Mathematical simulation of the influence of a focusing channel surface on the angle characteristics of a bundle of rapid neutral particles
Abstract The model of the channel of the neutralization of the plasma source of bundles of rapid neutral particles (RNPs), which was developed earlier, is expanded for the case of rough surfaces forming the neutralization channel. With the help of mathematical modeling, the dependences of the main c...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Degtyarev, A. V. [verfasserIn] Kudrya, V. P. [verfasserIn] Maishev, Yu. P. [verfasserIn] |
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| Format: |
E-Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2010 |
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| Schlagwörter: |
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| Übergeordnetes Werk: |
Enthalten in: Russian microelectronics - Moscow : MAIK Nauka/Interperiodica Publ., 2000, 39(2010), 6 vom: Nov., Seite 405-410 |
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| Übergeordnetes Werk: |
volume:39 ; year:2010 ; number:6 ; month:11 ; pages:405-410 |
| Links: |
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| DOI / URN: |
10.1134/S1063739710060053 |
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| Katalog-ID: |
SPR017527384 |
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| 245 | 1 | 0 | |a Mathematical simulation of the influence of a focusing channel surface on the angle characteristics of a bundle of rapid neutral particles |
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| 520 | |a Abstract The model of the channel of the neutralization of the plasma source of bundles of rapid neutral particles (RNPs), which was developed earlier, is expanded for the case of rough surfaces forming the neutralization channel. With the help of mathematical modeling, the dependences of the main characteristics, as well as the spatial distribution of the RNP bundle from values of the roughness parameter, are obtained. It was found that the maximum values of the RNP bundle in the focusing plane when K > 30 practically stops depending on the values of roughness. These results may be used for the determination of the requirements for the purity of the processing surfaces of a source of RNP flows. | ||
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| 650 | 4 | |a Roughness Parameter |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a RUSSIAN Microelectronics |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a Mirror Reflection |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a Reflection Angle |7 (dpeaa)DE-He213 | |
| 700 | 1 | |a Kudrya, V. P. |e verfasserin |4 aut | |
| 700 | 1 | |a Maishev, Yu. P. |e verfasserin |4 aut | |
| 773 | 0 | 8 | |i Enthalten in |t Russian microelectronics |d Moscow : MAIK Nauka/Interperiodica Publ., 2000 |g 39(2010), 6 vom: Nov., Seite 405-410 |w (DE-627)334714338 |w (DE-600)2058225-0 |x 1608-3415 |7 nnns |
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| 856 | 4 | 0 | |u https://dx.doi.org/10.1134/S1063739710060053 |z lizenzpflichtig |3 Volltext |
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10.1134/S1063739710060053 doi (DE-627)SPR017527384 (SPR)S1063739710060053-e DE-627 ger DE-627 rakwb eng 620 ASE 53.00 bkl Degtyarev, A. V. verfasserin aut Mathematical simulation of the influence of a focusing channel surface on the angle characteristics of a bundle of rapid neutral particles 2010 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract The model of the channel of the neutralization of the plasma source of bundles of rapid neutral particles (RNPs), which was developed earlier, is expanded for the case of rough surfaces forming the neutralization channel. With the help of mathematical modeling, the dependences of the main characteristics, as well as the spatial distribution of the RNP bundle from values of the roughness parameter, are obtained. It was found that the maximum values of the RNP bundle in the focusing plane when K > 30 practically stops depending on the values of roughness. These results may be used for the determination of the requirements for the purity of the processing surfaces of a source of RNP flows. Mathematical Simulation (dpeaa)DE-He213 Roughness Parameter (dpeaa)DE-He213 RUSSIAN Microelectronics (dpeaa)DE-He213 Mirror Reflection (dpeaa)DE-He213 Reflection Angle (dpeaa)DE-He213 Kudrya, V. P. verfasserin aut Maishev, Yu. P. verfasserin aut Enthalten in Russian microelectronics Moscow : MAIK Nauka/Interperiodica Publ., 2000 39(2010), 6 vom: Nov., Seite 405-410 (DE-627)334714338 (DE-600)2058225-0 1608-3415 nnns volume:39 year:2010 number:6 month:11 pages:405-410 https://dx.doi.org/10.1134/S1063739710060053 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 53.00 ASE AR 39 2010 6 11 405-410 |
| spelling |
10.1134/S1063739710060053 doi (DE-627)SPR017527384 (SPR)S1063739710060053-e DE-627 ger DE-627 rakwb eng 620 ASE 53.00 bkl Degtyarev, A. V. verfasserin aut Mathematical simulation of the influence of a focusing channel surface on the angle characteristics of a bundle of rapid neutral particles 2010 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract The model of the channel of the neutralization of the plasma source of bundles of rapid neutral particles (RNPs), which was developed earlier, is expanded for the case of rough surfaces forming the neutralization channel. With the help of mathematical modeling, the dependences of the main characteristics, as well as the spatial distribution of the RNP bundle from values of the roughness parameter, are obtained. It was found that the maximum values of the RNP bundle in the focusing plane when K > 30 practically stops depending on the values of roughness. These results may be used for the determination of the requirements for the purity of the processing surfaces of a source of RNP flows. Mathematical Simulation (dpeaa)DE-He213 Roughness Parameter (dpeaa)DE-He213 RUSSIAN Microelectronics (dpeaa)DE-He213 Mirror Reflection (dpeaa)DE-He213 Reflection Angle (dpeaa)DE-He213 Kudrya, V. P. verfasserin aut Maishev, Yu. P. verfasserin aut Enthalten in Russian microelectronics Moscow : MAIK Nauka/Interperiodica Publ., 2000 39(2010), 6 vom: Nov., Seite 405-410 (DE-627)334714338 (DE-600)2058225-0 1608-3415 nnns volume:39 year:2010 number:6 month:11 pages:405-410 https://dx.doi.org/10.1134/S1063739710060053 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 53.00 ASE AR 39 2010 6 11 405-410 |
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10.1134/S1063739710060053 doi (DE-627)SPR017527384 (SPR)S1063739710060053-e DE-627 ger DE-627 rakwb eng 620 ASE 53.00 bkl Degtyarev, A. V. verfasserin aut Mathematical simulation of the influence of a focusing channel surface on the angle characteristics of a bundle of rapid neutral particles 2010 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract The model of the channel of the neutralization of the plasma source of bundles of rapid neutral particles (RNPs), which was developed earlier, is expanded for the case of rough surfaces forming the neutralization channel. With the help of mathematical modeling, the dependences of the main characteristics, as well as the spatial distribution of the RNP bundle from values of the roughness parameter, are obtained. It was found that the maximum values of the RNP bundle in the focusing plane when K > 30 practically stops depending on the values of roughness. These results may be used for the determination of the requirements for the purity of the processing surfaces of a source of RNP flows. Mathematical Simulation (dpeaa)DE-He213 Roughness Parameter (dpeaa)DE-He213 RUSSIAN Microelectronics (dpeaa)DE-He213 Mirror Reflection (dpeaa)DE-He213 Reflection Angle (dpeaa)DE-He213 Kudrya, V. P. verfasserin aut Maishev, Yu. P. verfasserin aut Enthalten in Russian microelectronics Moscow : MAIK Nauka/Interperiodica Publ., 2000 39(2010), 6 vom: Nov., Seite 405-410 (DE-627)334714338 (DE-600)2058225-0 1608-3415 nnns volume:39 year:2010 number:6 month:11 pages:405-410 https://dx.doi.org/10.1134/S1063739710060053 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 53.00 ASE AR 39 2010 6 11 405-410 |
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10.1134/S1063739710060053 doi (DE-627)SPR017527384 (SPR)S1063739710060053-e DE-627 ger DE-627 rakwb eng 620 ASE 53.00 bkl Degtyarev, A. V. verfasserin aut Mathematical simulation of the influence of a focusing channel surface on the angle characteristics of a bundle of rapid neutral particles 2010 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract The model of the channel of the neutralization of the plasma source of bundles of rapid neutral particles (RNPs), which was developed earlier, is expanded for the case of rough surfaces forming the neutralization channel. With the help of mathematical modeling, the dependences of the main characteristics, as well as the spatial distribution of the RNP bundle from values of the roughness parameter, are obtained. It was found that the maximum values of the RNP bundle in the focusing plane when K > 30 practically stops depending on the values of roughness. These results may be used for the determination of the requirements for the purity of the processing surfaces of a source of RNP flows. Mathematical Simulation (dpeaa)DE-He213 Roughness Parameter (dpeaa)DE-He213 RUSSIAN Microelectronics (dpeaa)DE-He213 Mirror Reflection (dpeaa)DE-He213 Reflection Angle (dpeaa)DE-He213 Kudrya, V. P. verfasserin aut Maishev, Yu. P. verfasserin aut Enthalten in Russian microelectronics Moscow : MAIK Nauka/Interperiodica Publ., 2000 39(2010), 6 vom: Nov., Seite 405-410 (DE-627)334714338 (DE-600)2058225-0 1608-3415 nnns volume:39 year:2010 number:6 month:11 pages:405-410 https://dx.doi.org/10.1134/S1063739710060053 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 53.00 ASE AR 39 2010 6 11 405-410 |
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10.1134/S1063739710060053 doi (DE-627)SPR017527384 (SPR)S1063739710060053-e DE-627 ger DE-627 rakwb eng 620 ASE 53.00 bkl Degtyarev, A. V. verfasserin aut Mathematical simulation of the influence of a focusing channel surface on the angle characteristics of a bundle of rapid neutral particles 2010 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract The model of the channel of the neutralization of the plasma source of bundles of rapid neutral particles (RNPs), which was developed earlier, is expanded for the case of rough surfaces forming the neutralization channel. With the help of mathematical modeling, the dependences of the main characteristics, as well as the spatial distribution of the RNP bundle from values of the roughness parameter, are obtained. It was found that the maximum values of the RNP bundle in the focusing plane when K > 30 practically stops depending on the values of roughness. These results may be used for the determination of the requirements for the purity of the processing surfaces of a source of RNP flows. Mathematical Simulation (dpeaa)DE-He213 Roughness Parameter (dpeaa)DE-He213 RUSSIAN Microelectronics (dpeaa)DE-He213 Mirror Reflection (dpeaa)DE-He213 Reflection Angle (dpeaa)DE-He213 Kudrya, V. P. verfasserin aut Maishev, Yu. P. verfasserin aut Enthalten in Russian microelectronics Moscow : MAIK Nauka/Interperiodica Publ., 2000 39(2010), 6 vom: Nov., Seite 405-410 (DE-627)334714338 (DE-600)2058225-0 1608-3415 nnns volume:39 year:2010 number:6 month:11 pages:405-410 https://dx.doi.org/10.1134/S1063739710060053 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 53.00 ASE AR 39 2010 6 11 405-410 |
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Degtyarev, A. V. @@aut@@ Kudrya, V. P. @@aut@@ Maishev, Yu. P. @@aut@@ |
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Degtyarev, A. V. |
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Degtyarev, A. V. ddc 620 bkl 53.00 misc Mathematical Simulation misc Roughness Parameter misc RUSSIAN Microelectronics misc Mirror Reflection misc Reflection Angle Mathematical simulation of the influence of a focusing channel surface on the angle characteristics of a bundle of rapid neutral particles |
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620 ASE 53.00 bkl Mathematical simulation of the influence of a focusing channel surface on the angle characteristics of a bundle of rapid neutral particles Mathematical Simulation (dpeaa)DE-He213 Roughness Parameter (dpeaa)DE-He213 RUSSIAN Microelectronics (dpeaa)DE-He213 Mirror Reflection (dpeaa)DE-He213 Reflection Angle (dpeaa)DE-He213 |
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mathematical simulation of the influence of a focusing channel surface on the angle characteristics of a bundle of rapid neutral particles |
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Mathematical simulation of the influence of a focusing channel surface on the angle characteristics of a bundle of rapid neutral particles |
| abstract |
Abstract The model of the channel of the neutralization of the plasma source of bundles of rapid neutral particles (RNPs), which was developed earlier, is expanded for the case of rough surfaces forming the neutralization channel. With the help of mathematical modeling, the dependences of the main characteristics, as well as the spatial distribution of the RNP bundle from values of the roughness parameter, are obtained. It was found that the maximum values of the RNP bundle in the focusing plane when K > 30 practically stops depending on the values of roughness. These results may be used for the determination of the requirements for the purity of the processing surfaces of a source of RNP flows. |
| abstractGer |
Abstract The model of the channel of the neutralization of the plasma source of bundles of rapid neutral particles (RNPs), which was developed earlier, is expanded for the case of rough surfaces forming the neutralization channel. With the help of mathematical modeling, the dependences of the main characteristics, as well as the spatial distribution of the RNP bundle from values of the roughness parameter, are obtained. It was found that the maximum values of the RNP bundle in the focusing plane when K > 30 practically stops depending on the values of roughness. These results may be used for the determination of the requirements for the purity of the processing surfaces of a source of RNP flows. |
| abstract_unstemmed |
Abstract The model of the channel of the neutralization of the plasma source of bundles of rapid neutral particles (RNPs), which was developed earlier, is expanded for the case of rough surfaces forming the neutralization channel. With the help of mathematical modeling, the dependences of the main characteristics, as well as the spatial distribution of the RNP bundle from values of the roughness parameter, are obtained. It was found that the maximum values of the RNP bundle in the focusing plane when K > 30 practically stops depending on the values of roughness. These results may be used for the determination of the requirements for the purity of the processing surfaces of a source of RNP flows. |
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<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">SPR017527384</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20220111052540.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">201006s2010 xx |||||o 00| ||eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1134/S1063739710060053</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)SPR017527384</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(SPR)S1063739710060053-e</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">620</subfield><subfield code="q">ASE</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">53.00</subfield><subfield code="2">bkl</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Degtyarev, A. V.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Mathematical simulation of the influence of a focusing channel surface on the angle characteristics of a bundle of rapid neutral particles</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2010</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">Computermedien</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Online-Ressource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Abstract The model of the channel of the neutralization of the plasma source of bundles of rapid neutral particles (RNPs), which was developed earlier, is expanded for the case of rough surfaces forming the neutralization channel. With the help of mathematical modeling, the dependences of the main characteristics, as well as the spatial distribution of the RNP bundle from values of the roughness parameter, are obtained. It was found that the maximum values of the RNP bundle in the focusing plane when K > 30 practically stops depending on the values of roughness. These results may be used for the determination of the requirements for the purity of the processing surfaces of a source of RNP flows.</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Mathematical Simulation</subfield><subfield code="7">(dpeaa)DE-He213</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Roughness Parameter</subfield><subfield code="7">(dpeaa)DE-He213</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">RUSSIAN Microelectronics</subfield><subfield code="7">(dpeaa)DE-He213</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Mirror Reflection</subfield><subfield code="7">(dpeaa)DE-He213</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Reflection Angle</subfield><subfield code="7">(dpeaa)DE-He213</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kudrya, V. 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