Phosphorus carbide thin films: experiment and theory

Abstract The recent finding that radio frequency plasma activation of $ CH_{4} $/$ PH_{3} $ gas mixtures [7] could lead to films with P:C ratios ≤3 (which also contain ∼10% hydrogen, distributed evenly throughout the bulk) has served to trigger further research into new ‘amorphous phosphorus carbide...
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Autor*in:	Claeyssens, F. [verfasserIn] Fuge, G.M. Allan, N.L. May, P.W. Pearce, S.R.J. Ashfold, M.N.R.

Format:	Artikel
Sprache:	Englisch

Erschienen:	2004

Schlagwörter:	Carbide Radio Frequency Substrate Temperature Frequency Plasma Carbon Film

Systematik:	UA 9001.A

Anmerkung:	© Springer-Verlag 2004

Übergeordnetes Werk:	Enthalten in: Applied physics. A, Materials science & processing - Springer Berlin Heidelberg, 1981, 79(2004), 4-6 vom: 01. Sept., Seite 1237-1241
Übergeordnetes Werk:	volume:79 ; year:2004 ; number:4-6 ; day:01 ; month:09 ; pages:1237-1241

Links:	Volltext

DOI / URN:	10.1007/s00339-004-2726-7

Katalog-ID:	OLC2074167407

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520			\|a Abstract The recent finding that radio frequency plasma activation of $ CH_{4} $/$ PH_{3} $ gas mixtures [7] could lead to films with P:C ratios ≤3 (which also contain ∼10% hydrogen, distributed evenly throughout the bulk) has served to trigger further research into new ‘amorphous phosphorus carbide’ materials. New theoretical and experimental results relating to these materials are presented here. The electronic structure and stability of different crystalline phosphorus carbide $ P_{x} $$ C_{y} $ phases have been studied using first-principles density-functional theory methods. Calculations have been carried out for both $ P_{4} $$ C_{3} $ and PC and a range of the more likely periodic structures examined. The lowest energy pseudocubic $ P_{4} $$ C_{3} $ and GaSe PC phases have been further investigated as templates to discover the stability and the electronic and structural properties of these phosphorus carbide materials. Recent experimental studies have involved use of pulsed laser ablation (PLA) methods to produce hydrogen-free phosphorus carbide thin films. Mechanically hard, electrically conducting diamond-like carbon films containing 0-∼26 at. % P have been deposited on both Si and quartz substrates by 193 nm PLA of graphite/phosphorus targets (containing varying percentages of phosphorus), at a range of substrate temperatures ($ T_{sub} $=25–400 °C), in vacuum, and analysed via laser Raman and X-ray photoelectron spectroscopy.
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language	English
source	Enthalten in Applied physics. A, Materials science & processing 79(2004), 4-6 vom: 01. Sept., Seite 1237-1241 volume:79 year:2004 number:4-6 day:01 month:09 pages:1237-1241
sourceStr	Enthalten in Applied physics. A, Materials science & processing 79(2004), 4-6 vom: 01. Sept., Seite 1237-1241 volume:79 year:2004 number:4-6 day:01 month:09 pages:1237-1241
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title_sort	phosphorus carbide thin films: experiment and theory
title_auth	Phosphorus carbide thin films: experiment and theory
abstract	Abstract The recent finding that radio frequency plasma activation of $ CH_{4} $/$ PH_{3} $ gas mixtures [7] could lead to films with P:C ratios ≤3 (which also contain ∼10% hydrogen, distributed evenly throughout the bulk) has served to trigger further research into new ‘amorphous phosphorus carbide’ materials. New theoretical and experimental results relating to these materials are presented here. The electronic structure and stability of different crystalline phosphorus carbide $ P_{x} $$ C_{y} $ phases have been studied using first-principles density-functional theory methods. Calculations have been carried out for both $ P_{4} $$ C_{3} $ and PC and a range of the more likely periodic structures examined. The lowest energy pseudocubic $ P_{4} $$ C_{3} $ and GaSe PC phases have been further investigated as templates to discover the stability and the electronic and structural properties of these phosphorus carbide materials. Recent experimental studies have involved use of pulsed laser ablation (PLA) methods to produce hydrogen-free phosphorus carbide thin films. Mechanically hard, electrically conducting diamond-like carbon films containing 0-∼26 at. % P have been deposited on both Si and quartz substrates by 193 nm PLA of graphite/phosphorus targets (containing varying percentages of phosphorus), at a range of substrate temperatures ($ T_{sub} $=25–400 °C), in vacuum, and analysed via laser Raman and X-ray photoelectron spectroscopy. © Springer-Verlag 2004
abstractGer	Abstract The recent finding that radio frequency plasma activation of $ CH_{4} $/$ PH_{3} $ gas mixtures [7] could lead to films with P:C ratios ≤3 (which also contain ∼10% hydrogen, distributed evenly throughout the bulk) has served to trigger further research into new ‘amorphous phosphorus carbide’ materials. New theoretical and experimental results relating to these materials are presented here. The electronic structure and stability of different crystalline phosphorus carbide $ P_{x} $$ C_{y} $ phases have been studied using first-principles density-functional theory methods. Calculations have been carried out for both $ P_{4} $$ C_{3} $ and PC and a range of the more likely periodic structures examined. The lowest energy pseudocubic $ P_{4} $$ C_{3} $ and GaSe PC phases have been further investigated as templates to discover the stability and the electronic and structural properties of these phosphorus carbide materials. Recent experimental studies have involved use of pulsed laser ablation (PLA) methods to produce hydrogen-free phosphorus carbide thin films. Mechanically hard, electrically conducting diamond-like carbon films containing 0-∼26 at. % P have been deposited on both Si and quartz substrates by 193 nm PLA of graphite/phosphorus targets (containing varying percentages of phosphorus), at a range of substrate temperatures ($ T_{sub} $=25–400 °C), in vacuum, and analysed via laser Raman and X-ray photoelectron spectroscopy. © Springer-Verlag 2004
abstract_unstemmed	Abstract The recent finding that radio frequency plasma activation of $ CH_{4} $/$ PH_{3} $ gas mixtures [7] could lead to films with P:C ratios ≤3 (which also contain ∼10% hydrogen, distributed evenly throughout the bulk) has served to trigger further research into new ‘amorphous phosphorus carbide’ materials. New theoretical and experimental results relating to these materials are presented here. The electronic structure and stability of different crystalline phosphorus carbide $ P_{x} $$ C_{y} $ phases have been studied using first-principles density-functional theory methods. Calculations have been carried out for both $ P_{4} $$ C_{3} $ and PC and a range of the more likely periodic structures examined. The lowest energy pseudocubic $ P_{4} $$ C_{3} $ and GaSe PC phases have been further investigated as templates to discover the stability and the electronic and structural properties of these phosphorus carbide materials. Recent experimental studies have involved use of pulsed laser ablation (PLA) methods to produce hydrogen-free phosphorus carbide thin films. Mechanically hard, electrically conducting diamond-like carbon films containing 0-∼26 at. % P have been deposited on both Si and quartz substrates by 193 nm PLA of graphite/phosphorus targets (containing varying percentages of phosphorus), at a range of substrate temperatures ($ T_{sub} $=25–400 °C), in vacuum, and analysed via laser Raman and X-ray photoelectron spectroscopy. © Springer-Verlag 2004
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title_short	Phosphorus carbide thin films: experiment and theory
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Phosphorus carbide thin films: experiment and theory

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