Bottom-up fabrication and piezoelectric properties of $ CaBi_{4} %$ Ti_{4} %$ O_{15} $ micro-plateaus
Abstract $ CaBi_{4} %$ Ti_{4} %$ O_{15} $ (CBTi144) micro-plateaus were fabricated on Si wafers and Pt foils using a self-assembled monolayer (SAM) and a complex metal alkoxide solution. The micro-plateaus are delineated by metal masks, which are used for shadowing against the ultraviolet (UV) irrad...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Kato, K. [verfasserIn] |
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| Format: |
E-Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2007 |
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| Schlagwörter: |
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| Anmerkung: |
© Springer-Verlag 2007 |
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| Übergeordnetes Werk: |
Enthalten in: Applied physics - Berlin : Springer, 1973, 88(2007), 2 vom: 20. Apr., Seite 273-276 |
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| Übergeordnetes Werk: |
volume:88 ; year:2007 ; number:2 ; day:20 ; month:04 ; pages:273-276 |
| Links: |
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| DOI / URN: |
10.1007/s00339-007-3985-x |
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| Katalog-ID: |
SPR004094727 |
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| 100 | 1 | |a Kato, K. |e verfasserin |4 aut | |
| 245 | 1 | 0 | |a Bottom-up fabrication and piezoelectric properties of $ CaBi_{4} %$ Ti_{4} %$ O_{15} $ micro-plateaus |
| 264 | 1 | |c 2007 | |
| 336 | |a Text |b txt |2 rdacontent | ||
| 337 | |a Computermedien |b c |2 rdamedia | ||
| 338 | |a Online-Ressource |b cr |2 rdacarrier | ||
| 500 | |a © Springer-Verlag 2007 | ||
| 520 | |a Abstract $ CaBi_{4} %$ Ti_{4} %$ O_{15} $ (CBTi144) micro-plateaus were fabricated on Si wafers and Pt foils using a self-assembled monolayer (SAM) and a complex metal alkoxide solution. The micro-plateaus are delineated by metal masks, which are used for shadowing against the ultraviolet (UV) irradiation for decomposition of SAM to make the surface hydrophilic. The micro-plateaus crystallized to a ferroelectric phase with random orientation. The crystallization depended on the SAM-derived ultra thin layers at the surface of the substrates. The primitive PFM measurements without any top electrodes confirmed that the micro-plateaus exhibited the piezoresponse behaviors. The piezoelectric constant, $ d_{33} $, had some distribution, and the maximum $ d_{33} $ was confirmed as about 45 pm/V, which is identical to the $ d_{33} $ of the polar-axis oriented CBTi144 thin films. | ||
| 650 | 4 | |a Piezoelectric Property |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a Ferroelectric Phase |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a Titanium Isopropoxide |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a Metal Mask |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a Methoxyethanol |7 (dpeaa)DE-He213 | |
| 700 | 1 | |a Tanaka, K. |4 aut | |
| 700 | 1 | |a Kayukawa, S. |4 aut | |
| 700 | 1 | |a Suzuki, K. |4 aut | |
| 700 | 1 | |a Masuda, Y. |4 aut | |
| 700 | 1 | |a Kimura, T. |4 aut | |
| 700 | 1 | |a Nishizawa, K. |4 aut | |
| 700 | 1 | |a Miki, T. |4 aut | |
| 773 | 0 | 8 | |i Enthalten in |t Applied physics |d Berlin : Springer, 1973 |g 88(2007), 2 vom: 20. Apr., Seite 273-276 |w (DE-627)235503231 |w (DE-600)1398311-8 |x 1432-0630 |7 nnns |
| 773 | 1 | 8 | |g volume:88 |g year:2007 |g number:2 |g day:20 |g month:04 |g pages:273-276 |
| 856 | 4 | 0 | |u https://dx.doi.org/10.1007/s00339-007-3985-x |z lizenzpflichtig |3 Volltext |
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10.1007/s00339-007-3985-x doi (DE-627)SPR004094727 (SPR)s00339-007-3985-x-e DE-627 ger DE-627 rakwb eng Kato, K. verfasserin aut Bottom-up fabrication and piezoelectric properties of $ CaBi_{4} %$ Ti_{4} %$ O_{15} $ micro-plateaus 2007 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer-Verlag 2007 Abstract $ CaBi_{4} %$ Ti_{4} %$ O_{15} $ (CBTi144) micro-plateaus were fabricated on Si wafers and Pt foils using a self-assembled monolayer (SAM) and a complex metal alkoxide solution. The micro-plateaus are delineated by metal masks, which are used for shadowing against the ultraviolet (UV) irradiation for decomposition of SAM to make the surface hydrophilic. The micro-plateaus crystallized to a ferroelectric phase with random orientation. The crystallization depended on the SAM-derived ultra thin layers at the surface of the substrates. The primitive PFM measurements without any top electrodes confirmed that the micro-plateaus exhibited the piezoresponse behaviors. The piezoelectric constant, $ d_{33} $, had some distribution, and the maximum $ d_{33} $ was confirmed as about 45 pm/V, which is identical to the $ d_{33} $ of the polar-axis oriented CBTi144 thin films. Piezoelectric Property (dpeaa)DE-He213 Ferroelectric Phase (dpeaa)DE-He213 Titanium Isopropoxide (dpeaa)DE-He213 Metal Mask (dpeaa)DE-He213 Methoxyethanol (dpeaa)DE-He213 Tanaka, K. aut Kayukawa, S. aut Suzuki, K. aut Masuda, Y. aut Kimura, T. aut Nishizawa, K. aut Miki, T. aut Enthalten in Applied physics Berlin : Springer, 1973 88(2007), 2 vom: 20. Apr., Seite 273-276 (DE-627)235503231 (DE-600)1398311-8 1432-0630 nnns volume:88 year:2007 number:2 day:20 month:04 pages:273-276 https://dx.doi.org/10.1007/s00339-007-3985-x lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_267 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 88 2007 2 20 04 273-276 |
| spelling |
10.1007/s00339-007-3985-x doi (DE-627)SPR004094727 (SPR)s00339-007-3985-x-e DE-627 ger DE-627 rakwb eng Kato, K. verfasserin aut Bottom-up fabrication and piezoelectric properties of $ CaBi_{4} %$ Ti_{4} %$ O_{15} $ micro-plateaus 2007 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer-Verlag 2007 Abstract $ CaBi_{4} %$ Ti_{4} %$ O_{15} $ (CBTi144) micro-plateaus were fabricated on Si wafers and Pt foils using a self-assembled monolayer (SAM) and a complex metal alkoxide solution. The micro-plateaus are delineated by metal masks, which are used for shadowing against the ultraviolet (UV) irradiation for decomposition of SAM to make the surface hydrophilic. The micro-plateaus crystallized to a ferroelectric phase with random orientation. The crystallization depended on the SAM-derived ultra thin layers at the surface of the substrates. The primitive PFM measurements without any top electrodes confirmed that the micro-plateaus exhibited the piezoresponse behaviors. The piezoelectric constant, $ d_{33} $, had some distribution, and the maximum $ d_{33} $ was confirmed as about 45 pm/V, which is identical to the $ d_{33} $ of the polar-axis oriented CBTi144 thin films. Piezoelectric Property (dpeaa)DE-He213 Ferroelectric Phase (dpeaa)DE-He213 Titanium Isopropoxide (dpeaa)DE-He213 Metal Mask (dpeaa)DE-He213 Methoxyethanol (dpeaa)DE-He213 Tanaka, K. aut Kayukawa, S. aut Suzuki, K. aut Masuda, Y. aut Kimura, T. aut Nishizawa, K. aut Miki, T. aut Enthalten in Applied physics Berlin : Springer, 1973 88(2007), 2 vom: 20. Apr., Seite 273-276 (DE-627)235503231 (DE-600)1398311-8 1432-0630 nnns volume:88 year:2007 number:2 day:20 month:04 pages:273-276 https://dx.doi.org/10.1007/s00339-007-3985-x lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_267 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 88 2007 2 20 04 273-276 |
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10.1007/s00339-007-3985-x doi (DE-627)SPR004094727 (SPR)s00339-007-3985-x-e DE-627 ger DE-627 rakwb eng Kato, K. verfasserin aut Bottom-up fabrication and piezoelectric properties of $ CaBi_{4} %$ Ti_{4} %$ O_{15} $ micro-plateaus 2007 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer-Verlag 2007 Abstract $ CaBi_{4} %$ Ti_{4} %$ O_{15} $ (CBTi144) micro-plateaus were fabricated on Si wafers and Pt foils using a self-assembled monolayer (SAM) and a complex metal alkoxide solution. The micro-plateaus are delineated by metal masks, which are used for shadowing against the ultraviolet (UV) irradiation for decomposition of SAM to make the surface hydrophilic. The micro-plateaus crystallized to a ferroelectric phase with random orientation. The crystallization depended on the SAM-derived ultra thin layers at the surface of the substrates. The primitive PFM measurements without any top electrodes confirmed that the micro-plateaus exhibited the piezoresponse behaviors. The piezoelectric constant, $ d_{33} $, had some distribution, and the maximum $ d_{33} $ was confirmed as about 45 pm/V, which is identical to the $ d_{33} $ of the polar-axis oriented CBTi144 thin films. Piezoelectric Property (dpeaa)DE-He213 Ferroelectric Phase (dpeaa)DE-He213 Titanium Isopropoxide (dpeaa)DE-He213 Metal Mask (dpeaa)DE-He213 Methoxyethanol (dpeaa)DE-He213 Tanaka, K. aut Kayukawa, S. aut Suzuki, K. aut Masuda, Y. aut Kimura, T. aut Nishizawa, K. aut Miki, T. aut Enthalten in Applied physics Berlin : Springer, 1973 88(2007), 2 vom: 20. Apr., Seite 273-276 (DE-627)235503231 (DE-600)1398311-8 1432-0630 nnns volume:88 year:2007 number:2 day:20 month:04 pages:273-276 https://dx.doi.org/10.1007/s00339-007-3985-x lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_267 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 88 2007 2 20 04 273-276 |
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10.1007/s00339-007-3985-x doi (DE-627)SPR004094727 (SPR)s00339-007-3985-x-e DE-627 ger DE-627 rakwb eng Kato, K. verfasserin aut Bottom-up fabrication and piezoelectric properties of $ CaBi_{4} %$ Ti_{4} %$ O_{15} $ micro-plateaus 2007 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer-Verlag 2007 Abstract $ CaBi_{4} %$ Ti_{4} %$ O_{15} $ (CBTi144) micro-plateaus were fabricated on Si wafers and Pt foils using a self-assembled monolayer (SAM) and a complex metal alkoxide solution. The micro-plateaus are delineated by metal masks, which are used for shadowing against the ultraviolet (UV) irradiation for decomposition of SAM to make the surface hydrophilic. The micro-plateaus crystallized to a ferroelectric phase with random orientation. The crystallization depended on the SAM-derived ultra thin layers at the surface of the substrates. The primitive PFM measurements without any top electrodes confirmed that the micro-plateaus exhibited the piezoresponse behaviors. The piezoelectric constant, $ d_{33} $, had some distribution, and the maximum $ d_{33} $ was confirmed as about 45 pm/V, which is identical to the $ d_{33} $ of the polar-axis oriented CBTi144 thin films. Piezoelectric Property (dpeaa)DE-He213 Ferroelectric Phase (dpeaa)DE-He213 Titanium Isopropoxide (dpeaa)DE-He213 Metal Mask (dpeaa)DE-He213 Methoxyethanol (dpeaa)DE-He213 Tanaka, K. aut Kayukawa, S. aut Suzuki, K. aut Masuda, Y. aut Kimura, T. aut Nishizawa, K. aut Miki, T. aut Enthalten in Applied physics Berlin : Springer, 1973 88(2007), 2 vom: 20. Apr., Seite 273-276 (DE-627)235503231 (DE-600)1398311-8 1432-0630 nnns volume:88 year:2007 number:2 day:20 month:04 pages:273-276 https://dx.doi.org/10.1007/s00339-007-3985-x lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_267 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 88 2007 2 20 04 273-276 |
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10.1007/s00339-007-3985-x doi (DE-627)SPR004094727 (SPR)s00339-007-3985-x-e DE-627 ger DE-627 rakwb eng Kato, K. verfasserin aut Bottom-up fabrication and piezoelectric properties of $ CaBi_{4} %$ Ti_{4} %$ O_{15} $ micro-plateaus 2007 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer-Verlag 2007 Abstract $ CaBi_{4} %$ Ti_{4} %$ O_{15} $ (CBTi144) micro-plateaus were fabricated on Si wafers and Pt foils using a self-assembled monolayer (SAM) and a complex metal alkoxide solution. The micro-plateaus are delineated by metal masks, which are used for shadowing against the ultraviolet (UV) irradiation for decomposition of SAM to make the surface hydrophilic. The micro-plateaus crystallized to a ferroelectric phase with random orientation. The crystallization depended on the SAM-derived ultra thin layers at the surface of the substrates. The primitive PFM measurements without any top electrodes confirmed that the micro-plateaus exhibited the piezoresponse behaviors. The piezoelectric constant, $ d_{33} $, had some distribution, and the maximum $ d_{33} $ was confirmed as about 45 pm/V, which is identical to the $ d_{33} $ of the polar-axis oriented CBTi144 thin films. Piezoelectric Property (dpeaa)DE-He213 Ferroelectric Phase (dpeaa)DE-He213 Titanium Isopropoxide (dpeaa)DE-He213 Metal Mask (dpeaa)DE-He213 Methoxyethanol (dpeaa)DE-He213 Tanaka, K. aut Kayukawa, S. aut Suzuki, K. aut Masuda, Y. aut Kimura, T. aut Nishizawa, K. aut Miki, T. aut Enthalten in Applied physics Berlin : Springer, 1973 88(2007), 2 vom: 20. Apr., Seite 273-276 (DE-627)235503231 (DE-600)1398311-8 1432-0630 nnns volume:88 year:2007 number:2 day:20 month:04 pages:273-276 https://dx.doi.org/10.1007/s00339-007-3985-x lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_267 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 88 2007 2 20 04 273-276 |
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Enthalten in Applied physics 88(2007), 2 vom: 20. Apr., Seite 273-276 volume:88 year:2007 number:2 day:20 month:04 pages:273-276 |
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Enthalten in Applied physics 88(2007), 2 vom: 20. Apr., Seite 273-276 volume:88 year:2007 number:2 day:20 month:04 pages:273-276 |
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Piezoelectric Property Ferroelectric Phase Titanium Isopropoxide Metal Mask Methoxyethanol |
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Kato, K. @@aut@@ Tanaka, K. @@aut@@ Kayukawa, S. @@aut@@ Suzuki, K. @@aut@@ Masuda, Y. @@aut@@ Kimura, T. @@aut@@ Nishizawa, K. @@aut@@ Miki, T. @@aut@@ |
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<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">SPR004094727</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230328150618.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">201001s2007 xx |||||o 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/s00339-007-3985-x</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)SPR004094727</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(SPR)s00339-007-3985-x-e</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Kato, K.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Bottom-up fabrication and piezoelectric properties of $ CaBi_{4} %$ Ti_{4} %$ O_{15} $ micro-plateaus</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2007</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">Computermedien</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Online-Ressource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">© Springer-Verlag 2007</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Abstract $ CaBi_{4} %$ Ti_{4} %$ O_{15} $ (CBTi144) micro-plateaus were fabricated on Si wafers and Pt foils using a self-assembled monolayer (SAM) and a complex metal alkoxide solution. The micro-plateaus are delineated by metal masks, which are used for shadowing against the ultraviolet (UV) irradiation for decomposition of SAM to make the surface hydrophilic. The micro-plateaus crystallized to a ferroelectric phase with random orientation. The crystallization depended on the SAM-derived ultra thin layers at the surface of the substrates. The primitive PFM measurements without any top electrodes confirmed that the micro-plateaus exhibited the piezoresponse behaviors. 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Kato, K. |
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Kato, K. misc Piezoelectric Property misc Ferroelectric Phase misc Titanium Isopropoxide misc Metal Mask misc Methoxyethanol Bottom-up fabrication and piezoelectric properties of $ CaBi_{4} %$ Ti_{4} %$ O_{15} $ micro-plateaus |
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Bottom-up fabrication and piezoelectric properties of $ CaBi_{4} %$ Ti_{4} %$ O_{15} $ micro-plateaus Piezoelectric Property (dpeaa)DE-He213 Ferroelectric Phase (dpeaa)DE-He213 Titanium Isopropoxide (dpeaa)DE-He213 Metal Mask (dpeaa)DE-He213 Methoxyethanol (dpeaa)DE-He213 |
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Bottom-up fabrication and piezoelectric properties of $ CaBi_{4} %$ Ti_{4} %$ O_{15} $ micro-plateaus |
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Bottom-up fabrication and piezoelectric properties of $ CaBi_{4} %$ Ti_{4} %$ O_{15} $ micro-plateaus |
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Kato, K. |
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Kato, K. Tanaka, K. Kayukawa, S. Suzuki, K. Masuda, Y. Kimura, T. Nishizawa, K. Miki, T. |
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Elektronische Aufsätze |
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Kato, K. |
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10.1007/s00339-007-3985-x |
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bottom-up fabrication and piezoelectric properties of $ cabi_{4} %$ ti_{4} %$ o_{15} $ micro-plateaus |
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Bottom-up fabrication and piezoelectric properties of $ CaBi_{4} %$ Ti_{4} %$ O_{15} $ micro-plateaus |
| abstract |
Abstract $ CaBi_{4} %$ Ti_{4} %$ O_{15} $ (CBTi144) micro-plateaus were fabricated on Si wafers and Pt foils using a self-assembled monolayer (SAM) and a complex metal alkoxide solution. The micro-plateaus are delineated by metal masks, which are used for shadowing against the ultraviolet (UV) irradiation for decomposition of SAM to make the surface hydrophilic. The micro-plateaus crystallized to a ferroelectric phase with random orientation. The crystallization depended on the SAM-derived ultra thin layers at the surface of the substrates. The primitive PFM measurements without any top electrodes confirmed that the micro-plateaus exhibited the piezoresponse behaviors. The piezoelectric constant, $ d_{33} $, had some distribution, and the maximum $ d_{33} $ was confirmed as about 45 pm/V, which is identical to the $ d_{33} $ of the polar-axis oriented CBTi144 thin films. © Springer-Verlag 2007 |
| abstractGer |
Abstract $ CaBi_{4} %$ Ti_{4} %$ O_{15} $ (CBTi144) micro-plateaus were fabricated on Si wafers and Pt foils using a self-assembled monolayer (SAM) and a complex metal alkoxide solution. The micro-plateaus are delineated by metal masks, which are used for shadowing against the ultraviolet (UV) irradiation for decomposition of SAM to make the surface hydrophilic. The micro-plateaus crystallized to a ferroelectric phase with random orientation. The crystallization depended on the SAM-derived ultra thin layers at the surface of the substrates. The primitive PFM measurements without any top electrodes confirmed that the micro-plateaus exhibited the piezoresponse behaviors. The piezoelectric constant, $ d_{33} $, had some distribution, and the maximum $ d_{33} $ was confirmed as about 45 pm/V, which is identical to the $ d_{33} $ of the polar-axis oriented CBTi144 thin films. © Springer-Verlag 2007 |
| abstract_unstemmed |
Abstract $ CaBi_{4} %$ Ti_{4} %$ O_{15} $ (CBTi144) micro-plateaus were fabricated on Si wafers and Pt foils using a self-assembled monolayer (SAM) and a complex metal alkoxide solution. The micro-plateaus are delineated by metal masks, which are used for shadowing against the ultraviolet (UV) irradiation for decomposition of SAM to make the surface hydrophilic. The micro-plateaus crystallized to a ferroelectric phase with random orientation. The crystallization depended on the SAM-derived ultra thin layers at the surface of the substrates. The primitive PFM measurements without any top electrodes confirmed that the micro-plateaus exhibited the piezoresponse behaviors. The piezoelectric constant, $ d_{33} $, had some distribution, and the maximum $ d_{33} $ was confirmed as about 45 pm/V, which is identical to the $ d_{33} $ of the polar-axis oriented CBTi144 thin films. © Springer-Verlag 2007 |
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2 |
| title_short |
Bottom-up fabrication and piezoelectric properties of $ CaBi_{4} %$ Ti_{4} %$ O_{15} $ micro-plateaus |
| url |
https://dx.doi.org/10.1007/s00339-007-3985-x |
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Tanaka, K. Kayukawa, S. Suzuki, K. Masuda, Y. Kimura, T. Nishizawa, K. Miki, T. |
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Tanaka, K. Kayukawa, S. Suzuki, K. Masuda, Y. Kimura, T. Nishizawa, K. Miki, T. |
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10.1007/s00339-007-3985-x |
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2024-07-03T23:35:07.800Z |
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| score |
7.401598 |