Experimental investigation of the influence of excitation signal on radiation characteristics of capacitive micromachined ultrasonic transducer

Abstract CMUT based on micro-electro-mechanical systems (MEMS) technology has a broad application prospects and has become the mainstream transducer for the new generation of ultrasound imaging systems. In this paper, based on the 16-element linear CMUT array chip that has been manufactured, an expe...
Ausführliche Beschreibung

Gespeichert in:
Autor*in:

Wang, Hongliang [verfasserIn]

Tong, Yifei [verfasserIn]

Wang, Xiangjun [verfasserIn]

He, Changde [verfasserIn]

Xue, Chenyang [verfasserIn]

Format:

E-Artikel

Sprache:

Englisch

Erschienen:

2018

Übergeordnetes Werk:

Enthalten in: Microsystem technologies - Berlin : Springer, 1994, 24(2018), 12 vom: 07. Sept., Seite 5055-5063

Übergeordnetes Werk:

volume:24 ; year:2018 ; number:12 ; day:07 ; month:09 ; pages:5055-5063

Links:

Volltext

DOI / URN:

10.1007/s00542-018-4131-8

Katalog-ID:

SPR006847072

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