Simultaneous optimization in ultra-precision motion systems
Abstract In ultra-precision motion systems, vibration has non-negligible influence on motion performance, especially when these systems are getting more lightweight and more flexible. Research on simultaneous optimization of structural and controller design has been conducted to achieve effective vi...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Wang, Jing [verfasserIn] |
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| Format: |
E-Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2019 |
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| Schlagwörter: |
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| Anmerkung: |
© Springer-Verlag GmbH Germany, part of Springer Nature 2019 |
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| Übergeordnetes Werk: |
Enthalten in: Structural and multidisciplinary optimization - Berlin : Springer, 1989, 59(2019), 6 vom: 28. Jan., Seite 2273-2285 |
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| Übergeordnetes Werk: |
volume:59 ; year:2019 ; number:6 ; day:28 ; month:01 ; pages:2273-2285 |
| Links: |
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| DOI / URN: |
10.1007/s00158-018-02191-6 |
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| Katalog-ID: |
SPR001330225 |
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| 520 | |a Abstract In ultra-precision motion systems, vibration has non-negligible influence on motion performance, especially when these systems are getting more lightweight and more flexible. Research on simultaneous optimization of structural and controller design has been conducted to achieve effective vibration control. However, these methods will not have an adequate performance when used in ultra-precision motion systems with a time-varying performance location. In this paper, structural sizes, actuators configuration, and controller parameters are simultaneously optimized. To realize global vibration control and facilitate simultaneous optimization, a new vibration controller with position-dependent control gains is proposed, in which the worst-case vibration magnitude across all considered performance locations is set to be the objective function. To achieve high modeling accuracy, mass and stiffness distribution of actuators is also included into structural dynamics since it plays a large role in structural dynamics. The genetic algorithm is adopted to search for a global optimum. To increase efficiency, R-functions and level-set functions are introduced to translate the complicated over-lapping constraints into a simple integral equality. Neural fitting models instead of the finite element analysis method are used to derive eigenvalues and eigenvectors of the plant. The proposed method is verified on a simplified fine stage in the wafer stage. The numerical results prove its effectiveness. | ||
| 650 | 4 | |a Simultaneous optimization |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a Time-varying performance location |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a Over-actuation |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a Global vibration control |7 (dpeaa)DE-He213 | |
| 700 | 1 | |a Zhang, Ming |4 aut | |
| 700 | 1 | |a Zhu, Yu |4 aut | |
| 700 | 1 | |a Yang, Kaiming |4 aut | |
| 700 | 1 | |a Li, Xin |4 aut | |
| 700 | 1 | |a Wang, Leijie |4 aut | |
| 773 | 0 | 8 | |i Enthalten in |t Structural and multidisciplinary optimization |d Berlin : Springer, 1989 |g 59(2019), 6 vom: 28. Jan., Seite 2273-2285 |w (DE-627)271602503 |w (DE-600)1481279-4 |x 1615-1488 |7 nnns |
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10.1007/s00158-018-02191-6 doi (DE-627)SPR001330225 (SPR)s00158-018-02191-6-e DE-627 ger DE-627 rakwb eng Wang, Jing verfasserin aut Simultaneous optimization in ultra-precision motion systems 2019 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer-Verlag GmbH Germany, part of Springer Nature 2019 Abstract In ultra-precision motion systems, vibration has non-negligible influence on motion performance, especially when these systems are getting more lightweight and more flexible. Research on simultaneous optimization of structural and controller design has been conducted to achieve effective vibration control. However, these methods will not have an adequate performance when used in ultra-precision motion systems with a time-varying performance location. In this paper, structural sizes, actuators configuration, and controller parameters are simultaneously optimized. To realize global vibration control and facilitate simultaneous optimization, a new vibration controller with position-dependent control gains is proposed, in which the worst-case vibration magnitude across all considered performance locations is set to be the objective function. To achieve high modeling accuracy, mass and stiffness distribution of actuators is also included into structural dynamics since it plays a large role in structural dynamics. The genetic algorithm is adopted to search for a global optimum. To increase efficiency, R-functions and level-set functions are introduced to translate the complicated over-lapping constraints into a simple integral equality. Neural fitting models instead of the finite element analysis method are used to derive eigenvalues and eigenvectors of the plant. The proposed method is verified on a simplified fine stage in the wafer stage. The numerical results prove its effectiveness. Simultaneous optimization (dpeaa)DE-He213 Time-varying performance location (dpeaa)DE-He213 Over-actuation (dpeaa)DE-He213 Global vibration control (dpeaa)DE-He213 Zhang, Ming aut Zhu, Yu aut Yang, Kaiming aut Li, Xin aut Wang, Leijie aut Enthalten in Structural and multidisciplinary optimization Berlin : Springer, 1989 59(2019), 6 vom: 28. Jan., Seite 2273-2285 (DE-627)271602503 (DE-600)1481279-4 1615-1488 nnns volume:59 year:2019 number:6 day:28 month:01 pages:2273-2285 https://dx.doi.org/10.1007/s00158-018-02191-6 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_267 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 59 2019 6 28 01 2273-2285 |
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10.1007/s00158-018-02191-6 doi (DE-627)SPR001330225 (SPR)s00158-018-02191-6-e DE-627 ger DE-627 rakwb eng Wang, Jing verfasserin aut Simultaneous optimization in ultra-precision motion systems 2019 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer-Verlag GmbH Germany, part of Springer Nature 2019 Abstract In ultra-precision motion systems, vibration has non-negligible influence on motion performance, especially when these systems are getting more lightweight and more flexible. Research on simultaneous optimization of structural and controller design has been conducted to achieve effective vibration control. However, these methods will not have an adequate performance when used in ultra-precision motion systems with a time-varying performance location. In this paper, structural sizes, actuators configuration, and controller parameters are simultaneously optimized. To realize global vibration control and facilitate simultaneous optimization, a new vibration controller with position-dependent control gains is proposed, in which the worst-case vibration magnitude across all considered performance locations is set to be the objective function. To achieve high modeling accuracy, mass and stiffness distribution of actuators is also included into structural dynamics since it plays a large role in structural dynamics. The genetic algorithm is adopted to search for a global optimum. To increase efficiency, R-functions and level-set functions are introduced to translate the complicated over-lapping constraints into a simple integral equality. Neural fitting models instead of the finite element analysis method are used to derive eigenvalues and eigenvectors of the plant. The proposed method is verified on a simplified fine stage in the wafer stage. The numerical results prove its effectiveness. Simultaneous optimization (dpeaa)DE-He213 Time-varying performance location (dpeaa)DE-He213 Over-actuation (dpeaa)DE-He213 Global vibration control (dpeaa)DE-He213 Zhang, Ming aut Zhu, Yu aut Yang, Kaiming aut Li, Xin aut Wang, Leijie aut Enthalten in Structural and multidisciplinary optimization Berlin : Springer, 1989 59(2019), 6 vom: 28. Jan., Seite 2273-2285 (DE-627)271602503 (DE-600)1481279-4 1615-1488 nnns volume:59 year:2019 number:6 day:28 month:01 pages:2273-2285 https://dx.doi.org/10.1007/s00158-018-02191-6 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_267 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 59 2019 6 28 01 2273-2285 |
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10.1007/s00158-018-02191-6 doi (DE-627)SPR001330225 (SPR)s00158-018-02191-6-e DE-627 ger DE-627 rakwb eng Wang, Jing verfasserin aut Simultaneous optimization in ultra-precision motion systems 2019 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer-Verlag GmbH Germany, part of Springer Nature 2019 Abstract In ultra-precision motion systems, vibration has non-negligible influence on motion performance, especially when these systems are getting more lightweight and more flexible. Research on simultaneous optimization of structural and controller design has been conducted to achieve effective vibration control. However, these methods will not have an adequate performance when used in ultra-precision motion systems with a time-varying performance location. In this paper, structural sizes, actuators configuration, and controller parameters are simultaneously optimized. To realize global vibration control and facilitate simultaneous optimization, a new vibration controller with position-dependent control gains is proposed, in which the worst-case vibration magnitude across all considered performance locations is set to be the objective function. To achieve high modeling accuracy, mass and stiffness distribution of actuators is also included into structural dynamics since it plays a large role in structural dynamics. The genetic algorithm is adopted to search for a global optimum. To increase efficiency, R-functions and level-set functions are introduced to translate the complicated over-lapping constraints into a simple integral equality. Neural fitting models instead of the finite element analysis method are used to derive eigenvalues and eigenvectors of the plant. The proposed method is verified on a simplified fine stage in the wafer stage. The numerical results prove its effectiveness. Simultaneous optimization (dpeaa)DE-He213 Time-varying performance location (dpeaa)DE-He213 Over-actuation (dpeaa)DE-He213 Global vibration control (dpeaa)DE-He213 Zhang, Ming aut Zhu, Yu aut Yang, Kaiming aut Li, Xin aut Wang, Leijie aut Enthalten in Structural and multidisciplinary optimization Berlin : Springer, 1989 59(2019), 6 vom: 28. Jan., Seite 2273-2285 (DE-627)271602503 (DE-600)1481279-4 1615-1488 nnns volume:59 year:2019 number:6 day:28 month:01 pages:2273-2285 https://dx.doi.org/10.1007/s00158-018-02191-6 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_267 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 59 2019 6 28 01 2273-2285 |
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10.1007/s00158-018-02191-6 doi (DE-627)SPR001330225 (SPR)s00158-018-02191-6-e DE-627 ger DE-627 rakwb eng Wang, Jing verfasserin aut Simultaneous optimization in ultra-precision motion systems 2019 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer-Verlag GmbH Germany, part of Springer Nature 2019 Abstract In ultra-precision motion systems, vibration has non-negligible influence on motion performance, especially when these systems are getting more lightweight and more flexible. Research on simultaneous optimization of structural and controller design has been conducted to achieve effective vibration control. However, these methods will not have an adequate performance when used in ultra-precision motion systems with a time-varying performance location. In this paper, structural sizes, actuators configuration, and controller parameters are simultaneously optimized. To realize global vibration control and facilitate simultaneous optimization, a new vibration controller with position-dependent control gains is proposed, in which the worst-case vibration magnitude across all considered performance locations is set to be the objective function. To achieve high modeling accuracy, mass and stiffness distribution of actuators is also included into structural dynamics since it plays a large role in structural dynamics. The genetic algorithm is adopted to search for a global optimum. To increase efficiency, R-functions and level-set functions are introduced to translate the complicated over-lapping constraints into a simple integral equality. Neural fitting models instead of the finite element analysis method are used to derive eigenvalues and eigenvectors of the plant. The proposed method is verified on a simplified fine stage in the wafer stage. The numerical results prove its effectiveness. Simultaneous optimization (dpeaa)DE-He213 Time-varying performance location (dpeaa)DE-He213 Over-actuation (dpeaa)DE-He213 Global vibration control (dpeaa)DE-He213 Zhang, Ming aut Zhu, Yu aut Yang, Kaiming aut Li, Xin aut Wang, Leijie aut Enthalten in Structural and multidisciplinary optimization Berlin : Springer, 1989 59(2019), 6 vom: 28. Jan., Seite 2273-2285 (DE-627)271602503 (DE-600)1481279-4 1615-1488 nnns volume:59 year:2019 number:6 day:28 month:01 pages:2273-2285 https://dx.doi.org/10.1007/s00158-018-02191-6 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_267 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 59 2019 6 28 01 2273-2285 |
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10.1007/s00158-018-02191-6 doi (DE-627)SPR001330225 (SPR)s00158-018-02191-6-e DE-627 ger DE-627 rakwb eng Wang, Jing verfasserin aut Simultaneous optimization in ultra-precision motion systems 2019 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer-Verlag GmbH Germany, part of Springer Nature 2019 Abstract In ultra-precision motion systems, vibration has non-negligible influence on motion performance, especially when these systems are getting more lightweight and more flexible. Research on simultaneous optimization of structural and controller design has been conducted to achieve effective vibration control. However, these methods will not have an adequate performance when used in ultra-precision motion systems with a time-varying performance location. In this paper, structural sizes, actuators configuration, and controller parameters are simultaneously optimized. To realize global vibration control and facilitate simultaneous optimization, a new vibration controller with position-dependent control gains is proposed, in which the worst-case vibration magnitude across all considered performance locations is set to be the objective function. To achieve high modeling accuracy, mass and stiffness distribution of actuators is also included into structural dynamics since it plays a large role in structural dynamics. The genetic algorithm is adopted to search for a global optimum. To increase efficiency, R-functions and level-set functions are introduced to translate the complicated over-lapping constraints into a simple integral equality. Neural fitting models instead of the finite element analysis method are used to derive eigenvalues and eigenvectors of the plant. The proposed method is verified on a simplified fine stage in the wafer stage. The numerical results prove its effectiveness. Simultaneous optimization (dpeaa)DE-He213 Time-varying performance location (dpeaa)DE-He213 Over-actuation (dpeaa)DE-He213 Global vibration control (dpeaa)DE-He213 Zhang, Ming aut Zhu, Yu aut Yang, Kaiming aut Li, Xin aut Wang, Leijie aut Enthalten in Structural and multidisciplinary optimization Berlin : Springer, 1989 59(2019), 6 vom: 28. Jan., Seite 2273-2285 (DE-627)271602503 (DE-600)1481279-4 1615-1488 nnns volume:59 year:2019 number:6 day:28 month:01 pages:2273-2285 https://dx.doi.org/10.1007/s00158-018-02191-6 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_267 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 59 2019 6 28 01 2273-2285 |
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Wang, Jing @@aut@@ Zhang, Ming @@aut@@ Zhu, Yu @@aut@@ Yang, Kaiming @@aut@@ Li, Xin @@aut@@ Wang, Leijie @@aut@@ |
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Wang, Jing |
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simultaneous optimization in ultra-precision motion systems |
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Simultaneous optimization in ultra-precision motion systems |
| abstract |
Abstract In ultra-precision motion systems, vibration has non-negligible influence on motion performance, especially when these systems are getting more lightweight and more flexible. Research on simultaneous optimization of structural and controller design has been conducted to achieve effective vibration control. However, these methods will not have an adequate performance when used in ultra-precision motion systems with a time-varying performance location. In this paper, structural sizes, actuators configuration, and controller parameters are simultaneously optimized. To realize global vibration control and facilitate simultaneous optimization, a new vibration controller with position-dependent control gains is proposed, in which the worst-case vibration magnitude across all considered performance locations is set to be the objective function. To achieve high modeling accuracy, mass and stiffness distribution of actuators is also included into structural dynamics since it plays a large role in structural dynamics. The genetic algorithm is adopted to search for a global optimum. To increase efficiency, R-functions and level-set functions are introduced to translate the complicated over-lapping constraints into a simple integral equality. Neural fitting models instead of the finite element analysis method are used to derive eigenvalues and eigenvectors of the plant. The proposed method is verified on a simplified fine stage in the wafer stage. The numerical results prove its effectiveness. © Springer-Verlag GmbH Germany, part of Springer Nature 2019 |
| abstractGer |
Abstract In ultra-precision motion systems, vibration has non-negligible influence on motion performance, especially when these systems are getting more lightweight and more flexible. Research on simultaneous optimization of structural and controller design has been conducted to achieve effective vibration control. However, these methods will not have an adequate performance when used in ultra-precision motion systems with a time-varying performance location. In this paper, structural sizes, actuators configuration, and controller parameters are simultaneously optimized. To realize global vibration control and facilitate simultaneous optimization, a new vibration controller with position-dependent control gains is proposed, in which the worst-case vibration magnitude across all considered performance locations is set to be the objective function. To achieve high modeling accuracy, mass and stiffness distribution of actuators is also included into structural dynamics since it plays a large role in structural dynamics. The genetic algorithm is adopted to search for a global optimum. To increase efficiency, R-functions and level-set functions are introduced to translate the complicated over-lapping constraints into a simple integral equality. Neural fitting models instead of the finite element analysis method are used to derive eigenvalues and eigenvectors of the plant. The proposed method is verified on a simplified fine stage in the wafer stage. The numerical results prove its effectiveness. © Springer-Verlag GmbH Germany, part of Springer Nature 2019 |
| abstract_unstemmed |
Abstract In ultra-precision motion systems, vibration has non-negligible influence on motion performance, especially when these systems are getting more lightweight and more flexible. Research on simultaneous optimization of structural and controller design has been conducted to achieve effective vibration control. However, these methods will not have an adequate performance when used in ultra-precision motion systems with a time-varying performance location. In this paper, structural sizes, actuators configuration, and controller parameters are simultaneously optimized. To realize global vibration control and facilitate simultaneous optimization, a new vibration controller with position-dependent control gains is proposed, in which the worst-case vibration magnitude across all considered performance locations is set to be the objective function. To achieve high modeling accuracy, mass and stiffness distribution of actuators is also included into structural dynamics since it plays a large role in structural dynamics. The genetic algorithm is adopted to search for a global optimum. To increase efficiency, R-functions and level-set functions are introduced to translate the complicated over-lapping constraints into a simple integral equality. Neural fitting models instead of the finite element analysis method are used to derive eigenvalues and eigenvectors of the plant. The proposed method is verified on a simplified fine stage in the wafer stage. The numerical results prove its effectiveness. © Springer-Verlag GmbH Germany, part of Springer Nature 2019 |
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Simultaneous optimization in ultra-precision motion systems |
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https://dx.doi.org/10.1007/s00158-018-02191-6 |
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Zhang, Ming Zhu, Yu Yang, Kaiming Li, Xin Wang, Leijie |
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Zhang, Ming Zhu, Yu Yang, Kaiming Li, Xin Wang, Leijie |
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10.1007/s00158-018-02191-6 |
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2024-07-03T21:50:21.801Z |
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| score |
7.3975964 |