Studies on a micro turbine device with both journal- and thrust-air bearings
Abstract This paper presents design, fabrication, analysis and test of a silicon-based micro turbine device that is driven by compressed air. To improve the motion stability at high rotational speed, the turbine device employs an enhanced micro air bearing system that includes both journal air beari...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Shan, X. C. [verfasserIn] |
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| Format: |
E-Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2007 |
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| Schlagwörter: |
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| Anmerkung: |
© Springer-Verlag 2006 |
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| Übergeordnetes Werk: |
Enthalten in: Microsystem technologies - Berlin : Springer, 1994, 13(2007), 11-12 vom: 04. Jan., Seite 1501-1508 |
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| Übergeordnetes Werk: |
volume:13 ; year:2007 ; number:11-12 ; day:04 ; month:01 ; pages:1501-1508 |
| Links: |
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| DOI / URN: |
10.1007/s00542-006-0346-1 |
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| Katalog-ID: |
SPR006809960 |
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| 100 | 1 | |a Shan, X. C. |e verfasserin |4 aut | |
| 245 | 1 | 0 | |a Studies on a micro turbine device with both journal- and thrust-air bearings |
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| 520 | |a Abstract This paper presents design, fabrication, analysis and test of a silicon-based micro turbine device that is driven by compressed air. To improve the motion stability at high rotational speed, the turbine device employs an enhanced micro air bearing system that includes both journal air bearing and thrust air bearings. The double-sides dynamic thrust air bearings are designed to support the rotor from both its top and bottom sides. The top thrust air bearing employs pump-in spiral groove configuration, and the bottom bearing uses pump-out spiral groove configuration. The dynamic journal air bearing is formed by a plain circular trench with a short journal length (L) and a narrow radial clearance (C). The critical aspect ratio (L/C) over 20:1 is realized through an optimized fabrication process. The micro turbine device has been fabricated, integrated and tested. During the test, the turbine device demonstrated stable operations at a rotational speed of 14,700 rpm. | ||
| 650 | 4 | |a Load Capacity |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a Journal Bearing |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a Centrifugal Compressor |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a Thrust Bearing |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a Radial Clearance |7 (dpeaa)DE-He213 | |
| 700 | 1 | |a Zhang, Q. D. |4 aut | |
| 700 | 1 | |a Sun, Y. F. |4 aut | |
| 700 | 1 | |a Maeda, R. |4 aut | |
| 773 | 0 | 8 | |i Enthalten in |t Microsystem technologies |d Berlin : Springer, 1994 |g 13(2007), 11-12 vom: 04. Jan., Seite 1501-1508 |w (DE-627)270128182 |w (DE-600)1476561-5 |x 1432-1858 |7 nnns |
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10.1007/s00542-006-0346-1 doi (DE-627)SPR006809960 (SPR)s00542-006-0346-1-e DE-627 ger DE-627 rakwb eng Shan, X. C. verfasserin aut Studies on a micro turbine device with both journal- and thrust-air bearings 2007 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer-Verlag 2006 Abstract This paper presents design, fabrication, analysis and test of a silicon-based micro turbine device that is driven by compressed air. To improve the motion stability at high rotational speed, the turbine device employs an enhanced micro air bearing system that includes both journal air bearing and thrust air bearings. The double-sides dynamic thrust air bearings are designed to support the rotor from both its top and bottom sides. The top thrust air bearing employs pump-in spiral groove configuration, and the bottom bearing uses pump-out spiral groove configuration. The dynamic journal air bearing is formed by a plain circular trench with a short journal length (L) and a narrow radial clearance (C). The critical aspect ratio (L/C) over 20:1 is realized through an optimized fabrication process. The micro turbine device has been fabricated, integrated and tested. During the test, the turbine device demonstrated stable operations at a rotational speed of 14,700 rpm. Load Capacity (dpeaa)DE-He213 Journal Bearing (dpeaa)DE-He213 Centrifugal Compressor (dpeaa)DE-He213 Thrust Bearing (dpeaa)DE-He213 Radial Clearance (dpeaa)DE-He213 Zhang, Q. D. aut Sun, Y. F. aut Maeda, R. aut Enthalten in Microsystem technologies Berlin : Springer, 1994 13(2007), 11-12 vom: 04. Jan., Seite 1501-1508 (DE-627)270128182 (DE-600)1476561-5 1432-1858 nnns volume:13 year:2007 number:11-12 day:04 month:01 pages:1501-1508 https://dx.doi.org/10.1007/s00542-006-0346-1 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_266 GBV_ILN_267 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 13 2007 11-12 04 01 1501-1508 |
| spelling |
10.1007/s00542-006-0346-1 doi (DE-627)SPR006809960 (SPR)s00542-006-0346-1-e DE-627 ger DE-627 rakwb eng Shan, X. C. verfasserin aut Studies on a micro turbine device with both journal- and thrust-air bearings 2007 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer-Verlag 2006 Abstract This paper presents design, fabrication, analysis and test of a silicon-based micro turbine device that is driven by compressed air. To improve the motion stability at high rotational speed, the turbine device employs an enhanced micro air bearing system that includes both journal air bearing and thrust air bearings. The double-sides dynamic thrust air bearings are designed to support the rotor from both its top and bottom sides. The top thrust air bearing employs pump-in spiral groove configuration, and the bottom bearing uses pump-out spiral groove configuration. The dynamic journal air bearing is formed by a plain circular trench with a short journal length (L) and a narrow radial clearance (C). The critical aspect ratio (L/C) over 20:1 is realized through an optimized fabrication process. The micro turbine device has been fabricated, integrated and tested. During the test, the turbine device demonstrated stable operations at a rotational speed of 14,700 rpm. Load Capacity (dpeaa)DE-He213 Journal Bearing (dpeaa)DE-He213 Centrifugal Compressor (dpeaa)DE-He213 Thrust Bearing (dpeaa)DE-He213 Radial Clearance (dpeaa)DE-He213 Zhang, Q. D. aut Sun, Y. F. aut Maeda, R. aut Enthalten in Microsystem technologies Berlin : Springer, 1994 13(2007), 11-12 vom: 04. Jan., Seite 1501-1508 (DE-627)270128182 (DE-600)1476561-5 1432-1858 nnns volume:13 year:2007 number:11-12 day:04 month:01 pages:1501-1508 https://dx.doi.org/10.1007/s00542-006-0346-1 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_266 GBV_ILN_267 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 13 2007 11-12 04 01 1501-1508 |
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10.1007/s00542-006-0346-1 doi (DE-627)SPR006809960 (SPR)s00542-006-0346-1-e DE-627 ger DE-627 rakwb eng Shan, X. C. verfasserin aut Studies on a micro turbine device with both journal- and thrust-air bearings 2007 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer-Verlag 2006 Abstract This paper presents design, fabrication, analysis and test of a silicon-based micro turbine device that is driven by compressed air. To improve the motion stability at high rotational speed, the turbine device employs an enhanced micro air bearing system that includes both journal air bearing and thrust air bearings. The double-sides dynamic thrust air bearings are designed to support the rotor from both its top and bottom sides. The top thrust air bearing employs pump-in spiral groove configuration, and the bottom bearing uses pump-out spiral groove configuration. The dynamic journal air bearing is formed by a plain circular trench with a short journal length (L) and a narrow radial clearance (C). The critical aspect ratio (L/C) over 20:1 is realized through an optimized fabrication process. The micro turbine device has been fabricated, integrated and tested. During the test, the turbine device demonstrated stable operations at a rotational speed of 14,700 rpm. Load Capacity (dpeaa)DE-He213 Journal Bearing (dpeaa)DE-He213 Centrifugal Compressor (dpeaa)DE-He213 Thrust Bearing (dpeaa)DE-He213 Radial Clearance (dpeaa)DE-He213 Zhang, Q. D. aut Sun, Y. F. aut Maeda, R. aut Enthalten in Microsystem technologies Berlin : Springer, 1994 13(2007), 11-12 vom: 04. Jan., Seite 1501-1508 (DE-627)270128182 (DE-600)1476561-5 1432-1858 nnns volume:13 year:2007 number:11-12 day:04 month:01 pages:1501-1508 https://dx.doi.org/10.1007/s00542-006-0346-1 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_266 GBV_ILN_267 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 13 2007 11-12 04 01 1501-1508 |
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10.1007/s00542-006-0346-1 doi (DE-627)SPR006809960 (SPR)s00542-006-0346-1-e DE-627 ger DE-627 rakwb eng Shan, X. C. verfasserin aut Studies on a micro turbine device with both journal- and thrust-air bearings 2007 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer-Verlag 2006 Abstract This paper presents design, fabrication, analysis and test of a silicon-based micro turbine device that is driven by compressed air. To improve the motion stability at high rotational speed, the turbine device employs an enhanced micro air bearing system that includes both journal air bearing and thrust air bearings. The double-sides dynamic thrust air bearings are designed to support the rotor from both its top and bottom sides. The top thrust air bearing employs pump-in spiral groove configuration, and the bottom bearing uses pump-out spiral groove configuration. The dynamic journal air bearing is formed by a plain circular trench with a short journal length (L) and a narrow radial clearance (C). The critical aspect ratio (L/C) over 20:1 is realized through an optimized fabrication process. The micro turbine device has been fabricated, integrated and tested. During the test, the turbine device demonstrated stable operations at a rotational speed of 14,700 rpm. Load Capacity (dpeaa)DE-He213 Journal Bearing (dpeaa)DE-He213 Centrifugal Compressor (dpeaa)DE-He213 Thrust Bearing (dpeaa)DE-He213 Radial Clearance (dpeaa)DE-He213 Zhang, Q. D. aut Sun, Y. F. aut Maeda, R. aut Enthalten in Microsystem technologies Berlin : Springer, 1994 13(2007), 11-12 vom: 04. Jan., Seite 1501-1508 (DE-627)270128182 (DE-600)1476561-5 1432-1858 nnns volume:13 year:2007 number:11-12 day:04 month:01 pages:1501-1508 https://dx.doi.org/10.1007/s00542-006-0346-1 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_266 GBV_ILN_267 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 13 2007 11-12 04 01 1501-1508 |
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10.1007/s00542-006-0346-1 doi (DE-627)SPR006809960 (SPR)s00542-006-0346-1-e DE-627 ger DE-627 rakwb eng Shan, X. C. verfasserin aut Studies on a micro turbine device with both journal- and thrust-air bearings 2007 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer-Verlag 2006 Abstract This paper presents design, fabrication, analysis and test of a silicon-based micro turbine device that is driven by compressed air. To improve the motion stability at high rotational speed, the turbine device employs an enhanced micro air bearing system that includes both journal air bearing and thrust air bearings. The double-sides dynamic thrust air bearings are designed to support the rotor from both its top and bottom sides. The top thrust air bearing employs pump-in spiral groove configuration, and the bottom bearing uses pump-out spiral groove configuration. The dynamic journal air bearing is formed by a plain circular trench with a short journal length (L) and a narrow radial clearance (C). The critical aspect ratio (L/C) over 20:1 is realized through an optimized fabrication process. The micro turbine device has been fabricated, integrated and tested. During the test, the turbine device demonstrated stable operations at a rotational speed of 14,700 rpm. Load Capacity (dpeaa)DE-He213 Journal Bearing (dpeaa)DE-He213 Centrifugal Compressor (dpeaa)DE-He213 Thrust Bearing (dpeaa)DE-He213 Radial Clearance (dpeaa)DE-He213 Zhang, Q. D. aut Sun, Y. F. aut Maeda, R. aut Enthalten in Microsystem technologies Berlin : Springer, 1994 13(2007), 11-12 vom: 04. Jan., Seite 1501-1508 (DE-627)270128182 (DE-600)1476561-5 1432-1858 nnns volume:13 year:2007 number:11-12 day:04 month:01 pages:1501-1508 https://dx.doi.org/10.1007/s00542-006-0346-1 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_266 GBV_ILN_267 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 13 2007 11-12 04 01 1501-1508 |
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Shan, X. C. |
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Shan, X. C. misc Load Capacity misc Journal Bearing misc Centrifugal Compressor misc Thrust Bearing misc Radial Clearance Studies on a micro turbine device with both journal- and thrust-air bearings |
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Studies on a micro turbine device with both journal- and thrust-air bearings Load Capacity (dpeaa)DE-He213 Journal Bearing (dpeaa)DE-He213 Centrifugal Compressor (dpeaa)DE-He213 Thrust Bearing (dpeaa)DE-He213 Radial Clearance (dpeaa)DE-He213 |
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studies on a micro turbine device with both journal- and thrust-air bearings |
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Studies on a micro turbine device with both journal- and thrust-air bearings |
| abstract |
Abstract This paper presents design, fabrication, analysis and test of a silicon-based micro turbine device that is driven by compressed air. To improve the motion stability at high rotational speed, the turbine device employs an enhanced micro air bearing system that includes both journal air bearing and thrust air bearings. The double-sides dynamic thrust air bearings are designed to support the rotor from both its top and bottom sides. The top thrust air bearing employs pump-in spiral groove configuration, and the bottom bearing uses pump-out spiral groove configuration. The dynamic journal air bearing is formed by a plain circular trench with a short journal length (L) and a narrow radial clearance (C). The critical aspect ratio (L/C) over 20:1 is realized through an optimized fabrication process. The micro turbine device has been fabricated, integrated and tested. During the test, the turbine device demonstrated stable operations at a rotational speed of 14,700 rpm. © Springer-Verlag 2006 |
| abstractGer |
Abstract This paper presents design, fabrication, analysis and test of a silicon-based micro turbine device that is driven by compressed air. To improve the motion stability at high rotational speed, the turbine device employs an enhanced micro air bearing system that includes both journal air bearing and thrust air bearings. The double-sides dynamic thrust air bearings are designed to support the rotor from both its top and bottom sides. The top thrust air bearing employs pump-in spiral groove configuration, and the bottom bearing uses pump-out spiral groove configuration. The dynamic journal air bearing is formed by a plain circular trench with a short journal length (L) and a narrow radial clearance (C). The critical aspect ratio (L/C) over 20:1 is realized through an optimized fabrication process. The micro turbine device has been fabricated, integrated and tested. During the test, the turbine device demonstrated stable operations at a rotational speed of 14,700 rpm. © Springer-Verlag 2006 |
| abstract_unstemmed |
Abstract This paper presents design, fabrication, analysis and test of a silicon-based micro turbine device that is driven by compressed air. To improve the motion stability at high rotational speed, the turbine device employs an enhanced micro air bearing system that includes both journal air bearing and thrust air bearings. The double-sides dynamic thrust air bearings are designed to support the rotor from both its top and bottom sides. The top thrust air bearing employs pump-in spiral groove configuration, and the bottom bearing uses pump-out spiral groove configuration. The dynamic journal air bearing is formed by a plain circular trench with a short journal length (L) and a narrow radial clearance (C). The critical aspect ratio (L/C) over 20:1 is realized through an optimized fabrication process. The micro turbine device has been fabricated, integrated and tested. During the test, the turbine device demonstrated stable operations at a rotational speed of 14,700 rpm. © Springer-Verlag 2006 |
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Studies on a micro turbine device with both journal- and thrust-air bearings |
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https://dx.doi.org/10.1007/s00542-006-0346-1 |
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Zhang, Q. D. Sun, Y. F. Maeda, R. |
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10.1007/s00542-006-0346-1 |
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