Investigation of glass panels thickness profile by all-fiber digital heterodyne interferometry
Abstract All-fiber digital heterodyne interferometry is a laser metrology technique employing pseudo-random codes phase modulated onto an optical carrier signal. In this heterodyne interferometer system, the optical signal includes signal reflected and transmitted from the sample, respectively. Comp...
Ausführliche Beschreibung
Autor*in: |
Gao, Long [verfasserIn] Wang, Chunhui [verfasserIn] Ji, Yiqin [verfasserIn] Li, Yanchao [verfasserIn] Cong, Haifang [verfasserIn] Qu, Yang [verfasserIn] |
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E-Artikel |
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Sprache: |
Englisch |
Erschienen: |
2010 |
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Übergeordnetes Werk: |
Enthalten in: Optical review - Tokyo : Business Center for Acad. Soc., 1994, 17(2010), 6 vom: Nov., Seite 549-552 |
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Übergeordnetes Werk: |
volume:17 ; year:2010 ; number:6 ; month:11 ; pages:549-552 |
Links: |
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DOI / URN: |
10.1007/s10043-010-0098-0 |
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Katalog-ID: |
SPR008198802 |
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520 | |a Abstract All-fiber digital heterodyne interferometry is a laser metrology technique employing pseudo-random codes phase modulated onto an optical carrier signal. In this heterodyne interferometer system, the optical signal includes signal reflected and transmitted from the sample, respectively. Compared with the conventional heterodyne interferometry, this enhanced optical system has much higher measurement sensitivity, and can distinguish the signal which reflected from the front and the rear surface of the sample. Analysis and simulation for the digital heterodyne interferometry are presented. It takes approximately 4 s to scan the whole surface with the diameter of 300 mm. The thickness profile of the sample is obtained in the experiment. The discussion about the experiment is given finally. | ||
650 | 4 | |a heterodyne interferometry |7 (dpeaa)DE-He213 | |
650 | 4 | |a balanced detection |7 (dpeaa)DE-He213 | |
650 | 4 | |a heterodyne detection |7 (dpeaa)DE-He213 | |
650 | 4 | |a pseudorandom noise code |7 (dpeaa)DE-He213 | |
700 | 1 | |a Wang, Chunhui |e verfasserin |4 aut | |
700 | 1 | |a Ji, Yiqin |e verfasserin |4 aut | |
700 | 1 | |a Li, Yanchao |e verfasserin |4 aut | |
700 | 1 | |a Cong, Haifang |e verfasserin |4 aut | |
700 | 1 | |a Qu, Yang |e verfasserin |4 aut | |
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10.1007/s10043-010-0098-0 doi (DE-627)SPR008198802 (SPR)s10043-010-0098-0-e DE-627 ger DE-627 rakwb eng 530 ASE 33.18 bkl 50.37 bkl Gao, Long verfasserin aut Investigation of glass panels thickness profile by all-fiber digital heterodyne interferometry 2010 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract All-fiber digital heterodyne interferometry is a laser metrology technique employing pseudo-random codes phase modulated onto an optical carrier signal. In this heterodyne interferometer system, the optical signal includes signal reflected and transmitted from the sample, respectively. Compared with the conventional heterodyne interferometry, this enhanced optical system has much higher measurement sensitivity, and can distinguish the signal which reflected from the front and the rear surface of the sample. Analysis and simulation for the digital heterodyne interferometry are presented. It takes approximately 4 s to scan the whole surface with the diameter of 300 mm. The thickness profile of the sample is obtained in the experiment. The discussion about the experiment is given finally. heterodyne interferometry (dpeaa)DE-He213 balanced detection (dpeaa)DE-He213 heterodyne detection (dpeaa)DE-He213 pseudorandom noise code (dpeaa)DE-He213 Wang, Chunhui verfasserin aut Ji, Yiqin verfasserin aut Li, Yanchao verfasserin aut Cong, Haifang verfasserin aut Qu, Yang verfasserin aut Enthalten in Optical review Tokyo : Business Center for Acad. Soc., 1994 17(2010), 6 vom: Nov., Seite 549-552 (DE-627)320485935 (DE-600)2010420-0 1349-9432 nnns volume:17 year:2010 number:6 month:11 pages:549-552 https://dx.doi.org/10.1007/s10043-010-0098-0 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 33.18 ASE 50.37 ASE AR 17 2010 6 11 549-552 |
spelling |
10.1007/s10043-010-0098-0 doi (DE-627)SPR008198802 (SPR)s10043-010-0098-0-e DE-627 ger DE-627 rakwb eng 530 ASE 33.18 bkl 50.37 bkl Gao, Long verfasserin aut Investigation of glass panels thickness profile by all-fiber digital heterodyne interferometry 2010 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract All-fiber digital heterodyne interferometry is a laser metrology technique employing pseudo-random codes phase modulated onto an optical carrier signal. In this heterodyne interferometer system, the optical signal includes signal reflected and transmitted from the sample, respectively. Compared with the conventional heterodyne interferometry, this enhanced optical system has much higher measurement sensitivity, and can distinguish the signal which reflected from the front and the rear surface of the sample. Analysis and simulation for the digital heterodyne interferometry are presented. It takes approximately 4 s to scan the whole surface with the diameter of 300 mm. The thickness profile of the sample is obtained in the experiment. The discussion about the experiment is given finally. heterodyne interferometry (dpeaa)DE-He213 balanced detection (dpeaa)DE-He213 heterodyne detection (dpeaa)DE-He213 pseudorandom noise code (dpeaa)DE-He213 Wang, Chunhui verfasserin aut Ji, Yiqin verfasserin aut Li, Yanchao verfasserin aut Cong, Haifang verfasserin aut Qu, Yang verfasserin aut Enthalten in Optical review Tokyo : Business Center for Acad. Soc., 1994 17(2010), 6 vom: Nov., Seite 549-552 (DE-627)320485935 (DE-600)2010420-0 1349-9432 nnns volume:17 year:2010 number:6 month:11 pages:549-552 https://dx.doi.org/10.1007/s10043-010-0098-0 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 33.18 ASE 50.37 ASE AR 17 2010 6 11 549-552 |
allfields_unstemmed |
10.1007/s10043-010-0098-0 doi (DE-627)SPR008198802 (SPR)s10043-010-0098-0-e DE-627 ger DE-627 rakwb eng 530 ASE 33.18 bkl 50.37 bkl Gao, Long verfasserin aut Investigation of glass panels thickness profile by all-fiber digital heterodyne interferometry 2010 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract All-fiber digital heterodyne interferometry is a laser metrology technique employing pseudo-random codes phase modulated onto an optical carrier signal. In this heterodyne interferometer system, the optical signal includes signal reflected and transmitted from the sample, respectively. Compared with the conventional heterodyne interferometry, this enhanced optical system has much higher measurement sensitivity, and can distinguish the signal which reflected from the front and the rear surface of the sample. Analysis and simulation for the digital heterodyne interferometry are presented. It takes approximately 4 s to scan the whole surface with the diameter of 300 mm. The thickness profile of the sample is obtained in the experiment. The discussion about the experiment is given finally. heterodyne interferometry (dpeaa)DE-He213 balanced detection (dpeaa)DE-He213 heterodyne detection (dpeaa)DE-He213 pseudorandom noise code (dpeaa)DE-He213 Wang, Chunhui verfasserin aut Ji, Yiqin verfasserin aut Li, Yanchao verfasserin aut Cong, Haifang verfasserin aut Qu, Yang verfasserin aut Enthalten in Optical review Tokyo : Business Center for Acad. Soc., 1994 17(2010), 6 vom: Nov., Seite 549-552 (DE-627)320485935 (DE-600)2010420-0 1349-9432 nnns volume:17 year:2010 number:6 month:11 pages:549-552 https://dx.doi.org/10.1007/s10043-010-0098-0 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 33.18 ASE 50.37 ASE AR 17 2010 6 11 549-552 |
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10.1007/s10043-010-0098-0 doi (DE-627)SPR008198802 (SPR)s10043-010-0098-0-e DE-627 ger DE-627 rakwb eng 530 ASE 33.18 bkl 50.37 bkl Gao, Long verfasserin aut Investigation of glass panels thickness profile by all-fiber digital heterodyne interferometry 2010 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract All-fiber digital heterodyne interferometry is a laser metrology technique employing pseudo-random codes phase modulated onto an optical carrier signal. In this heterodyne interferometer system, the optical signal includes signal reflected and transmitted from the sample, respectively. Compared with the conventional heterodyne interferometry, this enhanced optical system has much higher measurement sensitivity, and can distinguish the signal which reflected from the front and the rear surface of the sample. Analysis and simulation for the digital heterodyne interferometry are presented. It takes approximately 4 s to scan the whole surface with the diameter of 300 mm. The thickness profile of the sample is obtained in the experiment. The discussion about the experiment is given finally. heterodyne interferometry (dpeaa)DE-He213 balanced detection (dpeaa)DE-He213 heterodyne detection (dpeaa)DE-He213 pseudorandom noise code (dpeaa)DE-He213 Wang, Chunhui verfasserin aut Ji, Yiqin verfasserin aut Li, Yanchao verfasserin aut Cong, Haifang verfasserin aut Qu, Yang verfasserin aut Enthalten in Optical review Tokyo : Business Center for Acad. Soc., 1994 17(2010), 6 vom: Nov., Seite 549-552 (DE-627)320485935 (DE-600)2010420-0 1349-9432 nnns volume:17 year:2010 number:6 month:11 pages:549-552 https://dx.doi.org/10.1007/s10043-010-0098-0 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 33.18 ASE 50.37 ASE AR 17 2010 6 11 549-552 |
allfieldsSound |
10.1007/s10043-010-0098-0 doi (DE-627)SPR008198802 (SPR)s10043-010-0098-0-e DE-627 ger DE-627 rakwb eng 530 ASE 33.18 bkl 50.37 bkl Gao, Long verfasserin aut Investigation of glass panels thickness profile by all-fiber digital heterodyne interferometry 2010 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract All-fiber digital heterodyne interferometry is a laser metrology technique employing pseudo-random codes phase modulated onto an optical carrier signal. In this heterodyne interferometer system, the optical signal includes signal reflected and transmitted from the sample, respectively. Compared with the conventional heterodyne interferometry, this enhanced optical system has much higher measurement sensitivity, and can distinguish the signal which reflected from the front and the rear surface of the sample. Analysis and simulation for the digital heterodyne interferometry are presented. It takes approximately 4 s to scan the whole surface with the diameter of 300 mm. The thickness profile of the sample is obtained in the experiment. The discussion about the experiment is given finally. heterodyne interferometry (dpeaa)DE-He213 balanced detection (dpeaa)DE-He213 heterodyne detection (dpeaa)DE-He213 pseudorandom noise code (dpeaa)DE-He213 Wang, Chunhui verfasserin aut Ji, Yiqin verfasserin aut Li, Yanchao verfasserin aut Cong, Haifang verfasserin aut Qu, Yang verfasserin aut Enthalten in Optical review Tokyo : Business Center for Acad. Soc., 1994 17(2010), 6 vom: Nov., Seite 549-552 (DE-627)320485935 (DE-600)2010420-0 1349-9432 nnns volume:17 year:2010 number:6 month:11 pages:549-552 https://dx.doi.org/10.1007/s10043-010-0098-0 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 33.18 ASE 50.37 ASE AR 17 2010 6 11 549-552 |
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Optical review |
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Gao, Long @@aut@@ Wang, Chunhui @@aut@@ Ji, Yiqin @@aut@@ Li, Yanchao @@aut@@ Cong, Haifang @@aut@@ Qu, Yang @@aut@@ |
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Gao, Long |
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Gao, Long ddc 530 bkl 33.18 bkl 50.37 misc heterodyne interferometry misc balanced detection misc heterodyne detection misc pseudorandom noise code Investigation of glass panels thickness profile by all-fiber digital heterodyne interferometry |
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530 ASE 33.18 bkl 50.37 bkl Investigation of glass panels thickness profile by all-fiber digital heterodyne interferometry heterodyne interferometry (dpeaa)DE-He213 balanced detection (dpeaa)DE-He213 heterodyne detection (dpeaa)DE-He213 pseudorandom noise code (dpeaa)DE-He213 |
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ddc 530 bkl 33.18 bkl 50.37 misc heterodyne interferometry misc balanced detection misc heterodyne detection misc pseudorandom noise code |
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ddc 530 bkl 33.18 bkl 50.37 misc heterodyne interferometry misc balanced detection misc heterodyne detection misc pseudorandom noise code |
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Investigation of glass panels thickness profile by all-fiber digital heterodyne interferometry |
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Investigation of glass panels thickness profile by all-fiber digital heterodyne interferometry |
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investigation of glass panels thickness profile by all-fiber digital heterodyne interferometry |
title_auth |
Investigation of glass panels thickness profile by all-fiber digital heterodyne interferometry |
abstract |
Abstract All-fiber digital heterodyne interferometry is a laser metrology technique employing pseudo-random codes phase modulated onto an optical carrier signal. In this heterodyne interferometer system, the optical signal includes signal reflected and transmitted from the sample, respectively. Compared with the conventional heterodyne interferometry, this enhanced optical system has much higher measurement sensitivity, and can distinguish the signal which reflected from the front and the rear surface of the sample. Analysis and simulation for the digital heterodyne interferometry are presented. It takes approximately 4 s to scan the whole surface with the diameter of 300 mm. The thickness profile of the sample is obtained in the experiment. The discussion about the experiment is given finally. |
abstractGer |
Abstract All-fiber digital heterodyne interferometry is a laser metrology technique employing pseudo-random codes phase modulated onto an optical carrier signal. In this heterodyne interferometer system, the optical signal includes signal reflected and transmitted from the sample, respectively. Compared with the conventional heterodyne interferometry, this enhanced optical system has much higher measurement sensitivity, and can distinguish the signal which reflected from the front and the rear surface of the sample. Analysis and simulation for the digital heterodyne interferometry are presented. It takes approximately 4 s to scan the whole surface with the diameter of 300 mm. The thickness profile of the sample is obtained in the experiment. The discussion about the experiment is given finally. |
abstract_unstemmed |
Abstract All-fiber digital heterodyne interferometry is a laser metrology technique employing pseudo-random codes phase modulated onto an optical carrier signal. In this heterodyne interferometer system, the optical signal includes signal reflected and transmitted from the sample, respectively. Compared with the conventional heterodyne interferometry, this enhanced optical system has much higher measurement sensitivity, and can distinguish the signal which reflected from the front and the rear surface of the sample. Analysis and simulation for the digital heterodyne interferometry are presented. It takes approximately 4 s to scan the whole surface with the diameter of 300 mm. The thickness profile of the sample is obtained in the experiment. The discussion about the experiment is given finally. |
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title_short |
Investigation of glass panels thickness profile by all-fiber digital heterodyne interferometry |
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https://dx.doi.org/10.1007/s10043-010-0098-0 |
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Wang, Chunhui Ji, Yiqin Li, Yanchao Cong, Haifang Qu, Yang |
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<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">SPR008198802</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20220110201301.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">201005s2010 xx |||||o 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/s10043-010-0098-0</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)SPR008198802</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(SPR)s10043-010-0098-0-e</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">530</subfield><subfield code="q">ASE</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">33.18</subfield><subfield code="2">bkl</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">50.37</subfield><subfield code="2">bkl</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Gao, Long</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Investigation of glass panels thickness profile by all-fiber digital heterodyne interferometry</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2010</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">Computermedien</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Online-Ressource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Abstract All-fiber digital heterodyne interferometry is a laser metrology technique employing pseudo-random codes phase modulated onto an optical carrier signal. In this heterodyne interferometer system, the optical signal includes signal reflected and transmitted from the sample, respectively. Compared with the conventional heterodyne interferometry, this enhanced optical system has much higher measurement sensitivity, and can distinguish the signal which reflected from the front and the rear surface of the sample. Analysis and simulation for the digital heterodyne interferometry are presented. It takes approximately 4 s to scan the whole surface with the diameter of 300 mm. The thickness profile of the sample is obtained in the experiment. The discussion about the experiment is given finally.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">heterodyne interferometry</subfield><subfield code="7">(dpeaa)DE-He213</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">balanced detection</subfield><subfield code="7">(dpeaa)DE-He213</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">heterodyne detection</subfield><subfield code="7">(dpeaa)DE-He213</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">pseudorandom noise code</subfield><subfield code="7">(dpeaa)DE-He213</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Wang, Chunhui</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ji, Yiqin</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Li, Yanchao</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Cong, Haifang</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Qu, Yang</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Enthalten in</subfield><subfield code="t">Optical review</subfield><subfield code="d">Tokyo : Business Center for Acad. Soc., 1994</subfield><subfield code="g">17(2010), 6 vom: Nov., Seite 549-552</subfield><subfield code="w">(DE-627)320485935</subfield><subfield code="w">(DE-600)2010420-0</subfield><subfield code="x">1349-9432</subfield><subfield code="7">nnns</subfield></datafield><datafield tag="773" ind1="1" ind2="8"><subfield code="g">volume:17</subfield><subfield code="g">year:2010</subfield><subfield code="g">number:6</subfield><subfield code="g">month:11</subfield><subfield code="g">pages:549-552</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://dx.doi.org/10.1007/s10043-010-0098-0</subfield><subfield code="z">lizenzpflichtig</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_USEFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_A</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield 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