Probe studies of laser erosion plume arising at silicon ablation in vacuum
Abstract An erosion plume arising at the ablation of silicon by a solid-state laser (λ = 1.06 μm) is studied with a Langmuir probe. The time-of-flight curves of the probe ion current are obtained for a plasma beam formed by intersecting plumes from two targets and for an erosion plume from one silic...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Khaydukov, E. V. [verfasserIn] Novodvorsky, O. A. [verfasserIn] Lotin, A. A. [verfasserIn] Rocheva, V. V. [verfasserIn] Khramova, O. D. [verfasserIn] Panchenko, V. Ya. [verfasserIn] |
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| Format: |
E-Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2010 |
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| Schlagwörter: |
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| Übergeordnetes Werk: |
Enthalten in: Technical physics - Berlin : Springer Science + Business Media, 1997, 55(2010), 4 vom: Apr., Seite 491-495 |
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| Übergeordnetes Werk: |
volume:55 ; year:2010 ; number:4 ; month:04 ; pages:491-495 |
| Links: |
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| DOI / URN: |
10.1134/S1063784210040092 |
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| Katalog-ID: |
SPR019766548 |
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| 245 | 1 | 0 | |a Probe studies of laser erosion plume arising at silicon ablation in vacuum |
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| 520 | |a Abstract An erosion plume arising at the ablation of silicon by a solid-state laser (λ = 1.06 μm) is studied with a Langmuir probe. The time-of-flight curves of the probe ion current are obtained for a plasma beam formed by intersecting plumes from two targets and for an erosion plume from one silicon target. The probe-target distance is varied in the range 40–157 mm. The time-of-flight curves for the ions of the erosion plume are sums of the velocity one-dimensional Maxwell distributions for four groups of ions. It is found that a plasma beam formed by intersecting plumes from two targets does not contain all groups of ions present in initial plumes. | ||
| 650 | 4 | |a Target Distance |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a Thin Silicon Film |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a Plasma Beam |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a Probe Distance |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a Silicon Target |7 (dpeaa)DE-He213 | |
| 700 | 1 | |a Novodvorsky, O. A. |e verfasserin |4 aut | |
| 700 | 1 | |a Lotin, A. A. |e verfasserin |4 aut | |
| 700 | 1 | |a Rocheva, V. V. |e verfasserin |4 aut | |
| 700 | 1 | |a Khramova, O. D. |e verfasserin |4 aut | |
| 700 | 1 | |a Panchenko, V. Ya. |e verfasserin |4 aut | |
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10.1134/S1063784210040092 doi (DE-627)SPR019766548 (SPR)S1063784210040092-e DE-627 ger DE-627 rakwb eng 530 ASE 33.00 bkl 31.00 bkl 50.30 bkl Khaydukov, E. V. verfasserin aut Probe studies of laser erosion plume arising at silicon ablation in vacuum 2010 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract An erosion plume arising at the ablation of silicon by a solid-state laser (λ = 1.06 μm) is studied with a Langmuir probe. The time-of-flight curves of the probe ion current are obtained for a plasma beam formed by intersecting plumes from two targets and for an erosion plume from one silicon target. The probe-target distance is varied in the range 40–157 mm. The time-of-flight curves for the ions of the erosion plume are sums of the velocity one-dimensional Maxwell distributions for four groups of ions. It is found that a plasma beam formed by intersecting plumes from two targets does not contain all groups of ions present in initial plumes. Target Distance (dpeaa)DE-He213 Thin Silicon Film (dpeaa)DE-He213 Plasma Beam (dpeaa)DE-He213 Probe Distance (dpeaa)DE-He213 Silicon Target (dpeaa)DE-He213 Novodvorsky, O. A. verfasserin aut Lotin, A. A. verfasserin aut Rocheva, V. V. verfasserin aut Khramova, O. D. verfasserin aut Panchenko, V. Ya. verfasserin aut Enthalten in Technical physics Berlin : Springer Science + Business Media, 1997 55(2010), 4 vom: Apr., Seite 491-495 (DE-627)311278795 (DE-600)2008502-3 1090-6525 nnns volume:55 year:2010 number:4 month:04 pages:491-495 https://dx.doi.org/10.1134/S1063784210040092 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER SSG-OPC-MAT SSG-OPC-ASE GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 33.00 ASE 31.00 ASE 50.30 ASE AR 55 2010 4 04 491-495 |
| spelling |
10.1134/S1063784210040092 doi (DE-627)SPR019766548 (SPR)S1063784210040092-e DE-627 ger DE-627 rakwb eng 530 ASE 33.00 bkl 31.00 bkl 50.30 bkl Khaydukov, E. V. verfasserin aut Probe studies of laser erosion plume arising at silicon ablation in vacuum 2010 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract An erosion plume arising at the ablation of silicon by a solid-state laser (λ = 1.06 μm) is studied with a Langmuir probe. The time-of-flight curves of the probe ion current are obtained for a plasma beam formed by intersecting plumes from two targets and for an erosion plume from one silicon target. The probe-target distance is varied in the range 40–157 mm. The time-of-flight curves for the ions of the erosion plume are sums of the velocity one-dimensional Maxwell distributions for four groups of ions. It is found that a plasma beam formed by intersecting plumes from two targets does not contain all groups of ions present in initial plumes. Target Distance (dpeaa)DE-He213 Thin Silicon Film (dpeaa)DE-He213 Plasma Beam (dpeaa)DE-He213 Probe Distance (dpeaa)DE-He213 Silicon Target (dpeaa)DE-He213 Novodvorsky, O. A. verfasserin aut Lotin, A. A. verfasserin aut Rocheva, V. V. verfasserin aut Khramova, O. D. verfasserin aut Panchenko, V. Ya. verfasserin aut Enthalten in Technical physics Berlin : Springer Science + Business Media, 1997 55(2010), 4 vom: Apr., Seite 491-495 (DE-627)311278795 (DE-600)2008502-3 1090-6525 nnns volume:55 year:2010 number:4 month:04 pages:491-495 https://dx.doi.org/10.1134/S1063784210040092 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER SSG-OPC-MAT SSG-OPC-ASE GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 33.00 ASE 31.00 ASE 50.30 ASE AR 55 2010 4 04 491-495 |
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10.1134/S1063784210040092 doi (DE-627)SPR019766548 (SPR)S1063784210040092-e DE-627 ger DE-627 rakwb eng 530 ASE 33.00 bkl 31.00 bkl 50.30 bkl Khaydukov, E. V. verfasserin aut Probe studies of laser erosion plume arising at silicon ablation in vacuum 2010 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract An erosion plume arising at the ablation of silicon by a solid-state laser (λ = 1.06 μm) is studied with a Langmuir probe. The time-of-flight curves of the probe ion current are obtained for a plasma beam formed by intersecting plumes from two targets and for an erosion plume from one silicon target. The probe-target distance is varied in the range 40–157 mm. The time-of-flight curves for the ions of the erosion plume are sums of the velocity one-dimensional Maxwell distributions for four groups of ions. It is found that a plasma beam formed by intersecting plumes from two targets does not contain all groups of ions present in initial plumes. Target Distance (dpeaa)DE-He213 Thin Silicon Film (dpeaa)DE-He213 Plasma Beam (dpeaa)DE-He213 Probe Distance (dpeaa)DE-He213 Silicon Target (dpeaa)DE-He213 Novodvorsky, O. A. verfasserin aut Lotin, A. A. verfasserin aut Rocheva, V. V. verfasserin aut Khramova, O. D. verfasserin aut Panchenko, V. Ya. verfasserin aut Enthalten in Technical physics Berlin : Springer Science + Business Media, 1997 55(2010), 4 vom: Apr., Seite 491-495 (DE-627)311278795 (DE-600)2008502-3 1090-6525 nnns volume:55 year:2010 number:4 month:04 pages:491-495 https://dx.doi.org/10.1134/S1063784210040092 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER SSG-OPC-MAT SSG-OPC-ASE GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 33.00 ASE 31.00 ASE 50.30 ASE AR 55 2010 4 04 491-495 |
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10.1134/S1063784210040092 doi (DE-627)SPR019766548 (SPR)S1063784210040092-e DE-627 ger DE-627 rakwb eng 530 ASE 33.00 bkl 31.00 bkl 50.30 bkl Khaydukov, E. V. verfasserin aut Probe studies of laser erosion plume arising at silicon ablation in vacuum 2010 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract An erosion plume arising at the ablation of silicon by a solid-state laser (λ = 1.06 μm) is studied with a Langmuir probe. The time-of-flight curves of the probe ion current are obtained for a plasma beam formed by intersecting plumes from two targets and for an erosion plume from one silicon target. The probe-target distance is varied in the range 40–157 mm. The time-of-flight curves for the ions of the erosion plume are sums of the velocity one-dimensional Maxwell distributions for four groups of ions. It is found that a plasma beam formed by intersecting plumes from two targets does not contain all groups of ions present in initial plumes. Target Distance (dpeaa)DE-He213 Thin Silicon Film (dpeaa)DE-He213 Plasma Beam (dpeaa)DE-He213 Probe Distance (dpeaa)DE-He213 Silicon Target (dpeaa)DE-He213 Novodvorsky, O. A. verfasserin aut Lotin, A. A. verfasserin aut Rocheva, V. V. verfasserin aut Khramova, O. D. verfasserin aut Panchenko, V. Ya. verfasserin aut Enthalten in Technical physics Berlin : Springer Science + Business Media, 1997 55(2010), 4 vom: Apr., Seite 491-495 (DE-627)311278795 (DE-600)2008502-3 1090-6525 nnns volume:55 year:2010 number:4 month:04 pages:491-495 https://dx.doi.org/10.1134/S1063784210040092 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER SSG-OPC-MAT SSG-OPC-ASE GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 33.00 ASE 31.00 ASE 50.30 ASE AR 55 2010 4 04 491-495 |
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10.1134/S1063784210040092 doi (DE-627)SPR019766548 (SPR)S1063784210040092-e DE-627 ger DE-627 rakwb eng 530 ASE 33.00 bkl 31.00 bkl 50.30 bkl Khaydukov, E. V. verfasserin aut Probe studies of laser erosion plume arising at silicon ablation in vacuum 2010 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract An erosion plume arising at the ablation of silicon by a solid-state laser (λ = 1.06 μm) is studied with a Langmuir probe. The time-of-flight curves of the probe ion current are obtained for a plasma beam formed by intersecting plumes from two targets and for an erosion plume from one silicon target. The probe-target distance is varied in the range 40–157 mm. The time-of-flight curves for the ions of the erosion plume are sums of the velocity one-dimensional Maxwell distributions for four groups of ions. It is found that a plasma beam formed by intersecting plumes from two targets does not contain all groups of ions present in initial plumes. Target Distance (dpeaa)DE-He213 Thin Silicon Film (dpeaa)DE-He213 Plasma Beam (dpeaa)DE-He213 Probe Distance (dpeaa)DE-He213 Silicon Target (dpeaa)DE-He213 Novodvorsky, O. A. verfasserin aut Lotin, A. A. verfasserin aut Rocheva, V. V. verfasserin aut Khramova, O. D. verfasserin aut Panchenko, V. Ya. verfasserin aut Enthalten in Technical physics Berlin : Springer Science + Business Media, 1997 55(2010), 4 vom: Apr., Seite 491-495 (DE-627)311278795 (DE-600)2008502-3 1090-6525 nnns volume:55 year:2010 number:4 month:04 pages:491-495 https://dx.doi.org/10.1134/S1063784210040092 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER SSG-OPC-MAT SSG-OPC-ASE GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 33.00 ASE 31.00 ASE 50.30 ASE AR 55 2010 4 04 491-495 |
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Khaydukov, E. V. @@aut@@ Novodvorsky, O. A. @@aut@@ Lotin, A. A. @@aut@@ Rocheva, V. V. @@aut@@ Khramova, O. D. @@aut@@ Panchenko, V. Ya. @@aut@@ |
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Khaydukov, E. V. |
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Khaydukov, E. V. ddc 530 bkl 33.00 bkl 31.00 bkl 50.30 misc Target Distance misc Thin Silicon Film misc Plasma Beam misc Probe Distance misc Silicon Target Probe studies of laser erosion plume arising at silicon ablation in vacuum |
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530 ASE 33.00 bkl 31.00 bkl 50.30 bkl Probe studies of laser erosion plume arising at silicon ablation in vacuum Target Distance (dpeaa)DE-He213 Thin Silicon Film (dpeaa)DE-He213 Plasma Beam (dpeaa)DE-He213 Probe Distance (dpeaa)DE-He213 Silicon Target (dpeaa)DE-He213 |
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ddc 530 bkl 33.00 bkl 31.00 bkl 50.30 misc Target Distance misc Thin Silicon Film misc Plasma Beam misc Probe Distance misc Silicon Target |
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ddc 530 bkl 33.00 bkl 31.00 bkl 50.30 misc Target Distance misc Thin Silicon Film misc Plasma Beam misc Probe Distance misc Silicon Target |
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Probe studies of laser erosion plume arising at silicon ablation in vacuum |
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Probe studies of laser erosion plume arising at silicon ablation in vacuum |
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Khaydukov, E. V. Novodvorsky, O. A. Lotin, A. A. Rocheva, V. V. Khramova, O. D. Panchenko, V. Ya. |
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probe studies of laser erosion plume arising at silicon ablation in vacuum |
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Probe studies of laser erosion plume arising at silicon ablation in vacuum |
| abstract |
Abstract An erosion plume arising at the ablation of silicon by a solid-state laser (λ = 1.06 μm) is studied with a Langmuir probe. The time-of-flight curves of the probe ion current are obtained for a plasma beam formed by intersecting plumes from two targets and for an erosion plume from one silicon target. The probe-target distance is varied in the range 40–157 mm. The time-of-flight curves for the ions of the erosion plume are sums of the velocity one-dimensional Maxwell distributions for four groups of ions. It is found that a plasma beam formed by intersecting plumes from two targets does not contain all groups of ions present in initial plumes. |
| abstractGer |
Abstract An erosion plume arising at the ablation of silicon by a solid-state laser (λ = 1.06 μm) is studied with a Langmuir probe. The time-of-flight curves of the probe ion current are obtained for a plasma beam formed by intersecting plumes from two targets and for an erosion plume from one silicon target. The probe-target distance is varied in the range 40–157 mm. The time-of-flight curves for the ions of the erosion plume are sums of the velocity one-dimensional Maxwell distributions for four groups of ions. It is found that a plasma beam formed by intersecting plumes from two targets does not contain all groups of ions present in initial plumes. |
| abstract_unstemmed |
Abstract An erosion plume arising at the ablation of silicon by a solid-state laser (λ = 1.06 μm) is studied with a Langmuir probe. The time-of-flight curves of the probe ion current are obtained for a plasma beam formed by intersecting plumes from two targets and for an erosion plume from one silicon target. The probe-target distance is varied in the range 40–157 mm. The time-of-flight curves for the ions of the erosion plume are sums of the velocity one-dimensional Maxwell distributions for four groups of ions. It is found that a plasma beam formed by intersecting plumes from two targets does not contain all groups of ions present in initial plumes. |
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Probe studies of laser erosion plume arising at silicon ablation in vacuum |
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https://dx.doi.org/10.1134/S1063784210040092 |
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Novodvorsky, O. A. Lotin, A. A. Rocheva, V. V. Khramova, O. D. Panchenko, V. Ya |
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Novodvorsky, O. A. Lotin, A. A. Rocheva, V. V. Khramova, O. D. Panchenko, V. Ya |
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311278795 |
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| doi_str |
10.1134/S1063784210040092 |
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2024-07-04T02:51:15.194Z |
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| score |
7.401045 |