Phosphorus carbide thin films: experiment and theory
Abstract The recent finding that radio frequency plasma activation of $ CH_{4} $/$ PH_{3} $ gas mixtures [7] could lead to films with P:C ratios ≤3 (which also contain ∼10% hydrogen, distributed evenly throughout the bulk) has served to trigger further research into new ‘amorphous phosphorus carbide...
Ausführliche Beschreibung
Autor*in: |
Claeyssens, F. [verfasserIn] |
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Englisch |
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2004 |
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© Springer-Verlag 2004 |
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Übergeordnetes Werk: |
Enthalten in: Applied physics. A, Materials science & processing - Springer Berlin Heidelberg, 1981, 79(2004), 4-6 vom: 01. Sept., Seite 1237-1241 |
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Übergeordnetes Werk: |
volume:79 ; year:2004 ; number:4-6 ; day:01 ; month:09 ; pages:1237-1241 |
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DOI / URN: |
10.1007/s00339-004-2726-7 |
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Katalog-ID: |
OLC2074167407 |
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520 | |a Abstract The recent finding that radio frequency plasma activation of $ CH_{4} $/$ PH_{3} $ gas mixtures [7] could lead to films with P:C ratios ≤3 (which also contain ∼10% hydrogen, distributed evenly throughout the bulk) has served to trigger further research into new ‘amorphous phosphorus carbide’ materials. New theoretical and experimental results relating to these materials are presented here. The electronic structure and stability of different crystalline phosphorus carbide $ P_{x} $$ C_{y} $ phases have been studied using first-principles density-functional theory methods. Calculations have been carried out for both $ P_{4} $$ C_{3} $ and PC and a range of the more likely periodic structures examined. The lowest energy pseudocubic $ P_{4} $$ C_{3} $ and GaSe PC phases have been further investigated as templates to discover the stability and the electronic and structural properties of these phosphorus carbide materials. Recent experimental studies have involved use of pulsed laser ablation (PLA) methods to produce hydrogen-free phosphorus carbide thin films. Mechanically hard, electrically conducting diamond-like carbon films containing 0-∼26 at. % P have been deposited on both Si and quartz substrates by 193 nm PLA of graphite/phosphorus targets (containing varying percentages of phosphorus), at a range of substrate temperatures ($ T_{sub} $=25–400 °C), in vacuum, and analysed via laser Raman and X-ray photoelectron spectroscopy. | ||
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10.1007/s00339-004-2726-7 doi (DE-627)OLC2074167407 (DE-He213)s00339-004-2726-7-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001.A VZ rvk Claeyssens, F. verfasserin aut Phosphorus carbide thin films: experiment and theory 2004 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2004 Abstract The recent finding that radio frequency plasma activation of $ CH_{4} $/$ PH_{3} $ gas mixtures [7] could lead to films with P:C ratios ≤3 (which also contain ∼10% hydrogen, distributed evenly throughout the bulk) has served to trigger further research into new ‘amorphous phosphorus carbide’ materials. New theoretical and experimental results relating to these materials are presented here. The electronic structure and stability of different crystalline phosphorus carbide $ P_{x} $$ C_{y} $ phases have been studied using first-principles density-functional theory methods. Calculations have been carried out for both $ P_{4} $$ C_{3} $ and PC and a range of the more likely periodic structures examined. The lowest energy pseudocubic $ P_{4} $$ C_{3} $ and GaSe PC phases have been further investigated as templates to discover the stability and the electronic and structural properties of these phosphorus carbide materials. Recent experimental studies have involved use of pulsed laser ablation (PLA) methods to produce hydrogen-free phosphorus carbide thin films. Mechanically hard, electrically conducting diamond-like carbon films containing 0-∼26 at. % P have been deposited on both Si and quartz substrates by 193 nm PLA of graphite/phosphorus targets (containing varying percentages of phosphorus), at a range of substrate temperatures ($ T_{sub} $=25–400 °C), in vacuum, and analysed via laser Raman and X-ray photoelectron spectroscopy. Carbide Radio Frequency Substrate Temperature Frequency Plasma Carbon Film Fuge, G.M. aut Allan, N.L. aut May, P.W. aut Pearce, S.R.J. aut Ashfold, M.N.R. aut Enthalten in Applied physics. A, Materials science & processing Springer Berlin Heidelberg, 1981 79(2004), 4-6 vom: 01. Sept., Seite 1237-1241 (DE-627)129861340 (DE-600)283365-7 (DE-576)015171930 0947-8396 nnns volume:79 year:2004 number:4-6 day:01 month:09 pages:1237-1241 https://doi.org/10.1007/s00339-004-2726-7 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_24 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_70 GBV_ILN_130 GBV_ILN_150 GBV_ILN_170 GBV_ILN_2002 GBV_ILN_2005 GBV_ILN_2010 GBV_ILN_2018 GBV_ILN_2021 GBV_ILN_4036 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4277 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4700 UA 9001.A AR 79 2004 4-6 01 09 1237-1241 |
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10.1007/s00339-004-2726-7 doi (DE-627)OLC2074167407 (DE-He213)s00339-004-2726-7-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001.A VZ rvk Claeyssens, F. verfasserin aut Phosphorus carbide thin films: experiment and theory 2004 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2004 Abstract The recent finding that radio frequency plasma activation of $ CH_{4} $/$ PH_{3} $ gas mixtures [7] could lead to films with P:C ratios ≤3 (which also contain ∼10% hydrogen, distributed evenly throughout the bulk) has served to trigger further research into new ‘amorphous phosphorus carbide’ materials. New theoretical and experimental results relating to these materials are presented here. The electronic structure and stability of different crystalline phosphorus carbide $ P_{x} $$ C_{y} $ phases have been studied using first-principles density-functional theory methods. Calculations have been carried out for both $ P_{4} $$ C_{3} $ and PC and a range of the more likely periodic structures examined. The lowest energy pseudocubic $ P_{4} $$ C_{3} $ and GaSe PC phases have been further investigated as templates to discover the stability and the electronic and structural properties of these phosphorus carbide materials. Recent experimental studies have involved use of pulsed laser ablation (PLA) methods to produce hydrogen-free phosphorus carbide thin films. Mechanically hard, electrically conducting diamond-like carbon films containing 0-∼26 at. % P have been deposited on both Si and quartz substrates by 193 nm PLA of graphite/phosphorus targets (containing varying percentages of phosphorus), at a range of substrate temperatures ($ T_{sub} $=25–400 °C), in vacuum, and analysed via laser Raman and X-ray photoelectron spectroscopy. Carbide Radio Frequency Substrate Temperature Frequency Plasma Carbon Film Fuge, G.M. aut Allan, N.L. aut May, P.W. aut Pearce, S.R.J. aut Ashfold, M.N.R. aut Enthalten in Applied physics. A, Materials science & processing Springer Berlin Heidelberg, 1981 79(2004), 4-6 vom: 01. Sept., Seite 1237-1241 (DE-627)129861340 (DE-600)283365-7 (DE-576)015171930 0947-8396 nnns volume:79 year:2004 number:4-6 day:01 month:09 pages:1237-1241 https://doi.org/10.1007/s00339-004-2726-7 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_24 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_70 GBV_ILN_130 GBV_ILN_150 GBV_ILN_170 GBV_ILN_2002 GBV_ILN_2005 GBV_ILN_2010 GBV_ILN_2018 GBV_ILN_2021 GBV_ILN_4036 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4277 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4700 UA 9001.A AR 79 2004 4-6 01 09 1237-1241 |
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Abstract The recent finding that radio frequency plasma activation of $ CH_{4} $/$ PH_{3} $ gas mixtures [7] could lead to films with P:C ratios ≤3 (which also contain ∼10% hydrogen, distributed evenly throughout the bulk) has served to trigger further research into new ‘amorphous phosphorus carbide’ materials. New theoretical and experimental results relating to these materials are presented here. The electronic structure and stability of different crystalline phosphorus carbide $ P_{x} $$ C_{y} $ phases have been studied using first-principles density-functional theory methods. Calculations have been carried out for both $ P_{4} $$ C_{3} $ and PC and a range of the more likely periodic structures examined. The lowest energy pseudocubic $ P_{4} $$ C_{3} $ and GaSe PC phases have been further investigated as templates to discover the stability and the electronic and structural properties of these phosphorus carbide materials. Recent experimental studies have involved use of pulsed laser ablation (PLA) methods to produce hydrogen-free phosphorus carbide thin films. Mechanically hard, electrically conducting diamond-like carbon films containing 0-∼26 at. % P have been deposited on both Si and quartz substrates by 193 nm PLA of graphite/phosphorus targets (containing varying percentages of phosphorus), at a range of substrate temperatures ($ T_{sub} $=25–400 °C), in vacuum, and analysed via laser Raman and X-ray photoelectron spectroscopy. © Springer-Verlag 2004 |
abstractGer |
Abstract The recent finding that radio frequency plasma activation of $ CH_{4} $/$ PH_{3} $ gas mixtures [7] could lead to films with P:C ratios ≤3 (which also contain ∼10% hydrogen, distributed evenly throughout the bulk) has served to trigger further research into new ‘amorphous phosphorus carbide’ materials. New theoretical and experimental results relating to these materials are presented here. The electronic structure and stability of different crystalline phosphorus carbide $ P_{x} $$ C_{y} $ phases have been studied using first-principles density-functional theory methods. Calculations have been carried out for both $ P_{4} $$ C_{3} $ and PC and a range of the more likely periodic structures examined. The lowest energy pseudocubic $ P_{4} $$ C_{3} $ and GaSe PC phases have been further investigated as templates to discover the stability and the electronic and structural properties of these phosphorus carbide materials. Recent experimental studies have involved use of pulsed laser ablation (PLA) methods to produce hydrogen-free phosphorus carbide thin films. Mechanically hard, electrically conducting diamond-like carbon films containing 0-∼26 at. % P have been deposited on both Si and quartz substrates by 193 nm PLA of graphite/phosphorus targets (containing varying percentages of phosphorus), at a range of substrate temperatures ($ T_{sub} $=25–400 °C), in vacuum, and analysed via laser Raman and X-ray photoelectron spectroscopy. © Springer-Verlag 2004 |
abstract_unstemmed |
Abstract The recent finding that radio frequency plasma activation of $ CH_{4} $/$ PH_{3} $ gas mixtures [7] could lead to films with P:C ratios ≤3 (which also contain ∼10% hydrogen, distributed evenly throughout the bulk) has served to trigger further research into new ‘amorphous phosphorus carbide’ materials. New theoretical and experimental results relating to these materials are presented here. The electronic structure and stability of different crystalline phosphorus carbide $ P_{x} $$ C_{y} $ phases have been studied using first-principles density-functional theory methods. Calculations have been carried out for both $ P_{4} $$ C_{3} $ and PC and a range of the more likely periodic structures examined. The lowest energy pseudocubic $ P_{4} $$ C_{3} $ and GaSe PC phases have been further investigated as templates to discover the stability and the electronic and structural properties of these phosphorus carbide materials. Recent experimental studies have involved use of pulsed laser ablation (PLA) methods to produce hydrogen-free phosphorus carbide thin films. Mechanically hard, electrically conducting diamond-like carbon films containing 0-∼26 at. % P have been deposited on both Si and quartz substrates by 193 nm PLA of graphite/phosphorus targets (containing varying percentages of phosphorus), at a range of substrate temperatures ($ T_{sub} $=25–400 °C), in vacuum, and analysed via laser Raman and X-ray photoelectron spectroscopy. © Springer-Verlag 2004 |
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