100-kHz diffraction-limited femtosecond laser micromachining

Abstract We demonstrate active and adaptive wavefront correction of a 100-kHz amplified femtosecond laser chain, and investigate the subsequent improvement for micromachining applications. Thanks to a non-pixelated liquid-crystal modulator, phase-front distortions are decreased down to λ/15 peak–val...
Ausführliche Beschreibung

Gespeichert in:

Autor*in:	Sanner, N. [verfasserIn] Huot, N. Audouard, E. Larat, C. Laporte, P. Huignard, J.P.

Format:	Artikel
Sprache:	Englisch

Erschienen:	2005

Schlagwörter:	Femtosecond Laser Ablation Threshold Valette Reading Beam Femtosecond Laser Beam

Systematik:	UA 9001

Anmerkung:	© Springer-Verlag 2004

Übergeordnetes Werk:	Enthalten in: Applied physics. B, Lasers and optics - Springer Berlin Heidelberg, 1981, 80(2005), 1 vom: 01. Jan., Seite 27-30
Übergeordnetes Werk:	volume:80 ; year:2005 ; number:1 ; day:01 ; month:01 ; pages:27-30

Links:	Volltext

DOI / URN:	10.1007/s00340-004-1697-x

Katalog-ID:	OLC2074279698

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allfields	10.1007/s00340-004-1697-x doi (DE-627)OLC2074279698 (DE-He213)s00340-004-1697-x-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001 VZ rvk Sanner, N. verfasserin aut 100-kHz diffraction-limited femtosecond laser micromachining 2005 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2004 Abstract We demonstrate active and adaptive wavefront correction of a 100-kHz amplified femtosecond laser chain, and investigate the subsequent improvement for micromachining applications. Thanks to a non-pixelated liquid-crystal modulator, phase-front distortions are decreased down to λ/15 peak–valley and λ/100 rms. Clean 1.7-μm diffraction-limited microholes are obtained, both on low-threshold metallic and high-threshold dielectric materials. This high beam quality femtosecond source enables diffraction-limited high-speed micromachining. Femtosecond Laser Ablation Threshold Valette Reading Beam Femtosecond Laser Beam Huot, N. aut Audouard, E. aut Larat, C. aut Laporte, P. aut Huignard, J.P. aut Enthalten in Applied physics. B, Lasers and optics Springer Berlin Heidelberg, 1981 80(2005), 1 vom: 01. Jan., Seite 27-30 (DE-627)130297682 (DE-600)579693-3 (DE-576)015877272 0946-2171 nnns volume:80 year:2005 number:1 day:01 month:01 pages:27-30 https://doi.org/10.1007/s00340-004-1697-x lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_60 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_285 GBV_ILN_602 GBV_ILN_2010 GBV_ILN_2018 GBV_ILN_2021 GBV_ILN_4036 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4277 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4323 UA 9001 AR 80 2005 1 01 01 27-30
spelling	10.1007/s00340-004-1697-x doi (DE-627)OLC2074279698 (DE-He213)s00340-004-1697-x-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001 VZ rvk Sanner, N. verfasserin aut 100-kHz diffraction-limited femtosecond laser micromachining 2005 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2004 Abstract We demonstrate active and adaptive wavefront correction of a 100-kHz amplified femtosecond laser chain, and investigate the subsequent improvement for micromachining applications. Thanks to a non-pixelated liquid-crystal modulator, phase-front distortions are decreased down to λ/15 peak–valley and λ/100 rms. Clean 1.7-μm diffraction-limited microholes are obtained, both on low-threshold metallic and high-threshold dielectric materials. This high beam quality femtosecond source enables diffraction-limited high-speed micromachining. Femtosecond Laser Ablation Threshold Valette Reading Beam Femtosecond Laser Beam Huot, N. aut Audouard, E. aut Larat, C. aut Laporte, P. aut Huignard, J.P. aut Enthalten in Applied physics. B, Lasers and optics Springer Berlin Heidelberg, 1981 80(2005), 1 vom: 01. Jan., Seite 27-30 (DE-627)130297682 (DE-600)579693-3 (DE-576)015877272 0946-2171 nnns volume:80 year:2005 number:1 day:01 month:01 pages:27-30 https://doi.org/10.1007/s00340-004-1697-x lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_60 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_285 GBV_ILN_602 GBV_ILN_2010 GBV_ILN_2018 GBV_ILN_2021 GBV_ILN_4036 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4277 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4323 UA 9001 AR 80 2005 1 01 01 27-30
allfields_unstemmed	10.1007/s00340-004-1697-x doi (DE-627)OLC2074279698 (DE-He213)s00340-004-1697-x-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001 VZ rvk Sanner, N. verfasserin aut 100-kHz diffraction-limited femtosecond laser micromachining 2005 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2004 Abstract We demonstrate active and adaptive wavefront correction of a 100-kHz amplified femtosecond laser chain, and investigate the subsequent improvement for micromachining applications. Thanks to a non-pixelated liquid-crystal modulator, phase-front distortions are decreased down to λ/15 peak–valley and λ/100 rms. Clean 1.7-μm diffraction-limited microholes are obtained, both on low-threshold metallic and high-threshold dielectric materials. This high beam quality femtosecond source enables diffraction-limited high-speed micromachining. Femtosecond Laser Ablation Threshold Valette Reading Beam Femtosecond Laser Beam Huot, N. aut Audouard, E. aut Larat, C. aut Laporte, P. aut Huignard, J.P. aut Enthalten in Applied physics. B, Lasers and optics Springer Berlin Heidelberg, 1981 80(2005), 1 vom: 01. Jan., Seite 27-30 (DE-627)130297682 (DE-600)579693-3 (DE-576)015877272 0946-2171 nnns volume:80 year:2005 number:1 day:01 month:01 pages:27-30 https://doi.org/10.1007/s00340-004-1697-x lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_60 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_285 GBV_ILN_602 GBV_ILN_2010 GBV_ILN_2018 GBV_ILN_2021 GBV_ILN_4036 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4277 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4323 UA 9001 AR 80 2005 1 01 01 27-30
allfieldsGer	10.1007/s00340-004-1697-x doi (DE-627)OLC2074279698 (DE-He213)s00340-004-1697-x-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001 VZ rvk Sanner, N. verfasserin aut 100-kHz diffraction-limited femtosecond laser micromachining 2005 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2004 Abstract We demonstrate active and adaptive wavefront correction of a 100-kHz amplified femtosecond laser chain, and investigate the subsequent improvement for micromachining applications. Thanks to a non-pixelated liquid-crystal modulator, phase-front distortions are decreased down to λ/15 peak–valley and λ/100 rms. Clean 1.7-μm diffraction-limited microholes are obtained, both on low-threshold metallic and high-threshold dielectric materials. This high beam quality femtosecond source enables diffraction-limited high-speed micromachining. Femtosecond Laser Ablation Threshold Valette Reading Beam Femtosecond Laser Beam Huot, N. aut Audouard, E. aut Larat, C. aut Laporte, P. aut Huignard, J.P. aut Enthalten in Applied physics. B, Lasers and optics Springer Berlin Heidelberg, 1981 80(2005), 1 vom: 01. Jan., Seite 27-30 (DE-627)130297682 (DE-600)579693-3 (DE-576)015877272 0946-2171 nnns volume:80 year:2005 number:1 day:01 month:01 pages:27-30 https://doi.org/10.1007/s00340-004-1697-x lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_60 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_285 GBV_ILN_602 GBV_ILN_2010 GBV_ILN_2018 GBV_ILN_2021 GBV_ILN_4036 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4277 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4323 UA 9001 AR 80 2005 1 01 01 27-30
allfieldsSound	10.1007/s00340-004-1697-x doi (DE-627)OLC2074279698 (DE-He213)s00340-004-1697-x-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001 VZ rvk Sanner, N. verfasserin aut 100-kHz diffraction-limited femtosecond laser micromachining 2005 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2004 Abstract We demonstrate active and adaptive wavefront correction of a 100-kHz amplified femtosecond laser chain, and investigate the subsequent improvement for micromachining applications. Thanks to a non-pixelated liquid-crystal modulator, phase-front distortions are decreased down to λ/15 peak–valley and λ/100 rms. Clean 1.7-μm diffraction-limited microholes are obtained, both on low-threshold metallic and high-threshold dielectric materials. This high beam quality femtosecond source enables diffraction-limited high-speed micromachining. Femtosecond Laser Ablation Threshold Valette Reading Beam Femtosecond Laser Beam Huot, N. aut Audouard, E. aut Larat, C. aut Laporte, P. aut Huignard, J.P. aut Enthalten in Applied physics. B, Lasers and optics Springer Berlin Heidelberg, 1981 80(2005), 1 vom: 01. Jan., Seite 27-30 (DE-627)130297682 (DE-600)579693-3 (DE-576)015877272 0946-2171 nnns volume:80 year:2005 number:1 day:01 month:01 pages:27-30 https://doi.org/10.1007/s00340-004-1697-x lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_20 GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_40 GBV_ILN_60 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_285 GBV_ILN_602 GBV_ILN_2010 GBV_ILN_2018 GBV_ILN_2021 GBV_ILN_4036 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4277 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4323 UA 9001 AR 80 2005 1 01 01 27-30
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source	Enthalten in Applied physics. B, Lasers and optics 80(2005), 1 vom: 01. Jan., Seite 27-30 volume:80 year:2005 number:1 day:01 month:01 pages:27-30
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topic_facet	Femtosecond Laser Ablation Threshold Valette Reading Beam Femtosecond Laser Beam
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title	100-kHz diffraction-limited femtosecond laser micromachining
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title_full	100-kHz diffraction-limited femtosecond laser micromachining
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author_browse	Sanner, N. Huot, N. Audouard, E. Larat, C. Laporte, P. Huignard, J.P.
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doi_str_mv	10.1007/s00340-004-1697-x
dewey-full	530 620
title_sort	100-khz diffraction-limited femtosecond laser micromachining
title_auth	100-kHz diffraction-limited femtosecond laser micromachining
abstract	Abstract We demonstrate active and adaptive wavefront correction of a 100-kHz amplified femtosecond laser chain, and investigate the subsequent improvement for micromachining applications. Thanks to a non-pixelated liquid-crystal modulator, phase-front distortions are decreased down to λ/15 peak–valley and λ/100 rms. Clean 1.7-μm diffraction-limited microholes are obtained, both on low-threshold metallic and high-threshold dielectric materials. This high beam quality femtosecond source enables diffraction-limited high-speed micromachining. © Springer-Verlag 2004
abstractGer	Abstract We demonstrate active and adaptive wavefront correction of a 100-kHz amplified femtosecond laser chain, and investigate the subsequent improvement for micromachining applications. Thanks to a non-pixelated liquid-crystal modulator, phase-front distortions are decreased down to λ/15 peak–valley and λ/100 rms. Clean 1.7-μm diffraction-limited microholes are obtained, both on low-threshold metallic and high-threshold dielectric materials. This high beam quality femtosecond source enables diffraction-limited high-speed micromachining. © Springer-Verlag 2004
abstract_unstemmed	Abstract We demonstrate active and adaptive wavefront correction of a 100-kHz amplified femtosecond laser chain, and investigate the subsequent improvement for micromachining applications. Thanks to a non-pixelated liquid-crystal modulator, phase-front distortions are decreased down to λ/15 peak–valley and λ/100 rms. Clean 1.7-μm diffraction-limited microholes are obtained, both on low-threshold metallic and high-threshold dielectric materials. This high beam quality femtosecond source enables diffraction-limited high-speed micromachining. © Springer-Verlag 2004
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title_short	100-kHz diffraction-limited femtosecond laser micromachining
url	https://doi.org/10.1007/s00340-004-1697-x
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author2	Huot, N. Audouard, E. Larat, C. Laporte, P. Huignard, J.P.
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up_date	2024-07-03T21:40:02.831Z
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