Variety of ZnO nanostructured materials prepared by PECVD
Abstract Zinc oxide nanostructures of different composition and morphology have been prepared by the plasma-enhanced chemical vapor deposition technique (PECVD). Highly pure elemental zinc was used as the precursor. RF (40 MHz) inductively-coupled plasma discharge was implemented for initiation of t...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Mochalov, Leonid [verfasserIn] |
|---|
| Format: |
Artikel |
|---|---|
| Sprache: |
Englisch |
| Erschienen: |
2022 |
|---|
| Schlagwörter: |
|---|
| Anmerkung: |
© The Author(s), under exclusive licence to Springer Science+Business Media, LLC, part of Springer Nature 2022. Springer Nature or its licensor holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law. |
|---|
| Übergeordnetes Werk: |
Enthalten in: Optical and quantum electronics - Springer US, 1975, 54(2022), 10 vom: 24. Aug. |
|---|---|
| Übergeordnetes Werk: |
volume:54 ; year:2022 ; number:10 ; day:24 ; month:08 |
| Links: |
|---|
| DOI / URN: |
10.1007/s11082-022-03979-z |
|---|
| Katalog-ID: |
OLC2079413074 |
|---|
| LEADER | 01000caa a22002652 4500 | ||
|---|---|---|---|
| 001 | OLC2079413074 | ||
| 003 | DE-627 | ||
| 005 | 20230506070259.0 | ||
| 007 | tu | ||
| 008 | 221220s2022 xx ||||| 00| ||eng c | ||
| 024 | 7 | |a 10.1007/s11082-022-03979-z |2 doi | |
| 035 | |a (DE-627)OLC2079413074 | ||
| 035 | |a (DE-He213)s11082-022-03979-z-p | ||
| 040 | |a DE-627 |b ger |c DE-627 |e rakwb | ||
| 041 | |a eng | ||
| 082 | 0 | 4 | |a 500 |a 620 |q VZ |
| 100 | 1 | |a Mochalov, Leonid |e verfasserin |4 aut | |
| 245 | 1 | 0 | |a Variety of ZnO nanostructured materials prepared by PECVD |
| 264 | 1 | |c 2022 | |
| 336 | |a Text |b txt |2 rdacontent | ||
| 337 | |a ohne Hilfsmittel zu benutzen |b n |2 rdamedia | ||
| 338 | |a Band |b nc |2 rdacarrier | ||
| 500 | |a © The Author(s), under exclusive licence to Springer Science+Business Media, LLC, part of Springer Nature 2022. Springer Nature or its licensor holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law. | ||
| 520 | |a Abstract Zinc oxide nanostructures of different composition and morphology have been prepared by the plasma-enhanced chemical vapor deposition technique (PECVD). Highly pure elemental zinc was used as the precursor. RF (40 MHz) inductively-coupled plasma discharge was implemented for initiation of the plasma-chemical reactions in the gas phase. Hydrogen–oxygen ($ H_{2} $–$ O_{2} $) gas composition of various ratios (1:2, 1:1, and 2:1) was employed as the plasma feed gas mixture. Hydrogen also served as the carrier gas. Optical emission spectroscopy was utilized to identify the intermediate reactive species and assume the possible mechanism of the plasma process. The effect of the power produced by the plasma discharge, as well as the heating of the zinc precursor, on the stoichiometry and structure of thin films was investigated. The obtained material properties were described by different analytical techniques. | ||
| 650 | 4 | |a Zinc oxide | |
| 650 | 4 | |a Nanostructures | |
| 650 | 4 | |a PECVD | |
| 700 | 1 | |a Logunov, Alexander |4 aut | |
| 700 | 1 | |a Prokhorov, Igor |4 aut | |
| 700 | 1 | |a Vshivtsev, Maksim |4 aut | |
| 700 | 1 | |a Kudryashov, Mikhail |4 aut | |
| 700 | 1 | |a Kudryashova, Yulia |4 aut | |
| 700 | 1 | |a Malyshev, Vladimir |4 aut | |
| 700 | 1 | |a Spivak, Yulia |0 (orcid)0000-0002-5852-999X |4 aut | |
| 700 | 1 | |a Greshnyakov, Evgeny |4 aut | |
| 700 | 1 | |a Knyazev, Alexander |4 aut | |
| 700 | 1 | |a Fukina, Diana |4 aut | |
| 700 | 1 | |a Yunin, Pavel |4 aut | |
| 700 | 1 | |a Moshnikov, Vyacheslav |4 aut | |
| 773 | 0 | 8 | |i Enthalten in |t Optical and quantum electronics |d Springer US, 1975 |g 54(2022), 10 vom: 24. Aug. |w (DE-627)129419540 |w (DE-600)189950-8 |w (DE-576)014796139 |x 0306-8919 |7 nnns |
| 773 | 1 | 8 | |g volume:54 |g year:2022 |g number:10 |g day:24 |g month:08 |
| 856 | 4 | 1 | |u https://doi.org/10.1007/s11082-022-03979-z |z lizenzpflichtig |3 Volltext |
| 912 | |a GBV_USEFLAG_A | ||
| 912 | |a SYSFLAG_A | ||
| 912 | |a GBV_OLC | ||
| 912 | |a SSG-OLC-TEC | ||
| 912 | |a SSG-OLC-PHY | ||
| 951 | |a AR | ||
| 952 | |d 54 |j 2022 |e 10 |b 24 |c 08 | ||
| author_variant |
l m lm a l al i p ip m v mv m k mk y k yk v m vm y s ys e g eg a k ak d f df p y py v m vm |
|---|---|
| matchkey_str |
article:03068919:2022----::aitozoaotutrdaeilp |
| hierarchy_sort_str |
2022 |
| publishDate |
2022 |
| allfields |
10.1007/s11082-022-03979-z doi (DE-627)OLC2079413074 (DE-He213)s11082-022-03979-z-p DE-627 ger DE-627 rakwb eng 500 620 VZ Mochalov, Leonid verfasserin aut Variety of ZnO nanostructured materials prepared by PECVD 2022 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © The Author(s), under exclusive licence to Springer Science+Business Media, LLC, part of Springer Nature 2022. Springer Nature or its licensor holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law. Abstract Zinc oxide nanostructures of different composition and morphology have been prepared by the plasma-enhanced chemical vapor deposition technique (PECVD). Highly pure elemental zinc was used as the precursor. RF (40 MHz) inductively-coupled plasma discharge was implemented for initiation of the plasma-chemical reactions in the gas phase. Hydrogen–oxygen ($ H_{2} $–$ O_{2} $) gas composition of various ratios (1:2, 1:1, and 2:1) was employed as the plasma feed gas mixture. Hydrogen also served as the carrier gas. Optical emission spectroscopy was utilized to identify the intermediate reactive species and assume the possible mechanism of the plasma process. The effect of the power produced by the plasma discharge, as well as the heating of the zinc precursor, on the stoichiometry and structure of thin films was investigated. The obtained material properties were described by different analytical techniques. Zinc oxide Nanostructures PECVD Logunov, Alexander aut Prokhorov, Igor aut Vshivtsev, Maksim aut Kudryashov, Mikhail aut Kudryashova, Yulia aut Malyshev, Vladimir aut Spivak, Yulia (orcid)0000-0002-5852-999X aut Greshnyakov, Evgeny aut Knyazev, Alexander aut Fukina, Diana aut Yunin, Pavel aut Moshnikov, Vyacheslav aut Enthalten in Optical and quantum electronics Springer US, 1975 54(2022), 10 vom: 24. Aug. (DE-627)129419540 (DE-600)189950-8 (DE-576)014796139 0306-8919 nnns volume:54 year:2022 number:10 day:24 month:08 https://doi.org/10.1007/s11082-022-03979-z lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY AR 54 2022 10 24 08 |
| spelling |
10.1007/s11082-022-03979-z doi (DE-627)OLC2079413074 (DE-He213)s11082-022-03979-z-p DE-627 ger DE-627 rakwb eng 500 620 VZ Mochalov, Leonid verfasserin aut Variety of ZnO nanostructured materials prepared by PECVD 2022 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © The Author(s), under exclusive licence to Springer Science+Business Media, LLC, part of Springer Nature 2022. Springer Nature or its licensor holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law. Abstract Zinc oxide nanostructures of different composition and morphology have been prepared by the plasma-enhanced chemical vapor deposition technique (PECVD). Highly pure elemental zinc was used as the precursor. RF (40 MHz) inductively-coupled plasma discharge was implemented for initiation of the plasma-chemical reactions in the gas phase. Hydrogen–oxygen ($ H_{2} $–$ O_{2} $) gas composition of various ratios (1:2, 1:1, and 2:1) was employed as the plasma feed gas mixture. Hydrogen also served as the carrier gas. Optical emission spectroscopy was utilized to identify the intermediate reactive species and assume the possible mechanism of the plasma process. The effect of the power produced by the plasma discharge, as well as the heating of the zinc precursor, on the stoichiometry and structure of thin films was investigated. The obtained material properties were described by different analytical techniques. Zinc oxide Nanostructures PECVD Logunov, Alexander aut Prokhorov, Igor aut Vshivtsev, Maksim aut Kudryashov, Mikhail aut Kudryashova, Yulia aut Malyshev, Vladimir aut Spivak, Yulia (orcid)0000-0002-5852-999X aut Greshnyakov, Evgeny aut Knyazev, Alexander aut Fukina, Diana aut Yunin, Pavel aut Moshnikov, Vyacheslav aut Enthalten in Optical and quantum electronics Springer US, 1975 54(2022), 10 vom: 24. Aug. (DE-627)129419540 (DE-600)189950-8 (DE-576)014796139 0306-8919 nnns volume:54 year:2022 number:10 day:24 month:08 https://doi.org/10.1007/s11082-022-03979-z lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY AR 54 2022 10 24 08 |
| allfields_unstemmed |
10.1007/s11082-022-03979-z doi (DE-627)OLC2079413074 (DE-He213)s11082-022-03979-z-p DE-627 ger DE-627 rakwb eng 500 620 VZ Mochalov, Leonid verfasserin aut Variety of ZnO nanostructured materials prepared by PECVD 2022 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © The Author(s), under exclusive licence to Springer Science+Business Media, LLC, part of Springer Nature 2022. Springer Nature or its licensor holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law. Abstract Zinc oxide nanostructures of different composition and morphology have been prepared by the plasma-enhanced chemical vapor deposition technique (PECVD). Highly pure elemental zinc was used as the precursor. RF (40 MHz) inductively-coupled plasma discharge was implemented for initiation of the plasma-chemical reactions in the gas phase. Hydrogen–oxygen ($ H_{2} $–$ O_{2} $) gas composition of various ratios (1:2, 1:1, and 2:1) was employed as the plasma feed gas mixture. Hydrogen also served as the carrier gas. Optical emission spectroscopy was utilized to identify the intermediate reactive species and assume the possible mechanism of the plasma process. The effect of the power produced by the plasma discharge, as well as the heating of the zinc precursor, on the stoichiometry and structure of thin films was investigated. The obtained material properties were described by different analytical techniques. Zinc oxide Nanostructures PECVD Logunov, Alexander aut Prokhorov, Igor aut Vshivtsev, Maksim aut Kudryashov, Mikhail aut Kudryashova, Yulia aut Malyshev, Vladimir aut Spivak, Yulia (orcid)0000-0002-5852-999X aut Greshnyakov, Evgeny aut Knyazev, Alexander aut Fukina, Diana aut Yunin, Pavel aut Moshnikov, Vyacheslav aut Enthalten in Optical and quantum electronics Springer US, 1975 54(2022), 10 vom: 24. Aug. (DE-627)129419540 (DE-600)189950-8 (DE-576)014796139 0306-8919 nnns volume:54 year:2022 number:10 day:24 month:08 https://doi.org/10.1007/s11082-022-03979-z lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY AR 54 2022 10 24 08 |
| allfieldsGer |
10.1007/s11082-022-03979-z doi (DE-627)OLC2079413074 (DE-He213)s11082-022-03979-z-p DE-627 ger DE-627 rakwb eng 500 620 VZ Mochalov, Leonid verfasserin aut Variety of ZnO nanostructured materials prepared by PECVD 2022 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © The Author(s), under exclusive licence to Springer Science+Business Media, LLC, part of Springer Nature 2022. Springer Nature or its licensor holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law. Abstract Zinc oxide nanostructures of different composition and morphology have been prepared by the plasma-enhanced chemical vapor deposition technique (PECVD). Highly pure elemental zinc was used as the precursor. RF (40 MHz) inductively-coupled plasma discharge was implemented for initiation of the plasma-chemical reactions in the gas phase. Hydrogen–oxygen ($ H_{2} $–$ O_{2} $) gas composition of various ratios (1:2, 1:1, and 2:1) was employed as the plasma feed gas mixture. Hydrogen also served as the carrier gas. Optical emission spectroscopy was utilized to identify the intermediate reactive species and assume the possible mechanism of the plasma process. The effect of the power produced by the plasma discharge, as well as the heating of the zinc precursor, on the stoichiometry and structure of thin films was investigated. The obtained material properties were described by different analytical techniques. Zinc oxide Nanostructures PECVD Logunov, Alexander aut Prokhorov, Igor aut Vshivtsev, Maksim aut Kudryashov, Mikhail aut Kudryashova, Yulia aut Malyshev, Vladimir aut Spivak, Yulia (orcid)0000-0002-5852-999X aut Greshnyakov, Evgeny aut Knyazev, Alexander aut Fukina, Diana aut Yunin, Pavel aut Moshnikov, Vyacheslav aut Enthalten in Optical and quantum electronics Springer US, 1975 54(2022), 10 vom: 24. Aug. (DE-627)129419540 (DE-600)189950-8 (DE-576)014796139 0306-8919 nnns volume:54 year:2022 number:10 day:24 month:08 https://doi.org/10.1007/s11082-022-03979-z lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY AR 54 2022 10 24 08 |
| allfieldsSound |
10.1007/s11082-022-03979-z doi (DE-627)OLC2079413074 (DE-He213)s11082-022-03979-z-p DE-627 ger DE-627 rakwb eng 500 620 VZ Mochalov, Leonid verfasserin aut Variety of ZnO nanostructured materials prepared by PECVD 2022 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © The Author(s), under exclusive licence to Springer Science+Business Media, LLC, part of Springer Nature 2022. Springer Nature or its licensor holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law. Abstract Zinc oxide nanostructures of different composition and morphology have been prepared by the plasma-enhanced chemical vapor deposition technique (PECVD). Highly pure elemental zinc was used as the precursor. RF (40 MHz) inductively-coupled plasma discharge was implemented for initiation of the plasma-chemical reactions in the gas phase. Hydrogen–oxygen ($ H_{2} $–$ O_{2} $) gas composition of various ratios (1:2, 1:1, and 2:1) was employed as the plasma feed gas mixture. Hydrogen also served as the carrier gas. Optical emission spectroscopy was utilized to identify the intermediate reactive species and assume the possible mechanism of the plasma process. The effect of the power produced by the plasma discharge, as well as the heating of the zinc precursor, on the stoichiometry and structure of thin films was investigated. The obtained material properties were described by different analytical techniques. Zinc oxide Nanostructures PECVD Logunov, Alexander aut Prokhorov, Igor aut Vshivtsev, Maksim aut Kudryashov, Mikhail aut Kudryashova, Yulia aut Malyshev, Vladimir aut Spivak, Yulia (orcid)0000-0002-5852-999X aut Greshnyakov, Evgeny aut Knyazev, Alexander aut Fukina, Diana aut Yunin, Pavel aut Moshnikov, Vyacheslav aut Enthalten in Optical and quantum electronics Springer US, 1975 54(2022), 10 vom: 24. Aug. (DE-627)129419540 (DE-600)189950-8 (DE-576)014796139 0306-8919 nnns volume:54 year:2022 number:10 day:24 month:08 https://doi.org/10.1007/s11082-022-03979-z lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY AR 54 2022 10 24 08 |
| language |
English |
| source |
Enthalten in Optical and quantum electronics 54(2022), 10 vom: 24. Aug. volume:54 year:2022 number:10 day:24 month:08 |
| sourceStr |
Enthalten in Optical and quantum electronics 54(2022), 10 vom: 24. Aug. volume:54 year:2022 number:10 day:24 month:08 |
| format_phy_str_mv |
Article |
| institution |
findex.gbv.de |
| topic_facet |
Zinc oxide Nanostructures PECVD |
| dewey-raw |
500 |
| isfreeaccess_bool |
false |
| container_title |
Optical and quantum electronics |
| authorswithroles_txt_mv |
Mochalov, Leonid @@aut@@ Logunov, Alexander @@aut@@ Prokhorov, Igor @@aut@@ Vshivtsev, Maksim @@aut@@ Kudryashov, Mikhail @@aut@@ Kudryashova, Yulia @@aut@@ Malyshev, Vladimir @@aut@@ Spivak, Yulia @@aut@@ Greshnyakov, Evgeny @@aut@@ Knyazev, Alexander @@aut@@ Fukina, Diana @@aut@@ Yunin, Pavel @@aut@@ Moshnikov, Vyacheslav @@aut@@ |
| publishDateDaySort_date |
2022-08-24T00:00:00Z |
| hierarchy_top_id |
129419540 |
| dewey-sort |
3500 |
| id |
OLC2079413074 |
| language_de |
englisch |
| fullrecord |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC2079413074</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230506070259.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">221220s2022 xx ||||| 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/s11082-022-03979-z</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC2079413074</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-He213)s11082-022-03979-z-p</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">500</subfield><subfield code="a">620</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Mochalov, Leonid</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Variety of ZnO nanostructured materials prepared by PECVD</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2022</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">© The Author(s), under exclusive licence to Springer Science+Business Media, LLC, part of Springer Nature 2022. Springer Nature or its licensor holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Abstract Zinc oxide nanostructures of different composition and morphology have been prepared by the plasma-enhanced chemical vapor deposition technique (PECVD). Highly pure elemental zinc was used as the precursor. RF (40 MHz) inductively-coupled plasma discharge was implemented for initiation of the plasma-chemical reactions in the gas phase. Hydrogen–oxygen ($ H_{2} $–$ O_{2} $) gas composition of various ratios (1:2, 1:1, and 2:1) was employed as the plasma feed gas mixture. Hydrogen also served as the carrier gas. Optical emission spectroscopy was utilized to identify the intermediate reactive species and assume the possible mechanism of the plasma process. The effect of the power produced by the plasma discharge, as well as the heating of the zinc precursor, on the stoichiometry and structure of thin films was investigated. The obtained material properties were described by different analytical techniques.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Zinc oxide</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Nanostructures</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">PECVD</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Logunov, Alexander</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Prokhorov, Igor</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Vshivtsev, Maksim</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kudryashov, Mikhail</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kudryashova, Yulia</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Malyshev, Vladimir</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Spivak, Yulia</subfield><subfield code="0">(orcid)0000-0002-5852-999X</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Greshnyakov, Evgeny</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Knyazev, Alexander</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Fukina, Diana</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Yunin, Pavel</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Moshnikov, Vyacheslav</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Optical and quantum electronics</subfield><subfield code="d">Springer US, 1975</subfield><subfield code="g">54(2022), 10 vom: 24. Aug.</subfield><subfield code="w">(DE-627)129419540</subfield><subfield code="w">(DE-600)189950-8</subfield><subfield code="w">(DE-576)014796139</subfield><subfield code="x">0306-8919</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:54</subfield><subfield code="g">year:2022</subfield><subfield code="g">number:10</subfield><subfield code="g">day:24</subfield><subfield code="g">month:08</subfield></datafield><datafield tag="856" ind1="4" ind2="1"><subfield code="u">https://doi.org/10.1007/s11082-022-03979-z</subfield><subfield code="z">lizenzpflichtig</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-TEC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHY</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">54</subfield><subfield code="j">2022</subfield><subfield code="e">10</subfield><subfield code="b">24</subfield><subfield code="c">08</subfield></datafield></record></collection>
|
| author |
Mochalov, Leonid |
| spellingShingle |
Mochalov, Leonid ddc 500 misc Zinc oxide misc Nanostructures misc PECVD Variety of ZnO nanostructured materials prepared by PECVD |
| authorStr |
Mochalov, Leonid |
| ppnlink_with_tag_str_mv |
@@773@@(DE-627)129419540 |
| format |
Article |
| dewey-ones |
500 - Natural sciences & mathematics 620 - Engineering & allied operations |
| delete_txt_mv |
keep |
| author_role |
aut aut aut aut aut aut aut aut aut aut aut aut aut |
| collection |
OLC |
| remote_str |
false |
| illustrated |
Not Illustrated |
| issn |
0306-8919 |
| topic_title |
500 620 VZ Variety of ZnO nanostructured materials prepared by PECVD Zinc oxide Nanostructures PECVD |
| topic |
ddc 500 misc Zinc oxide misc Nanostructures misc PECVD |
| topic_unstemmed |
ddc 500 misc Zinc oxide misc Nanostructures misc PECVD |
| topic_browse |
ddc 500 misc Zinc oxide misc Nanostructures misc PECVD |
| format_facet |
Aufsätze Gedruckte Aufsätze |
| format_main_str_mv |
Text Zeitschrift/Artikel |
| carriertype_str_mv |
nc |
| hierarchy_parent_title |
Optical and quantum electronics |
| hierarchy_parent_id |
129419540 |
| dewey-tens |
500 - Science 620 - Engineering |
| hierarchy_top_title |
Optical and quantum electronics |
| isfreeaccess_txt |
false |
| familylinks_str_mv |
(DE-627)129419540 (DE-600)189950-8 (DE-576)014796139 |
| title |
Variety of ZnO nanostructured materials prepared by PECVD |
| ctrlnum |
(DE-627)OLC2079413074 (DE-He213)s11082-022-03979-z-p |
| title_full |
Variety of ZnO nanostructured materials prepared by PECVD |
| author_sort |
Mochalov, Leonid |
| journal |
Optical and quantum electronics |
| journalStr |
Optical and quantum electronics |
| lang_code |
eng |
| isOA_bool |
false |
| dewey-hundreds |
500 - Science 600 - Technology |
| recordtype |
marc |
| publishDateSort |
2022 |
| contenttype_str_mv |
txt |
| author_browse |
Mochalov, Leonid Logunov, Alexander Prokhorov, Igor Vshivtsev, Maksim Kudryashov, Mikhail Kudryashova, Yulia Malyshev, Vladimir Spivak, Yulia Greshnyakov, Evgeny Knyazev, Alexander Fukina, Diana Yunin, Pavel Moshnikov, Vyacheslav |
| container_volume |
54 |
| class |
500 620 VZ |
| format_se |
Aufsätze |
| author-letter |
Mochalov, Leonid |
| doi_str_mv |
10.1007/s11082-022-03979-z |
| normlink |
(ORCID)0000-0002-5852-999X |
| normlink_prefix_str_mv |
(orcid)0000-0002-5852-999X |
| dewey-full |
500 620 |
| title_sort |
variety of zno nanostructured materials prepared by pecvd |
| title_auth |
Variety of ZnO nanostructured materials prepared by PECVD |
| abstract |
Abstract Zinc oxide nanostructures of different composition and morphology have been prepared by the plasma-enhanced chemical vapor deposition technique (PECVD). Highly pure elemental zinc was used as the precursor. RF (40 MHz) inductively-coupled plasma discharge was implemented for initiation of the plasma-chemical reactions in the gas phase. Hydrogen–oxygen ($ H_{2} $–$ O_{2} $) gas composition of various ratios (1:2, 1:1, and 2:1) was employed as the plasma feed gas mixture. Hydrogen also served as the carrier gas. Optical emission spectroscopy was utilized to identify the intermediate reactive species and assume the possible mechanism of the plasma process. The effect of the power produced by the plasma discharge, as well as the heating of the zinc precursor, on the stoichiometry and structure of thin films was investigated. The obtained material properties were described by different analytical techniques. © The Author(s), under exclusive licence to Springer Science+Business Media, LLC, part of Springer Nature 2022. Springer Nature or its licensor holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law. |
| abstractGer |
Abstract Zinc oxide nanostructures of different composition and morphology have been prepared by the plasma-enhanced chemical vapor deposition technique (PECVD). Highly pure elemental zinc was used as the precursor. RF (40 MHz) inductively-coupled plasma discharge was implemented for initiation of the plasma-chemical reactions in the gas phase. Hydrogen–oxygen ($ H_{2} $–$ O_{2} $) gas composition of various ratios (1:2, 1:1, and 2:1) was employed as the plasma feed gas mixture. Hydrogen also served as the carrier gas. Optical emission spectroscopy was utilized to identify the intermediate reactive species and assume the possible mechanism of the plasma process. The effect of the power produced by the plasma discharge, as well as the heating of the zinc precursor, on the stoichiometry and structure of thin films was investigated. The obtained material properties were described by different analytical techniques. © The Author(s), under exclusive licence to Springer Science+Business Media, LLC, part of Springer Nature 2022. Springer Nature or its licensor holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law. |
| abstract_unstemmed |
Abstract Zinc oxide nanostructures of different composition and morphology have been prepared by the plasma-enhanced chemical vapor deposition technique (PECVD). Highly pure elemental zinc was used as the precursor. RF (40 MHz) inductively-coupled plasma discharge was implemented for initiation of the plasma-chemical reactions in the gas phase. Hydrogen–oxygen ($ H_{2} $–$ O_{2} $) gas composition of various ratios (1:2, 1:1, and 2:1) was employed as the plasma feed gas mixture. Hydrogen also served as the carrier gas. Optical emission spectroscopy was utilized to identify the intermediate reactive species and assume the possible mechanism of the plasma process. The effect of the power produced by the plasma discharge, as well as the heating of the zinc precursor, on the stoichiometry and structure of thin films was investigated. The obtained material properties were described by different analytical techniques. © The Author(s), under exclusive licence to Springer Science+Business Media, LLC, part of Springer Nature 2022. Springer Nature or its licensor holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law. |
| collection_details |
GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-PHY |
| container_issue |
10 |
| title_short |
Variety of ZnO nanostructured materials prepared by PECVD |
| url |
https://doi.org/10.1007/s11082-022-03979-z |
| remote_bool |
false |
| author2 |
Logunov, Alexander Prokhorov, Igor Vshivtsev, Maksim Kudryashov, Mikhail Kudryashova, Yulia Malyshev, Vladimir Spivak, Yulia Greshnyakov, Evgeny Knyazev, Alexander Fukina, Diana Yunin, Pavel Moshnikov, Vyacheslav |
| author2Str |
Logunov, Alexander Prokhorov, Igor Vshivtsev, Maksim Kudryashov, Mikhail Kudryashova, Yulia Malyshev, Vladimir Spivak, Yulia Greshnyakov, Evgeny Knyazev, Alexander Fukina, Diana Yunin, Pavel Moshnikov, Vyacheslav |
| ppnlink |
129419540 |
| mediatype_str_mv |
n |
| isOA_txt |
false |
| hochschulschrift_bool |
false |
| doi_str |
10.1007/s11082-022-03979-z |
| up_date |
2024-07-04T00:50:33.250Z |
| _version_ |
1803607587690643456 |
| fullrecord_marcxml |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">OLC2079413074</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230506070259.0</controlfield><controlfield tag="007">tu</controlfield><controlfield tag="008">221220s2022 xx ||||| 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/s11082-022-03979-z</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)OLC2079413074</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-He213)s11082-022-03979-z-p</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">500</subfield><subfield code="a">620</subfield><subfield code="q">VZ</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Mochalov, Leonid</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Variety of ZnO nanostructured materials prepared by PECVD</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2022</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">ohne Hilfsmittel zu benutzen</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Band</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">© The Author(s), under exclusive licence to Springer Science+Business Media, LLC, part of Springer Nature 2022. Springer Nature or its licensor holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Abstract Zinc oxide nanostructures of different composition and morphology have been prepared by the plasma-enhanced chemical vapor deposition technique (PECVD). Highly pure elemental zinc was used as the precursor. RF (40 MHz) inductively-coupled plasma discharge was implemented for initiation of the plasma-chemical reactions in the gas phase. Hydrogen–oxygen ($ H_{2} $–$ O_{2} $) gas composition of various ratios (1:2, 1:1, and 2:1) was employed as the plasma feed gas mixture. Hydrogen also served as the carrier gas. Optical emission spectroscopy was utilized to identify the intermediate reactive species and assume the possible mechanism of the plasma process. The effect of the power produced by the plasma discharge, as well as the heating of the zinc precursor, on the stoichiometry and structure of thin films was investigated. The obtained material properties were described by different analytical techniques.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Zinc oxide</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Nanostructures</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">PECVD</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Logunov, Alexander</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Prokhorov, Igor</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Vshivtsev, Maksim</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kudryashov, Mikhail</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kudryashova, Yulia</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Malyshev, Vladimir</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Spivak, Yulia</subfield><subfield code="0">(orcid)0000-0002-5852-999X</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Greshnyakov, Evgeny</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Knyazev, Alexander</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Fukina, Diana</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Yunin, Pavel</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Moshnikov, Vyacheslav</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Optical and quantum electronics</subfield><subfield code="d">Springer US, 1975</subfield><subfield code="g">54(2022), 10 vom: 24. Aug.</subfield><subfield code="w">(DE-627)129419540</subfield><subfield code="w">(DE-600)189950-8</subfield><subfield code="w">(DE-576)014796139</subfield><subfield code="x">0306-8919</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:54</subfield><subfield code="g">year:2022</subfield><subfield code="g">number:10</subfield><subfield code="g">day:24</subfield><subfield code="g">month:08</subfield></datafield><datafield tag="856" ind1="4" ind2="1"><subfield code="u">https://doi.org/10.1007/s11082-022-03979-z</subfield><subfield code="z">lizenzpflichtig</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_OLC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-TEC</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SSG-OLC-PHY</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">AR</subfield></datafield><datafield tag="952" ind1=" " ind2=" "><subfield code="d">54</subfield><subfield code="j">2022</subfield><subfield code="e">10</subfield><subfield code="b">24</subfield><subfield code="c">08</subfield></datafield></record></collection>
|
| score |
7.400571 |