Energy saving in line patterning using pulse laser by reducing overlapping rate with rectangular beam shape

Abstract Line patterning using a pulse laser is important process for fabrication of solar cells, circuit patterning of transparent conductive oxide (TCO) layer and so on. The typical laser beam shape is circular, so high overlapping rate for line patterning is required for making a straight scribed...
Ausführliche Beschreibung

Gespeichert in:

Autor*in:	Lee, Jae-Hoon [verfasserIn] Lee, Won-Jin [verfasserIn] Shin, Dong-Jae [verfasserIn] Daavasuren, Gaasuren [verfasserIn] Chun, Doo-Man [verfasserIn]

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	2013

Schlagwörter:	Laser scribing Overlapping rate Rectangular beam Energy saving

Übergeordnetes Werk:	Enthalten in: International journal of precision engineering and manufacturing - Sŏul : KSPE, 2009, 14(2013), 6 vom: Juni, Seite 985-988
Übergeordnetes Werk:	volume:14 ; year:2013 ; number:6 ; month:06 ; pages:985-988

Links:	Volltext

DOI / URN:	10.1007/s12541-013-0130-y

Katalog-ID:	SPR026092239

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520			\|a Abstract Line patterning using a pulse laser is important process for fabrication of solar cells, circuit patterning of transparent conductive oxide (TCO) layer and so on. The typical laser beam shape is circular, so high overlapping rate for line patterning is required for making a straight scribed line edge. In this research, the rectangular beam was used to minimize the overlapping rate. The rectangular beam was made by locating a rectangular shape mask between laser source and objective lens. The nanosecond ultra-violet (UV) pulse laser with 355 nm wavelength was used. Indium tin oxide (ITO) coated polyethylene terephthalate (PET) was used for thin conductive layer scribing. The fabricated line patterns with the original circular beam and the rectangular beam were compared under the same process parameters such as laser power, laser pulse frequency, and so on. The overlapping rate was controlled by scan speed. The shape of patterning lines, and the quality of scribed line edge were observed. The rectangular beam could decrease the overlapping rate for straight scribed line edge. Even though the rectangular beam shape had energy loss by blocking the laser beam, it could increase overall energy efficiency of laser patterning by reducing the overlapping rate.
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allfields	10.1007/s12541-013-0130-y doi (DE-627)SPR026092239 (SPR)s12541-013-0130-y-e DE-627 ger DE-627 rakwb eng 600 ASE Lee, Jae-Hoon verfasserin aut Energy saving in line patterning using pulse laser by reducing overlapping rate with rectangular beam shape 2013 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract Line patterning using a pulse laser is important process for fabrication of solar cells, circuit patterning of transparent conductive oxide (TCO) layer and so on. The typical laser beam shape is circular, so high overlapping rate for line patterning is required for making a straight scribed line edge. In this research, the rectangular beam was used to minimize the overlapping rate. The rectangular beam was made by locating a rectangular shape mask between laser source and objective lens. The nanosecond ultra-violet (UV) pulse laser with 355 nm wavelength was used. Indium tin oxide (ITO) coated polyethylene terephthalate (PET) was used for thin conductive layer scribing. The fabricated line patterns with the original circular beam and the rectangular beam were compared under the same process parameters such as laser power, laser pulse frequency, and so on. The overlapping rate was controlled by scan speed. The shape of patterning lines, and the quality of scribed line edge were observed. The rectangular beam could decrease the overlapping rate for straight scribed line edge. Even though the rectangular beam shape had energy loss by blocking the laser beam, it could increase overall energy efficiency of laser patterning by reducing the overlapping rate. Laser scribing (dpeaa)DE-He213 Overlapping rate (dpeaa)DE-He213 Rectangular beam (dpeaa)DE-He213 Energy saving (dpeaa)DE-He213 Lee, Won-Jin verfasserin aut Shin, Dong-Jae verfasserin aut Daavasuren, Gaasuren verfasserin aut Chun, Doo-Man verfasserin aut Enthalten in International journal of precision engineering and manufacturing Sŏul : KSPE, 2009 14(2013), 6 vom: Juni, Seite 985-988 (DE-627)609403109 (DE-600)2515436-9 2005-4602 nnns volume:14 year:2013 number:6 month:06 pages:985-988 https://dx.doi.org/10.1007/s12541-013-0130-y lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 14 2013 6 06 985-988
spelling	10.1007/s12541-013-0130-y doi (DE-627)SPR026092239 (SPR)s12541-013-0130-y-e DE-627 ger DE-627 rakwb eng 600 ASE Lee, Jae-Hoon verfasserin aut Energy saving in line patterning using pulse laser by reducing overlapping rate with rectangular beam shape 2013 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract Line patterning using a pulse laser is important process for fabrication of solar cells, circuit patterning of transparent conductive oxide (TCO) layer and so on. The typical laser beam shape is circular, so high overlapping rate for line patterning is required for making a straight scribed line edge. In this research, the rectangular beam was used to minimize the overlapping rate. The rectangular beam was made by locating a rectangular shape mask between laser source and objective lens. The nanosecond ultra-violet (UV) pulse laser with 355 nm wavelength was used. Indium tin oxide (ITO) coated polyethylene terephthalate (PET) was used for thin conductive layer scribing. The fabricated line patterns with the original circular beam and the rectangular beam were compared under the same process parameters such as laser power, laser pulse frequency, and so on. The overlapping rate was controlled by scan speed. The shape of patterning lines, and the quality of scribed line edge were observed. The rectangular beam could decrease the overlapping rate for straight scribed line edge. Even though the rectangular beam shape had energy loss by blocking the laser beam, it could increase overall energy efficiency of laser patterning by reducing the overlapping rate. Laser scribing (dpeaa)DE-He213 Overlapping rate (dpeaa)DE-He213 Rectangular beam (dpeaa)DE-He213 Energy saving (dpeaa)DE-He213 Lee, Won-Jin verfasserin aut Shin, Dong-Jae verfasserin aut Daavasuren, Gaasuren verfasserin aut Chun, Doo-Man verfasserin aut Enthalten in International journal of precision engineering and manufacturing Sŏul : KSPE, 2009 14(2013), 6 vom: Juni, Seite 985-988 (DE-627)609403109 (DE-600)2515436-9 2005-4602 nnns volume:14 year:2013 number:6 month:06 pages:985-988 https://dx.doi.org/10.1007/s12541-013-0130-y lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 14 2013 6 06 985-988
allfields_unstemmed	10.1007/s12541-013-0130-y doi (DE-627)SPR026092239 (SPR)s12541-013-0130-y-e DE-627 ger DE-627 rakwb eng 600 ASE Lee, Jae-Hoon verfasserin aut Energy saving in line patterning using pulse laser by reducing overlapping rate with rectangular beam shape 2013 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract Line patterning using a pulse laser is important process for fabrication of solar cells, circuit patterning of transparent conductive oxide (TCO) layer and so on. The typical laser beam shape is circular, so high overlapping rate for line patterning is required for making a straight scribed line edge. In this research, the rectangular beam was used to minimize the overlapping rate. The rectangular beam was made by locating a rectangular shape mask between laser source and objective lens. The nanosecond ultra-violet (UV) pulse laser with 355 nm wavelength was used. Indium tin oxide (ITO) coated polyethylene terephthalate (PET) was used for thin conductive layer scribing. The fabricated line patterns with the original circular beam and the rectangular beam were compared under the same process parameters such as laser power, laser pulse frequency, and so on. The overlapping rate was controlled by scan speed. The shape of patterning lines, and the quality of scribed line edge were observed. The rectangular beam could decrease the overlapping rate for straight scribed line edge. Even though the rectangular beam shape had energy loss by blocking the laser beam, it could increase overall energy efficiency of laser patterning by reducing the overlapping rate. Laser scribing (dpeaa)DE-He213 Overlapping rate (dpeaa)DE-He213 Rectangular beam (dpeaa)DE-He213 Energy saving (dpeaa)DE-He213 Lee, Won-Jin verfasserin aut Shin, Dong-Jae verfasserin aut Daavasuren, Gaasuren verfasserin aut Chun, Doo-Man verfasserin aut Enthalten in International journal of precision engineering and manufacturing Sŏul : KSPE, 2009 14(2013), 6 vom: Juni, Seite 985-988 (DE-627)609403109 (DE-600)2515436-9 2005-4602 nnns volume:14 year:2013 number:6 month:06 pages:985-988 https://dx.doi.org/10.1007/s12541-013-0130-y lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 14 2013 6 06 985-988
allfieldsGer	10.1007/s12541-013-0130-y doi (DE-627)SPR026092239 (SPR)s12541-013-0130-y-e DE-627 ger DE-627 rakwb eng 600 ASE Lee, Jae-Hoon verfasserin aut Energy saving in line patterning using pulse laser by reducing overlapping rate with rectangular beam shape 2013 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract Line patterning using a pulse laser is important process for fabrication of solar cells, circuit patterning of transparent conductive oxide (TCO) layer and so on. The typical laser beam shape is circular, so high overlapping rate for line patterning is required for making a straight scribed line edge. In this research, the rectangular beam was used to minimize the overlapping rate. The rectangular beam was made by locating a rectangular shape mask between laser source and objective lens. The nanosecond ultra-violet (UV) pulse laser with 355 nm wavelength was used. Indium tin oxide (ITO) coated polyethylene terephthalate (PET) was used for thin conductive layer scribing. The fabricated line patterns with the original circular beam and the rectangular beam were compared under the same process parameters such as laser power, laser pulse frequency, and so on. The overlapping rate was controlled by scan speed. The shape of patterning lines, and the quality of scribed line edge were observed. The rectangular beam could decrease the overlapping rate for straight scribed line edge. Even though the rectangular beam shape had energy loss by blocking the laser beam, it could increase overall energy efficiency of laser patterning by reducing the overlapping rate. Laser scribing (dpeaa)DE-He213 Overlapping rate (dpeaa)DE-He213 Rectangular beam (dpeaa)DE-He213 Energy saving (dpeaa)DE-He213 Lee, Won-Jin verfasserin aut Shin, Dong-Jae verfasserin aut Daavasuren, Gaasuren verfasserin aut Chun, Doo-Man verfasserin aut Enthalten in International journal of precision engineering and manufacturing Sŏul : KSPE, 2009 14(2013), 6 vom: Juni, Seite 985-988 (DE-627)609403109 (DE-600)2515436-9 2005-4602 nnns volume:14 year:2013 number:6 month:06 pages:985-988 https://dx.doi.org/10.1007/s12541-013-0130-y lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 14 2013 6 06 985-988
allfieldsSound	10.1007/s12541-013-0130-y doi (DE-627)SPR026092239 (SPR)s12541-013-0130-y-e DE-627 ger DE-627 rakwb eng 600 ASE Lee, Jae-Hoon verfasserin aut Energy saving in line patterning using pulse laser by reducing overlapping rate with rectangular beam shape 2013 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract Line patterning using a pulse laser is important process for fabrication of solar cells, circuit patterning of transparent conductive oxide (TCO) layer and so on. The typical laser beam shape is circular, so high overlapping rate for line patterning is required for making a straight scribed line edge. In this research, the rectangular beam was used to minimize the overlapping rate. The rectangular beam was made by locating a rectangular shape mask between laser source and objective lens. The nanosecond ultra-violet (UV) pulse laser with 355 nm wavelength was used. Indium tin oxide (ITO) coated polyethylene terephthalate (PET) was used for thin conductive layer scribing. The fabricated line patterns with the original circular beam and the rectangular beam were compared under the same process parameters such as laser power, laser pulse frequency, and so on. The overlapping rate was controlled by scan speed. The shape of patterning lines, and the quality of scribed line edge were observed. The rectangular beam could decrease the overlapping rate for straight scribed line edge. Even though the rectangular beam shape had energy loss by blocking the laser beam, it could increase overall energy efficiency of laser patterning by reducing the overlapping rate. Laser scribing (dpeaa)DE-He213 Overlapping rate (dpeaa)DE-He213 Rectangular beam (dpeaa)DE-He213 Energy saving (dpeaa)DE-He213 Lee, Won-Jin verfasserin aut Shin, Dong-Jae verfasserin aut Daavasuren, Gaasuren verfasserin aut Chun, Doo-Man verfasserin aut Enthalten in International journal of precision engineering and manufacturing Sŏul : KSPE, 2009 14(2013), 6 vom: Juni, Seite 985-988 (DE-627)609403109 (DE-600)2515436-9 2005-4602 nnns volume:14 year:2013 number:6 month:06 pages:985-988 https://dx.doi.org/10.1007/s12541-013-0130-y lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 14 2013 6 06 985-988
language	English
source	Enthalten in International journal of precision engineering and manufacturing 14(2013), 6 vom: Juni, Seite 985-988 volume:14 year:2013 number:6 month:06 pages:985-988
sourceStr	Enthalten in International journal of precision engineering and manufacturing 14(2013), 6 vom: Juni, Seite 985-988 volume:14 year:2013 number:6 month:06 pages:985-988
format_phy_str_mv	Article
institution	findex.gbv.de
topic_facet	Laser scribing Overlapping rate Rectangular beam Energy saving
dewey-raw	600
isfreeaccess_bool	false
container_title	International journal of precision engineering and manufacturing
authorswithroles_txt_mv	Lee, Jae-Hoon @@aut@@ Lee, Won-Jin @@aut@@ Shin, Dong-Jae @@aut@@ Daavasuren, Gaasuren @@aut@@ Chun, Doo-Man @@aut@@
publishDateDaySort_date	2013-06-01T00:00:00Z
hierarchy_top_id	609403109
dewey-sort	3600
id	SPR026092239
language_de	englisch
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author	Lee, Jae-Hoon
spellingShingle	Lee, Jae-Hoon ddc 600 misc Laser scribing misc Overlapping rate misc Rectangular beam misc Energy saving Energy saving in line patterning using pulse laser by reducing overlapping rate with rectangular beam shape
authorStr	Lee, Jae-Hoon
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topic_title	600 ASE Energy saving in line patterning using pulse laser by reducing overlapping rate with rectangular beam shape Laser scribing (dpeaa)DE-He213 Overlapping rate (dpeaa)DE-He213 Rectangular beam (dpeaa)DE-He213 Energy saving (dpeaa)DE-He213
topic	ddc 600 misc Laser scribing misc Overlapping rate misc Rectangular beam misc Energy saving
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title	Energy saving in line patterning using pulse laser by reducing overlapping rate with rectangular beam shape
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title_full	Energy saving in line patterning using pulse laser by reducing overlapping rate with rectangular beam shape
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author_browse	Lee, Jae-Hoon Lee, Won-Jin Shin, Dong-Jae Daavasuren, Gaasuren Chun, Doo-Man
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author-letter	Lee, Jae-Hoon
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title_sort	energy saving in line patterning using pulse laser by reducing overlapping rate with rectangular beam shape
title_auth	Energy saving in line patterning using pulse laser by reducing overlapping rate with rectangular beam shape
abstract	Abstract Line patterning using a pulse laser is important process for fabrication of solar cells, circuit patterning of transparent conductive oxide (TCO) layer and so on. The typical laser beam shape is circular, so high overlapping rate for line patterning is required for making a straight scribed line edge. In this research, the rectangular beam was used to minimize the overlapping rate. The rectangular beam was made by locating a rectangular shape mask between laser source and objective lens. The nanosecond ultra-violet (UV) pulse laser with 355 nm wavelength was used. Indium tin oxide (ITO) coated polyethylene terephthalate (PET) was used for thin conductive layer scribing. The fabricated line patterns with the original circular beam and the rectangular beam were compared under the same process parameters such as laser power, laser pulse frequency, and so on. The overlapping rate was controlled by scan speed. The shape of patterning lines, and the quality of scribed line edge were observed. The rectangular beam could decrease the overlapping rate for straight scribed line edge. Even though the rectangular beam shape had energy loss by blocking the laser beam, it could increase overall energy efficiency of laser patterning by reducing the overlapping rate.
abstractGer	Abstract Line patterning using a pulse laser is important process for fabrication of solar cells, circuit patterning of transparent conductive oxide (TCO) layer and so on. The typical laser beam shape is circular, so high overlapping rate for line patterning is required for making a straight scribed line edge. In this research, the rectangular beam was used to minimize the overlapping rate. The rectangular beam was made by locating a rectangular shape mask between laser source and objective lens. The nanosecond ultra-violet (UV) pulse laser with 355 nm wavelength was used. Indium tin oxide (ITO) coated polyethylene terephthalate (PET) was used for thin conductive layer scribing. The fabricated line patterns with the original circular beam and the rectangular beam were compared under the same process parameters such as laser power, laser pulse frequency, and so on. The overlapping rate was controlled by scan speed. The shape of patterning lines, and the quality of scribed line edge were observed. The rectangular beam could decrease the overlapping rate for straight scribed line edge. Even though the rectangular beam shape had energy loss by blocking the laser beam, it could increase overall energy efficiency of laser patterning by reducing the overlapping rate.
abstract_unstemmed	Abstract Line patterning using a pulse laser is important process for fabrication of solar cells, circuit patterning of transparent conductive oxide (TCO) layer and so on. The typical laser beam shape is circular, so high overlapping rate for line patterning is required for making a straight scribed line edge. In this research, the rectangular beam was used to minimize the overlapping rate. The rectangular beam was made by locating a rectangular shape mask between laser source and objective lens. The nanosecond ultra-violet (UV) pulse laser with 355 nm wavelength was used. Indium tin oxide (ITO) coated polyethylene terephthalate (PET) was used for thin conductive layer scribing. The fabricated line patterns with the original circular beam and the rectangular beam were compared under the same process parameters such as laser power, laser pulse frequency, and so on. The overlapping rate was controlled by scan speed. The shape of patterning lines, and the quality of scribed line edge were observed. The rectangular beam could decrease the overlapping rate for straight scribed line edge. Even though the rectangular beam shape had energy loss by blocking the laser beam, it could increase overall energy efficiency of laser patterning by reducing the overlapping rate.
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container_issue	6
title_short	Energy saving in line patterning using pulse laser by reducing overlapping rate with rectangular beam shape
url	https://dx.doi.org/10.1007/s12541-013-0130-y
remote_bool	true
author2	Lee, Won-Jin Shin, Dong-Jae Daavasuren, Gaasuren Chun, Doo-Man
author2Str	Lee, Won-Jin Shin, Dong-Jae Daavasuren, Gaasuren Chun, Doo-Man
ppnlink	609403109
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isOA_txt	false
hochschulschrift_bool	false
doi_str	10.1007/s12541-013-0130-y
up_date	2024-07-03T18:50:21.565Z
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Energy saving in line patterning using pulse laser by reducing overlapping rate with rectangular beam shape

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