Optical and electrical characteristics of amorphous boron carbonitride thin films deposited by radiofrequency sputtering
Abstract Amorphous boron carbonitride (a-BCN) thin films were deposited by reactive radiofrequency (RF) sputtering onto silicon and glass substrates, from a boron carbide target in an atmosphere composed of a mixture of argon and nitrogen. The a-BCN films were highly transparent (almost 85%) in the...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Essafti, A. [verfasserIn] |
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| Format: |
E-Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2011 |
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| Schlagwörter: |
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| Anmerkung: |
© Springer Science+Business Media, LLC 2011 |
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| Übergeordnetes Werk: |
Enthalten in: Journal of materials science - Dordrecht [u.a.] : Springer Science + Business Media B.V, 1966, 46(2011), 17 vom: 01. Sept., Seite 5847-5850 |
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| Übergeordnetes Werk: |
volume:46 ; year:2011 ; number:17 ; day:01 ; month:09 ; pages:5847-5850 |
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| DOI / URN: |
10.1007/s10853-011-5541-5 |
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SPR013863339 |
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| 245 | 1 | 0 | |a Optical and electrical characteristics of amorphous boron carbonitride thin films deposited by radiofrequency sputtering |
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| 520 | |a Abstract Amorphous boron carbonitride (a-BCN) thin films were deposited by reactive radiofrequency (RF) sputtering onto silicon and glass substrates, from a boron carbide target in an atmosphere composed of a mixture of argon and nitrogen. The a-BCN films were highly transparent (almost 85%) in the visible and near-infrared regions. The optical band gap and the refractive index in the near-infrared region of the a-BCN films were found to be, respectively, in the range of 3.6 and 1.68 eV. The electrical characterization of the a-BCN films for application as an intermetal dielectric was investigated by measuring the current–voltage characteristic in Al/a-BCN/n-Si/Al structure. The electrical resistivity at room temperature, determined in the low voltage region where the Ohmic conduction mechanism is dominant, is around 2 × $ 10^{10} $ Ω cm. The electrical conduction results, in the high-applied fields, were interpreted in terms of a Schottky mechanism. The dielectric constant is about 2.83 and is consistent with the optical results. | ||
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| 650 | 4 | |a Current Conduction Mechanism |7 (dpeaa)DE-He213 | |
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10.1007/s10853-011-5541-5 doi (DE-627)SPR013863339 (SPR)s10853-011-5541-5-e DE-627 ger DE-627 rakwb eng Essafti, A. verfasserin aut Optical and electrical characteristics of amorphous boron carbonitride thin films deposited by radiofrequency sputtering 2011 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer Science+Business Media, LLC 2011 Abstract Amorphous boron carbonitride (a-BCN) thin films were deposited by reactive radiofrequency (RF) sputtering onto silicon and glass substrates, from a boron carbide target in an atmosphere composed of a mixture of argon and nitrogen. The a-BCN films were highly transparent (almost 85%) in the visible and near-infrared regions. The optical band gap and the refractive index in the near-infrared region of the a-BCN films were found to be, respectively, in the range of 3.6 and 1.68 eV. The electrical characterization of the a-BCN films for application as an intermetal dielectric was investigated by measuring the current–voltage characteristic in Al/a-BCN/n-Si/Al structure. The electrical resistivity at room temperature, determined in the low voltage region where the Ohmic conduction mechanism is dominant, is around 2 × $ 10^{10} $ Ω cm. The electrical conduction results, in the high-applied fields, were interpreted in terms of a Schottky mechanism. The dielectric constant is about 2.83 and is consistent with the optical results. Conduction Mechanism (dpeaa)DE-He213 Boron Carbide (dpeaa)DE-He213 Amorphous Boron (dpeaa)DE-He213 Schottky Emission (dpeaa)DE-He213 Current Conduction Mechanism (dpeaa)DE-He213 Ech-chamikh, E. aut Enthalten in Journal of materials science Dordrecht [u.a.] : Springer Science + Business Media B.V, 1966 46(2011), 17 vom: 01. Sept., Seite 5847-5850 (DE-627)315293969 (DE-600)2015305-3 1573-4803 nnns volume:46 year:2011 number:17 day:01 month:09 pages:5847-5850 https://dx.doi.org/10.1007/s10853-011-5541-5 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 46 2011 17 01 09 5847-5850 |
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10.1007/s10853-011-5541-5 doi (DE-627)SPR013863339 (SPR)s10853-011-5541-5-e DE-627 ger DE-627 rakwb eng Essafti, A. verfasserin aut Optical and electrical characteristics of amorphous boron carbonitride thin films deposited by radiofrequency sputtering 2011 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer Science+Business Media, LLC 2011 Abstract Amorphous boron carbonitride (a-BCN) thin films were deposited by reactive radiofrequency (RF) sputtering onto silicon and glass substrates, from a boron carbide target in an atmosphere composed of a mixture of argon and nitrogen. The a-BCN films were highly transparent (almost 85%) in the visible and near-infrared regions. The optical band gap and the refractive index in the near-infrared region of the a-BCN films were found to be, respectively, in the range of 3.6 and 1.68 eV. The electrical characterization of the a-BCN films for application as an intermetal dielectric was investigated by measuring the current–voltage characteristic in Al/a-BCN/n-Si/Al structure. The electrical resistivity at room temperature, determined in the low voltage region where the Ohmic conduction mechanism is dominant, is around 2 × $ 10^{10} $ Ω cm. The electrical conduction results, in the high-applied fields, were interpreted in terms of a Schottky mechanism. The dielectric constant is about 2.83 and is consistent with the optical results. Conduction Mechanism (dpeaa)DE-He213 Boron Carbide (dpeaa)DE-He213 Amorphous Boron (dpeaa)DE-He213 Schottky Emission (dpeaa)DE-He213 Current Conduction Mechanism (dpeaa)DE-He213 Ech-chamikh, E. aut Enthalten in Journal of materials science Dordrecht [u.a.] : Springer Science + Business Media B.V, 1966 46(2011), 17 vom: 01. Sept., Seite 5847-5850 (DE-627)315293969 (DE-600)2015305-3 1573-4803 nnns volume:46 year:2011 number:17 day:01 month:09 pages:5847-5850 https://dx.doi.org/10.1007/s10853-011-5541-5 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 46 2011 17 01 09 5847-5850 |
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10.1007/s10853-011-5541-5 doi (DE-627)SPR013863339 (SPR)s10853-011-5541-5-e DE-627 ger DE-627 rakwb eng Essafti, A. verfasserin aut Optical and electrical characteristics of amorphous boron carbonitride thin films deposited by radiofrequency sputtering 2011 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer Science+Business Media, LLC 2011 Abstract Amorphous boron carbonitride (a-BCN) thin films were deposited by reactive radiofrequency (RF) sputtering onto silicon and glass substrates, from a boron carbide target in an atmosphere composed of a mixture of argon and nitrogen. The a-BCN films were highly transparent (almost 85%) in the visible and near-infrared regions. The optical band gap and the refractive index in the near-infrared region of the a-BCN films were found to be, respectively, in the range of 3.6 and 1.68 eV. The electrical characterization of the a-BCN films for application as an intermetal dielectric was investigated by measuring the current–voltage characteristic in Al/a-BCN/n-Si/Al structure. The electrical resistivity at room temperature, determined in the low voltage region where the Ohmic conduction mechanism is dominant, is around 2 × $ 10^{10} $ Ω cm. The electrical conduction results, in the high-applied fields, were interpreted in terms of a Schottky mechanism. The dielectric constant is about 2.83 and is consistent with the optical results. Conduction Mechanism (dpeaa)DE-He213 Boron Carbide (dpeaa)DE-He213 Amorphous Boron (dpeaa)DE-He213 Schottky Emission (dpeaa)DE-He213 Current Conduction Mechanism (dpeaa)DE-He213 Ech-chamikh, E. aut Enthalten in Journal of materials science Dordrecht [u.a.] : Springer Science + Business Media B.V, 1966 46(2011), 17 vom: 01. Sept., Seite 5847-5850 (DE-627)315293969 (DE-600)2015305-3 1573-4803 nnns volume:46 year:2011 number:17 day:01 month:09 pages:5847-5850 https://dx.doi.org/10.1007/s10853-011-5541-5 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 46 2011 17 01 09 5847-5850 |
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10.1007/s10853-011-5541-5 doi (DE-627)SPR013863339 (SPR)s10853-011-5541-5-e DE-627 ger DE-627 rakwb eng Essafti, A. verfasserin aut Optical and electrical characteristics of amorphous boron carbonitride thin films deposited by radiofrequency sputtering 2011 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer Science+Business Media, LLC 2011 Abstract Amorphous boron carbonitride (a-BCN) thin films were deposited by reactive radiofrequency (RF) sputtering onto silicon and glass substrates, from a boron carbide target in an atmosphere composed of a mixture of argon and nitrogen. The a-BCN films were highly transparent (almost 85%) in the visible and near-infrared regions. The optical band gap and the refractive index in the near-infrared region of the a-BCN films were found to be, respectively, in the range of 3.6 and 1.68 eV. The electrical characterization of the a-BCN films for application as an intermetal dielectric was investigated by measuring the current–voltage characteristic in Al/a-BCN/n-Si/Al structure. The electrical resistivity at room temperature, determined in the low voltage region where the Ohmic conduction mechanism is dominant, is around 2 × $ 10^{10} $ Ω cm. The electrical conduction results, in the high-applied fields, were interpreted in terms of a Schottky mechanism. The dielectric constant is about 2.83 and is consistent with the optical results. Conduction Mechanism (dpeaa)DE-He213 Boron Carbide (dpeaa)DE-He213 Amorphous Boron (dpeaa)DE-He213 Schottky Emission (dpeaa)DE-He213 Current Conduction Mechanism (dpeaa)DE-He213 Ech-chamikh, E. aut Enthalten in Journal of materials science Dordrecht [u.a.] : Springer Science + Business Media B.V, 1966 46(2011), 17 vom: 01. Sept., Seite 5847-5850 (DE-627)315293969 (DE-600)2015305-3 1573-4803 nnns volume:46 year:2011 number:17 day:01 month:09 pages:5847-5850 https://dx.doi.org/10.1007/s10853-011-5541-5 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 46 2011 17 01 09 5847-5850 |
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10.1007/s10853-011-5541-5 doi (DE-627)SPR013863339 (SPR)s10853-011-5541-5-e DE-627 ger DE-627 rakwb eng Essafti, A. verfasserin aut Optical and electrical characteristics of amorphous boron carbonitride thin films deposited by radiofrequency sputtering 2011 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer Science+Business Media, LLC 2011 Abstract Amorphous boron carbonitride (a-BCN) thin films were deposited by reactive radiofrequency (RF) sputtering onto silicon and glass substrates, from a boron carbide target in an atmosphere composed of a mixture of argon and nitrogen. The a-BCN films were highly transparent (almost 85%) in the visible and near-infrared regions. The optical band gap and the refractive index in the near-infrared region of the a-BCN films were found to be, respectively, in the range of 3.6 and 1.68 eV. The electrical characterization of the a-BCN films for application as an intermetal dielectric was investigated by measuring the current–voltage characteristic in Al/a-BCN/n-Si/Al structure. The electrical resistivity at room temperature, determined in the low voltage region where the Ohmic conduction mechanism is dominant, is around 2 × $ 10^{10} $ Ω cm. The electrical conduction results, in the high-applied fields, were interpreted in terms of a Schottky mechanism. The dielectric constant is about 2.83 and is consistent with the optical results. Conduction Mechanism (dpeaa)DE-He213 Boron Carbide (dpeaa)DE-He213 Amorphous Boron (dpeaa)DE-He213 Schottky Emission (dpeaa)DE-He213 Current Conduction Mechanism (dpeaa)DE-He213 Ech-chamikh, E. aut Enthalten in Journal of materials science Dordrecht [u.a.] : Springer Science + Business Media B.V, 1966 46(2011), 17 vom: 01. Sept., Seite 5847-5850 (DE-627)315293969 (DE-600)2015305-3 1573-4803 nnns volume:46 year:2011 number:17 day:01 month:09 pages:5847-5850 https://dx.doi.org/10.1007/s10853-011-5541-5 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 46 2011 17 01 09 5847-5850 |
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Essafti, A. |
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Essafti, A. misc Conduction Mechanism misc Boron Carbide misc Amorphous Boron misc Schottky Emission misc Current Conduction Mechanism Optical and electrical characteristics of amorphous boron carbonitride thin films deposited by radiofrequency sputtering |
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Optical and electrical characteristics of amorphous boron carbonitride thin films deposited by radiofrequency sputtering Conduction Mechanism (dpeaa)DE-He213 Boron Carbide (dpeaa)DE-He213 Amorphous Boron (dpeaa)DE-He213 Schottky Emission (dpeaa)DE-He213 Current Conduction Mechanism (dpeaa)DE-He213 |
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Optical and electrical characteristics of amorphous boron carbonitride thin films deposited by radiofrequency sputtering |
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Optical and electrical characteristics of amorphous boron carbonitride thin films deposited by radiofrequency sputtering |
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optical and electrical characteristics of amorphous boron carbonitride thin films deposited by radiofrequency sputtering |
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Optical and electrical characteristics of amorphous boron carbonitride thin films deposited by radiofrequency sputtering |
| abstract |
Abstract Amorphous boron carbonitride (a-BCN) thin films were deposited by reactive radiofrequency (RF) sputtering onto silicon and glass substrates, from a boron carbide target in an atmosphere composed of a mixture of argon and nitrogen. The a-BCN films were highly transparent (almost 85%) in the visible and near-infrared regions. The optical band gap and the refractive index in the near-infrared region of the a-BCN films were found to be, respectively, in the range of 3.6 and 1.68 eV. The electrical characterization of the a-BCN films for application as an intermetal dielectric was investigated by measuring the current–voltage characteristic in Al/a-BCN/n-Si/Al structure. The electrical resistivity at room temperature, determined in the low voltage region where the Ohmic conduction mechanism is dominant, is around 2 × $ 10^{10} $ Ω cm. The electrical conduction results, in the high-applied fields, were interpreted in terms of a Schottky mechanism. The dielectric constant is about 2.83 and is consistent with the optical results. © Springer Science+Business Media, LLC 2011 |
| abstractGer |
Abstract Amorphous boron carbonitride (a-BCN) thin films were deposited by reactive radiofrequency (RF) sputtering onto silicon and glass substrates, from a boron carbide target in an atmosphere composed of a mixture of argon and nitrogen. The a-BCN films were highly transparent (almost 85%) in the visible and near-infrared regions. The optical band gap and the refractive index in the near-infrared region of the a-BCN films were found to be, respectively, in the range of 3.6 and 1.68 eV. The electrical characterization of the a-BCN films for application as an intermetal dielectric was investigated by measuring the current–voltage characteristic in Al/a-BCN/n-Si/Al structure. The electrical resistivity at room temperature, determined in the low voltage region where the Ohmic conduction mechanism is dominant, is around 2 × $ 10^{10} $ Ω cm. The electrical conduction results, in the high-applied fields, were interpreted in terms of a Schottky mechanism. The dielectric constant is about 2.83 and is consistent with the optical results. © Springer Science+Business Media, LLC 2011 |
| abstract_unstemmed |
Abstract Amorphous boron carbonitride (a-BCN) thin films were deposited by reactive radiofrequency (RF) sputtering onto silicon and glass substrates, from a boron carbide target in an atmosphere composed of a mixture of argon and nitrogen. The a-BCN films were highly transparent (almost 85%) in the visible and near-infrared regions. The optical band gap and the refractive index in the near-infrared region of the a-BCN films were found to be, respectively, in the range of 3.6 and 1.68 eV. The electrical characterization of the a-BCN films for application as an intermetal dielectric was investigated by measuring the current–voltage characteristic in Al/a-BCN/n-Si/Al structure. The electrical resistivity at room temperature, determined in the low voltage region where the Ohmic conduction mechanism is dominant, is around 2 × $ 10^{10} $ Ω cm. The electrical conduction results, in the high-applied fields, were interpreted in terms of a Schottky mechanism. The dielectric constant is about 2.83 and is consistent with the optical results. © Springer Science+Business Media, LLC 2011 |
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17 |
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Optical and electrical characteristics of amorphous boron carbonitride thin films deposited by radiofrequency sputtering |
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https://dx.doi.org/10.1007/s10853-011-5541-5 |
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Ech-chamikh, E. |
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10.1007/s10853-011-5541-5 |
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2024-07-03T22:38:29.230Z |
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| score |
7.3995256 |