Kinetic modelling of a discharge-pumped ArF excimer laser and the effects of discharge filamentation

Abstract. Results of kinetic modelling of an X-ray preionised, discharge-pumped ArF excimer laser, operating with a spiker-sustainer circuit are presented. The parallel-resistor model includes the complete ArF laser kinetics and calculations of the Boltzmann equation in each layer taking into accoun...
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Autor*in:	Demyanov, A.V. [verfasserIn] Feenstra, L. Peters, P.J.M. Napartovich, A.P. Witteman, W.J.

Format:	Artikel
Sprache:	Englisch

Erschienen:	2001

Systematik:	UA 9001

Anmerkung:	© Springer-Verlag 2001

Übergeordnetes Werk:	Enthalten in: Applied physics. B, Lasers and optics - Springer-Verlag, 1981, 72(2001), 7 vom: Mai, Seite 823-833
Übergeordnetes Werk:	volume:72 ; year:2001 ; number:7 ; month:05 ; pages:823-833

Links:	Volltext

DOI / URN:	10.1007/s003400100538

Katalog-ID:	OLC2074268718

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allfields	10.1007/s003400100538 doi (DE-627)OLC2074268718 (DE-He213)s003400100538-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001 VZ rvk Demyanov, A.V. verfasserin aut Kinetic modelling of a discharge-pumped ArF excimer laser and the effects of discharge filamentation 2001 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2001 Abstract. Results of kinetic modelling of an X-ray preionised, discharge-pumped ArF excimer laser, operating with a spiker-sustainer circuit are presented. The parallel-resistor model includes the complete ArF laser kinetics and calculations of the Boltzmann equation in each layer taking into account the effects of electron–electron and super-elastic collisions. The model further includes a detailed description of the electrical circuit and the formation of filaments with a realistic electrode profile. This model shows a good correspondence with the experimental results in predicting laser energy and optical behaviour. Neglecting the formation of filaments and the electron–electron and super-elastic collision processes yields remarkably poorer results. Parametric studies on the electrode profile, the formation of micro-arcs and on the electrical circuit parameters were performed numerically. Feenstra, L. aut Peters, P.J.M. aut Napartovich, A.P. aut Witteman, W.J. aut Enthalten in Applied physics. B, Lasers and optics Springer-Verlag, 1981 72(2001), 7 vom: Mai, Seite 823-833 (DE-627)130297682 (DE-600)579693-3 (DE-576)015877272 0946-2171 nnns volume:72 year:2001 number:7 month:05 pages:823-833 https://doi.org/10.1007/s003400100538 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_60 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4126 GBV_ILN_4277 GBV_ILN_4306 GBV_ILN_4310 GBV_ILN_4313 GBV_ILN_4315 GBV_ILN_4319 GBV_ILN_4323 UA 9001 AR 72 2001 7 05 823-833
spelling	10.1007/s003400100538 doi (DE-627)OLC2074268718 (DE-He213)s003400100538-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001 VZ rvk Demyanov, A.V. verfasserin aut Kinetic modelling of a discharge-pumped ArF excimer laser and the effects of discharge filamentation 2001 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2001 Abstract. Results of kinetic modelling of an X-ray preionised, discharge-pumped ArF excimer laser, operating with a spiker-sustainer circuit are presented. The parallel-resistor model includes the complete ArF laser kinetics and calculations of the Boltzmann equation in each layer taking into account the effects of electron–electron and super-elastic collisions. The model further includes a detailed description of the electrical circuit and the formation of filaments with a realistic electrode profile. This model shows a good correspondence with the experimental results in predicting laser energy and optical behaviour. Neglecting the formation of filaments and the electron–electron and super-elastic collision processes yields remarkably poorer results. Parametric studies on the electrode profile, the formation of micro-arcs and on the electrical circuit parameters were performed numerically. Feenstra, L. aut Peters, P.J.M. aut Napartovich, A.P. aut Witteman, W.J. aut Enthalten in Applied physics. B, Lasers and optics Springer-Verlag, 1981 72(2001), 7 vom: Mai, Seite 823-833 (DE-627)130297682 (DE-600)579693-3 (DE-576)015877272 0946-2171 nnns volume:72 year:2001 number:7 month:05 pages:823-833 https://doi.org/10.1007/s003400100538 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_60 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4126 GBV_ILN_4277 GBV_ILN_4306 GBV_ILN_4310 GBV_ILN_4313 GBV_ILN_4315 GBV_ILN_4319 GBV_ILN_4323 UA 9001 AR 72 2001 7 05 823-833
allfields_unstemmed	10.1007/s003400100538 doi (DE-627)OLC2074268718 (DE-He213)s003400100538-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001 VZ rvk Demyanov, A.V. verfasserin aut Kinetic modelling of a discharge-pumped ArF excimer laser and the effects of discharge filamentation 2001 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2001 Abstract. Results of kinetic modelling of an X-ray preionised, discharge-pumped ArF excimer laser, operating with a spiker-sustainer circuit are presented. The parallel-resistor model includes the complete ArF laser kinetics and calculations of the Boltzmann equation in each layer taking into account the effects of electron–electron and super-elastic collisions. The model further includes a detailed description of the electrical circuit and the formation of filaments with a realistic electrode profile. This model shows a good correspondence with the experimental results in predicting laser energy and optical behaviour. Neglecting the formation of filaments and the electron–electron and super-elastic collision processes yields remarkably poorer results. Parametric studies on the electrode profile, the formation of micro-arcs and on the electrical circuit parameters were performed numerically. Feenstra, L. aut Peters, P.J.M. aut Napartovich, A.P. aut Witteman, W.J. aut Enthalten in Applied physics. B, Lasers and optics Springer-Verlag, 1981 72(2001), 7 vom: Mai, Seite 823-833 (DE-627)130297682 (DE-600)579693-3 (DE-576)015877272 0946-2171 nnns volume:72 year:2001 number:7 month:05 pages:823-833 https://doi.org/10.1007/s003400100538 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_60 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4126 GBV_ILN_4277 GBV_ILN_4306 GBV_ILN_4310 GBV_ILN_4313 GBV_ILN_4315 GBV_ILN_4319 GBV_ILN_4323 UA 9001 AR 72 2001 7 05 823-833
allfieldsGer	10.1007/s003400100538 doi (DE-627)OLC2074268718 (DE-He213)s003400100538-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001 VZ rvk Demyanov, A.V. verfasserin aut Kinetic modelling of a discharge-pumped ArF excimer laser and the effects of discharge filamentation 2001 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2001 Abstract. Results of kinetic modelling of an X-ray preionised, discharge-pumped ArF excimer laser, operating with a spiker-sustainer circuit are presented. The parallel-resistor model includes the complete ArF laser kinetics and calculations of the Boltzmann equation in each layer taking into account the effects of electron–electron and super-elastic collisions. The model further includes a detailed description of the electrical circuit and the formation of filaments with a realistic electrode profile. This model shows a good correspondence with the experimental results in predicting laser energy and optical behaviour. Neglecting the formation of filaments and the electron–electron and super-elastic collision processes yields remarkably poorer results. Parametric studies on the electrode profile, the formation of micro-arcs and on the electrical circuit parameters were performed numerically. Feenstra, L. aut Peters, P.J.M. aut Napartovich, A.P. aut Witteman, W.J. aut Enthalten in Applied physics. B, Lasers and optics Springer-Verlag, 1981 72(2001), 7 vom: Mai, Seite 823-833 (DE-627)130297682 (DE-600)579693-3 (DE-576)015877272 0946-2171 nnns volume:72 year:2001 number:7 month:05 pages:823-833 https://doi.org/10.1007/s003400100538 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_60 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4126 GBV_ILN_4277 GBV_ILN_4306 GBV_ILN_4310 GBV_ILN_4313 GBV_ILN_4315 GBV_ILN_4319 GBV_ILN_4323 UA 9001 AR 72 2001 7 05 823-833
allfieldsSound	10.1007/s003400100538 doi (DE-627)OLC2074268718 (DE-He213)s003400100538-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001 VZ rvk Demyanov, A.V. verfasserin aut Kinetic modelling of a discharge-pumped ArF excimer laser and the effects of discharge filamentation 2001 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2001 Abstract. Results of kinetic modelling of an X-ray preionised, discharge-pumped ArF excimer laser, operating with a spiker-sustainer circuit are presented. The parallel-resistor model includes the complete ArF laser kinetics and calculations of the Boltzmann equation in each layer taking into account the effects of electron–electron and super-elastic collisions. The model further includes a detailed description of the electrical circuit and the formation of filaments with a realistic electrode profile. This model shows a good correspondence with the experimental results in predicting laser energy and optical behaviour. Neglecting the formation of filaments and the electron–electron and super-elastic collision processes yields remarkably poorer results. Parametric studies on the electrode profile, the formation of micro-arcs and on the electrical circuit parameters were performed numerically. Feenstra, L. aut Peters, P.J.M. aut Napartovich, A.P. aut Witteman, W.J. aut Enthalten in Applied physics. B, Lasers and optics Springer-Verlag, 1981 72(2001), 7 vom: Mai, Seite 823-833 (DE-627)130297682 (DE-600)579693-3 (DE-576)015877272 0946-2171 nnns volume:72 year:2001 number:7 month:05 pages:823-833 https://doi.org/10.1007/s003400100538 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_11 GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_60 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4126 GBV_ILN_4277 GBV_ILN_4306 GBV_ILN_4310 GBV_ILN_4313 GBV_ILN_4315 GBV_ILN_4319 GBV_ILN_4323 UA 9001 AR 72 2001 7 05 823-833
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topic_title	530 620 VZ 530 VZ UA 9001 VZ rvk Kinetic modelling of a discharge-pumped ArF excimer laser and the effects of discharge filamentation
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title	Kinetic modelling of a discharge-pumped ArF excimer laser and the effects of discharge filamentation
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title_full	Kinetic modelling of a discharge-pumped ArF excimer laser and the effects of discharge filamentation
author_sort	Demyanov, A.V.
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author_browse	Demyanov, A.V. Feenstra, L. Peters, P.J.M. Napartovich, A.P. Witteman, W.J.
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title_sort	kinetic modelling of a discharge-pumped arf excimer laser and the effects of discharge filamentation
title_auth	Kinetic modelling of a discharge-pumped ArF excimer laser and the effects of discharge filamentation
abstract	Abstract. Results of kinetic modelling of an X-ray preionised, discharge-pumped ArF excimer laser, operating with a spiker-sustainer circuit are presented. The parallel-resistor model includes the complete ArF laser kinetics and calculations of the Boltzmann equation in each layer taking into account the effects of electron–electron and super-elastic collisions. The model further includes a detailed description of the electrical circuit and the formation of filaments with a realistic electrode profile. This model shows a good correspondence with the experimental results in predicting laser energy and optical behaviour. Neglecting the formation of filaments and the electron–electron and super-elastic collision processes yields remarkably poorer results. Parametric studies on the electrode profile, the formation of micro-arcs and on the electrical circuit parameters were performed numerically. © Springer-Verlag 2001
abstractGer	Abstract. Results of kinetic modelling of an X-ray preionised, discharge-pumped ArF excimer laser, operating with a spiker-sustainer circuit are presented. The parallel-resistor model includes the complete ArF laser kinetics and calculations of the Boltzmann equation in each layer taking into account the effects of electron–electron and super-elastic collisions. The model further includes a detailed description of the electrical circuit and the formation of filaments with a realistic electrode profile. This model shows a good correspondence with the experimental results in predicting laser energy and optical behaviour. Neglecting the formation of filaments and the electron–electron and super-elastic collision processes yields remarkably poorer results. Parametric studies on the electrode profile, the formation of micro-arcs and on the electrical circuit parameters were performed numerically. © Springer-Verlag 2001
abstract_unstemmed	Abstract. Results of kinetic modelling of an X-ray preionised, discharge-pumped ArF excimer laser, operating with a spiker-sustainer circuit are presented. The parallel-resistor model includes the complete ArF laser kinetics and calculations of the Boltzmann equation in each layer taking into account the effects of electron–electron and super-elastic collisions. The model further includes a detailed description of the electrical circuit and the formation of filaments with a realistic electrode profile. This model shows a good correspondence with the experimental results in predicting laser energy and optical behaviour. Neglecting the formation of filaments and the electron–electron and super-elastic collision processes yields remarkably poorer results. Parametric studies on the electrode profile, the formation of micro-arcs and on the electrical circuit parameters were performed numerically. © Springer-Verlag 2001
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title_short	Kinetic modelling of a discharge-pumped ArF excimer laser and the effects of discharge filamentation
url	https://doi.org/10.1007/s003400100538
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author2	Feenstra, L. Peters, P.J.M. Napartovich, A.P. Witteman, W.J.
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up_date	2024-07-03T21:37:04.296Z
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