Stress-Corrosion Cracking of Spin-On Glass Thin Films
Abstract The crack-velocity behavior of silsesqioxane spin-on glass thin films exposed to moist environments is examined. Anabsolute reaction-rate model is used to predict crack velocity using a deleted-bond model and fused silica as a basis, and compared with observed steady-state crack velocities...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Cook, Robert F. [verfasserIn] Liniger, Eric G. [verfasserIn] |
|---|
| Format: |
E-Artikel |
|---|---|
| Sprache: |
Englisch |
| Erschienen: |
1998 |
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| Übergeordnetes Werk: |
Enthalten in: MRS online proceedings library - Warrendale, Pa. : MRS, 1998, 511(1998), 1 vom: Jan., Seite 171-176 |
|---|---|
| Übergeordnetes Werk: |
volume:511 ; year:1998 ; number:1 ; month:01 ; pages:171-176 |
| Links: |
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| DOI / URN: |
10.1557/PROC-511-171 |
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SPR041666143 |
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| 520 | |a Abstract The crack-velocity behavior of silsesqioxane spin-on glass thin films exposed to moist environments is examined. Anabsolute reaction-rate model is used to predict crack velocity using a deleted-bond model and fused silica as a basis, and compared with observed steady-state crack velocities as a function of film thickness and variations in the curing process. An implication is that, on curing, the driving force for film fracture, determined by thermal expansion mismatch, increases less rapidly than the fracture resistance, determined by polymerization. | ||
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10.1557/PROC-511-171 doi (DE-627)SPR041666143 (SPR)PROC-511-171-e DE-627 ger DE-627 rakwb eng 670 ASE Cook, Robert F. verfasserin aut Stress-Corrosion Cracking of Spin-On Glass Thin Films 1998 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract The crack-velocity behavior of silsesqioxane spin-on glass thin films exposed to moist environments is examined. Anabsolute reaction-rate model is used to predict crack velocity using a deleted-bond model and fused silica as a basis, and compared with observed steady-state crack velocities as a function of film thickness and variations in the curing process. An implication is that, on curing, the driving force for film fracture, determined by thermal expansion mismatch, increases less rapidly than the fracture resistance, determined by polymerization. Liniger, Eric G. verfasserin aut Enthalten in MRS online proceedings library Warrendale, Pa. : MRS, 1998 511(1998), 1 vom: Jan., Seite 171-176 (DE-627)57782046X (DE-600)2451008-7 1946-4274 nnns volume:511 year:1998 number:1 month:01 pages:171-176 https://dx.doi.org/10.1557/PROC-511-171 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_2005 AR 511 1998 1 01 171-176 |
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10.1557/PROC-511-171 doi (DE-627)SPR041666143 (SPR)PROC-511-171-e DE-627 ger DE-627 rakwb eng 670 ASE Cook, Robert F. verfasserin aut Stress-Corrosion Cracking of Spin-On Glass Thin Films 1998 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract The crack-velocity behavior of silsesqioxane spin-on glass thin films exposed to moist environments is examined. Anabsolute reaction-rate model is used to predict crack velocity using a deleted-bond model and fused silica as a basis, and compared with observed steady-state crack velocities as a function of film thickness and variations in the curing process. An implication is that, on curing, the driving force for film fracture, determined by thermal expansion mismatch, increases less rapidly than the fracture resistance, determined by polymerization. Liniger, Eric G. verfasserin aut Enthalten in MRS online proceedings library Warrendale, Pa. : MRS, 1998 511(1998), 1 vom: Jan., Seite 171-176 (DE-627)57782046X (DE-600)2451008-7 1946-4274 nnns volume:511 year:1998 number:1 month:01 pages:171-176 https://dx.doi.org/10.1557/PROC-511-171 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_2005 AR 511 1998 1 01 171-176 |
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10.1557/PROC-511-171 doi (DE-627)SPR041666143 (SPR)PROC-511-171-e DE-627 ger DE-627 rakwb eng 670 ASE Cook, Robert F. verfasserin aut Stress-Corrosion Cracking of Spin-On Glass Thin Films 1998 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract The crack-velocity behavior of silsesqioxane spin-on glass thin films exposed to moist environments is examined. Anabsolute reaction-rate model is used to predict crack velocity using a deleted-bond model and fused silica as a basis, and compared with observed steady-state crack velocities as a function of film thickness and variations in the curing process. An implication is that, on curing, the driving force for film fracture, determined by thermal expansion mismatch, increases less rapidly than the fracture resistance, determined by polymerization. Liniger, Eric G. verfasserin aut Enthalten in MRS online proceedings library Warrendale, Pa. : MRS, 1998 511(1998), 1 vom: Jan., Seite 171-176 (DE-627)57782046X (DE-600)2451008-7 1946-4274 nnns volume:511 year:1998 number:1 month:01 pages:171-176 https://dx.doi.org/10.1557/PROC-511-171 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_2005 AR 511 1998 1 01 171-176 |
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10.1557/PROC-511-171 doi (DE-627)SPR041666143 (SPR)PROC-511-171-e DE-627 ger DE-627 rakwb eng 670 ASE Cook, Robert F. verfasserin aut Stress-Corrosion Cracking of Spin-On Glass Thin Films 1998 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract The crack-velocity behavior of silsesqioxane spin-on glass thin films exposed to moist environments is examined. Anabsolute reaction-rate model is used to predict crack velocity using a deleted-bond model and fused silica as a basis, and compared with observed steady-state crack velocities as a function of film thickness and variations in the curing process. An implication is that, on curing, the driving force for film fracture, determined by thermal expansion mismatch, increases less rapidly than the fracture resistance, determined by polymerization. Liniger, Eric G. verfasserin aut Enthalten in MRS online proceedings library Warrendale, Pa. : MRS, 1998 511(1998), 1 vom: Jan., Seite 171-176 (DE-627)57782046X (DE-600)2451008-7 1946-4274 nnns volume:511 year:1998 number:1 month:01 pages:171-176 https://dx.doi.org/10.1557/PROC-511-171 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_2005 AR 511 1998 1 01 171-176 |
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10.1557/PROC-511-171 doi (DE-627)SPR041666143 (SPR)PROC-511-171-e DE-627 ger DE-627 rakwb eng 670 ASE Cook, Robert F. verfasserin aut Stress-Corrosion Cracking of Spin-On Glass Thin Films 1998 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract The crack-velocity behavior of silsesqioxane spin-on glass thin films exposed to moist environments is examined. Anabsolute reaction-rate model is used to predict crack velocity using a deleted-bond model and fused silica as a basis, and compared with observed steady-state crack velocities as a function of film thickness and variations in the curing process. An implication is that, on curing, the driving force for film fracture, determined by thermal expansion mismatch, increases less rapidly than the fracture resistance, determined by polymerization. Liniger, Eric G. verfasserin aut Enthalten in MRS online proceedings library Warrendale, Pa. : MRS, 1998 511(1998), 1 vom: Jan., Seite 171-176 (DE-627)57782046X (DE-600)2451008-7 1946-4274 nnns volume:511 year:1998 number:1 month:01 pages:171-176 https://dx.doi.org/10.1557/PROC-511-171 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_2005 AR 511 1998 1 01 171-176 |
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Abstract The crack-velocity behavior of silsesqioxane spin-on glass thin films exposed to moist environments is examined. Anabsolute reaction-rate model is used to predict crack velocity using a deleted-bond model and fused silica as a basis, and compared with observed steady-state crack velocities as a function of film thickness and variations in the curing process. An implication is that, on curing, the driving force for film fracture, determined by thermal expansion mismatch, increases less rapidly than the fracture resistance, determined by polymerization. |
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Abstract The crack-velocity behavior of silsesqioxane spin-on glass thin films exposed to moist environments is examined. Anabsolute reaction-rate model is used to predict crack velocity using a deleted-bond model and fused silica as a basis, and compared with observed steady-state crack velocities as a function of film thickness and variations in the curing process. An implication is that, on curing, the driving force for film fracture, determined by thermal expansion mismatch, increases less rapidly than the fracture resistance, determined by polymerization. |
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Abstract The crack-velocity behavior of silsesqioxane spin-on glass thin films exposed to moist environments is examined. Anabsolute reaction-rate model is used to predict crack velocity using a deleted-bond model and fused silica as a basis, and compared with observed steady-state crack velocities as a function of film thickness and variations in the curing process. An implication is that, on curing, the driving force for film fracture, determined by thermal expansion mismatch, increases less rapidly than the fracture resistance, determined by polymerization. |
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