SiC coatings for mirrors prepared by low pressure chemical vapor deposition

Gespeichert in:

Autor*in:	Liu, Rong-Jun [verfasserIn] Zhang, Chang-Rui Zhou, Xin-Gui Cao, Ying-Bin

Format:	Artikel
Sprache:	Englisch

Erschienen:	2003

Schlagwörter:	Polymer Chemical Vapor Deposition Vapor Deposition Chemical Vapor Pressure Chemical

Anmerkung:	© Kluwer Academic Publishers 2003

Übergeordnetes Werk:	Enthalten in: Journal of materials science / Letters - Kluwer Academic Publishers, 1982, 22(2003), 11 vom: Juni, Seite 841-843
Übergeordnetes Werk:	volume:22 ; year:2003 ; number:11 ; month:06 ; pages:841-843

Links:	Volltext

DOI / URN:	10.1023/A:1023924528444

Katalog-ID:	OLC2073037194

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SiC coatings for mirrors prepared by low pressure chemical vapor deposition

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