Enhanced cohesion of photo-oxygenated fullerene films: A new opportunity for lithography

Abstract The irradiation of sublimed fullerene ($ C_{60} $ and $ C_{70} $) thin films with ultraviolet light in an oxygen-rich ambient has been found to lead to a substantially increased cohesive energy in the fullerene solid. The decreased solubility and lower vapor pressure of the phototransformed...
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Autor*in:	Hebard, A. F. [verfasserIn] Eom, C. B. Fleming, R. M. Chabal, Y. J. Muller, A. J. Glarum, S. H. Pietsch, G. J. Haddon, R. C. Mujsce, A. M. Paczkowski, M. A. Kochanski, G. P.

Format:	Artikel
Sprache:	Englisch

Erschienen:	1993

Systematik:	UA 9001.A

Anmerkung:	© Springer-Verlag 1993

Übergeordnetes Werk:	Enthalten in: Applied physics. A, Materials science & processing - Springer-Verlag, 1981, 57(1993), 3 vom: Sept., Seite 299-303
Übergeordnetes Werk:	volume:57 ; year:1993 ; number:3 ; month:09 ; pages:299-303

Links:	Volltext

DOI / URN:	10.1007/BF00332606

Katalog-ID:	OLC2074127391

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allfields	10.1007/BF00332606 doi (DE-627)OLC2074127391 (DE-He213)BF00332606-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001.A VZ rvk Hebard, A. F. verfasserin aut Enhanced cohesion of photo-oxygenated fullerene films: A new opportunity for lithography 1993 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 1993 Abstract The irradiation of sublimed fullerene ($ C_{60} $ and $ C_{70} $) thin films with ultraviolet light in an oxygen-rich ambient has been found to lead to a substantially increased cohesive energy in the fullerene solid. The decreased solubility and lower vapor pressure of the phototransformed material enables wet (organic solvents) or dry (thermal or photon-induced sublimation) development of photo-defined negative images. One micrometer wide lines with good edge definition are demonstrated. X-ray, infrared, optical absorption, and high performance liquid chromatography reveal that photo-oxygenated $ C_{60} $ retains its fcc crystal structure but with a substantial fraction of the $ C_{60} $ molecules modified with carbonyl (C=O) bonds. Eom, C. B. aut Fleming, R. M. aut Chabal, Y. J. aut Muller, A. J. aut Glarum, S. H. aut Pietsch, G. J. aut Haddon, R. C. aut Mujsce, A. M. aut Paczkowski, M. A. aut Kochanski, G. P. aut Enthalten in Applied physics. A, Materials science & processing Springer-Verlag, 1981 57(1993), 3 vom: Sept., Seite 299-303 (DE-627)129861340 (DE-600)283365-7 (DE-576)015171930 0947-8396 nnns volume:57 year:1993 number:3 month:09 pages:299-303 https://doi.org/10.1007/BF00332606 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_70 GBV_ILN_105 GBV_ILN_121 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4012 GBV_ILN_4082 GBV_ILN_4126 GBV_ILN_4306 GBV_ILN_4310 GBV_ILN_4313 GBV_ILN_4315 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 UA 9001.A AR 57 1993 3 09 299-303
spelling	10.1007/BF00332606 doi (DE-627)OLC2074127391 (DE-He213)BF00332606-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001.A VZ rvk Hebard, A. F. verfasserin aut Enhanced cohesion of photo-oxygenated fullerene films: A new opportunity for lithography 1993 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 1993 Abstract The irradiation of sublimed fullerene ($ C_{60} $ and $ C_{70} $) thin films with ultraviolet light in an oxygen-rich ambient has been found to lead to a substantially increased cohesive energy in the fullerene solid. The decreased solubility and lower vapor pressure of the phototransformed material enables wet (organic solvents) or dry (thermal or photon-induced sublimation) development of photo-defined negative images. One micrometer wide lines with good edge definition are demonstrated. X-ray, infrared, optical absorption, and high performance liquid chromatography reveal that photo-oxygenated $ C_{60} $ retains its fcc crystal structure but with a substantial fraction of the $ C_{60} $ molecules modified with carbonyl (C=O) bonds. Eom, C. B. aut Fleming, R. M. aut Chabal, Y. J. aut Muller, A. J. aut Glarum, S. H. aut Pietsch, G. J. aut Haddon, R. C. aut Mujsce, A. M. aut Paczkowski, M. A. aut Kochanski, G. P. aut Enthalten in Applied physics. A, Materials science & processing Springer-Verlag, 1981 57(1993), 3 vom: Sept., Seite 299-303 (DE-627)129861340 (DE-600)283365-7 (DE-576)015171930 0947-8396 nnns volume:57 year:1993 number:3 month:09 pages:299-303 https://doi.org/10.1007/BF00332606 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_70 GBV_ILN_105 GBV_ILN_121 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4012 GBV_ILN_4082 GBV_ILN_4126 GBV_ILN_4306 GBV_ILN_4310 GBV_ILN_4313 GBV_ILN_4315 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 UA 9001.A AR 57 1993 3 09 299-303
allfields_unstemmed	10.1007/BF00332606 doi (DE-627)OLC2074127391 (DE-He213)BF00332606-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001.A VZ rvk Hebard, A. F. verfasserin aut Enhanced cohesion of photo-oxygenated fullerene films: A new opportunity for lithography 1993 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 1993 Abstract The irradiation of sublimed fullerene ($ C_{60} $ and $ C_{70} $) thin films with ultraviolet light in an oxygen-rich ambient has been found to lead to a substantially increased cohesive energy in the fullerene solid. The decreased solubility and lower vapor pressure of the phototransformed material enables wet (organic solvents) or dry (thermal or photon-induced sublimation) development of photo-defined negative images. One micrometer wide lines with good edge definition are demonstrated. X-ray, infrared, optical absorption, and high performance liquid chromatography reveal that photo-oxygenated $ C_{60} $ retains its fcc crystal structure but with a substantial fraction of the $ C_{60} $ molecules modified with carbonyl (C=O) bonds. Eom, C. B. aut Fleming, R. M. aut Chabal, Y. J. aut Muller, A. J. aut Glarum, S. H. aut Pietsch, G. J. aut Haddon, R. C. aut Mujsce, A. M. aut Paczkowski, M. A. aut Kochanski, G. P. aut Enthalten in Applied physics. A, Materials science & processing Springer-Verlag, 1981 57(1993), 3 vom: Sept., Seite 299-303 (DE-627)129861340 (DE-600)283365-7 (DE-576)015171930 0947-8396 nnns volume:57 year:1993 number:3 month:09 pages:299-303 https://doi.org/10.1007/BF00332606 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_70 GBV_ILN_105 GBV_ILN_121 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4012 GBV_ILN_4082 GBV_ILN_4126 GBV_ILN_4306 GBV_ILN_4310 GBV_ILN_4313 GBV_ILN_4315 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 UA 9001.A AR 57 1993 3 09 299-303
allfieldsGer	10.1007/BF00332606 doi (DE-627)OLC2074127391 (DE-He213)BF00332606-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001.A VZ rvk Hebard, A. F. verfasserin aut Enhanced cohesion of photo-oxygenated fullerene films: A new opportunity for lithography 1993 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 1993 Abstract The irradiation of sublimed fullerene ($ C_{60} $ and $ C_{70} $) thin films with ultraviolet light in an oxygen-rich ambient has been found to lead to a substantially increased cohesive energy in the fullerene solid. The decreased solubility and lower vapor pressure of the phototransformed material enables wet (organic solvents) or dry (thermal or photon-induced sublimation) development of photo-defined negative images. One micrometer wide lines with good edge definition are demonstrated. X-ray, infrared, optical absorption, and high performance liquid chromatography reveal that photo-oxygenated $ C_{60} $ retains its fcc crystal structure but with a substantial fraction of the $ C_{60} $ molecules modified with carbonyl (C=O) bonds. Eom, C. B. aut Fleming, R. M. aut Chabal, Y. J. aut Muller, A. J. aut Glarum, S. H. aut Pietsch, G. J. aut Haddon, R. C. aut Mujsce, A. M. aut Paczkowski, M. A. aut Kochanski, G. P. aut Enthalten in Applied physics. A, Materials science & processing Springer-Verlag, 1981 57(1993), 3 vom: Sept., Seite 299-303 (DE-627)129861340 (DE-600)283365-7 (DE-576)015171930 0947-8396 nnns volume:57 year:1993 number:3 month:09 pages:299-303 https://doi.org/10.1007/BF00332606 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_70 GBV_ILN_105 GBV_ILN_121 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4012 GBV_ILN_4082 GBV_ILN_4126 GBV_ILN_4306 GBV_ILN_4310 GBV_ILN_4313 GBV_ILN_4315 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 UA 9001.A AR 57 1993 3 09 299-303
allfieldsSound	10.1007/BF00332606 doi (DE-627)OLC2074127391 (DE-He213)BF00332606-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001.A VZ rvk Hebard, A. F. verfasserin aut Enhanced cohesion of photo-oxygenated fullerene films: A new opportunity for lithography 1993 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 1993 Abstract The irradiation of sublimed fullerene ($ C_{60} $ and $ C_{70} $) thin films with ultraviolet light in an oxygen-rich ambient has been found to lead to a substantially increased cohesive energy in the fullerene solid. The decreased solubility and lower vapor pressure of the phototransformed material enables wet (organic solvents) or dry (thermal or photon-induced sublimation) development of photo-defined negative images. One micrometer wide lines with good edge definition are demonstrated. X-ray, infrared, optical absorption, and high performance liquid chromatography reveal that photo-oxygenated $ C_{60} $ retains its fcc crystal structure but with a substantial fraction of the $ C_{60} $ molecules modified with carbonyl (C=O) bonds. Eom, C. B. aut Fleming, R. M. aut Chabal, Y. J. aut Muller, A. J. aut Glarum, S. H. aut Pietsch, G. J. aut Haddon, R. C. aut Mujsce, A. M. aut Paczkowski, M. A. aut Kochanski, G. P. aut Enthalten in Applied physics. A, Materials science & processing Springer-Verlag, 1981 57(1993), 3 vom: Sept., Seite 299-303 (DE-627)129861340 (DE-600)283365-7 (DE-576)015171930 0947-8396 nnns volume:57 year:1993 number:3 month:09 pages:299-303 https://doi.org/10.1007/BF00332606 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_23 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_70 GBV_ILN_105 GBV_ILN_121 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2004 GBV_ILN_2006 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4012 GBV_ILN_4082 GBV_ILN_4126 GBV_ILN_4306 GBV_ILN_4310 GBV_ILN_4313 GBV_ILN_4315 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4323 GBV_ILN_4700 UA 9001.A AR 57 1993 3 09 299-303
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source	Enthalten in Applied physics. A, Materials science & processing 57(1993), 3 vom: Sept., Seite 299-303 volume:57 year:1993 number:3 month:09 pages:299-303
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authorswithroles_txt_mv	Hebard, A. F. @@aut@@ Eom, C. B. @@aut@@ Fleming, R. M. @@aut@@ Chabal, Y. J. @@aut@@ Muller, A. J. @@aut@@ Glarum, S. H. @@aut@@ Pietsch, G. J. @@aut@@ Haddon, R. C. @@aut@@ Mujsce, A. M. @@aut@@ Paczkowski, M. A. @@aut@@ Kochanski, G. P. @@aut@@
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author	Hebard, A. F.
spellingShingle	Hebard, A. F. ddc 530 rvk UA 9001.A Enhanced cohesion of photo-oxygenated fullerene films: A new opportunity for lithography
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topic_title	530 620 VZ 530 VZ UA 9001.A VZ rvk Enhanced cohesion of photo-oxygenated fullerene films: A new opportunity for lithography
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title	Enhanced cohesion of photo-oxygenated fullerene films: A new opportunity for lithography
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title_full	Enhanced cohesion of photo-oxygenated fullerene films: A new opportunity for lithography
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author_browse	Hebard, A. F. Eom, C. B. Fleming, R. M. Chabal, Y. J. Muller, A. J. Glarum, S. H. Pietsch, G. J. Haddon, R. C. Mujsce, A. M. Paczkowski, M. A. Kochanski, G. P.
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title_sort	enhanced cohesion of photo-oxygenated fullerene films: a new opportunity for lithography
title_auth	Enhanced cohesion of photo-oxygenated fullerene films: A new opportunity for lithography
abstract	Abstract The irradiation of sublimed fullerene ($ C_{60} $ and $ C_{70} $) thin films with ultraviolet light in an oxygen-rich ambient has been found to lead to a substantially increased cohesive energy in the fullerene solid. The decreased solubility and lower vapor pressure of the phototransformed material enables wet (organic solvents) or dry (thermal or photon-induced sublimation) development of photo-defined negative images. One micrometer wide lines with good edge definition are demonstrated. X-ray, infrared, optical absorption, and high performance liquid chromatography reveal that photo-oxygenated $ C_{60} $ retains its fcc crystal structure but with a substantial fraction of the $ C_{60} $ molecules modified with carbonyl (C=O) bonds. © Springer-Verlag 1993
abstractGer	Abstract The irradiation of sublimed fullerene ($ C_{60} $ and $ C_{70} $) thin films with ultraviolet light in an oxygen-rich ambient has been found to lead to a substantially increased cohesive energy in the fullerene solid. The decreased solubility and lower vapor pressure of the phototransformed material enables wet (organic solvents) or dry (thermal or photon-induced sublimation) development of photo-defined negative images. One micrometer wide lines with good edge definition are demonstrated. X-ray, infrared, optical absorption, and high performance liquid chromatography reveal that photo-oxygenated $ C_{60} $ retains its fcc crystal structure but with a substantial fraction of the $ C_{60} $ molecules modified with carbonyl (C=O) bonds. © Springer-Verlag 1993
abstract_unstemmed	Abstract The irradiation of sublimed fullerene ($ C_{60} $ and $ C_{70} $) thin films with ultraviolet light in an oxygen-rich ambient has been found to lead to a substantially increased cohesive energy in the fullerene solid. The decreased solubility and lower vapor pressure of the phototransformed material enables wet (organic solvents) or dry (thermal or photon-induced sublimation) development of photo-defined negative images. One micrometer wide lines with good edge definition are demonstrated. X-ray, infrared, optical absorption, and high performance liquid chromatography reveal that photo-oxygenated $ C_{60} $ retains its fcc crystal structure but with a substantial fraction of the $ C_{60} $ molecules modified with carbonyl (C=O) bonds. © Springer-Verlag 1993
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title_short	Enhanced cohesion of photo-oxygenated fullerene films: A new opportunity for lithography
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