Investigation of Vacuum Annealing Temperature Effects on the Microstructure Properties of DC-PECVD Grown Diamond Nanoparticles
Abstract In this study, nanodiamonds (NDs) coatings were grown on gold-coated silicon substrates by a DC-plasma enhanced chemical vapor (DC-PECVD) deposition technique using $ CH_{4} $ plus $ H_{2} $ as the feedstock. The effect of annealing temperature under vacuum environment on the characteristic...
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| Autor*in: |
Asgary, Somayeh [verfasserIn] |
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| Format: |
Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2021 |
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| Schlagwörter: |
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| Anmerkung: |
© The Author(s), under exclusive licence to Springer Science+Business Media, LLC part of Springer Nature 2021 |
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| Übergeordnetes Werk: |
Enthalten in: Journal of inorganic and organometallic polymers and materials - Springer US, 1991, 31(2021), 4 vom: 01. Jan., Seite 1704-1712 |
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| Übergeordnetes Werk: |
volume:31 ; year:2021 ; number:4 ; day:01 ; month:01 ; pages:1704-1712 |
| Links: |
|---|
| DOI / URN: |
10.1007/s10904-020-01836-8 |
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OLC2124425099 |
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| 520 | |a Abstract In this study, nanodiamonds (NDs) coatings were grown on gold-coated silicon substrates by a DC-plasma enhanced chemical vapor (DC-PECVD) deposition technique using $ CH_{4} $ plus $ H_{2} $ as the feedstock. The effect of annealing temperature under vacuum environment on the characteristics of the resulting coatings were investigated experimentally by means of Raman spectroscopy, Atomic Force Microscopy (AFM), X-ray diffraction pattern (XRD) and field emission scanning electron microscopy (FE-SEM). Results show that by adjusting annealing temperature up to 200 °C, the internal compressive stress, the amount of aromatic ring and the size of the $ sp^{2} $-bonded carbon decreases in NDs coatings. It has been found that by further increasing annealing temperature up to 300 °C, the degree of graphitization of NDs coatings is increased and graphitic clusters become larger in grain boundaries. In addition, the high concentration and homogenous distribution of particles sizes of the diamond nanocrystals were obtained on the surfaces of the annealed sample at 100 °C. Our experimental results can be beneficial guidance to the production of NDs coatings with the desired attributes. | ||
| 650 | 4 | |a Nanodiamonds (NDs) | |
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| 700 | 1 | |a Ramezani, Amir Hoshang |4 aut | |
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10.1007/s10904-020-01836-8 doi (DE-627)OLC2124425099 (DE-He213)s10904-020-01836-8-p DE-627 ger DE-627 rakwb eng 660 VZ Asgary, Somayeh verfasserin aut Investigation of Vacuum Annealing Temperature Effects on the Microstructure Properties of DC-PECVD Grown Diamond Nanoparticles 2021 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © The Author(s), under exclusive licence to Springer Science+Business Media, LLC part of Springer Nature 2021 Abstract In this study, nanodiamonds (NDs) coatings were grown on gold-coated silicon substrates by a DC-plasma enhanced chemical vapor (DC-PECVD) deposition technique using $ CH_{4} $ plus $ H_{2} $ as the feedstock. The effect of annealing temperature under vacuum environment on the characteristics of the resulting coatings were investigated experimentally by means of Raman spectroscopy, Atomic Force Microscopy (AFM), X-ray diffraction pattern (XRD) and field emission scanning electron microscopy (FE-SEM). Results show that by adjusting annealing temperature up to 200 °C, the internal compressive stress, the amount of aromatic ring and the size of the $ sp^{2} $-bonded carbon decreases in NDs coatings. It has been found that by further increasing annealing temperature up to 300 °C, the degree of graphitization of NDs coatings is increased and graphitic clusters become larger in grain boundaries. In addition, the high concentration and homogenous distribution of particles sizes of the diamond nanocrystals were obtained on the surfaces of the annealed sample at 100 °C. Our experimental results can be beneficial guidance to the production of NDs coatings with the desired attributes. Nanodiamonds (NDs) Plasma enhanced chemical vapor deposition (PECVD) Graphite Annealing Vaghri, Elnaz aut Ramezani, Amir Hoshang aut Enthalten in Journal of inorganic and organometallic polymers and materials Springer US, 1991 31(2021), 4 vom: 01. Jan., Seite 1704-1712 (DE-627)130968625 (DE-600)1069621-0 (DE-576)029153867 1574-1443 nnns volume:31 year:2021 number:4 day:01 month:01 pages:1704-1712 https://doi.org/10.1007/s10904-020-01836-8 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-CHE AR 31 2021 4 01 01 1704-1712 |
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10.1007/s10904-020-01836-8 doi (DE-627)OLC2124425099 (DE-He213)s10904-020-01836-8-p DE-627 ger DE-627 rakwb eng 660 VZ Asgary, Somayeh verfasserin aut Investigation of Vacuum Annealing Temperature Effects on the Microstructure Properties of DC-PECVD Grown Diamond Nanoparticles 2021 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © The Author(s), under exclusive licence to Springer Science+Business Media, LLC part of Springer Nature 2021 Abstract In this study, nanodiamonds (NDs) coatings were grown on gold-coated silicon substrates by a DC-plasma enhanced chemical vapor (DC-PECVD) deposition technique using $ CH_{4} $ plus $ H_{2} $ as the feedstock. The effect of annealing temperature under vacuum environment on the characteristics of the resulting coatings were investigated experimentally by means of Raman spectroscopy, Atomic Force Microscopy (AFM), X-ray diffraction pattern (XRD) and field emission scanning electron microscopy (FE-SEM). Results show that by adjusting annealing temperature up to 200 °C, the internal compressive stress, the amount of aromatic ring and the size of the $ sp^{2} $-bonded carbon decreases in NDs coatings. It has been found that by further increasing annealing temperature up to 300 °C, the degree of graphitization of NDs coatings is increased and graphitic clusters become larger in grain boundaries. In addition, the high concentration and homogenous distribution of particles sizes of the diamond nanocrystals were obtained on the surfaces of the annealed sample at 100 °C. Our experimental results can be beneficial guidance to the production of NDs coatings with the desired attributes. Nanodiamonds (NDs) Plasma enhanced chemical vapor deposition (PECVD) Graphite Annealing Vaghri, Elnaz aut Ramezani, Amir Hoshang aut Enthalten in Journal of inorganic and organometallic polymers and materials Springer US, 1991 31(2021), 4 vom: 01. Jan., Seite 1704-1712 (DE-627)130968625 (DE-600)1069621-0 (DE-576)029153867 1574-1443 nnns volume:31 year:2021 number:4 day:01 month:01 pages:1704-1712 https://doi.org/10.1007/s10904-020-01836-8 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-CHE AR 31 2021 4 01 01 1704-1712 |
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10.1007/s10904-020-01836-8 doi (DE-627)OLC2124425099 (DE-He213)s10904-020-01836-8-p DE-627 ger DE-627 rakwb eng 660 VZ Asgary, Somayeh verfasserin aut Investigation of Vacuum Annealing Temperature Effects on the Microstructure Properties of DC-PECVD Grown Diamond Nanoparticles 2021 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © The Author(s), under exclusive licence to Springer Science+Business Media, LLC part of Springer Nature 2021 Abstract In this study, nanodiamonds (NDs) coatings were grown on gold-coated silicon substrates by a DC-plasma enhanced chemical vapor (DC-PECVD) deposition technique using $ CH_{4} $ plus $ H_{2} $ as the feedstock. The effect of annealing temperature under vacuum environment on the characteristics of the resulting coatings were investigated experimentally by means of Raman spectroscopy, Atomic Force Microscopy (AFM), X-ray diffraction pattern (XRD) and field emission scanning electron microscopy (FE-SEM). Results show that by adjusting annealing temperature up to 200 °C, the internal compressive stress, the amount of aromatic ring and the size of the $ sp^{2} $-bonded carbon decreases in NDs coatings. It has been found that by further increasing annealing temperature up to 300 °C, the degree of graphitization of NDs coatings is increased and graphitic clusters become larger in grain boundaries. In addition, the high concentration and homogenous distribution of particles sizes of the diamond nanocrystals were obtained on the surfaces of the annealed sample at 100 °C. Our experimental results can be beneficial guidance to the production of NDs coatings with the desired attributes. Nanodiamonds (NDs) Plasma enhanced chemical vapor deposition (PECVD) Graphite Annealing Vaghri, Elnaz aut Ramezani, Amir Hoshang aut Enthalten in Journal of inorganic and organometallic polymers and materials Springer US, 1991 31(2021), 4 vom: 01. Jan., Seite 1704-1712 (DE-627)130968625 (DE-600)1069621-0 (DE-576)029153867 1574-1443 nnns volume:31 year:2021 number:4 day:01 month:01 pages:1704-1712 https://doi.org/10.1007/s10904-020-01836-8 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-CHE AR 31 2021 4 01 01 1704-1712 |
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10.1007/s10904-020-01836-8 doi (DE-627)OLC2124425099 (DE-He213)s10904-020-01836-8-p DE-627 ger DE-627 rakwb eng 660 VZ Asgary, Somayeh verfasserin aut Investigation of Vacuum Annealing Temperature Effects on the Microstructure Properties of DC-PECVD Grown Diamond Nanoparticles 2021 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © The Author(s), under exclusive licence to Springer Science+Business Media, LLC part of Springer Nature 2021 Abstract In this study, nanodiamonds (NDs) coatings were grown on gold-coated silicon substrates by a DC-plasma enhanced chemical vapor (DC-PECVD) deposition technique using $ CH_{4} $ plus $ H_{2} $ as the feedstock. The effect of annealing temperature under vacuum environment on the characteristics of the resulting coatings were investigated experimentally by means of Raman spectroscopy, Atomic Force Microscopy (AFM), X-ray diffraction pattern (XRD) and field emission scanning electron microscopy (FE-SEM). Results show that by adjusting annealing temperature up to 200 °C, the internal compressive stress, the amount of aromatic ring and the size of the $ sp^{2} $-bonded carbon decreases in NDs coatings. It has been found that by further increasing annealing temperature up to 300 °C, the degree of graphitization of NDs coatings is increased and graphitic clusters become larger in grain boundaries. In addition, the high concentration and homogenous distribution of particles sizes of the diamond nanocrystals were obtained on the surfaces of the annealed sample at 100 °C. Our experimental results can be beneficial guidance to the production of NDs coatings with the desired attributes. Nanodiamonds (NDs) Plasma enhanced chemical vapor deposition (PECVD) Graphite Annealing Vaghri, Elnaz aut Ramezani, Amir Hoshang aut Enthalten in Journal of inorganic and organometallic polymers and materials Springer US, 1991 31(2021), 4 vom: 01. Jan., Seite 1704-1712 (DE-627)130968625 (DE-600)1069621-0 (DE-576)029153867 1574-1443 nnns volume:31 year:2021 number:4 day:01 month:01 pages:1704-1712 https://doi.org/10.1007/s10904-020-01836-8 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-CHE AR 31 2021 4 01 01 1704-1712 |
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10.1007/s10904-020-01836-8 doi (DE-627)OLC2124425099 (DE-He213)s10904-020-01836-8-p DE-627 ger DE-627 rakwb eng 660 VZ Asgary, Somayeh verfasserin aut Investigation of Vacuum Annealing Temperature Effects on the Microstructure Properties of DC-PECVD Grown Diamond Nanoparticles 2021 Text txt rdacontent ohne Hilfsmittel zu benutzen n rdamedia Band nc rdacarrier © The Author(s), under exclusive licence to Springer Science+Business Media, LLC part of Springer Nature 2021 Abstract In this study, nanodiamonds (NDs) coatings were grown on gold-coated silicon substrates by a DC-plasma enhanced chemical vapor (DC-PECVD) deposition technique using $ CH_{4} $ plus $ H_{2} $ as the feedstock. The effect of annealing temperature under vacuum environment on the characteristics of the resulting coatings were investigated experimentally by means of Raman spectroscopy, Atomic Force Microscopy (AFM), X-ray diffraction pattern (XRD) and field emission scanning electron microscopy (FE-SEM). Results show that by adjusting annealing temperature up to 200 °C, the internal compressive stress, the amount of aromatic ring and the size of the $ sp^{2} $-bonded carbon decreases in NDs coatings. It has been found that by further increasing annealing temperature up to 300 °C, the degree of graphitization of NDs coatings is increased and graphitic clusters become larger in grain boundaries. In addition, the high concentration and homogenous distribution of particles sizes of the diamond nanocrystals were obtained on the surfaces of the annealed sample at 100 °C. Our experimental results can be beneficial guidance to the production of NDs coatings with the desired attributes. Nanodiamonds (NDs) Plasma enhanced chemical vapor deposition (PECVD) Graphite Annealing Vaghri, Elnaz aut Ramezani, Amir Hoshang aut Enthalten in Journal of inorganic and organometallic polymers and materials Springer US, 1991 31(2021), 4 vom: 01. Jan., Seite 1704-1712 (DE-627)130968625 (DE-600)1069621-0 (DE-576)029153867 1574-1443 nnns volume:31 year:2021 number:4 day:01 month:01 pages:1704-1712 https://doi.org/10.1007/s10904-020-01836-8 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_OLC SSG-OLC-TEC SSG-OLC-CHE AR 31 2021 4 01 01 1704-1712 |
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Investigation of Vacuum Annealing Temperature Effects on the Microstructure Properties of DC-PECVD Grown Diamond Nanoparticles |
| abstract |
Abstract In this study, nanodiamonds (NDs) coatings were grown on gold-coated silicon substrates by a DC-plasma enhanced chemical vapor (DC-PECVD) deposition technique using $ CH_{4} $ plus $ H_{2} $ as the feedstock. The effect of annealing temperature under vacuum environment on the characteristics of the resulting coatings were investigated experimentally by means of Raman spectroscopy, Atomic Force Microscopy (AFM), X-ray diffraction pattern (XRD) and field emission scanning electron microscopy (FE-SEM). Results show that by adjusting annealing temperature up to 200 °C, the internal compressive stress, the amount of aromatic ring and the size of the $ sp^{2} $-bonded carbon decreases in NDs coatings. It has been found that by further increasing annealing temperature up to 300 °C, the degree of graphitization of NDs coatings is increased and graphitic clusters become larger in grain boundaries. In addition, the high concentration and homogenous distribution of particles sizes of the diamond nanocrystals were obtained on the surfaces of the annealed sample at 100 °C. Our experimental results can be beneficial guidance to the production of NDs coatings with the desired attributes. © The Author(s), under exclusive licence to Springer Science+Business Media, LLC part of Springer Nature 2021 |
| abstractGer |
Abstract In this study, nanodiamonds (NDs) coatings were grown on gold-coated silicon substrates by a DC-plasma enhanced chemical vapor (DC-PECVD) deposition technique using $ CH_{4} $ plus $ H_{2} $ as the feedstock. The effect of annealing temperature under vacuum environment on the characteristics of the resulting coatings were investigated experimentally by means of Raman spectroscopy, Atomic Force Microscopy (AFM), X-ray diffraction pattern (XRD) and field emission scanning electron microscopy (FE-SEM). Results show that by adjusting annealing temperature up to 200 °C, the internal compressive stress, the amount of aromatic ring and the size of the $ sp^{2} $-bonded carbon decreases in NDs coatings. It has been found that by further increasing annealing temperature up to 300 °C, the degree of graphitization of NDs coatings is increased and graphitic clusters become larger in grain boundaries. In addition, the high concentration and homogenous distribution of particles sizes of the diamond nanocrystals were obtained on the surfaces of the annealed sample at 100 °C. Our experimental results can be beneficial guidance to the production of NDs coatings with the desired attributes. © The Author(s), under exclusive licence to Springer Science+Business Media, LLC part of Springer Nature 2021 |
| abstract_unstemmed |
Abstract In this study, nanodiamonds (NDs) coatings were grown on gold-coated silicon substrates by a DC-plasma enhanced chemical vapor (DC-PECVD) deposition technique using $ CH_{4} $ plus $ H_{2} $ as the feedstock. The effect of annealing temperature under vacuum environment on the characteristics of the resulting coatings were investigated experimentally by means of Raman spectroscopy, Atomic Force Microscopy (AFM), X-ray diffraction pattern (XRD) and field emission scanning electron microscopy (FE-SEM). Results show that by adjusting annealing temperature up to 200 °C, the internal compressive stress, the amount of aromatic ring and the size of the $ sp^{2} $-bonded carbon decreases in NDs coatings. It has been found that by further increasing annealing temperature up to 300 °C, the degree of graphitization of NDs coatings is increased and graphitic clusters become larger in grain boundaries. In addition, the high concentration and homogenous distribution of particles sizes of the diamond nanocrystals were obtained on the surfaces of the annealed sample at 100 °C. Our experimental results can be beneficial guidance to the production of NDs coatings with the desired attributes. © The Author(s), under exclusive licence to Springer Science+Business Media, LLC part of Springer Nature 2021 |
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| title_short |
Investigation of Vacuum Annealing Temperature Effects on the Microstructure Properties of DC-PECVD Grown Diamond Nanoparticles |
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https://doi.org/10.1007/s10904-020-01836-8 |
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Vaghri, Elnaz Ramezani, Amir Hoshang |
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