Additive oxygen effects in Cl2 plasma etching of chrome films

Gespeichert in:

Autor*in:	Kwon, Kwang-Ho [verfasserIn] Kang, Seung-Youl Park, Sang-Ho Sung, Hee-Kyung Kim, Dong-Keun Moon, Jong-Ha

Format:	Artikel
Sprache:	Englisch

Erschienen:	1999

Schlagwörter:	Oxygen Polymer Chrome Plasma Etching Additive Oxygen

Anmerkung:	© Kluwer Academic Publishers 1999

Übergeordnetes Werk:	Enthalten in: Journal of materials science / Letters - Kluwer Academic Publishers, 1982, 18(1999), 15 vom: Aug., Seite 1197-1200
Übergeordnetes Werk:	volume:18 ; year:1999 ; number:15 ; month:08 ; pages:1197-1200

Links:	Volltext

DOI / URN:	10.1023/A:1006642016630

Katalog-ID:	OLC2073015778

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allfields	10.1023/A:1006642016630 doi (DE-627)OLC2073015778 (DE-He213)A:1006642016630-p DE-627 ger DE-627 rakwb eng 670 VZ Kwon, Kwang-Ho verfasserin aut Additive oxygen effects in Cl2 plasma etching of chrome films 1999 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Kluwer Academic Publishers 1999 Oxygen Polymer Chrome Plasma Etching Additive Oxygen Kang, Seung-Youl aut Park, Sang-Ho aut Sung, Hee-Kyung aut Kim, Dong-Keun aut Moon, Jong-Ha aut Enthalten in Journal of materials science / Letters Kluwer Academic Publishers, 1982 18(1999), 15 vom: Aug., Seite 1197-1200 (DE-627)130626473 (DE-600)797184-9 (DE-576)016132890 0261-8028 nnns volume:18 year:1999 number:15 month:08 pages:1197-1200 https://doi.org/10.1023/A:1006642016630 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_4046 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4314 GBV_ILN_4316 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 18 1999 15 08 1197-1200
spelling	10.1023/A:1006642016630 doi (DE-627)OLC2073015778 (DE-He213)A:1006642016630-p DE-627 ger DE-627 rakwb eng 670 VZ Kwon, Kwang-Ho verfasserin aut Additive oxygen effects in Cl2 plasma etching of chrome films 1999 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Kluwer Academic Publishers 1999 Oxygen Polymer Chrome Plasma Etching Additive Oxygen Kang, Seung-Youl aut Park, Sang-Ho aut Sung, Hee-Kyung aut Kim, Dong-Keun aut Moon, Jong-Ha aut Enthalten in Journal of materials science / Letters Kluwer Academic Publishers, 1982 18(1999), 15 vom: Aug., Seite 1197-1200 (DE-627)130626473 (DE-600)797184-9 (DE-576)016132890 0261-8028 nnns volume:18 year:1999 number:15 month:08 pages:1197-1200 https://doi.org/10.1023/A:1006642016630 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_4046 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4314 GBV_ILN_4316 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 18 1999 15 08 1197-1200
allfields_unstemmed	10.1023/A:1006642016630 doi (DE-627)OLC2073015778 (DE-He213)A:1006642016630-p DE-627 ger DE-627 rakwb eng 670 VZ Kwon, Kwang-Ho verfasserin aut Additive oxygen effects in Cl2 plasma etching of chrome films 1999 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Kluwer Academic Publishers 1999 Oxygen Polymer Chrome Plasma Etching Additive Oxygen Kang, Seung-Youl aut Park, Sang-Ho aut Sung, Hee-Kyung aut Kim, Dong-Keun aut Moon, Jong-Ha aut Enthalten in Journal of materials science / Letters Kluwer Academic Publishers, 1982 18(1999), 15 vom: Aug., Seite 1197-1200 (DE-627)130626473 (DE-600)797184-9 (DE-576)016132890 0261-8028 nnns volume:18 year:1999 number:15 month:08 pages:1197-1200 https://doi.org/10.1023/A:1006642016630 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_4046 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4314 GBV_ILN_4316 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 18 1999 15 08 1197-1200
allfieldsGer	10.1023/A:1006642016630 doi (DE-627)OLC2073015778 (DE-He213)A:1006642016630-p DE-627 ger DE-627 rakwb eng 670 VZ Kwon, Kwang-Ho verfasserin aut Additive oxygen effects in Cl2 plasma etching of chrome films 1999 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Kluwer Academic Publishers 1999 Oxygen Polymer Chrome Plasma Etching Additive Oxygen Kang, Seung-Youl aut Park, Sang-Ho aut Sung, Hee-Kyung aut Kim, Dong-Keun aut Moon, Jong-Ha aut Enthalten in Journal of materials science / Letters Kluwer Academic Publishers, 1982 18(1999), 15 vom: Aug., Seite 1197-1200 (DE-627)130626473 (DE-600)797184-9 (DE-576)016132890 0261-8028 nnns volume:18 year:1999 number:15 month:08 pages:1197-1200 https://doi.org/10.1023/A:1006642016630 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_4046 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4314 GBV_ILN_4316 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 18 1999 15 08 1197-1200
allfieldsSound	10.1023/A:1006642016630 doi (DE-627)OLC2073015778 (DE-He213)A:1006642016630-p DE-627 ger DE-627 rakwb eng 670 VZ Kwon, Kwang-Ho verfasserin aut Additive oxygen effects in Cl2 plasma etching of chrome films 1999 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Kluwer Academic Publishers 1999 Oxygen Polymer Chrome Plasma Etching Additive Oxygen Kang, Seung-Youl aut Park, Sang-Ho aut Sung, Hee-Kyung aut Kim, Dong-Keun aut Moon, Jong-Ha aut Enthalten in Journal of materials science / Letters Kluwer Academic Publishers, 1982 18(1999), 15 vom: Aug., Seite 1197-1200 (DE-627)130626473 (DE-600)797184-9 (DE-576)016132890 0261-8028 nnns volume:18 year:1999 number:15 month:08 pages:1197-1200 https://doi.org/10.1023/A:1006642016630 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_23 GBV_ILN_30 GBV_ILN_32 GBV_ILN_40 GBV_ILN_62 GBV_ILN_65 GBV_ILN_70 GBV_ILN_2004 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2027 GBV_ILN_4046 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4314 GBV_ILN_4316 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 AR 18 1999 15 08 1197-1200
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