995 number:18 month:09 pages:1263-1267 https://doi.org/10.1007/BF01262262 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_23 GBV_ILN_24 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_65 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_4046 GBV_ILN_4082 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4314 GBV_ILN_4316 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 14 1995 18 09 1263-1267 |
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