Emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for extreme ultraviolet lithography light source
Abstract We describe a comparative study of the emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for developing an extreme-ultraviolet (EUV) lithography light source. Tin (Sn) ions and droplets emitted from a Sn plasma produced by a $ CO_{2} $ laser or an Nd:Y...
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| Autor*in: |
Takahashi, A. [verfasserIn] |
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| Format: |
Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2008 |
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| Anmerkung: |
© Springer-Verlag 2008 |
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| Übergeordnetes Werk: |
Enthalten in: Applied physics. B, Lasers and optics - Springer-Verlag, 1981, 92(2008), 1 vom: 13. Juni, Seite 73-77 |
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| Übergeordnetes Werk: |
volume:92 ; year:2008 ; number:1 ; day:13 ; month:06 ; pages:73-77 |
| Links: |
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| DOI / URN: |
10.1007/s00340-008-3068-5 |
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| Katalog-ID: |
OLC2074291876 |
|---|
| LEADER | 01000caa a22002652 4500 | ||
|---|---|---|---|
| 001 | OLC2074291876 | ||
| 003 | DE-627 | ||
| 005 | 20230331133118.0 | ||
| 007 | tu | ||
| 008 | 200819s2008 xx ||||| 00| ||eng c | ||
| 024 | 7 | |a 10.1007/s00340-008-3068-5 |2 doi | |
| 035 | |a (DE-627)OLC2074291876 | ||
| 035 | |a (DE-He213)s00340-008-3068-5-p | ||
| 040 | |a DE-627 |b ger |c DE-627 |e rakwb | ||
| 041 | |a eng | ||
| 082 | 0 | 4 | |a 530 |a 620 |q VZ |
| 082 | 0 | 4 | |a 530 |q VZ |
| 084 | |a UA 9001 |q VZ |2 rvk | ||
| 100 | 1 | |a Takahashi, A. |e verfasserin |4 aut | |
| 245 | 1 | 0 | |a Emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for extreme ultraviolet lithography light source |
| 264 | 1 | |c 2008 | |
| 336 | |a Text |b txt |2 rdacontent | ||
| 337 | |a ohne Hilfsmittel zu benutzen |b n |2 rdamedia | ||
| 338 | |a Band |b nc |2 rdacarrier | ||
| 500 | |a © Springer-Verlag 2008 | ||
| 520 | |a Abstract We describe a comparative study of the emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for developing an extreme-ultraviolet (EUV) lithography light source. Tin (Sn) ions and droplets emitted from a Sn plasma produced by a $ CO_{2} $ laser or an Nd:YAG laser were detected using Faraday cups and quartz crystal microbalance (QCM) detectors, respectively. The droplets were also monitored by using silicon substrates as witness plates. The results showed higher ion kinetic energy and lower particle emission for the $ CO_{2} $ laser than the Nd:YAG laser for the same laser energy (50 mJ). The average ion energy was 2.2 keV for the $ CO_{2} $ laser-produced plasma (LPP), and 0.6 keV for the Nd:YAG LPP. The debris accumulation of the $ CO_{2} $ LPP detected by the QCM detectors, however, was less than one fourth of that of the Nd:YAG LPP for the same laser energy. Using ion energy data, the mirror lifetime is estimated for the $ CO_{2} $ and Nd:YAG lasers. In both cases, the upper limit of the number of shots was of the order of $ 10^{6} $. | ||
| 650 | 4 | |a Quartz Crystal Microbalance | |
| 650 | 4 | |a Full Width Half Maximum | |
| 650 | 4 | |a Debris Accumulation | |
| 650 | 4 | |a Quartz Crystal Microbalance Surface | |
| 650 | 4 | |a Lower Particle Emission | |
| 700 | 1 | |a Nakamura, D. |4 aut | |
| 700 | 1 | |a Tamaru, K. |4 aut | |
| 700 | 1 | |a Akiyama, T. |4 aut | |
| 700 | 1 | |a Okada, T. |4 aut | |
| 773 | 0 | 8 | |i Enthalten in |t Applied physics. B, Lasers and optics |d Springer-Verlag, 1981 |g 92(2008), 1 vom: 13. Juni, Seite 73-77 |w (DE-627)130297682 |w (DE-600)579693-3 |w (DE-576)015877272 |x 0946-2171 |7 nnns |
| 773 | 1 | 8 | |g volume:92 |g year:2008 |g number:1 |g day:13 |g month:06 |g pages:73-77 |
| 856 | 4 | 1 | |u https://doi.org/10.1007/s00340-008-3068-5 |z lizenzpflichtig |3 Volltext |
| 912 | |a GBV_USEFLAG_A | ||
| 912 | |a SYSFLAG_A | ||
| 912 | |a GBV_OLC | ||
| 912 | |a SSG-OLC-PHY | ||
| 912 | |a GBV_ILN_21 | ||
| 912 | |a GBV_ILN_22 | ||
| 912 | |a GBV_ILN_30 | ||
| 912 | |a GBV_ILN_31 | ||
| 912 | |a GBV_ILN_60 | ||
| 912 | |a GBV_ILN_70 | ||
| 912 | |a GBV_ILN_130 | ||
| 912 | |a GBV_ILN_170 | ||
| 912 | |a GBV_ILN_285 | ||
| 912 | |a GBV_ILN_2010 | ||
| 912 | |a GBV_ILN_2018 | ||
| 912 | |a GBV_ILN_2021 | ||
| 912 | |a GBV_ILN_4036 | ||
| 912 | |a GBV_ILN_4116 | ||
| 912 | |a GBV_ILN_4126 | ||
| 912 | |a GBV_ILN_4266 | ||
| 912 | |a GBV_ILN_4277 | ||
| 912 | |a GBV_ILN_4306 | ||
| 912 | |a GBV_ILN_4307 | ||
| 912 | |a GBV_ILN_4313 | ||
| 912 | |a GBV_ILN_4323 | ||
| 936 | r | v | |a UA 9001 |
| 951 | |a AR | ||
| 952 | |d 92 |j 2008 |e 1 |b 13 |c 06 |h 73-77 | ||
| author_variant |
a t at d n dn k t kt t a ta t o to |
|---|---|
| matchkey_str |
article:09462171:2008----::msinhrceitcodbifoc_addalsrrdcdipamsoeteelr |
| hierarchy_sort_str |
2008 |
| publishDate |
2008 |
| allfields |
10.1007/s00340-008-3068-5 doi (DE-627)OLC2074291876 (DE-He213)s00340-008-3068-5-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001 VZ rvk Takahashi, A. verfasserin aut Emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for extreme ultraviolet lithography light source 2008 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2008 Abstract We describe a comparative study of the emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for developing an extreme-ultraviolet (EUV) lithography light source. Tin (Sn) ions and droplets emitted from a Sn plasma produced by a $ CO_{2} $ laser or an Nd:YAG laser were detected using Faraday cups and quartz crystal microbalance (QCM) detectors, respectively. The droplets were also monitored by using silicon substrates as witness plates. The results showed higher ion kinetic energy and lower particle emission for the $ CO_{2} $ laser than the Nd:YAG laser for the same laser energy (50 mJ). The average ion energy was 2.2 keV for the $ CO_{2} $ laser-produced plasma (LPP), and 0.6 keV for the Nd:YAG LPP. The debris accumulation of the $ CO_{2} $ LPP detected by the QCM detectors, however, was less than one fourth of that of the Nd:YAG LPP for the same laser energy. Using ion energy data, the mirror lifetime is estimated for the $ CO_{2} $ and Nd:YAG lasers. In both cases, the upper limit of the number of shots was of the order of $ 10^{6} $. Quartz Crystal Microbalance Full Width Half Maximum Debris Accumulation Quartz Crystal Microbalance Surface Lower Particle Emission Nakamura, D. aut Tamaru, K. aut Akiyama, T. aut Okada, T. aut Enthalten in Applied physics. B, Lasers and optics Springer-Verlag, 1981 92(2008), 1 vom: 13. Juni, Seite 73-77 (DE-627)130297682 (DE-600)579693-3 (DE-576)015877272 0946-2171 nnns volume:92 year:2008 number:1 day:13 month:06 pages:73-77 https://doi.org/10.1007/s00340-008-3068-5 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_60 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_285 GBV_ILN_2010 GBV_ILN_2018 GBV_ILN_2021 GBV_ILN_4036 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4277 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4323 UA 9001 AR 92 2008 1 13 06 73-77 |
| spelling |
10.1007/s00340-008-3068-5 doi (DE-627)OLC2074291876 (DE-He213)s00340-008-3068-5-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001 VZ rvk Takahashi, A. verfasserin aut Emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for extreme ultraviolet lithography light source 2008 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2008 Abstract We describe a comparative study of the emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for developing an extreme-ultraviolet (EUV) lithography light source. Tin (Sn) ions and droplets emitted from a Sn plasma produced by a $ CO_{2} $ laser or an Nd:YAG laser were detected using Faraday cups and quartz crystal microbalance (QCM) detectors, respectively. The droplets were also monitored by using silicon substrates as witness plates. The results showed higher ion kinetic energy and lower particle emission for the $ CO_{2} $ laser than the Nd:YAG laser for the same laser energy (50 mJ). The average ion energy was 2.2 keV for the $ CO_{2} $ laser-produced plasma (LPP), and 0.6 keV for the Nd:YAG LPP. The debris accumulation of the $ CO_{2} $ LPP detected by the QCM detectors, however, was less than one fourth of that of the Nd:YAG LPP for the same laser energy. Using ion energy data, the mirror lifetime is estimated for the $ CO_{2} $ and Nd:YAG lasers. In both cases, the upper limit of the number of shots was of the order of $ 10^{6} $. Quartz Crystal Microbalance Full Width Half Maximum Debris Accumulation Quartz Crystal Microbalance Surface Lower Particle Emission Nakamura, D. aut Tamaru, K. aut Akiyama, T. aut Okada, T. aut Enthalten in Applied physics. B, Lasers and optics Springer-Verlag, 1981 92(2008), 1 vom: 13. Juni, Seite 73-77 (DE-627)130297682 (DE-600)579693-3 (DE-576)015877272 0946-2171 nnns volume:92 year:2008 number:1 day:13 month:06 pages:73-77 https://doi.org/10.1007/s00340-008-3068-5 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_60 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_285 GBV_ILN_2010 GBV_ILN_2018 GBV_ILN_2021 GBV_ILN_4036 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4277 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4323 UA 9001 AR 92 2008 1 13 06 73-77 |
| allfields_unstemmed |
10.1007/s00340-008-3068-5 doi (DE-627)OLC2074291876 (DE-He213)s00340-008-3068-5-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001 VZ rvk Takahashi, A. verfasserin aut Emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for extreme ultraviolet lithography light source 2008 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2008 Abstract We describe a comparative study of the emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for developing an extreme-ultraviolet (EUV) lithography light source. Tin (Sn) ions and droplets emitted from a Sn plasma produced by a $ CO_{2} $ laser or an Nd:YAG laser were detected using Faraday cups and quartz crystal microbalance (QCM) detectors, respectively. The droplets were also monitored by using silicon substrates as witness plates. The results showed higher ion kinetic energy and lower particle emission for the $ CO_{2} $ laser than the Nd:YAG laser for the same laser energy (50 mJ). The average ion energy was 2.2 keV for the $ CO_{2} $ laser-produced plasma (LPP), and 0.6 keV for the Nd:YAG LPP. The debris accumulation of the $ CO_{2} $ LPP detected by the QCM detectors, however, was less than one fourth of that of the Nd:YAG LPP for the same laser energy. Using ion energy data, the mirror lifetime is estimated for the $ CO_{2} $ and Nd:YAG lasers. In both cases, the upper limit of the number of shots was of the order of $ 10^{6} $. Quartz Crystal Microbalance Full Width Half Maximum Debris Accumulation Quartz Crystal Microbalance Surface Lower Particle Emission Nakamura, D. aut Tamaru, K. aut Akiyama, T. aut Okada, T. aut Enthalten in Applied physics. B, Lasers and optics Springer-Verlag, 1981 92(2008), 1 vom: 13. Juni, Seite 73-77 (DE-627)130297682 (DE-600)579693-3 (DE-576)015877272 0946-2171 nnns volume:92 year:2008 number:1 day:13 month:06 pages:73-77 https://doi.org/10.1007/s00340-008-3068-5 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_60 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_285 GBV_ILN_2010 GBV_ILN_2018 GBV_ILN_2021 GBV_ILN_4036 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4277 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4323 UA 9001 AR 92 2008 1 13 06 73-77 |
| allfieldsGer |
10.1007/s00340-008-3068-5 doi (DE-627)OLC2074291876 (DE-He213)s00340-008-3068-5-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001 VZ rvk Takahashi, A. verfasserin aut Emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for extreme ultraviolet lithography light source 2008 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2008 Abstract We describe a comparative study of the emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for developing an extreme-ultraviolet (EUV) lithography light source. Tin (Sn) ions and droplets emitted from a Sn plasma produced by a $ CO_{2} $ laser or an Nd:YAG laser were detected using Faraday cups and quartz crystal microbalance (QCM) detectors, respectively. The droplets were also monitored by using silicon substrates as witness plates. The results showed higher ion kinetic energy and lower particle emission for the $ CO_{2} $ laser than the Nd:YAG laser for the same laser energy (50 mJ). The average ion energy was 2.2 keV for the $ CO_{2} $ laser-produced plasma (LPP), and 0.6 keV for the Nd:YAG LPP. The debris accumulation of the $ CO_{2} $ LPP detected by the QCM detectors, however, was less than one fourth of that of the Nd:YAG LPP for the same laser energy. Using ion energy data, the mirror lifetime is estimated for the $ CO_{2} $ and Nd:YAG lasers. In both cases, the upper limit of the number of shots was of the order of $ 10^{6} $. Quartz Crystal Microbalance Full Width Half Maximum Debris Accumulation Quartz Crystal Microbalance Surface Lower Particle Emission Nakamura, D. aut Tamaru, K. aut Akiyama, T. aut Okada, T. aut Enthalten in Applied physics. B, Lasers and optics Springer-Verlag, 1981 92(2008), 1 vom: 13. Juni, Seite 73-77 (DE-627)130297682 (DE-600)579693-3 (DE-576)015877272 0946-2171 nnns volume:92 year:2008 number:1 day:13 month:06 pages:73-77 https://doi.org/10.1007/s00340-008-3068-5 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_60 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_285 GBV_ILN_2010 GBV_ILN_2018 GBV_ILN_2021 GBV_ILN_4036 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4277 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4323 UA 9001 AR 92 2008 1 13 06 73-77 |
| allfieldsSound |
10.1007/s00340-008-3068-5 doi (DE-627)OLC2074291876 (DE-He213)s00340-008-3068-5-p DE-627 ger DE-627 rakwb eng 530 620 VZ 530 VZ UA 9001 VZ rvk Takahashi, A. verfasserin aut Emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for extreme ultraviolet lithography light source 2008 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © Springer-Verlag 2008 Abstract We describe a comparative study of the emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for developing an extreme-ultraviolet (EUV) lithography light source. Tin (Sn) ions and droplets emitted from a Sn plasma produced by a $ CO_{2} $ laser or an Nd:YAG laser were detected using Faraday cups and quartz crystal microbalance (QCM) detectors, respectively. The droplets were also monitored by using silicon substrates as witness plates. The results showed higher ion kinetic energy and lower particle emission for the $ CO_{2} $ laser than the Nd:YAG laser for the same laser energy (50 mJ). The average ion energy was 2.2 keV for the $ CO_{2} $ laser-produced plasma (LPP), and 0.6 keV for the Nd:YAG LPP. The debris accumulation of the $ CO_{2} $ LPP detected by the QCM detectors, however, was less than one fourth of that of the Nd:YAG LPP for the same laser energy. Using ion energy data, the mirror lifetime is estimated for the $ CO_{2} $ and Nd:YAG lasers. In both cases, the upper limit of the number of shots was of the order of $ 10^{6} $. Quartz Crystal Microbalance Full Width Half Maximum Debris Accumulation Quartz Crystal Microbalance Surface Lower Particle Emission Nakamura, D. aut Tamaru, K. aut Akiyama, T. aut Okada, T. aut Enthalten in Applied physics. B, Lasers and optics Springer-Verlag, 1981 92(2008), 1 vom: 13. Juni, Seite 73-77 (DE-627)130297682 (DE-600)579693-3 (DE-576)015877272 0946-2171 nnns volume:92 year:2008 number:1 day:13 month:06 pages:73-77 https://doi.org/10.1007/s00340-008-3068-5 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_60 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_285 GBV_ILN_2010 GBV_ILN_2018 GBV_ILN_2021 GBV_ILN_4036 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4277 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4323 UA 9001 AR 92 2008 1 13 06 73-77 |
| language |
English |
| source |
Enthalten in Applied physics. B, Lasers and optics 92(2008), 1 vom: 13. Juni, Seite 73-77 volume:92 year:2008 number:1 day:13 month:06 pages:73-77 |
| sourceStr |
Enthalten in Applied physics. B, Lasers and optics 92(2008), 1 vom: 13. Juni, Seite 73-77 volume:92 year:2008 number:1 day:13 month:06 pages:73-77 |
| format_phy_str_mv |
Article |
| institution |
findex.gbv.de |
| topic_facet |
Quartz Crystal Microbalance Full Width Half Maximum Debris Accumulation Quartz Crystal Microbalance Surface Lower Particle Emission |
| dewey-raw |
530 |
| isfreeaccess_bool |
false |
| container_title |
Applied physics. B, Lasers and optics |
| authorswithroles_txt_mv |
Takahashi, A. @@aut@@ Nakamura, D. @@aut@@ Tamaru, K. @@aut@@ Akiyama, T. @@aut@@ Okada, T. @@aut@@ |
| publishDateDaySort_date |
2008-06-13T00:00:00Z |
| hierarchy_top_id |
130297682 |
| dewey-sort |
3530 |
| id |
OLC2074291876 |
| language_de |
englisch |
| fullrecord |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC2074291876</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230331133118.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">200819s2008 xx ||||| 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/s00340-008-3068-5</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC2074291876</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-He213)s00340-008-3068-5-p</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield><subfield code="a">620</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UA 9001</subfield><subfield code="q">VZ</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Takahashi, A.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for extreme ultraviolet lithography light source</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2008</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">© Springer-Verlag 2008</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Abstract We describe a comparative study of the emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for developing an extreme-ultraviolet (EUV) lithography light source. Tin (Sn) ions and droplets emitted from a Sn plasma produced by a $ CO_{2} $ laser or an Nd:YAG laser were detected using Faraday cups and quartz crystal microbalance (QCM) detectors, respectively. The droplets were also monitored by using silicon substrates as witness plates. The results showed higher ion kinetic energy and lower particle emission for the $ CO_{2} $ laser than the Nd:YAG laser for the same laser energy (50 mJ). The average ion energy was 2.2 keV for the $ CO_{2} $ laser-produced plasma (LPP), and 0.6 keV for the Nd:YAG LPP. The debris accumulation of the $ CO_{2} $ LPP detected by the QCM detectors, however, was less than one fourth of that of the Nd:YAG LPP for the same laser energy. Using ion energy data, the mirror lifetime is estimated for the $ CO_{2} $ and Nd:YAG lasers. In both cases, the upper limit of the number of shots was of the order of $ 10^{6} $.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Quartz Crystal Microbalance</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Full Width Half Maximum</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Debris Accumulation</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Quartz Crystal Microbalance Surface</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Lower Particle Emission</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Nakamura, D.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Tamaru, K.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Akiyama, T.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Okada, T.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Applied physics. B, Lasers and optics</subfield><subfield code="d">Springer-Verlag, 1981</subfield><subfield code="g">92(2008), 1 vom: 13. Juni, Seite 73-77</subfield><subfield code="w">(DE-627)130297682</subfield><subfield code="w">(DE-600)579693-3</subfield><subfield code="w">(DE-576)015877272</subfield><subfield code="x">0946-2171</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:92</subfield><subfield code="g">year:2008</subfield><subfield code="g">number:1</subfield><subfield code="g">day:13</subfield><subfield code="g">month:06</subfield><subfield code="g">pages:73-77</subfield></datafield><datafield tag="856" ind1="4" ind2="1"><subfield code="u">https://doi.org/10.1007/s00340-008-3068-5</subfield><subfield code="z">lizenzpflichtig</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHY</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_21</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_30</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_31</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_60</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_130</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_170</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_285</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2010</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2018</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2021</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4036</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4116</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4126</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4266</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4277</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4306</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4313</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4323</subfield></datafield><datafield tag="936" ind1="r" ind2="v"><subfield code="a">UA 9001</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">92</subfield><subfield code="j">2008</subfield><subfield code="e">1</subfield><subfield code="b">13</subfield><subfield code="c">06</subfield><subfield code="h">73-77</subfield></datafield></record></collection>
|
| author |
Takahashi, A. |
| spellingShingle |
Takahashi, A. ddc 530 rvk UA 9001 misc Quartz Crystal Microbalance misc Full Width Half Maximum misc Debris Accumulation misc Quartz Crystal Microbalance Surface misc Lower Particle Emission Emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for extreme ultraviolet lithography light source |
| authorStr |
Takahashi, A. |
| ppnlink_with_tag_str_mv |
@@773@@(DE-627)130297682 |
| format |
Article |
| dewey-ones |
530 - Physics 620 - Engineering & allied operations |
| delete_txt_mv |
keep |
| author_role |
aut aut aut aut aut |
| collection |
OLC |
| remote_str |
false |
| illustrated |
Not Illustrated |
| issn |
0946-2171 |
| topic_title |
530 620 VZ 530 VZ UA 9001 VZ rvk Emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for extreme ultraviolet lithography light source Quartz Crystal Microbalance Full Width Half Maximum Debris Accumulation Quartz Crystal Microbalance Surface Lower Particle Emission |
| topic |
ddc 530 rvk UA 9001 misc Quartz Crystal Microbalance misc Full Width Half Maximum misc Debris Accumulation misc Quartz Crystal Microbalance Surface misc Lower Particle Emission |
| topic_unstemmed |
ddc 530 rvk UA 9001 misc Quartz Crystal Microbalance misc Full Width Half Maximum misc Debris Accumulation misc Quartz Crystal Microbalance Surface misc Lower Particle Emission |
| topic_browse |
ddc 530 rvk UA 9001 misc Quartz Crystal Microbalance misc Full Width Half Maximum misc Debris Accumulation misc Quartz Crystal Microbalance Surface misc Lower Particle Emission |
| format_facet |
Aufsätze Gedruckte Aufsätze |
| format_main_str_mv |
Text Zeitschrift/Artikel |
| carriertype_str_mv |
nc |
| hierarchy_parent_title |
Applied physics. B, Lasers and optics |
| hierarchy_parent_id |
130297682 |
| dewey-tens |
530 - Physics 620 - Engineering |
| hierarchy_top_title |
Applied physics. B, Lasers and optics |
| isfreeaccess_txt |
false |
| familylinks_str_mv |
(DE-627)130297682 (DE-600)579693-3 (DE-576)015877272 |
| title |
Emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for extreme ultraviolet lithography light source |
| ctrlnum |
(DE-627)OLC2074291876 (DE-He213)s00340-008-3068-5-p |
| title_full |
Emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for extreme ultraviolet lithography light source |
| author_sort |
Takahashi, A. |
| journal |
Applied physics. B, Lasers and optics |
| journalStr |
Applied physics. B, Lasers and optics |
| lang_code |
eng |
| isOA_bool |
false |
| dewey-hundreds |
500 - Science 600 - Technology |
| recordtype |
marc |
| publishDateSort |
2008 |
| contenttype_str_mv |
txt |
| container_start_page |
73 |
| author_browse |
Takahashi, A. Nakamura, D. Tamaru, K. Akiyama, T. Okada, T. |
| container_volume |
92 |
| class |
530 620 VZ 530 VZ UA 9001 VZ rvk |
| format_se |
Aufsätze |
| author-letter |
Takahashi, A. |
| doi_str_mv |
10.1007/s00340-008-3068-5 |
| dewey-full |
530 620 |
| title_sort |
emission characteristics of debris from $ co_{2} $ and nd:yag laser-produced tin plasmas for extreme ultraviolet lithography light source |
| title_auth |
Emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for extreme ultraviolet lithography light source |
| abstract |
Abstract We describe a comparative study of the emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for developing an extreme-ultraviolet (EUV) lithography light source. Tin (Sn) ions and droplets emitted from a Sn plasma produced by a $ CO_{2} $ laser or an Nd:YAG laser were detected using Faraday cups and quartz crystal microbalance (QCM) detectors, respectively. The droplets were also monitored by using silicon substrates as witness plates. The results showed higher ion kinetic energy and lower particle emission for the $ CO_{2} $ laser than the Nd:YAG laser for the same laser energy (50 mJ). The average ion energy was 2.2 keV for the $ CO_{2} $ laser-produced plasma (LPP), and 0.6 keV for the Nd:YAG LPP. The debris accumulation of the $ CO_{2} $ LPP detected by the QCM detectors, however, was less than one fourth of that of the Nd:YAG LPP for the same laser energy. Using ion energy data, the mirror lifetime is estimated for the $ CO_{2} $ and Nd:YAG lasers. In both cases, the upper limit of the number of shots was of the order of $ 10^{6} $. © Springer-Verlag 2008 |
| abstractGer |
Abstract We describe a comparative study of the emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for developing an extreme-ultraviolet (EUV) lithography light source. Tin (Sn) ions and droplets emitted from a Sn plasma produced by a $ CO_{2} $ laser or an Nd:YAG laser were detected using Faraday cups and quartz crystal microbalance (QCM) detectors, respectively. The droplets were also monitored by using silicon substrates as witness plates. The results showed higher ion kinetic energy and lower particle emission for the $ CO_{2} $ laser than the Nd:YAG laser for the same laser energy (50 mJ). The average ion energy was 2.2 keV for the $ CO_{2} $ laser-produced plasma (LPP), and 0.6 keV for the Nd:YAG LPP. The debris accumulation of the $ CO_{2} $ LPP detected by the QCM detectors, however, was less than one fourth of that of the Nd:YAG LPP for the same laser energy. Using ion energy data, the mirror lifetime is estimated for the $ CO_{2} $ and Nd:YAG lasers. In both cases, the upper limit of the number of shots was of the order of $ 10^{6} $. © Springer-Verlag 2008 |
| abstract_unstemmed |
Abstract We describe a comparative study of the emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for developing an extreme-ultraviolet (EUV) lithography light source. Tin (Sn) ions and droplets emitted from a Sn plasma produced by a $ CO_{2} $ laser or an Nd:YAG laser were detected using Faraday cups and quartz crystal microbalance (QCM) detectors, respectively. The droplets were also monitored by using silicon substrates as witness plates. The results showed higher ion kinetic energy and lower particle emission for the $ CO_{2} $ laser than the Nd:YAG laser for the same laser energy (50 mJ). The average ion energy was 2.2 keV for the $ CO_{2} $ laser-produced plasma (LPP), and 0.6 keV for the Nd:YAG LPP. The debris accumulation of the $ CO_{2} $ LPP detected by the QCM detectors, however, was less than one fourth of that of the Nd:YAG LPP for the same laser energy. Using ion energy data, the mirror lifetime is estimated for the $ CO_{2} $ and Nd:YAG lasers. In both cases, the upper limit of the number of shots was of the order of $ 10^{6} $. © Springer-Verlag 2008 |
| collection_details |
GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-PHY GBV_ILN_21 GBV_ILN_22 GBV_ILN_30 GBV_ILN_31 GBV_ILN_60 GBV_ILN_70 GBV_ILN_130 GBV_ILN_170 GBV_ILN_285 GBV_ILN_2010 GBV_ILN_2018 GBV_ILN_2021 GBV_ILN_4036 GBV_ILN_4116 GBV_ILN_4126 GBV_ILN_4266 GBV_ILN_4277 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4323 |
| container_issue |
1 |
| title_short |
Emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for extreme ultraviolet lithography light source |
| url |
https://doi.org/10.1007/s00340-008-3068-5 |
| remote_bool |
false |
| author2 |
Nakamura, D. Tamaru, K. Akiyama, T. Okada, T. |
| author2Str |
Nakamura, D. Tamaru, K. Akiyama, T. Okada, T. |
| ppnlink |
130297682 |
| mediatype_str_mv |
n |
| isOA_txt |
false |
| hochschulschrift_bool |
false |
| doi_str |
10.1007/s00340-008-3068-5 |
| up_date |
2024-07-03T21:43:16.796Z |
| _version_ |
1803595805414653952 |
| fullrecord_marcxml |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC2074291876</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230331133118.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">200819s2008 xx ||||| 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/s00340-008-3068-5</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC2074291876</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-He213)s00340-008-3068-5-p</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield><subfield code="a">620</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UA 9001</subfield><subfield code="q">VZ</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Takahashi, A.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for extreme ultraviolet lithography light source</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2008</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">© Springer-Verlag 2008</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Abstract We describe a comparative study of the emission characteristics of debris from $ CO_{2} $ and Nd:YAG laser-produced tin plasmas for developing an extreme-ultraviolet (EUV) lithography light source. Tin (Sn) ions and droplets emitted from a Sn plasma produced by a $ CO_{2} $ laser or an Nd:YAG laser were detected using Faraday cups and quartz crystal microbalance (QCM) detectors, respectively. The droplets were also monitored by using silicon substrates as witness plates. The results showed higher ion kinetic energy and lower particle emission for the $ CO_{2} $ laser than the Nd:YAG laser for the same laser energy (50 mJ). The average ion energy was 2.2 keV for the $ CO_{2} $ laser-produced plasma (LPP), and 0.6 keV for the Nd:YAG LPP. The debris accumulation of the $ CO_{2} $ LPP detected by the QCM detectors, however, was less than one fourth of that of the Nd:YAG LPP for the same laser energy. Using ion energy data, the mirror lifetime is estimated for the $ CO_{2} $ and Nd:YAG lasers. In both cases, the upper limit of the number of shots was of the order of $ 10^{6} $.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Quartz Crystal Microbalance</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Full Width Half Maximum</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Debris Accumulation</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Quartz Crystal Microbalance Surface</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Lower Particle Emission</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Nakamura, D.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Tamaru, K.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Akiyama, T.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Okada, T.</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Applied physics. B, Lasers and optics</subfield><subfield code="d">Springer-Verlag, 1981</subfield><subfield code="g">92(2008), 1 vom: 13. Juni, Seite 73-77</subfield><subfield code="w">(DE-627)130297682</subfield><subfield code="w">(DE-600)579693-3</subfield><subfield code="w">(DE-576)015877272</subfield><subfield code="x">0946-2171</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:92</subfield><subfield code="g">year:2008</subfield><subfield code="g">number:1</subfield><subfield code="g">day:13</subfield><subfield code="g">month:06</subfield><subfield code="g">pages:73-77</subfield></datafield><datafield tag="856" ind1="4" ind2="1"><subfield code="u">https://doi.org/10.1007/s00340-008-3068-5</subfield><subfield code="z">lizenzpflichtig</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHY</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_21</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_22</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_30</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_31</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_60</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_70</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_130</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_170</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_285</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2010</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2018</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2021</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4036</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4116</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4126</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4266</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4277</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4306</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4307</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4313</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_4323</subfield></datafield><datafield tag="936" ind1="r" ind2="v"><subfield code="a">UA 9001</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">92</subfield><subfield code="j">2008</subfield><subfield code="e">1</subfield><subfield code="b">13</subfield><subfield code="c">06</subfield><subfield code="h">73-77</subfield></datafield></record></collection>
|
| score |
7.4004965 |