Experimental and numerical investigations of heat transport and crystallization kinetics in laser-induced modification of barium strontium titanate thin films

Abstract Barium strontium titanate (BST) has a large application potential in microelectronics due to its implementation as a high-permittivity dielectric in thin-film capacitors. Technologies are therefore being investigated for the deposition of the ceramics as thin films onto semiconductor compon...
Ausführliche Beschreibung

Gespeichert in:
Autor*in:

Baldus, O. [verfasserIn]

Waser, R.

Format:

Artikel

Sprache:

Englisch

Erschienen:

2004

Schlagwörter:

Crystallization Kinetic

Amorphous Film

Strontium Titanate

Barium Strontium Titanate

Titanate Thin Film

Systematik:

Anmerkung:

© Springer-Verlag 2004

Übergeordnetes Werk:

Enthalten in: Applied physics. A, Materials science & processing - Springer-Verlag, 1981, 80(2004), 7 vom: 06. Juli, Seite 1553-1562

Übergeordnetes Werk:

volume:80 ; year:2004 ; number:7 ; day:06 ; month:07 ; pages:1553-1562

Links:

Volltext

DOI / URN:

10.1007/s00339-004-2904-7

Katalog-ID:

OLC2074171234

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