Gold thickness impact on the enhancement of SERS detection in low-cost Au/Si nanosensors

Abstract In this paper, we present a study on the optimization of Au/Si surface-enhanced Raman scattering sensors for ultrasensitive chemical detection. Au/Si nanosensors are carried out at the wafer scale with a low-cost and quick fabrication method composed of an anisotropic reactive ion etching f...
Ausführliche Beschreibung

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Autor*in:	Magno, G. [verfasserIn] Bélier, B. [verfasserIn] Barbillon, G. [verfasserIn]

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	2017

Übergeordnetes Werk:	Enthalten in: Journal of materials science - Dordrecht [u.a.] : Springer Science + Business Media B.V, 1966, 52(2017), 23 vom: 04. Aug., Seite 13650-13656
Übergeordnetes Werk:	volume:52 ; year:2017 ; number:23 ; day:04 ; month:08 ; pages:13650-13656

Links:	Volltext

DOI / URN:	10.1007/s10853-017-1445-3

Katalog-ID:	SPR013926586

Internformat


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520			\|a Abstract In this paper, we present a study on the optimization of Au/Si surface-enhanced Raman scattering sensors for ultrasensitive chemical detection. Au/Si nanosensors are carried out at the wafer scale with a low-cost and quick fabrication method composed of an anisotropic reactive ion etching followed by an electron beam evaporation of a gold layer. For this investigation, the thickness of the gold layer varied from 10 to 50 nm, and thiophenol molecules were chosen as model molecules of which the concentration varied from %$10^{-12}%$ to %$10^{-3}%$ M. The studied optimization exploits the effect of the gold layer thickness on the detection limit of thiophenol molecules for a fixed geometry of Si nanopillar. For all the cases investigated here, detection limits between %$9\times 10^{-12}%$ and %$3\times 10^{-8}%$ M are experimentally found for the detection of thiophenol molecules with the Au/Si nanopillars. Moreover, the best detection limits are achieved with the thickest gold layer. Finally, a 3D FDTD-based numerical analysis confirmed the experimental results.
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matchkey_str	article:15734803:2017----::odhcnsipcotenacmnosrdtcinno
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publishDate	2017
allfields	10.1007/s10853-017-1445-3 doi (DE-627)SPR013926586 (SPR)s10853-017-1445-3-e DE-627 ger DE-627 rakwb eng 670 ASE 51.00 bkl Magno, G. verfasserin aut Gold thickness impact on the enhancement of SERS detection in low-cost Au/Si nanosensors 2017 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract In this paper, we present a study on the optimization of Au/Si surface-enhanced Raman scattering sensors for ultrasensitive chemical detection. Au/Si nanosensors are carried out at the wafer scale with a low-cost and quick fabrication method composed of an anisotropic reactive ion etching followed by an electron beam evaporation of a gold layer. For this investigation, the thickness of the gold layer varied from 10 to 50 nm, and thiophenol molecules were chosen as model molecules of which the concentration varied from %$10^{-12}%$ to %$10^{-3}%$ M. The studied optimization exploits the effect of the gold layer thickness on the detection limit of thiophenol molecules for a fixed geometry of Si nanopillar. For all the cases investigated here, detection limits between %$9\times 10^{-12}%$ and %$3\times 10^{-8}%$ M are experimentally found for the detection of thiophenol molecules with the Au/Si nanopillars. Moreover, the best detection limits are achieved with the thickest gold layer. Finally, a 3D FDTD-based numerical analysis confirmed the experimental results. Bélier, B. verfasserin aut Barbillon, G. verfasserin aut Enthalten in Journal of materials science Dordrecht [u.a.] : Springer Science + Business Media B.V, 1966 52(2017), 23 vom: 04. Aug., Seite 13650-13656 (DE-627)315293969 (DE-600)2015305-3 1573-4803 nnns volume:52 year:2017 number:23 day:04 month:08 pages:13650-13656 https://dx.doi.org/10.1007/s10853-017-1445-3 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 51.00 ASE AR 52 2017 23 04 08 13650-13656
spelling	10.1007/s10853-017-1445-3 doi (DE-627)SPR013926586 (SPR)s10853-017-1445-3-e DE-627 ger DE-627 rakwb eng 670 ASE 51.00 bkl Magno, G. verfasserin aut Gold thickness impact on the enhancement of SERS detection in low-cost Au/Si nanosensors 2017 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract In this paper, we present a study on the optimization of Au/Si surface-enhanced Raman scattering sensors for ultrasensitive chemical detection. Au/Si nanosensors are carried out at the wafer scale with a low-cost and quick fabrication method composed of an anisotropic reactive ion etching followed by an electron beam evaporation of a gold layer. For this investigation, the thickness of the gold layer varied from 10 to 50 nm, and thiophenol molecules were chosen as model molecules of which the concentration varied from %$10^{-12}%$ to %$10^{-3}%$ M. The studied optimization exploits the effect of the gold layer thickness on the detection limit of thiophenol molecules for a fixed geometry of Si nanopillar. For all the cases investigated here, detection limits between %$9\times 10^{-12}%$ and %$3\times 10^{-8}%$ M are experimentally found for the detection of thiophenol molecules with the Au/Si nanopillars. Moreover, the best detection limits are achieved with the thickest gold layer. Finally, a 3D FDTD-based numerical analysis confirmed the experimental results. Bélier, B. verfasserin aut Barbillon, G. verfasserin aut Enthalten in Journal of materials science Dordrecht [u.a.] : Springer Science + Business Media B.V, 1966 52(2017), 23 vom: 04. Aug., Seite 13650-13656 (DE-627)315293969 (DE-600)2015305-3 1573-4803 nnns volume:52 year:2017 number:23 day:04 month:08 pages:13650-13656 https://dx.doi.org/10.1007/s10853-017-1445-3 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 51.00 ASE AR 52 2017 23 04 08 13650-13656
allfields_unstemmed	10.1007/s10853-017-1445-3 doi (DE-627)SPR013926586 (SPR)s10853-017-1445-3-e DE-627 ger DE-627 rakwb eng 670 ASE 51.00 bkl Magno, G. verfasserin aut Gold thickness impact on the enhancement of SERS detection in low-cost Au/Si nanosensors 2017 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract In this paper, we present a study on the optimization of Au/Si surface-enhanced Raman scattering sensors for ultrasensitive chemical detection. Au/Si nanosensors are carried out at the wafer scale with a low-cost and quick fabrication method composed of an anisotropic reactive ion etching followed by an electron beam evaporation of a gold layer. For this investigation, the thickness of the gold layer varied from 10 to 50 nm, and thiophenol molecules were chosen as model molecules of which the concentration varied from %$10^{-12}%$ to %$10^{-3}%$ M. The studied optimization exploits the effect of the gold layer thickness on the detection limit of thiophenol molecules for a fixed geometry of Si nanopillar. For all the cases investigated here, detection limits between %$9\times 10^{-12}%$ and %$3\times 10^{-8}%$ M are experimentally found for the detection of thiophenol molecules with the Au/Si nanopillars. Moreover, the best detection limits are achieved with the thickest gold layer. Finally, a 3D FDTD-based numerical analysis confirmed the experimental results. Bélier, B. verfasserin aut Barbillon, G. verfasserin aut Enthalten in Journal of materials science Dordrecht [u.a.] : Springer Science + Business Media B.V, 1966 52(2017), 23 vom: 04. Aug., Seite 13650-13656 (DE-627)315293969 (DE-600)2015305-3 1573-4803 nnns volume:52 year:2017 number:23 day:04 month:08 pages:13650-13656 https://dx.doi.org/10.1007/s10853-017-1445-3 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 51.00 ASE AR 52 2017 23 04 08 13650-13656
allfieldsGer	10.1007/s10853-017-1445-3 doi (DE-627)SPR013926586 (SPR)s10853-017-1445-3-e DE-627 ger DE-627 rakwb eng 670 ASE 51.00 bkl Magno, G. verfasserin aut Gold thickness impact on the enhancement of SERS detection in low-cost Au/Si nanosensors 2017 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract In this paper, we present a study on the optimization of Au/Si surface-enhanced Raman scattering sensors for ultrasensitive chemical detection. Au/Si nanosensors are carried out at the wafer scale with a low-cost and quick fabrication method composed of an anisotropic reactive ion etching followed by an electron beam evaporation of a gold layer. For this investigation, the thickness of the gold layer varied from 10 to 50 nm, and thiophenol molecules were chosen as model molecules of which the concentration varied from %$10^{-12}%$ to %$10^{-3}%$ M. The studied optimization exploits the effect of the gold layer thickness on the detection limit of thiophenol molecules for a fixed geometry of Si nanopillar. For all the cases investigated here, detection limits between %$9\times 10^{-12}%$ and %$3\times 10^{-8}%$ M are experimentally found for the detection of thiophenol molecules with the Au/Si nanopillars. Moreover, the best detection limits are achieved with the thickest gold layer. Finally, a 3D FDTD-based numerical analysis confirmed the experimental results. Bélier, B. verfasserin aut Barbillon, G. verfasserin aut Enthalten in Journal of materials science Dordrecht [u.a.] : Springer Science + Business Media B.V, 1966 52(2017), 23 vom: 04. Aug., Seite 13650-13656 (DE-627)315293969 (DE-600)2015305-3 1573-4803 nnns volume:52 year:2017 number:23 day:04 month:08 pages:13650-13656 https://dx.doi.org/10.1007/s10853-017-1445-3 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 51.00 ASE AR 52 2017 23 04 08 13650-13656
allfieldsSound	10.1007/s10853-017-1445-3 doi (DE-627)SPR013926586 (SPR)s10853-017-1445-3-e DE-627 ger DE-627 rakwb eng 670 ASE 51.00 bkl Magno, G. verfasserin aut Gold thickness impact on the enhancement of SERS detection in low-cost Au/Si nanosensors 2017 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract In this paper, we present a study on the optimization of Au/Si surface-enhanced Raman scattering sensors for ultrasensitive chemical detection. Au/Si nanosensors are carried out at the wafer scale with a low-cost and quick fabrication method composed of an anisotropic reactive ion etching followed by an electron beam evaporation of a gold layer. For this investigation, the thickness of the gold layer varied from 10 to 50 nm, and thiophenol molecules were chosen as model molecules of which the concentration varied from %$10^{-12}%$ to %$10^{-3}%$ M. The studied optimization exploits the effect of the gold layer thickness on the detection limit of thiophenol molecules for a fixed geometry of Si nanopillar. For all the cases investigated here, detection limits between %$9\times 10^{-12}%$ and %$3\times 10^{-8}%$ M are experimentally found for the detection of thiophenol molecules with the Au/Si nanopillars. Moreover, the best detection limits are achieved with the thickest gold layer. Finally, a 3D FDTD-based numerical analysis confirmed the experimental results. Bélier, B. verfasserin aut Barbillon, G. verfasserin aut Enthalten in Journal of materials science Dordrecht [u.a.] : Springer Science + Business Media B.V, 1966 52(2017), 23 vom: 04. Aug., Seite 13650-13656 (DE-627)315293969 (DE-600)2015305-3 1573-4803 nnns volume:52 year:2017 number:23 day:04 month:08 pages:13650-13656 https://dx.doi.org/10.1007/s10853-017-1445-3 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 51.00 ASE AR 52 2017 23 04 08 13650-13656
language	English
source	Enthalten in Journal of materials science 52(2017), 23 vom: 04. Aug., Seite 13650-13656 volume:52 year:2017 number:23 day:04 month:08 pages:13650-13656
sourceStr	Enthalten in Journal of materials science 52(2017), 23 vom: 04. Aug., Seite 13650-13656 volume:52 year:2017 number:23 day:04 month:08 pages:13650-13656
format_phy_str_mv	Article
institution	findex.gbv.de
dewey-raw	670
isfreeaccess_bool	false
container_title	Journal of materials science
authorswithroles_txt_mv	Magno, G. @@aut@@ Bélier, B. @@aut@@ Barbillon, G. @@aut@@
publishDateDaySort_date	2017-08-04T00:00:00Z
hierarchy_top_id	315293969
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author	Magno, G.
spellingShingle	Magno, G. ddc 670 bkl 51.00 Gold thickness impact on the enhancement of SERS detection in low-cost Au/Si nanosensors
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topic_title	670 ASE 51.00 bkl Gold thickness impact on the enhancement of SERS detection in low-cost Au/Si nanosensors
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title	Gold thickness impact on the enhancement of SERS detection in low-cost Au/Si nanosensors
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title_full	Gold thickness impact on the enhancement of SERS detection in low-cost Au/Si nanosensors
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author_browse	Magno, G. Bélier, B. Barbillon, G.
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title_sort	gold thickness impact on the enhancement of sers detection in low-cost au/si nanosensors
title_auth	Gold thickness impact on the enhancement of SERS detection in low-cost Au/Si nanosensors
abstract	Abstract In this paper, we present a study on the optimization of Au/Si surface-enhanced Raman scattering sensors for ultrasensitive chemical detection. Au/Si nanosensors are carried out at the wafer scale with a low-cost and quick fabrication method composed of an anisotropic reactive ion etching followed by an electron beam evaporation of a gold layer. For this investigation, the thickness of the gold layer varied from 10 to 50 nm, and thiophenol molecules were chosen as model molecules of which the concentration varied from %$10^{-12}%$ to %$10^{-3}%$ M. The studied optimization exploits the effect of the gold layer thickness on the detection limit of thiophenol molecules for a fixed geometry of Si nanopillar. For all the cases investigated here, detection limits between %$9\times 10^{-12}%$ and %$3\times 10^{-8}%$ M are experimentally found for the detection of thiophenol molecules with the Au/Si nanopillars. Moreover, the best detection limits are achieved with the thickest gold layer. Finally, a 3D FDTD-based numerical analysis confirmed the experimental results.
abstractGer	Abstract In this paper, we present a study on the optimization of Au/Si surface-enhanced Raman scattering sensors for ultrasensitive chemical detection. Au/Si nanosensors are carried out at the wafer scale with a low-cost and quick fabrication method composed of an anisotropic reactive ion etching followed by an electron beam evaporation of a gold layer. For this investigation, the thickness of the gold layer varied from 10 to 50 nm, and thiophenol molecules were chosen as model molecules of which the concentration varied from %$10^{-12}%$ to %$10^{-3}%$ M. The studied optimization exploits the effect of the gold layer thickness on the detection limit of thiophenol molecules for a fixed geometry of Si nanopillar. For all the cases investigated here, detection limits between %$9\times 10^{-12}%$ and %$3\times 10^{-8}%$ M are experimentally found for the detection of thiophenol molecules with the Au/Si nanopillars. Moreover, the best detection limits are achieved with the thickest gold layer. Finally, a 3D FDTD-based numerical analysis confirmed the experimental results.
abstract_unstemmed	Abstract In this paper, we present a study on the optimization of Au/Si surface-enhanced Raman scattering sensors for ultrasensitive chemical detection. Au/Si nanosensors are carried out at the wafer scale with a low-cost and quick fabrication method composed of an anisotropic reactive ion etching followed by an electron beam evaporation of a gold layer. For this investigation, the thickness of the gold layer varied from 10 to 50 nm, and thiophenol molecules were chosen as model molecules of which the concentration varied from %$10^{-12}%$ to %$10^{-3}%$ M. The studied optimization exploits the effect of the gold layer thickness on the detection limit of thiophenol molecules for a fixed geometry of Si nanopillar. For all the cases investigated here, detection limits between %$9\times 10^{-12}%$ and %$3\times 10^{-8}%$ M are experimentally found for the detection of thiophenol molecules with the Au/Si nanopillars. Moreover, the best detection limits are achieved with the thickest gold layer. Finally, a 3D FDTD-based numerical analysis confirmed the experimental results.
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title_short	Gold thickness impact on the enhancement of SERS detection in low-cost Au/Si nanosensors
url	https://dx.doi.org/10.1007/s10853-017-1445-3
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author2	Bélier, B. Barbillon, G.
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doi_str	10.1007/s10853-017-1445-3
up_date	2024-07-03T23:04:00.358Z
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Au/Si nanosensors are carried out at the wafer scale with a low-cost and quick fabrication method composed of an anisotropic reactive ion etching followed by an electron beam evaporation of a gold layer. For this investigation, the thickness of the gold layer varied from 10 to 50 nm, and thiophenol molecules were chosen as model molecules of which the concentration varied from %$10^{-12}%$ to %$10^{-3}%$ M. The studied optimization exploits the effect of the gold layer thickness on the detection limit of thiophenol molecules for a fixed geometry of Si nanopillar. For all the cases investigated here, detection limits between %$9\times 10^{-12}%$ and %$3\times 10^{-8}%$ M are experimentally found for the detection of thiophenol molecules with the Au/Si nanopillars. Moreover, the best detection limits are achieved with the thickest gold layer. 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Gold thickness impact on the enhancement of SERS detection in low-cost Au/Si nanosensors

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