Charge storage characteristics in Al/AlN/Si metal–insulator–semiconductor structure based on deep traps in AlN layer
Abstract Charge storage characteristics in an Al/AlN/p-Si metal–insulator–semiconductor (MIS) structure have been investigated by capacitance–voltage and long-term capacitance measurements. Good program/erase behavior is observed in the AlN/Si structure, which is attributed to the trapping and detra...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Kong, Y.C. [verfasserIn] |
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| Format: |
E-Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2007 |
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| Schlagwörter: |
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| Anmerkung: |
© Springer-Verlag 2007 |
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| Übergeordnetes Werk: |
Enthalten in: Applied physics - Berlin : Springer, 1973, 90(2007), 3 vom: 08. Nov., Seite 545-548 |
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| Übergeordnetes Werk: |
volume:90 ; year:2007 ; number:3 ; day:08 ; month:11 ; pages:545-548 |
| Links: |
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| DOI / URN: |
10.1007/s00339-007-4319-8 |
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| Katalog-ID: |
SPR004098137 |
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| 040 | |a DE-627 |b ger |c DE-627 |e rakwb | ||
| 041 | |a eng | ||
| 100 | 1 | |a Kong, Y.C. |e verfasserin |4 aut | |
| 245 | 1 | 0 | |a Charge storage characteristics in Al/AlN/Si metal–insulator–semiconductor structure based on deep traps in AlN layer |
| 264 | 1 | |c 2007 | |
| 336 | |a Text |b txt |2 rdacontent | ||
| 337 | |a Computermedien |b c |2 rdamedia | ||
| 338 | |a Online-Ressource |b cr |2 rdacarrier | ||
| 500 | |a © Springer-Verlag 2007 | ||
| 520 | |a Abstract Charge storage characteristics in an Al/AlN/p-Si metal–insulator–semiconductor (MIS) structure have been investigated by capacitance–voltage and long-term capacitance measurements. Good program/erase behavior is observed in the AlN/Si structure, which is attributed to the trapping and detrapping of charges in deep traps of the AlN layer. In the long-term retention mode, a clear memory window is found 2000 s after removing a program/erase voltage of ±3 V, indicating good charge retention capability of the MIS structure. Further investigation shows that for a program pulse width of 500 ms, the charge storage does not occur when the pulse amplitude is smaller than a threshold value of ∼1 V. The trapped charge density increases linearly with increase of the pulse amplitude (>1 V) and tends to saturate at 2.5 V. With increasing program pulse width, the trapped charged density increases a little more than logarithmically. | ||
| 650 | 4 | |a Pulse Amplitude |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a Deep Trap |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a Charge Storage |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a Charge Retention |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a Trap Charge Density |7 (dpeaa)DE-He213 | |
| 700 | 1 | |a Hu, L.Q. |4 aut | |
| 700 | 1 | |a Zheng, Y.D. |4 aut | |
| 700 | 1 | |a Zhou, C.H. |4 aut | |
| 700 | 1 | |a Chen, C. |4 aut | |
| 700 | 1 | |a Gu, S.L. |4 aut | |
| 700 | 1 | |a Zhang, R. |4 aut | |
| 700 | 1 | |a Han, P. |4 aut | |
| 700 | 1 | |a Jiang, R.L. |4 aut | |
| 700 | 1 | |a Shi, Y. |4 aut | |
| 773 | 0 | 8 | |i Enthalten in |t Applied physics |d Berlin : Springer, 1973 |g 90(2007), 3 vom: 08. Nov., Seite 545-548 |w (DE-627)235503231 |w (DE-600)1398311-8 |x 1432-0630 |7 nnns |
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10.1007/s00339-007-4319-8 doi (DE-627)SPR004098137 (SPR)s00339-007-4319-8-e DE-627 ger DE-627 rakwb eng Kong, Y.C. verfasserin aut Charge storage characteristics in Al/AlN/Si metal–insulator–semiconductor structure based on deep traps in AlN layer 2007 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer-Verlag 2007 Abstract Charge storage characteristics in an Al/AlN/p-Si metal–insulator–semiconductor (MIS) structure have been investigated by capacitance–voltage and long-term capacitance measurements. Good program/erase behavior is observed in the AlN/Si structure, which is attributed to the trapping and detrapping of charges in deep traps of the AlN layer. In the long-term retention mode, a clear memory window is found 2000 s after removing a program/erase voltage of ±3 V, indicating good charge retention capability of the MIS structure. Further investigation shows that for a program pulse width of 500 ms, the charge storage does not occur when the pulse amplitude is smaller than a threshold value of ∼1 V. The trapped charge density increases linearly with increase of the pulse amplitude (>1 V) and tends to saturate at 2.5 V. With increasing program pulse width, the trapped charged density increases a little more than logarithmically. Pulse Amplitude (dpeaa)DE-He213 Deep Trap (dpeaa)DE-He213 Charge Storage (dpeaa)DE-He213 Charge Retention (dpeaa)DE-He213 Trap Charge Density (dpeaa)DE-He213 Hu, L.Q. aut Zheng, Y.D. aut Zhou, C.H. aut Chen, C. aut Gu, S.L. aut Zhang, R. aut Han, P. aut Jiang, R.L. aut Shi, Y. aut Enthalten in Applied physics Berlin : Springer, 1973 90(2007), 3 vom: 08. Nov., Seite 545-548 (DE-627)235503231 (DE-600)1398311-8 1432-0630 nnns volume:90 year:2007 number:3 day:08 month:11 pages:545-548 https://dx.doi.org/10.1007/s00339-007-4319-8 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_267 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 90 2007 3 08 11 545-548 |
| spelling |
10.1007/s00339-007-4319-8 doi (DE-627)SPR004098137 (SPR)s00339-007-4319-8-e DE-627 ger DE-627 rakwb eng Kong, Y.C. verfasserin aut Charge storage characteristics in Al/AlN/Si metal–insulator–semiconductor structure based on deep traps in AlN layer 2007 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer-Verlag 2007 Abstract Charge storage characteristics in an Al/AlN/p-Si metal–insulator–semiconductor (MIS) structure have been investigated by capacitance–voltage and long-term capacitance measurements. Good program/erase behavior is observed in the AlN/Si structure, which is attributed to the trapping and detrapping of charges in deep traps of the AlN layer. In the long-term retention mode, a clear memory window is found 2000 s after removing a program/erase voltage of ±3 V, indicating good charge retention capability of the MIS structure. Further investigation shows that for a program pulse width of 500 ms, the charge storage does not occur when the pulse amplitude is smaller than a threshold value of ∼1 V. The trapped charge density increases linearly with increase of the pulse amplitude (>1 V) and tends to saturate at 2.5 V. With increasing program pulse width, the trapped charged density increases a little more than logarithmically. Pulse Amplitude (dpeaa)DE-He213 Deep Trap (dpeaa)DE-He213 Charge Storage (dpeaa)DE-He213 Charge Retention (dpeaa)DE-He213 Trap Charge Density (dpeaa)DE-He213 Hu, L.Q. aut Zheng, Y.D. aut Zhou, C.H. aut Chen, C. aut Gu, S.L. aut Zhang, R. aut Han, P. aut Jiang, R.L. aut Shi, Y. aut Enthalten in Applied physics Berlin : Springer, 1973 90(2007), 3 vom: 08. Nov., Seite 545-548 (DE-627)235503231 (DE-600)1398311-8 1432-0630 nnns volume:90 year:2007 number:3 day:08 month:11 pages:545-548 https://dx.doi.org/10.1007/s00339-007-4319-8 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_267 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 90 2007 3 08 11 545-548 |
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10.1007/s00339-007-4319-8 doi (DE-627)SPR004098137 (SPR)s00339-007-4319-8-e DE-627 ger DE-627 rakwb eng Kong, Y.C. verfasserin aut Charge storage characteristics in Al/AlN/Si metal–insulator–semiconductor structure based on deep traps in AlN layer 2007 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer-Verlag 2007 Abstract Charge storage characteristics in an Al/AlN/p-Si metal–insulator–semiconductor (MIS) structure have been investigated by capacitance–voltage and long-term capacitance measurements. Good program/erase behavior is observed in the AlN/Si structure, which is attributed to the trapping and detrapping of charges in deep traps of the AlN layer. In the long-term retention mode, a clear memory window is found 2000 s after removing a program/erase voltage of ±3 V, indicating good charge retention capability of the MIS structure. Further investigation shows that for a program pulse width of 500 ms, the charge storage does not occur when the pulse amplitude is smaller than a threshold value of ∼1 V. The trapped charge density increases linearly with increase of the pulse amplitude (>1 V) and tends to saturate at 2.5 V. With increasing program pulse width, the trapped charged density increases a little more than logarithmically. Pulse Amplitude (dpeaa)DE-He213 Deep Trap (dpeaa)DE-He213 Charge Storage (dpeaa)DE-He213 Charge Retention (dpeaa)DE-He213 Trap Charge Density (dpeaa)DE-He213 Hu, L.Q. aut Zheng, Y.D. aut Zhou, C.H. aut Chen, C. aut Gu, S.L. aut Zhang, R. aut Han, P. aut Jiang, R.L. aut Shi, Y. aut Enthalten in Applied physics Berlin : Springer, 1973 90(2007), 3 vom: 08. Nov., Seite 545-548 (DE-627)235503231 (DE-600)1398311-8 1432-0630 nnns volume:90 year:2007 number:3 day:08 month:11 pages:545-548 https://dx.doi.org/10.1007/s00339-007-4319-8 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_267 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 90 2007 3 08 11 545-548 |
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10.1007/s00339-007-4319-8 doi (DE-627)SPR004098137 (SPR)s00339-007-4319-8-e DE-627 ger DE-627 rakwb eng Kong, Y.C. verfasserin aut Charge storage characteristics in Al/AlN/Si metal–insulator–semiconductor structure based on deep traps in AlN layer 2007 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer-Verlag 2007 Abstract Charge storage characteristics in an Al/AlN/p-Si metal–insulator–semiconductor (MIS) structure have been investigated by capacitance–voltage and long-term capacitance measurements. Good program/erase behavior is observed in the AlN/Si structure, which is attributed to the trapping and detrapping of charges in deep traps of the AlN layer. In the long-term retention mode, a clear memory window is found 2000 s after removing a program/erase voltage of ±3 V, indicating good charge retention capability of the MIS structure. Further investigation shows that for a program pulse width of 500 ms, the charge storage does not occur when the pulse amplitude is smaller than a threshold value of ∼1 V. The trapped charge density increases linearly with increase of the pulse amplitude (>1 V) and tends to saturate at 2.5 V. With increasing program pulse width, the trapped charged density increases a little more than logarithmically. Pulse Amplitude (dpeaa)DE-He213 Deep Trap (dpeaa)DE-He213 Charge Storage (dpeaa)DE-He213 Charge Retention (dpeaa)DE-He213 Trap Charge Density (dpeaa)DE-He213 Hu, L.Q. aut Zheng, Y.D. aut Zhou, C.H. aut Chen, C. aut Gu, S.L. aut Zhang, R. aut Han, P. aut Jiang, R.L. aut Shi, Y. aut Enthalten in Applied physics Berlin : Springer, 1973 90(2007), 3 vom: 08. Nov., Seite 545-548 (DE-627)235503231 (DE-600)1398311-8 1432-0630 nnns volume:90 year:2007 number:3 day:08 month:11 pages:545-548 https://dx.doi.org/10.1007/s00339-007-4319-8 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_267 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 90 2007 3 08 11 545-548 |
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10.1007/s00339-007-4319-8 doi (DE-627)SPR004098137 (SPR)s00339-007-4319-8-e DE-627 ger DE-627 rakwb eng Kong, Y.C. verfasserin aut Charge storage characteristics in Al/AlN/Si metal–insulator–semiconductor structure based on deep traps in AlN layer 2007 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer-Verlag 2007 Abstract Charge storage characteristics in an Al/AlN/p-Si metal–insulator–semiconductor (MIS) structure have been investigated by capacitance–voltage and long-term capacitance measurements. Good program/erase behavior is observed in the AlN/Si structure, which is attributed to the trapping and detrapping of charges in deep traps of the AlN layer. In the long-term retention mode, a clear memory window is found 2000 s after removing a program/erase voltage of ±3 V, indicating good charge retention capability of the MIS structure. Further investigation shows that for a program pulse width of 500 ms, the charge storage does not occur when the pulse amplitude is smaller than a threshold value of ∼1 V. The trapped charge density increases linearly with increase of the pulse amplitude (>1 V) and tends to saturate at 2.5 V. With increasing program pulse width, the trapped charged density increases a little more than logarithmically. Pulse Amplitude (dpeaa)DE-He213 Deep Trap (dpeaa)DE-He213 Charge Storage (dpeaa)DE-He213 Charge Retention (dpeaa)DE-He213 Trap Charge Density (dpeaa)DE-He213 Hu, L.Q. aut Zheng, Y.D. aut Zhou, C.H. aut Chen, C. aut Gu, S.L. aut Zhang, R. aut Han, P. aut Jiang, R.L. aut Shi, Y. aut Enthalten in Applied physics Berlin : Springer, 1973 90(2007), 3 vom: 08. Nov., Seite 545-548 (DE-627)235503231 (DE-600)1398311-8 1432-0630 nnns volume:90 year:2007 number:3 day:08 month:11 pages:545-548 https://dx.doi.org/10.1007/s00339-007-4319-8 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_267 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 90 2007 3 08 11 545-548 |
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Enthalten in Applied physics 90(2007), 3 vom: 08. Nov., Seite 545-548 volume:90 year:2007 number:3 day:08 month:11 pages:545-548 |
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Enthalten in Applied physics 90(2007), 3 vom: 08. Nov., Seite 545-548 volume:90 year:2007 number:3 day:08 month:11 pages:545-548 |
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Pulse Amplitude Deep Trap Charge Storage Charge Retention Trap Charge Density |
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Kong, Y.C. @@aut@@ Hu, L.Q. @@aut@@ Zheng, Y.D. @@aut@@ Zhou, C.H. @@aut@@ Chen, C. @@aut@@ Gu, S.L. @@aut@@ Zhang, R. @@aut@@ Han, P. @@aut@@ Jiang, R.L. @@aut@@ Shi, Y. @@aut@@ |
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<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">SPR004098137</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230328150631.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">201001s2007 xx |||||o 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/s00339-007-4319-8</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)SPR004098137</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(SPR)s00339-007-4319-8-e</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Kong, Y.C.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Charge storage characteristics in Al/AlN/Si metal–insulator–semiconductor structure based on deep traps in AlN layer</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2007</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">Computermedien</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Online-Ressource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">© Springer-Verlag 2007</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Abstract Charge storage characteristics in an Al/AlN/p-Si metal–insulator–semiconductor (MIS) structure have been investigated by capacitance–voltage and long-term capacitance measurements. Good program/erase behavior is observed in the AlN/Si structure, which is attributed to the trapping and detrapping of charges in deep traps of the AlN layer. In the long-term retention mode, a clear memory window is found 2000 s after removing a program/erase voltage of ±3 V, indicating good charge retention capability of the MIS structure. Further investigation shows that for a program pulse width of 500 ms, the charge storage does not occur when the pulse amplitude is smaller than a threshold value of ∼1 V. The trapped charge density increases linearly with increase of the pulse amplitude (>1 V) and tends to saturate at 2.5 V. 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Kong, Y.C. |
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Kong, Y.C. misc Pulse Amplitude misc Deep Trap misc Charge Storage misc Charge Retention misc Trap Charge Density Charge storage characteristics in Al/AlN/Si metal–insulator–semiconductor structure based on deep traps in AlN layer |
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Charge storage characteristics in Al/AlN/Si metal–insulator–semiconductor structure based on deep traps in AlN layer Pulse Amplitude (dpeaa)DE-He213 Deep Trap (dpeaa)DE-He213 Charge Storage (dpeaa)DE-He213 Charge Retention (dpeaa)DE-He213 Trap Charge Density (dpeaa)DE-He213 |
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Charge storage characteristics in Al/AlN/Si metal–insulator–semiconductor structure based on deep traps in AlN layer |
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Charge storage characteristics in Al/AlN/Si metal–insulator–semiconductor structure based on deep traps in AlN layer |
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Kong, Y.C. Hu, L.Q. Zheng, Y.D. Zhou, C.H. Chen, C. Gu, S.L. Zhang, R. Han, P. Jiang, R.L. Shi, Y. |
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charge storage characteristics in al/aln/si metal–insulator–semiconductor structure based on deep traps in aln layer |
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Charge storage characteristics in Al/AlN/Si metal–insulator–semiconductor structure based on deep traps in AlN layer |
| abstract |
Abstract Charge storage characteristics in an Al/AlN/p-Si metal–insulator–semiconductor (MIS) structure have been investigated by capacitance–voltage and long-term capacitance measurements. Good program/erase behavior is observed in the AlN/Si structure, which is attributed to the trapping and detrapping of charges in deep traps of the AlN layer. In the long-term retention mode, a clear memory window is found 2000 s after removing a program/erase voltage of ±3 V, indicating good charge retention capability of the MIS structure. Further investigation shows that for a program pulse width of 500 ms, the charge storage does not occur when the pulse amplitude is smaller than a threshold value of ∼1 V. The trapped charge density increases linearly with increase of the pulse amplitude (>1 V) and tends to saturate at 2.5 V. With increasing program pulse width, the trapped charged density increases a little more than logarithmically. © Springer-Verlag 2007 |
| abstractGer |
Abstract Charge storage characteristics in an Al/AlN/p-Si metal–insulator–semiconductor (MIS) structure have been investigated by capacitance–voltage and long-term capacitance measurements. Good program/erase behavior is observed in the AlN/Si structure, which is attributed to the trapping and detrapping of charges in deep traps of the AlN layer. In the long-term retention mode, a clear memory window is found 2000 s after removing a program/erase voltage of ±3 V, indicating good charge retention capability of the MIS structure. Further investigation shows that for a program pulse width of 500 ms, the charge storage does not occur when the pulse amplitude is smaller than a threshold value of ∼1 V. The trapped charge density increases linearly with increase of the pulse amplitude (>1 V) and tends to saturate at 2.5 V. With increasing program pulse width, the trapped charged density increases a little more than logarithmically. © Springer-Verlag 2007 |
| abstract_unstemmed |
Abstract Charge storage characteristics in an Al/AlN/p-Si metal–insulator–semiconductor (MIS) structure have been investigated by capacitance–voltage and long-term capacitance measurements. Good program/erase behavior is observed in the AlN/Si structure, which is attributed to the trapping and detrapping of charges in deep traps of the AlN layer. In the long-term retention mode, a clear memory window is found 2000 s after removing a program/erase voltage of ±3 V, indicating good charge retention capability of the MIS structure. Further investigation shows that for a program pulse width of 500 ms, the charge storage does not occur when the pulse amplitude is smaller than a threshold value of ∼1 V. The trapped charge density increases linearly with increase of the pulse amplitude (>1 V) and tends to saturate at 2.5 V. With increasing program pulse width, the trapped charged density increases a little more than logarithmically. © Springer-Verlag 2007 |
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| container_issue |
3 |
| title_short |
Charge storage characteristics in Al/AlN/Si metal–insulator–semiconductor structure based on deep traps in AlN layer |
| url |
https://dx.doi.org/10.1007/s00339-007-4319-8 |
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| author2 |
Hu, L.Q. Zheng, Y.D. Zhou, C.H. Chen, C. Gu, S.L. Zhang, R. Han, P. Jiang, R.L. Shi, Y. |
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Hu, L.Q. Zheng, Y.D. Zhou, C.H. Chen, C. Gu, S.L. Zhang, R. Han, P. Jiang, R.L. Shi, Y. |
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| doi_str |
10.1007/s00339-007-4319-8 |
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2024-07-03T23:36:09.802Z |
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| score |
7.401038 |