Effects of particle loading on a reduced pressure inductively coupled radio frequency plasma torch

Abstract Our previous attempts in the modeling of the heat transfer and fluid flow in radio frequency (RF) plasma torches considered dilute particle-loading conditions. It was assumed that the injected particles have no effect on the plasma temperature and velocity profiles. However, in practice, th...
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Gespeichert in:

Autor*in:	Wei, D. Y. [verfasserIn] Farouk, B. Apelian, D.

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	1989

Schlagwörter:	Metallurgical Transaction Plasma Torch Plasma Plume Radio Frequency Plasma Total Mass Flow Rate

Anmerkung:	© The Minerals, Metals & Materials Society and ASM International 1989

Übergeordnetes Werk:	Enthalten in: Metallurgical and materials transactions - New York, NY : Springer Sciences & Business Media, 1975, 20(1989), 6 vom: 01. Dez., Seite 949-958
Übergeordnetes Werk:	volume:20 ; year:1989 ; number:6 ; day:01 ; month:12 ; pages:949-958

Links:	Volltext

DOI / URN:	10.1007/BF02670200

Katalog-ID:	SPR021443726

Internformat


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100	1		\|a Wei, D. Y. \|e verfasserin \|4 aut
245	1	0	\|a Effects of particle loading on a reduced pressure inductively coupled radio frequency plasma torch
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520			\|a Abstract Our previous attempts in the modeling of the heat transfer and fluid flow in radio frequency (RF) plasma torches considered dilute particle-loading conditions. It was assumed that the injected particles have no effect on the plasma temperature and velocity profiles. However, in practice, the plasma deposition process is carried out under fairly high loading conditions to achieve high energy efficiency. The plasma gas experiences significant local cooling and deceleration due to high particle injection rates. To this end, a numerical model has been developed which considers the coupling effects between the plasma temperature and velocity fields and injected particles. In this study, effort has been focused on the particle-loading effect in an inductively coupled RF plasma torch under a reduced pressure environment. The temperature and flow fields in an inductively coupled RF plasma torch are solved using an axisymmetric, variable property formulation of the Navier-Stokes equations. Pseudo two-dimensional electrical and magnetic field equations were considered. In addition, an integral constraint condition is used to maintain a specified discharge power in the plasma torch. The interaction between the plasma gas and injected particles is considered using the well-known “Particle-Source-In-Cell” (PSI-Cell) method. The exchanged mass, momentum, and energy between the plasma gas and injected particles are accounted for through additional source terms in the governing equations. The effect of particle loading on the resulting torch flow, thermal profiles, and particle-melting characteristics are presented and discussed.
650		4	\|a Metallurgical Transaction \|7 (dpeaa)DE-He213
650		4	\|a Plasma Torch \|7 (dpeaa)DE-He213
650		4	\|a Plasma Plume \|7 (dpeaa)DE-He213
650		4	\|a Radio Frequency Plasma \|7 (dpeaa)DE-He213
650		4	\|a Total Mass Flow Rate \|7 (dpeaa)DE-He213
700	1		\|a Farouk, B. \|4 aut
700	1		\|a Apelian, D. \|4 aut
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author_variant	d y w dy dyw b f bf d a da
matchkey_str	article:15431916:1989----::fetoprillaignrdcdrsuenutvlculda
hierarchy_sort_str	1989
publishDate	1989
allfields	10.1007/BF02670200 doi (DE-627)SPR021443726 (SPR)BF02670200-e DE-627 ger DE-627 rakwb eng Wei, D. Y. verfasserin aut Effects of particle loading on a reduced pressure inductively coupled radio frequency plasma torch 1989 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © The Minerals, Metals & Materials Society and ASM International 1989 Abstract Our previous attempts in the modeling of the heat transfer and fluid flow in radio frequency (RF) plasma torches considered dilute particle-loading conditions. It was assumed that the injected particles have no effect on the plasma temperature and velocity profiles. However, in practice, the plasma deposition process is carried out under fairly high loading conditions to achieve high energy efficiency. The plasma gas experiences significant local cooling and deceleration due to high particle injection rates. To this end, a numerical model has been developed which considers the coupling effects between the plasma temperature and velocity fields and injected particles. In this study, effort has been focused on the particle-loading effect in an inductively coupled RF plasma torch under a reduced pressure environment. The temperature and flow fields in an inductively coupled RF plasma torch are solved using an axisymmetric, variable property formulation of the Navier-Stokes equations. Pseudo two-dimensional electrical and magnetic field equations were considered. In addition, an integral constraint condition is used to maintain a specified discharge power in the plasma torch. The interaction between the plasma gas and injected particles is considered using the well-known “Particle-Source-In-Cell” (PSI-Cell) method. The exchanged mass, momentum, and energy between the plasma gas and injected particles are accounted for through additional source terms in the governing equations. The effect of particle loading on the resulting torch flow, thermal profiles, and particle-melting characteristics are presented and discussed. Metallurgical Transaction (dpeaa)DE-He213 Plasma Torch (dpeaa)DE-He213 Plasma Plume (dpeaa)DE-He213 Radio Frequency Plasma (dpeaa)DE-He213 Total Mass Flow Rate (dpeaa)DE-He213 Farouk, B. aut Apelian, D. aut Enthalten in Metallurgical and materials transactions New York, NY : Springer Sciences & Business Media, 1975 20(1989), 6 vom: 01. Dez., Seite 949-958 (DE-627)325572062 (DE-600)2037524-4 1543-1916 nnns volume:20 year:1989 number:6 day:01 month:12 pages:949-958 https://dx.doi.org/10.1007/BF02670200 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER SSG-OLC-PHA GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_121 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_224 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_374 GBV_ILN_602 GBV_ILN_647 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2043 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2158 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2193 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_2808 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4277 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4346 GBV_ILN_4367 GBV_ILN_4393 GBV_ILN_4700 GBV_ILN_4753 AR 20 1989 6 01 12 949-958
spelling	10.1007/BF02670200 doi (DE-627)SPR021443726 (SPR)BF02670200-e DE-627 ger DE-627 rakwb eng Wei, D. Y. verfasserin aut Effects of particle loading on a reduced pressure inductively coupled radio frequency plasma torch 1989 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © The Minerals, Metals & Materials Society and ASM International 1989 Abstract Our previous attempts in the modeling of the heat transfer and fluid flow in radio frequency (RF) plasma torches considered dilute particle-loading conditions. It was assumed that the injected particles have no effect on the plasma temperature and velocity profiles. However, in practice, the plasma deposition process is carried out under fairly high loading conditions to achieve high energy efficiency. The plasma gas experiences significant local cooling and deceleration due to high particle injection rates. To this end, a numerical model has been developed which considers the coupling effects between the plasma temperature and velocity fields and injected particles. In this study, effort has been focused on the particle-loading effect in an inductively coupled RF plasma torch under a reduced pressure environment. The temperature and flow fields in an inductively coupled RF plasma torch are solved using an axisymmetric, variable property formulation of the Navier-Stokes equations. Pseudo two-dimensional electrical and magnetic field equations were considered. In addition, an integral constraint condition is used to maintain a specified discharge power in the plasma torch. The interaction between the plasma gas and injected particles is considered using the well-known “Particle-Source-In-Cell” (PSI-Cell) method. The exchanged mass, momentum, and energy between the plasma gas and injected particles are accounted for through additional source terms in the governing equations. The effect of particle loading on the resulting torch flow, thermal profiles, and particle-melting characteristics are presented and discussed. Metallurgical Transaction (dpeaa)DE-He213 Plasma Torch (dpeaa)DE-He213 Plasma Plume (dpeaa)DE-He213 Radio Frequency Plasma (dpeaa)DE-He213 Total Mass Flow Rate (dpeaa)DE-He213 Farouk, B. aut Apelian, D. aut Enthalten in Metallurgical and materials transactions New York, NY : Springer Sciences & Business Media, 1975 20(1989), 6 vom: 01. Dez., Seite 949-958 (DE-627)325572062 (DE-600)2037524-4 1543-1916 nnns volume:20 year:1989 number:6 day:01 month:12 pages:949-958 https://dx.doi.org/10.1007/BF02670200 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER SSG-OLC-PHA GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_121 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_224 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_374 GBV_ILN_602 GBV_ILN_647 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2043 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2158 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2193 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_2808 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4277 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4346 GBV_ILN_4367 GBV_ILN_4393 GBV_ILN_4700 GBV_ILN_4753 AR 20 1989 6 01 12 949-958
allfields_unstemmed	10.1007/BF02670200 doi (DE-627)SPR021443726 (SPR)BF02670200-e DE-627 ger DE-627 rakwb eng Wei, D. Y. verfasserin aut Effects of particle loading on a reduced pressure inductively coupled radio frequency plasma torch 1989 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © The Minerals, Metals & Materials Society and ASM International 1989 Abstract Our previous attempts in the modeling of the heat transfer and fluid flow in radio frequency (RF) plasma torches considered dilute particle-loading conditions. It was assumed that the injected particles have no effect on the plasma temperature and velocity profiles. However, in practice, the plasma deposition process is carried out under fairly high loading conditions to achieve high energy efficiency. The plasma gas experiences significant local cooling and deceleration due to high particle injection rates. To this end, a numerical model has been developed which considers the coupling effects between the plasma temperature and velocity fields and injected particles. In this study, effort has been focused on the particle-loading effect in an inductively coupled RF plasma torch under a reduced pressure environment. The temperature and flow fields in an inductively coupled RF plasma torch are solved using an axisymmetric, variable property formulation of the Navier-Stokes equations. Pseudo two-dimensional electrical and magnetic field equations were considered. In addition, an integral constraint condition is used to maintain a specified discharge power in the plasma torch. The interaction between the plasma gas and injected particles is considered using the well-known “Particle-Source-In-Cell” (PSI-Cell) method. The exchanged mass, momentum, and energy between the plasma gas and injected particles are accounted for through additional source terms in the governing equations. The effect of particle loading on the resulting torch flow, thermal profiles, and particle-melting characteristics are presented and discussed. Metallurgical Transaction (dpeaa)DE-He213 Plasma Torch (dpeaa)DE-He213 Plasma Plume (dpeaa)DE-He213 Radio Frequency Plasma (dpeaa)DE-He213 Total Mass Flow Rate (dpeaa)DE-He213 Farouk, B. aut Apelian, D. aut Enthalten in Metallurgical and materials transactions New York, NY : Springer Sciences & Business Media, 1975 20(1989), 6 vom: 01. Dez., Seite 949-958 (DE-627)325572062 (DE-600)2037524-4 1543-1916 nnns volume:20 year:1989 number:6 day:01 month:12 pages:949-958 https://dx.doi.org/10.1007/BF02670200 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER SSG-OLC-PHA GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_121 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_224 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_374 GBV_ILN_602 GBV_ILN_647 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2043 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2158 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2193 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_2808 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4277 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4346 GBV_ILN_4367 GBV_ILN_4393 GBV_ILN_4700 GBV_ILN_4753 AR 20 1989 6 01 12 949-958
allfieldsGer	10.1007/BF02670200 doi (DE-627)SPR021443726 (SPR)BF02670200-e DE-627 ger DE-627 rakwb eng Wei, D. Y. verfasserin aut Effects of particle loading on a reduced pressure inductively coupled radio frequency plasma torch 1989 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © The Minerals, Metals & Materials Society and ASM International 1989 Abstract Our previous attempts in the modeling of the heat transfer and fluid flow in radio frequency (RF) plasma torches considered dilute particle-loading conditions. It was assumed that the injected particles have no effect on the plasma temperature and velocity profiles. However, in practice, the plasma deposition process is carried out under fairly high loading conditions to achieve high energy efficiency. The plasma gas experiences significant local cooling and deceleration due to high particle injection rates. To this end, a numerical model has been developed which considers the coupling effects between the plasma temperature and velocity fields and injected particles. In this study, effort has been focused on the particle-loading effect in an inductively coupled RF plasma torch under a reduced pressure environment. The temperature and flow fields in an inductively coupled RF plasma torch are solved using an axisymmetric, variable property formulation of the Navier-Stokes equations. Pseudo two-dimensional electrical and magnetic field equations were considered. In addition, an integral constraint condition is used to maintain a specified discharge power in the plasma torch. The interaction between the plasma gas and injected particles is considered using the well-known “Particle-Source-In-Cell” (PSI-Cell) method. The exchanged mass, momentum, and energy between the plasma gas and injected particles are accounted for through additional source terms in the governing equations. The effect of particle loading on the resulting torch flow, thermal profiles, and particle-melting characteristics are presented and discussed. Metallurgical Transaction (dpeaa)DE-He213 Plasma Torch (dpeaa)DE-He213 Plasma Plume (dpeaa)DE-He213 Radio Frequency Plasma (dpeaa)DE-He213 Total Mass Flow Rate (dpeaa)DE-He213 Farouk, B. aut Apelian, D. aut Enthalten in Metallurgical and materials transactions New York, NY : Springer Sciences & Business Media, 1975 20(1989), 6 vom: 01. Dez., Seite 949-958 (DE-627)325572062 (DE-600)2037524-4 1543-1916 nnns volume:20 year:1989 number:6 day:01 month:12 pages:949-958 https://dx.doi.org/10.1007/BF02670200 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER SSG-OLC-PHA GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_121 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_224 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_374 GBV_ILN_602 GBV_ILN_647 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2043 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2158 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2193 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_2808 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4277 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4346 GBV_ILN_4367 GBV_ILN_4393 GBV_ILN_4700 GBV_ILN_4753 AR 20 1989 6 01 12 949-958
allfieldsSound	10.1007/BF02670200 doi (DE-627)SPR021443726 (SPR)BF02670200-e DE-627 ger DE-627 rakwb eng Wei, D. Y. verfasserin aut Effects of particle loading on a reduced pressure inductively coupled radio frequency plasma torch 1989 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © The Minerals, Metals & Materials Society and ASM International 1989 Abstract Our previous attempts in the modeling of the heat transfer and fluid flow in radio frequency (RF) plasma torches considered dilute particle-loading conditions. It was assumed that the injected particles have no effect on the plasma temperature and velocity profiles. However, in practice, the plasma deposition process is carried out under fairly high loading conditions to achieve high energy efficiency. The plasma gas experiences significant local cooling and deceleration due to high particle injection rates. To this end, a numerical model has been developed which considers the coupling effects between the plasma temperature and velocity fields and injected particles. In this study, effort has been focused on the particle-loading effect in an inductively coupled RF plasma torch under a reduced pressure environment. The temperature and flow fields in an inductively coupled RF plasma torch are solved using an axisymmetric, variable property formulation of the Navier-Stokes equations. Pseudo two-dimensional electrical and magnetic field equations were considered. In addition, an integral constraint condition is used to maintain a specified discharge power in the plasma torch. The interaction between the plasma gas and injected particles is considered using the well-known “Particle-Source-In-Cell” (PSI-Cell) method. The exchanged mass, momentum, and energy between the plasma gas and injected particles are accounted for through additional source terms in the governing equations. The effect of particle loading on the resulting torch flow, thermal profiles, and particle-melting characteristics are presented and discussed. Metallurgical Transaction (dpeaa)DE-He213 Plasma Torch (dpeaa)DE-He213 Plasma Plume (dpeaa)DE-He213 Radio Frequency Plasma (dpeaa)DE-He213 Total Mass Flow Rate (dpeaa)DE-He213 Farouk, B. aut Apelian, D. aut Enthalten in Metallurgical and materials transactions New York, NY : Springer Sciences & Business Media, 1975 20(1989), 6 vom: 01. Dez., Seite 949-958 (DE-627)325572062 (DE-600)2037524-4 1543-1916 nnns volume:20 year:1989 number:6 day:01 month:12 pages:949-958 https://dx.doi.org/10.1007/BF02670200 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER SSG-OLC-PHA GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_121 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_206 GBV_ILN_224 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_374 GBV_ILN_602 GBV_ILN_647 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2018 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2043 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2158 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2193 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_2808 GBV_ILN_4012 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4277 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4346 GBV_ILN_4367 GBV_ILN_4393 GBV_ILN_4700 GBV_ILN_4753 AR 20 1989 6 01 12 949-958
language	English
source	Enthalten in Metallurgical and materials transactions 20(1989), 6 vom: 01. Dez., Seite 949-958 volume:20 year:1989 number:6 day:01 month:12 pages:949-958
sourceStr	Enthalten in Metallurgical and materials transactions 20(1989), 6 vom: 01. Dez., Seite 949-958 volume:20 year:1989 number:6 day:01 month:12 pages:949-958
format_phy_str_mv	Article
institution	findex.gbv.de
topic_facet	Metallurgical Transaction Plasma Torch Plasma Plume Radio Frequency Plasma Total Mass Flow Rate
isfreeaccess_bool	false
container_title	Metallurgical and materials transactions
authorswithroles_txt_mv	Wei, D. Y. @@aut@@ Farouk, B. @@aut@@ Apelian, D. @@aut@@
publishDateDaySort_date	1989-12-01T00:00:00Z
hierarchy_top_id	325572062
id	SPR021443726
language_de	englisch
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author	Wei, D. Y.
spellingShingle	Wei, D. Y. misc Metallurgical Transaction misc Plasma Torch misc Plasma Plume misc Radio Frequency Plasma misc Total Mass Flow Rate Effects of particle loading on a reduced pressure inductively coupled radio frequency plasma torch
authorStr	Wei, D. Y.
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topic_title	Effects of particle loading on a reduced pressure inductively coupled radio frequency plasma torch Metallurgical Transaction (dpeaa)DE-He213 Plasma Torch (dpeaa)DE-He213 Plasma Plume (dpeaa)DE-He213 Radio Frequency Plasma (dpeaa)DE-He213 Total Mass Flow Rate (dpeaa)DE-He213
topic	misc Metallurgical Transaction misc Plasma Torch misc Plasma Plume misc Radio Frequency Plasma misc Total Mass Flow Rate
topic_unstemmed	misc Metallurgical Transaction misc Plasma Torch misc Plasma Plume misc Radio Frequency Plasma misc Total Mass Flow Rate
topic_browse	misc Metallurgical Transaction misc Plasma Torch misc Plasma Plume misc Radio Frequency Plasma misc Total Mass Flow Rate
format_facet	Elektronische Aufsätze Aufsätze Elektronische Ressource
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title	Effects of particle loading on a reduced pressure inductively coupled radio frequency plasma torch
ctrlnum	(DE-627)SPR021443726 (SPR)BF02670200-e
title_full	Effects of particle loading on a reduced pressure inductively coupled radio frequency plasma torch
author_sort	Wei, D. Y.
journal	Metallurgical and materials transactions
journalStr	Metallurgical and materials transactions
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container_start_page	949
author_browse	Wei, D. Y. Farouk, B. Apelian, D.
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format_se	Elektronische Aufsätze
author-letter	Wei, D. Y.
doi_str_mv	10.1007/BF02670200
title_sort	effects of particle loading on a reduced pressure inductively coupled radio frequency plasma torch
title_auth	Effects of particle loading on a reduced pressure inductively coupled radio frequency plasma torch
abstract	Abstract Our previous attempts in the modeling of the heat transfer and fluid flow in radio frequency (RF) plasma torches considered dilute particle-loading conditions. It was assumed that the injected particles have no effect on the plasma temperature and velocity profiles. However, in practice, the plasma deposition process is carried out under fairly high loading conditions to achieve high energy efficiency. The plasma gas experiences significant local cooling and deceleration due to high particle injection rates. To this end, a numerical model has been developed which considers the coupling effects between the plasma temperature and velocity fields and injected particles. In this study, effort has been focused on the particle-loading effect in an inductively coupled RF plasma torch under a reduced pressure environment. The temperature and flow fields in an inductively coupled RF plasma torch are solved using an axisymmetric, variable property formulation of the Navier-Stokes equations. Pseudo two-dimensional electrical and magnetic field equations were considered. In addition, an integral constraint condition is used to maintain a specified discharge power in the plasma torch. The interaction between the plasma gas and injected particles is considered using the well-known “Particle-Source-In-Cell” (PSI-Cell) method. The exchanged mass, momentum, and energy between the plasma gas and injected particles are accounted for through additional source terms in the governing equations. The effect of particle loading on the resulting torch flow, thermal profiles, and particle-melting characteristics are presented and discussed. © The Minerals, Metals & Materials Society and ASM International 1989
abstractGer	Abstract Our previous attempts in the modeling of the heat transfer and fluid flow in radio frequency (RF) plasma torches considered dilute particle-loading conditions. It was assumed that the injected particles have no effect on the plasma temperature and velocity profiles. However, in practice, the plasma deposition process is carried out under fairly high loading conditions to achieve high energy efficiency. The plasma gas experiences significant local cooling and deceleration due to high particle injection rates. To this end, a numerical model has been developed which considers the coupling effects between the plasma temperature and velocity fields and injected particles. In this study, effort has been focused on the particle-loading effect in an inductively coupled RF plasma torch under a reduced pressure environment. The temperature and flow fields in an inductively coupled RF plasma torch are solved using an axisymmetric, variable property formulation of the Navier-Stokes equations. Pseudo two-dimensional electrical and magnetic field equations were considered. In addition, an integral constraint condition is used to maintain a specified discharge power in the plasma torch. The interaction between the plasma gas and injected particles is considered using the well-known “Particle-Source-In-Cell” (PSI-Cell) method. The exchanged mass, momentum, and energy between the plasma gas and injected particles are accounted for through additional source terms in the governing equations. The effect of particle loading on the resulting torch flow, thermal profiles, and particle-melting characteristics are presented and discussed. © The Minerals, Metals & Materials Society and ASM International 1989
abstract_unstemmed	Abstract Our previous attempts in the modeling of the heat transfer and fluid flow in radio frequency (RF) plasma torches considered dilute particle-loading conditions. It was assumed that the injected particles have no effect on the plasma temperature and velocity profiles. However, in practice, the plasma deposition process is carried out under fairly high loading conditions to achieve high energy efficiency. The plasma gas experiences significant local cooling and deceleration due to high particle injection rates. To this end, a numerical model has been developed which considers the coupling effects between the plasma temperature and velocity fields and injected particles. In this study, effort has been focused on the particle-loading effect in an inductively coupled RF plasma torch under a reduced pressure environment. The temperature and flow fields in an inductively coupled RF plasma torch are solved using an axisymmetric, variable property formulation of the Navier-Stokes equations. Pseudo two-dimensional electrical and magnetic field equations were considered. In addition, an integral constraint condition is used to maintain a specified discharge power in the plasma torch. The interaction between the plasma gas and injected particles is considered using the well-known “Particle-Source-In-Cell” (PSI-Cell) method. The exchanged mass, momentum, and energy between the plasma gas and injected particles are accounted for through additional source terms in the governing equations. The effect of particle loading on the resulting torch flow, thermal profiles, and particle-melting characteristics are presented and discussed. © The Minerals, Metals & Materials Society and ASM International 1989
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title_short	Effects of particle loading on a reduced pressure inductively coupled radio frequency plasma torch
url	https://dx.doi.org/10.1007/BF02670200
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up_date	2024-07-03T22:35:30.607Z
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fullrecord_marcxml	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000caa a22002652 4500</leader><controlfield tag="001">SPR021443726</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20230519104053.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">201006s1989 xx \|\|\|\|\|o 00\| \|\|eng c</controlfield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/BF02670200</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)SPR021443726</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(SPR)BF02670200-e</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">ger</subfield><subfield code="c">DE-627</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Wei, D. Y.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Effects of particle loading on a reduced pressure inductively coupled radio frequency plasma torch</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">1989</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">Computermedien</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Online-Ressource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">© The Minerals, Metals & Materials Society and ASM International 1989</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Abstract Our previous attempts in the modeling of the heat transfer and fluid flow in radio frequency (RF) plasma torches considered dilute particle-loading conditions. It was assumed that the injected particles have no effect on the plasma temperature and velocity profiles. However, in practice, the plasma deposition process is carried out under fairly high loading conditions to achieve high energy efficiency. The plasma gas experiences significant local cooling and deceleration due to high particle injection rates. To this end, a numerical model has been developed which considers the coupling effects between the plasma temperature and velocity fields and injected particles. In this study, effort has been focused on the particle-loading effect in an inductively coupled RF plasma torch under a reduced pressure environment. The temperature and flow fields in an inductively coupled RF plasma torch are solved using an axisymmetric, variable property formulation of the Navier-Stokes equations. Pseudo two-dimensional electrical and magnetic field equations were considered. In addition, an integral constraint condition is used to maintain a specified discharge power in the plasma torch. The interaction between the plasma gas and injected particles is considered using the well-known “Particle-Source-In-Cell” (PSI-Cell) method. The exchanged mass, momentum, and energy between the plasma gas and injected particles are accounted for through additional source terms in the governing equations. 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Effects of particle loading on a reduced pressure inductively coupled radio frequency plasma torch

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