Nonlinear coupled vibration of electrostatically actuated clamped–clamped microbeams under higher-order modes excitation
Abstract Nonlinear modal interactions have recently become the focus of intense research in micro-resonators for their use to improve oscillator performance and probe the frontiers of fundamental physics. Understanding and controlling nonlinear coupling between vibrational modes is critical for the...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Li, Lei [verfasserIn] Zhang, Qichang [verfasserIn] Wang, Wei [verfasserIn] Han, Jianxin [verfasserIn] |
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| Format: |
E-Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2017 |
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| Schlagwörter: |
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| Übergeordnetes Werk: |
Enthalten in: Nonlinear dynamics - Dordrecht [u.a.] : Springer Science + Business Media B.V, 1990, 90(2017), 3 vom: 06. Sept., Seite 1593-1606 |
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| Übergeordnetes Werk: |
volume:90 ; year:2017 ; number:3 ; day:06 ; month:09 ; pages:1593-1606 |
| Links: |
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| DOI / URN: |
10.1007/s11071-017-3751-3 |
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| Katalog-ID: |
SPR016396472 |
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| 245 | 1 | 0 | |a Nonlinear coupled vibration of electrostatically actuated clamped–clamped microbeams under higher-order modes excitation |
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| 520 | |a Abstract Nonlinear modal interactions have recently become the focus of intense research in micro-resonators for their use to improve oscillator performance and probe the frontiers of fundamental physics. Understanding and controlling nonlinear coupling between vibrational modes is critical for the development of advanced micromechanical devices. This article aims to theoretically investigate the influence of antisymmetry mode on nonlinear dynamic characteristics of electrically actuated microbeam via considering nonlinear modal interactions. Under higher-order modes excitation, two nonlinear coupled flexural modes to describe microbeam-based resonators are obtained by using Hamilton’s principle and Galerkin method. Then, the Method of Multiple Scales is applied to determine the response and stability of the system for small amplitude vibration. Through Hopf bifurcation analysis, the bifurcation sets for antisymmetry mode vibration are theoretically derived, and the mechanism of energy transfer between antisymmetry mode and symmetry mode is detailed studied. The pseudo-trajectory processing method is introduced to investigate the influence of external drive on amplitude and bifurcation behavior. Results show that nonlinear modal interactions can transit vibration energy from one mode to nearby mode. In what follows, an effective way is proposed to suppress midpoint displacement of the microbeam and to reduce the possibility of large deflection. The quantitative relationship between vibrational modes is also obtained. The displacement of one mode can be predicted by detecting another mode, which shows great potential of developing parameter design in MEMS. Finally, numerical simulations are provided to illustrate the effectiveness of the theoretical results. | ||
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| 700 | 1 | |a Zhang, Qichang |e verfasserin |4 aut | |
| 700 | 1 | |a Wang, Wei |e verfasserin |4 aut | |
| 700 | 1 | |a Han, Jianxin |e verfasserin |4 aut | |
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10.1007/s11071-017-3751-3 doi (DE-627)SPR016396472 (SPR)s11071-017-3751-3-e DE-627 ger DE-627 rakwb eng 510 ASE 30.20 bkl Li, Lei verfasserin aut Nonlinear coupled vibration of electrostatically actuated clamped–clamped microbeams under higher-order modes excitation 2017 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract Nonlinear modal interactions have recently become the focus of intense research in micro-resonators for their use to improve oscillator performance and probe the frontiers of fundamental physics. Understanding and controlling nonlinear coupling between vibrational modes is critical for the development of advanced micromechanical devices. This article aims to theoretically investigate the influence of antisymmetry mode on nonlinear dynamic characteristics of electrically actuated microbeam via considering nonlinear modal interactions. Under higher-order modes excitation, two nonlinear coupled flexural modes to describe microbeam-based resonators are obtained by using Hamilton’s principle and Galerkin method. Then, the Method of Multiple Scales is applied to determine the response and stability of the system for small amplitude vibration. Through Hopf bifurcation analysis, the bifurcation sets for antisymmetry mode vibration are theoretically derived, and the mechanism of energy transfer between antisymmetry mode and symmetry mode is detailed studied. The pseudo-trajectory processing method is introduced to investigate the influence of external drive on amplitude and bifurcation behavior. Results show that nonlinear modal interactions can transit vibration energy from one mode to nearby mode. In what follows, an effective way is proposed to suppress midpoint displacement of the microbeam and to reduce the possibility of large deflection. The quantitative relationship between vibrational modes is also obtained. The displacement of one mode can be predicted by detecting another mode, which shows great potential of developing parameter design in MEMS. Finally, numerical simulations are provided to illustrate the effectiveness of the theoretical results. MEMS (dpeaa)DE-He213 Coupled vibration (dpeaa)DE-He213 Antisymmetry mode (dpeaa)DE-He213 Multiple scales (dpeaa)DE-He213 Hopf (dpeaa)DE-He213 Nonlinear dynamic (dpeaa)DE-He213 Zhang, Qichang verfasserin aut Wang, Wei verfasserin aut Han, Jianxin verfasserin aut Enthalten in Nonlinear dynamics Dordrecht [u.a.] : Springer Science + Business Media B.V, 1990 90(2017), 3 vom: 06. Sept., Seite 1593-1606 (DE-627)315297034 (DE-600)2012600-1 1573-269X nnns volume:90 year:2017 number:3 day:06 month:09 pages:1593-1606 https://dx.doi.org/10.1007/s11071-017-3751-3 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER SSG-OPC-MAT SSG-OPC-ASE GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 30.20 ASE AR 90 2017 3 06 09 1593-1606 |
| spelling |
10.1007/s11071-017-3751-3 doi (DE-627)SPR016396472 (SPR)s11071-017-3751-3-e DE-627 ger DE-627 rakwb eng 510 ASE 30.20 bkl Li, Lei verfasserin aut Nonlinear coupled vibration of electrostatically actuated clamped–clamped microbeams under higher-order modes excitation 2017 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract Nonlinear modal interactions have recently become the focus of intense research in micro-resonators for their use to improve oscillator performance and probe the frontiers of fundamental physics. Understanding and controlling nonlinear coupling between vibrational modes is critical for the development of advanced micromechanical devices. This article aims to theoretically investigate the influence of antisymmetry mode on nonlinear dynamic characteristics of electrically actuated microbeam via considering nonlinear modal interactions. Under higher-order modes excitation, two nonlinear coupled flexural modes to describe microbeam-based resonators are obtained by using Hamilton’s principle and Galerkin method. Then, the Method of Multiple Scales is applied to determine the response and stability of the system for small amplitude vibration. Through Hopf bifurcation analysis, the bifurcation sets for antisymmetry mode vibration are theoretically derived, and the mechanism of energy transfer between antisymmetry mode and symmetry mode is detailed studied. The pseudo-trajectory processing method is introduced to investigate the influence of external drive on amplitude and bifurcation behavior. Results show that nonlinear modal interactions can transit vibration energy from one mode to nearby mode. In what follows, an effective way is proposed to suppress midpoint displacement of the microbeam and to reduce the possibility of large deflection. The quantitative relationship between vibrational modes is also obtained. The displacement of one mode can be predicted by detecting another mode, which shows great potential of developing parameter design in MEMS. Finally, numerical simulations are provided to illustrate the effectiveness of the theoretical results. MEMS (dpeaa)DE-He213 Coupled vibration (dpeaa)DE-He213 Antisymmetry mode (dpeaa)DE-He213 Multiple scales (dpeaa)DE-He213 Hopf (dpeaa)DE-He213 Nonlinear dynamic (dpeaa)DE-He213 Zhang, Qichang verfasserin aut Wang, Wei verfasserin aut Han, Jianxin verfasserin aut Enthalten in Nonlinear dynamics Dordrecht [u.a.] : Springer Science + Business Media B.V, 1990 90(2017), 3 vom: 06. Sept., Seite 1593-1606 (DE-627)315297034 (DE-600)2012600-1 1573-269X nnns volume:90 year:2017 number:3 day:06 month:09 pages:1593-1606 https://dx.doi.org/10.1007/s11071-017-3751-3 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER SSG-OPC-MAT SSG-OPC-ASE GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 30.20 ASE AR 90 2017 3 06 09 1593-1606 |
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10.1007/s11071-017-3751-3 doi (DE-627)SPR016396472 (SPR)s11071-017-3751-3-e DE-627 ger DE-627 rakwb eng 510 ASE 30.20 bkl Li, Lei verfasserin aut Nonlinear coupled vibration of electrostatically actuated clamped–clamped microbeams under higher-order modes excitation 2017 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract Nonlinear modal interactions have recently become the focus of intense research in micro-resonators for their use to improve oscillator performance and probe the frontiers of fundamental physics. Understanding and controlling nonlinear coupling between vibrational modes is critical for the development of advanced micromechanical devices. This article aims to theoretically investigate the influence of antisymmetry mode on nonlinear dynamic characteristics of electrically actuated microbeam via considering nonlinear modal interactions. Under higher-order modes excitation, two nonlinear coupled flexural modes to describe microbeam-based resonators are obtained by using Hamilton’s principle and Galerkin method. Then, the Method of Multiple Scales is applied to determine the response and stability of the system for small amplitude vibration. Through Hopf bifurcation analysis, the bifurcation sets for antisymmetry mode vibration are theoretically derived, and the mechanism of energy transfer between antisymmetry mode and symmetry mode is detailed studied. The pseudo-trajectory processing method is introduced to investigate the influence of external drive on amplitude and bifurcation behavior. Results show that nonlinear modal interactions can transit vibration energy from one mode to nearby mode. In what follows, an effective way is proposed to suppress midpoint displacement of the microbeam and to reduce the possibility of large deflection. The quantitative relationship between vibrational modes is also obtained. The displacement of one mode can be predicted by detecting another mode, which shows great potential of developing parameter design in MEMS. Finally, numerical simulations are provided to illustrate the effectiveness of the theoretical results. MEMS (dpeaa)DE-He213 Coupled vibration (dpeaa)DE-He213 Antisymmetry mode (dpeaa)DE-He213 Multiple scales (dpeaa)DE-He213 Hopf (dpeaa)DE-He213 Nonlinear dynamic (dpeaa)DE-He213 Zhang, Qichang verfasserin aut Wang, Wei verfasserin aut Han, Jianxin verfasserin aut Enthalten in Nonlinear dynamics Dordrecht [u.a.] : Springer Science + Business Media B.V, 1990 90(2017), 3 vom: 06. Sept., Seite 1593-1606 (DE-627)315297034 (DE-600)2012600-1 1573-269X nnns volume:90 year:2017 number:3 day:06 month:09 pages:1593-1606 https://dx.doi.org/10.1007/s11071-017-3751-3 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER SSG-OPC-MAT SSG-OPC-ASE GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 30.20 ASE AR 90 2017 3 06 09 1593-1606 |
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10.1007/s11071-017-3751-3 doi (DE-627)SPR016396472 (SPR)s11071-017-3751-3-e DE-627 ger DE-627 rakwb eng 510 ASE 30.20 bkl Li, Lei verfasserin aut Nonlinear coupled vibration of electrostatically actuated clamped–clamped microbeams under higher-order modes excitation 2017 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract Nonlinear modal interactions have recently become the focus of intense research in micro-resonators for their use to improve oscillator performance and probe the frontiers of fundamental physics. Understanding and controlling nonlinear coupling between vibrational modes is critical for the development of advanced micromechanical devices. This article aims to theoretically investigate the influence of antisymmetry mode on nonlinear dynamic characteristics of electrically actuated microbeam via considering nonlinear modal interactions. Under higher-order modes excitation, two nonlinear coupled flexural modes to describe microbeam-based resonators are obtained by using Hamilton’s principle and Galerkin method. Then, the Method of Multiple Scales is applied to determine the response and stability of the system for small amplitude vibration. Through Hopf bifurcation analysis, the bifurcation sets for antisymmetry mode vibration are theoretically derived, and the mechanism of energy transfer between antisymmetry mode and symmetry mode is detailed studied. The pseudo-trajectory processing method is introduced to investigate the influence of external drive on amplitude and bifurcation behavior. Results show that nonlinear modal interactions can transit vibration energy from one mode to nearby mode. In what follows, an effective way is proposed to suppress midpoint displacement of the microbeam and to reduce the possibility of large deflection. The quantitative relationship between vibrational modes is also obtained. The displacement of one mode can be predicted by detecting another mode, which shows great potential of developing parameter design in MEMS. Finally, numerical simulations are provided to illustrate the effectiveness of the theoretical results. MEMS (dpeaa)DE-He213 Coupled vibration (dpeaa)DE-He213 Antisymmetry mode (dpeaa)DE-He213 Multiple scales (dpeaa)DE-He213 Hopf (dpeaa)DE-He213 Nonlinear dynamic (dpeaa)DE-He213 Zhang, Qichang verfasserin aut Wang, Wei verfasserin aut Han, Jianxin verfasserin aut Enthalten in Nonlinear dynamics Dordrecht [u.a.] : Springer Science + Business Media B.V, 1990 90(2017), 3 vom: 06. Sept., Seite 1593-1606 (DE-627)315297034 (DE-600)2012600-1 1573-269X nnns volume:90 year:2017 number:3 day:06 month:09 pages:1593-1606 https://dx.doi.org/10.1007/s11071-017-3751-3 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER SSG-OPC-MAT SSG-OPC-ASE GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 30.20 ASE AR 90 2017 3 06 09 1593-1606 |
| allfieldsSound |
10.1007/s11071-017-3751-3 doi (DE-627)SPR016396472 (SPR)s11071-017-3751-3-e DE-627 ger DE-627 rakwb eng 510 ASE 30.20 bkl Li, Lei verfasserin aut Nonlinear coupled vibration of electrostatically actuated clamped–clamped microbeams under higher-order modes excitation 2017 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract Nonlinear modal interactions have recently become the focus of intense research in micro-resonators for their use to improve oscillator performance and probe the frontiers of fundamental physics. Understanding and controlling nonlinear coupling between vibrational modes is critical for the development of advanced micromechanical devices. This article aims to theoretically investigate the influence of antisymmetry mode on nonlinear dynamic characteristics of electrically actuated microbeam via considering nonlinear modal interactions. Under higher-order modes excitation, two nonlinear coupled flexural modes to describe microbeam-based resonators are obtained by using Hamilton’s principle and Galerkin method. Then, the Method of Multiple Scales is applied to determine the response and stability of the system for small amplitude vibration. Through Hopf bifurcation analysis, the bifurcation sets for antisymmetry mode vibration are theoretically derived, and the mechanism of energy transfer between antisymmetry mode and symmetry mode is detailed studied. The pseudo-trajectory processing method is introduced to investigate the influence of external drive on amplitude and bifurcation behavior. Results show that nonlinear modal interactions can transit vibration energy from one mode to nearby mode. In what follows, an effective way is proposed to suppress midpoint displacement of the microbeam and to reduce the possibility of large deflection. The quantitative relationship between vibrational modes is also obtained. The displacement of one mode can be predicted by detecting another mode, which shows great potential of developing parameter design in MEMS. Finally, numerical simulations are provided to illustrate the effectiveness of the theoretical results. MEMS (dpeaa)DE-He213 Coupled vibration (dpeaa)DE-He213 Antisymmetry mode (dpeaa)DE-He213 Multiple scales (dpeaa)DE-He213 Hopf (dpeaa)DE-He213 Nonlinear dynamic (dpeaa)DE-He213 Zhang, Qichang verfasserin aut Wang, Wei verfasserin aut Han, Jianxin verfasserin aut Enthalten in Nonlinear dynamics Dordrecht [u.a.] : Springer Science + Business Media B.V, 1990 90(2017), 3 vom: 06. Sept., Seite 1593-1606 (DE-627)315297034 (DE-600)2012600-1 1573-269X nnns volume:90 year:2017 number:3 day:06 month:09 pages:1593-1606 https://dx.doi.org/10.1007/s11071-017-3751-3 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER SSG-OPC-MAT SSG-OPC-ASE GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 30.20 ASE AR 90 2017 3 06 09 1593-1606 |
| language |
English |
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Enthalten in Nonlinear dynamics 90(2017), 3 vom: 06. Sept., Seite 1593-1606 volume:90 year:2017 number:3 day:06 month:09 pages:1593-1606 |
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Enthalten in Nonlinear dynamics 90(2017), 3 vom: 06. Sept., Seite 1593-1606 volume:90 year:2017 number:3 day:06 month:09 pages:1593-1606 |
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MEMS Coupled vibration Antisymmetry mode Multiple scales Hopf Nonlinear dynamic |
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Nonlinear dynamics |
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Li, Lei @@aut@@ Zhang, Qichang @@aut@@ Wang, Wei @@aut@@ Han, Jianxin @@aut@@ |
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Understanding and controlling nonlinear coupling between vibrational modes is critical for the development of advanced micromechanical devices. This article aims to theoretically investigate the influence of antisymmetry mode on nonlinear dynamic characteristics of electrically actuated microbeam via considering nonlinear modal interactions. Under higher-order modes excitation, two nonlinear coupled flexural modes to describe microbeam-based resonators are obtained by using Hamilton’s principle and Galerkin method. Then, the Method of Multiple Scales is applied to determine the response and stability of the system for small amplitude vibration. Through Hopf bifurcation analysis, the bifurcation sets for antisymmetry mode vibration are theoretically derived, and the mechanism of energy transfer between antisymmetry mode and symmetry mode is detailed studied. The pseudo-trajectory processing method is introduced to investigate the influence of external drive on amplitude and bifurcation behavior. Results show that nonlinear modal interactions can transit vibration energy from one mode to nearby mode. In what follows, an effective way is proposed to suppress midpoint displacement of the microbeam and to reduce the possibility of large deflection. The quantitative relationship between vibrational modes is also obtained. The displacement of one mode can be predicted by detecting another mode, which shows great potential of developing parameter design in MEMS. 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| author |
Li, Lei |
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Li, Lei ddc 510 bkl 30.20 misc MEMS misc Coupled vibration misc Antisymmetry mode misc Multiple scales misc Hopf misc Nonlinear dynamic Nonlinear coupled vibration of electrostatically actuated clamped–clamped microbeams under higher-order modes excitation |
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510 ASE 30.20 bkl Nonlinear coupled vibration of electrostatically actuated clamped–clamped microbeams under higher-order modes excitation MEMS (dpeaa)DE-He213 Coupled vibration (dpeaa)DE-He213 Antisymmetry mode (dpeaa)DE-He213 Multiple scales (dpeaa)DE-He213 Hopf (dpeaa)DE-He213 Nonlinear dynamic (dpeaa)DE-He213 |
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ddc 510 bkl 30.20 misc MEMS misc Coupled vibration misc Antisymmetry mode misc Multiple scales misc Hopf misc Nonlinear dynamic |
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ddc 510 bkl 30.20 misc MEMS misc Coupled vibration misc Antisymmetry mode misc Multiple scales misc Hopf misc Nonlinear dynamic |
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Nonlinear coupled vibration of electrostatically actuated clamped–clamped microbeams under higher-order modes excitation |
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Nonlinear coupled vibration of electrostatically actuated clamped–clamped microbeams under higher-order modes excitation |
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Li, Lei |
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Li, Lei Zhang, Qichang Wang, Wei Han, Jianxin |
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nonlinear coupled vibration of electrostatically actuated clamped–clamped microbeams under higher-order modes excitation |
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Nonlinear coupled vibration of electrostatically actuated clamped–clamped microbeams under higher-order modes excitation |
| abstract |
Abstract Nonlinear modal interactions have recently become the focus of intense research in micro-resonators for their use to improve oscillator performance and probe the frontiers of fundamental physics. Understanding and controlling nonlinear coupling between vibrational modes is critical for the development of advanced micromechanical devices. This article aims to theoretically investigate the influence of antisymmetry mode on nonlinear dynamic characteristics of electrically actuated microbeam via considering nonlinear modal interactions. Under higher-order modes excitation, two nonlinear coupled flexural modes to describe microbeam-based resonators are obtained by using Hamilton’s principle and Galerkin method. Then, the Method of Multiple Scales is applied to determine the response and stability of the system for small amplitude vibration. Through Hopf bifurcation analysis, the bifurcation sets for antisymmetry mode vibration are theoretically derived, and the mechanism of energy transfer between antisymmetry mode and symmetry mode is detailed studied. The pseudo-trajectory processing method is introduced to investigate the influence of external drive on amplitude and bifurcation behavior. Results show that nonlinear modal interactions can transit vibration energy from one mode to nearby mode. In what follows, an effective way is proposed to suppress midpoint displacement of the microbeam and to reduce the possibility of large deflection. The quantitative relationship between vibrational modes is also obtained. The displacement of one mode can be predicted by detecting another mode, which shows great potential of developing parameter design in MEMS. Finally, numerical simulations are provided to illustrate the effectiveness of the theoretical results. |
| abstractGer |
Abstract Nonlinear modal interactions have recently become the focus of intense research in micro-resonators for their use to improve oscillator performance and probe the frontiers of fundamental physics. Understanding and controlling nonlinear coupling between vibrational modes is critical for the development of advanced micromechanical devices. This article aims to theoretically investigate the influence of antisymmetry mode on nonlinear dynamic characteristics of electrically actuated microbeam via considering nonlinear modal interactions. Under higher-order modes excitation, two nonlinear coupled flexural modes to describe microbeam-based resonators are obtained by using Hamilton’s principle and Galerkin method. Then, the Method of Multiple Scales is applied to determine the response and stability of the system for small amplitude vibration. Through Hopf bifurcation analysis, the bifurcation sets for antisymmetry mode vibration are theoretically derived, and the mechanism of energy transfer between antisymmetry mode and symmetry mode is detailed studied. The pseudo-trajectory processing method is introduced to investigate the influence of external drive on amplitude and bifurcation behavior. Results show that nonlinear modal interactions can transit vibration energy from one mode to nearby mode. In what follows, an effective way is proposed to suppress midpoint displacement of the microbeam and to reduce the possibility of large deflection. The quantitative relationship between vibrational modes is also obtained. The displacement of one mode can be predicted by detecting another mode, which shows great potential of developing parameter design in MEMS. Finally, numerical simulations are provided to illustrate the effectiveness of the theoretical results. |
| abstract_unstemmed |
Abstract Nonlinear modal interactions have recently become the focus of intense research in micro-resonators for their use to improve oscillator performance and probe the frontiers of fundamental physics. Understanding and controlling nonlinear coupling between vibrational modes is critical for the development of advanced micromechanical devices. This article aims to theoretically investigate the influence of antisymmetry mode on nonlinear dynamic characteristics of electrically actuated microbeam via considering nonlinear modal interactions. Under higher-order modes excitation, two nonlinear coupled flexural modes to describe microbeam-based resonators are obtained by using Hamilton’s principle and Galerkin method. Then, the Method of Multiple Scales is applied to determine the response and stability of the system for small amplitude vibration. Through Hopf bifurcation analysis, the bifurcation sets for antisymmetry mode vibration are theoretically derived, and the mechanism of energy transfer between antisymmetry mode and symmetry mode is detailed studied. The pseudo-trajectory processing method is introduced to investigate the influence of external drive on amplitude and bifurcation behavior. Results show that nonlinear modal interactions can transit vibration energy from one mode to nearby mode. In what follows, an effective way is proposed to suppress midpoint displacement of the microbeam and to reduce the possibility of large deflection. The quantitative relationship between vibrational modes is also obtained. The displacement of one mode can be predicted by detecting another mode, which shows great potential of developing parameter design in MEMS. Finally, numerical simulations are provided to illustrate the effectiveness of the theoretical results. |
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Nonlinear coupled vibration of electrostatically actuated clamped–clamped microbeams under higher-order modes excitation |
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https://dx.doi.org/10.1007/s11071-017-3751-3 |
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Zhang, Qichang Wang, Wei Han, Jianxin |
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Zhang, Qichang Wang, Wei Han, Jianxin |
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| doi_str |
10.1007/s11071-017-3751-3 |
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2024-07-03T22:50:03.811Z |
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| score |
7.3994904 |