Size controlled deposition of Cu and Si nano-clusters by an ultra-high vacuum sputtering gas aggregation technique
Abstract In this paper we have reported the syntheses of copper and silicon nano-clusters by a sputtering-gas-aggregation type growth technique. The process involves typical magnetron sputtering vaporization of target materials followed by an inert gas condensation to form clusters of varying sizes....
Ausführliche Beschreibung
Autor*in: |
Banerjee, A.N. [verfasserIn] |
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Format: |
Artikel |
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Sprache: |
Englisch |
Erschienen: |
2007 |
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Systematik: |
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Anmerkung: |
© Springer-Verlag 2007 |
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Übergeordnetes Werk: |
Enthalten in: Applied physics. A, Materials science & processing - Springer-Verlag, 1981, 90(2007), 2 vom: 12. Sept., Seite 299-303 |
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Übergeordnetes Werk: |
volume:90 ; year:2007 ; number:2 ; day:12 ; month:09 ; pages:299-303 |
Links: |
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DOI / URN: |
10.1007/s00339-007-4271-7 |
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Katalog-ID: |
OLC2074183968 |
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10.1007/s00339-007-4271-7 doi (DE-627)OLC2074183968 (DE-He213)s00339-007-4271-7-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001.A VZ rvk Banerjee, A.N. verfasserin aut Size controlled deposition of Cu and Si nano-clusters by an ultra-high vacuum sputtering gas aggregation technique 2007 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2007 Abstract In this paper we have reported the syntheses of copper and silicon nano-clusters by a sputtering-gas-aggregation type growth technique. The process involves typical magnetron sputtering vaporization of target materials followed by an inert gas condensation to form clusters of varying sizes. The size-distributions of the clusters typically follow a normal-distribution and the peak cluster sizes of the distributions depends on several factors, which include gas-flow rate, length of the growth region, deposition pressure etc. We have observed a variation in the peak cluster size with the variation of the gas (argon) flow rates. The experimental values are compared with the existing models and the results are found to be in good agreement. The results are significant since it demonstrates that proper optimization of operation conditions can lead to desired cluster sizes as well as desired cluster-size distributions. Cluster Size Cluster Growth Aggregation Region Deposition Pressure Cluster Source Krishna, R. aut Das, B. aut Enthalten in Applied physics. A, Materials science & processing Springer-Verlag, 1981 90(2007), 2 vom: 12. Sept., Seite 299-303 (DE-627)129861340 (DE-600)283365-7 (DE-576)015171930 0947-8396 nnns volume:90 year:2007 number:2 day:12 month:09 pages:299-303 https://doi.org/10.1007/s00339-007-4271-7 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_60 GBV_ILN_62 GBV_ILN_70 GBV_ILN_130 GBV_ILN_150 GBV_ILN_170 GBV_ILN_2010 GBV_ILN_2018 GBV_ILN_2021 GBV_ILN_4036 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4277 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4700 UA 9001.A AR 90 2007 2 12 09 299-303 |
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10.1007/s00339-007-4271-7 doi (DE-627)OLC2074183968 (DE-He213)s00339-007-4271-7-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001.A VZ rvk Banerjee, A.N. verfasserin aut Size controlled deposition of Cu and Si nano-clusters by an ultra-high vacuum sputtering gas aggregation technique 2007 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2007 Abstract In this paper we have reported the syntheses of copper and silicon nano-clusters by a sputtering-gas-aggregation type growth technique. The process involves typical magnetron sputtering vaporization of target materials followed by an inert gas condensation to form clusters of varying sizes. The size-distributions of the clusters typically follow a normal-distribution and the peak cluster sizes of the distributions depends on several factors, which include gas-flow rate, length of the growth region, deposition pressure etc. We have observed a variation in the peak cluster size with the variation of the gas (argon) flow rates. The experimental values are compared with the existing models and the results are found to be in good agreement. The results are significant since it demonstrates that proper optimization of operation conditions can lead to desired cluster sizes as well as desired cluster-size distributions. Cluster Size Cluster Growth Aggregation Region Deposition Pressure Cluster Source Krishna, R. aut Das, B. aut Enthalten in Applied physics. A, Materials science & processing Springer-Verlag, 1981 90(2007), 2 vom: 12. Sept., Seite 299-303 (DE-627)129861340 (DE-600)283365-7 (DE-576)015171930 0947-8396 nnns volume:90 year:2007 number:2 day:12 month:09 pages:299-303 https://doi.org/10.1007/s00339-007-4271-7 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_60 GBV_ILN_62 GBV_ILN_70 GBV_ILN_130 GBV_ILN_150 GBV_ILN_170 GBV_ILN_2010 GBV_ILN_2018 GBV_ILN_2021 GBV_ILN_4036 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4277 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4700 UA 9001.A AR 90 2007 2 12 09 299-303 |
allfields_unstemmed |
10.1007/s00339-007-4271-7 doi (DE-627)OLC2074183968 (DE-He213)s00339-007-4271-7-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001.A VZ rvk Banerjee, A.N. verfasserin aut Size controlled deposition of Cu and Si nano-clusters by an ultra-high vacuum sputtering gas aggregation technique 2007 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2007 Abstract In this paper we have reported the syntheses of copper and silicon nano-clusters by a sputtering-gas-aggregation type growth technique. The process involves typical magnetron sputtering vaporization of target materials followed by an inert gas condensation to form clusters of varying sizes. The size-distributions of the clusters typically follow a normal-distribution and the peak cluster sizes of the distributions depends on several factors, which include gas-flow rate, length of the growth region, deposition pressure etc. We have observed a variation in the peak cluster size with the variation of the gas (argon) flow rates. The experimental values are compared with the existing models and the results are found to be in good agreement. The results are significant since it demonstrates that proper optimization of operation conditions can lead to desired cluster sizes as well as desired cluster-size distributions. Cluster Size Cluster Growth Aggregation Region Deposition Pressure Cluster Source Krishna, R. aut Das, B. aut Enthalten in Applied physics. A, Materials science & processing Springer-Verlag, 1981 90(2007), 2 vom: 12. Sept., Seite 299-303 (DE-627)129861340 (DE-600)283365-7 (DE-576)015171930 0947-8396 nnns volume:90 year:2007 number:2 day:12 month:09 pages:299-303 https://doi.org/10.1007/s00339-007-4271-7 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_60 GBV_ILN_62 GBV_ILN_70 GBV_ILN_130 GBV_ILN_150 GBV_ILN_170 GBV_ILN_2010 GBV_ILN_2018 GBV_ILN_2021 GBV_ILN_4036 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4277 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4700 UA 9001.A AR 90 2007 2 12 09 299-303 |
allfieldsGer |
10.1007/s00339-007-4271-7 doi (DE-627)OLC2074183968 (DE-He213)s00339-007-4271-7-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001.A VZ rvk Banerjee, A.N. verfasserin aut Size controlled deposition of Cu and Si nano-clusters by an ultra-high vacuum sputtering gas aggregation technique 2007 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2007 Abstract In this paper we have reported the syntheses of copper and silicon nano-clusters by a sputtering-gas-aggregation type growth technique. The process involves typical magnetron sputtering vaporization of target materials followed by an inert gas condensation to form clusters of varying sizes. The size-distributions of the clusters typically follow a normal-distribution and the peak cluster sizes of the distributions depends on several factors, which include gas-flow rate, length of the growth region, deposition pressure etc. We have observed a variation in the peak cluster size with the variation of the gas (argon) flow rates. The experimental values are compared with the existing models and the results are found to be in good agreement. The results are significant since it demonstrates that proper optimization of operation conditions can lead to desired cluster sizes as well as desired cluster-size distributions. Cluster Size Cluster Growth Aggregation Region Deposition Pressure Cluster Source Krishna, R. aut Das, B. aut Enthalten in Applied physics. A, Materials science & processing Springer-Verlag, 1981 90(2007), 2 vom: 12. Sept., Seite 299-303 (DE-627)129861340 (DE-600)283365-7 (DE-576)015171930 0947-8396 nnns volume:90 year:2007 number:2 day:12 month:09 pages:299-303 https://doi.org/10.1007/s00339-007-4271-7 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_60 GBV_ILN_62 GBV_ILN_70 GBV_ILN_130 GBV_ILN_150 GBV_ILN_170 GBV_ILN_2010 GBV_ILN_2018 GBV_ILN_2021 GBV_ILN_4036 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4277 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4700 UA 9001.A AR 90 2007 2 12 09 299-303 |
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10.1007/s00339-007-4271-7 doi (DE-627)OLC2074183968 (DE-He213)s00339-007-4271-7-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001.A VZ rvk Banerjee, A.N. verfasserin aut Size controlled deposition of Cu and Si nano-clusters by an ultra-high vacuum sputtering gas aggregation technique 2007 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2007 Abstract In this paper we have reported the syntheses of copper and silicon nano-clusters by a sputtering-gas-aggregation type growth technique. The process involves typical magnetron sputtering vaporization of target materials followed by an inert gas condensation to form clusters of varying sizes. The size-distributions of the clusters typically follow a normal-distribution and the peak cluster sizes of the distributions depends on several factors, which include gas-flow rate, length of the growth region, deposition pressure etc. We have observed a variation in the peak cluster size with the variation of the gas (argon) flow rates. The experimental values are compared with the existing models and the results are found to be in good agreement. The results are significant since it demonstrates that proper optimization of operation conditions can lead to desired cluster sizes as well as desired cluster-size distributions. Cluster Size Cluster Growth Aggregation Region Deposition Pressure Cluster Source Krishna, R. aut Das, B. aut Enthalten in Applied physics. A, Materials science & processing Springer-Verlag, 1981 90(2007), 2 vom: 12. Sept., Seite 299-303 (DE-627)129861340 (DE-600)283365-7 (DE-576)015171930 0947-8396 nnns volume:90 year:2007 number:2 day:12 month:09 pages:299-303 https://doi.org/10.1007/s00339-007-4271-7 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_60 GBV_ILN_62 GBV_ILN_70 GBV_ILN_130 GBV_ILN_150 GBV_ILN_170 GBV_ILN_2010 GBV_ILN_2018 GBV_ILN_2021 GBV_ILN_4036 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4277 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4318 GBV_ILN_4319 GBV_ILN_4700 UA 9001.A AR 90 2007 2 12 09 299-303 |
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Enthalten in Applied physics. A, Materials science & processing 90(2007), 2 vom: 12. Sept., Seite 299-303 volume:90 year:2007 number:2 day:12 month:09 pages:299-303 |
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Abstract In this paper we have reported the syntheses of copper and silicon nano-clusters by a sputtering-gas-aggregation type growth technique. The process involves typical magnetron sputtering vaporization of target materials followed by an inert gas condensation to form clusters of varying sizes. The size-distributions of the clusters typically follow a normal-distribution and the peak cluster sizes of the distributions depends on several factors, which include gas-flow rate, length of the growth region, deposition pressure etc. We have observed a variation in the peak cluster size with the variation of the gas (argon) flow rates. The experimental values are compared with the existing models and the results are found to be in good agreement. The results are significant since it demonstrates that proper optimization of operation conditions can lead to desired cluster sizes as well as desired cluster-size distributions. © Springer-Verlag 2007 |
abstractGer |
Abstract In this paper we have reported the syntheses of copper and silicon nano-clusters by a sputtering-gas-aggregation type growth technique. The process involves typical magnetron sputtering vaporization of target materials followed by an inert gas condensation to form clusters of varying sizes. The size-distributions of the clusters typically follow a normal-distribution and the peak cluster sizes of the distributions depends on several factors, which include gas-flow rate, length of the growth region, deposition pressure etc. We have observed a variation in the peak cluster size with the variation of the gas (argon) flow rates. The experimental values are compared with the existing models and the results are found to be in good agreement. The results are significant since it demonstrates that proper optimization of operation conditions can lead to desired cluster sizes as well as desired cluster-size distributions. © Springer-Verlag 2007 |
abstract_unstemmed |
Abstract In this paper we have reported the syntheses of copper and silicon nano-clusters by a sputtering-gas-aggregation type growth technique. The process involves typical magnetron sputtering vaporization of target materials followed by an inert gas condensation to form clusters of varying sizes. The size-distributions of the clusters typically follow a normal-distribution and the peak cluster sizes of the distributions depends on several factors, which include gas-flow rate, length of the growth region, deposition pressure etc. We have observed a variation in the peak cluster size with the variation of the gas (argon) flow rates. The experimental values are compared with the existing models and the results are found to be in good agreement. The results are significant since it demonstrates that proper optimization of operation conditions can lead to desired cluster sizes as well as desired cluster-size distributions. © Springer-Verlag 2007 |
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