Determination of Eigenstresses from Curvature Data

Abstract Curvature measurements are generally employed in conjunction with elementary structural analysis to estimate deposition stresses in miniaturized electro-mechanical systems. In this paper the validity of this procedure is discussed by presenting a closed form solution for a bilayer subject t...
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Autor*in:	Ferrari, Mauro [verfasserIn] Weber, Marie [verfasserIn]

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	1992

Übergeordnetes Werk:	Enthalten in: MRS online proceedings library - Warrendale, Pa. : MRS, 1998, 276(1992), 1 vom: 01. Juli, Seite 221-226
Übergeordnetes Werk:	volume:276 ; year:1992 ; number:1 ; day:01 ; month:07 ; pages:221-226

Links:	Volltext

DOI / URN:	10.1557/PROC-276-221

Katalog-ID:	SPR041773810

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520			\|a Abstract Curvature measurements are generally employed in conjunction with elementary structural analysis to estimate deposition stresses in miniaturized electro-mechanical systems. In this paper the validity of this procedure is discussed by presenting a closed form solution for a bilayer subject to nonuniform intrinsic straining, and comparing the exact stress-curvature relations with the oft-used formulae of Stoney and Brenner-Senderoff.
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allfields	10.1557/PROC-276-221 doi (DE-627)SPR041773810 (SPR)PROC-276-221-e DE-627 ger DE-627 rakwb eng 670 ASE Ferrari, Mauro verfasserin aut Determination of Eigenstresses from Curvature Data 1992 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract Curvature measurements are generally employed in conjunction with elementary structural analysis to estimate deposition stresses in miniaturized electro-mechanical systems. In this paper the validity of this procedure is discussed by presenting a closed form solution for a bilayer subject to nonuniform intrinsic straining, and comparing the exact stress-curvature relations with the oft-used formulae of Stoney and Brenner-Senderoff. Weber, Marie verfasserin aut Enthalten in MRS online proceedings library Warrendale, Pa. : MRS, 1998 276(1992), 1 vom: 01. Juli, Seite 221-226 (DE-627)57782046X (DE-600)2451008-7 1946-4274 nnns volume:276 year:1992 number:1 day:01 month:07 pages:221-226 https://dx.doi.org/10.1557/PROC-276-221 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_2005 AR 276 1992 1 01 07 221-226
spelling	10.1557/PROC-276-221 doi (DE-627)SPR041773810 (SPR)PROC-276-221-e DE-627 ger DE-627 rakwb eng 670 ASE Ferrari, Mauro verfasserin aut Determination of Eigenstresses from Curvature Data 1992 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract Curvature measurements are generally employed in conjunction with elementary structural analysis to estimate deposition stresses in miniaturized electro-mechanical systems. In this paper the validity of this procedure is discussed by presenting a closed form solution for a bilayer subject to nonuniform intrinsic straining, and comparing the exact stress-curvature relations with the oft-used formulae of Stoney and Brenner-Senderoff. Weber, Marie verfasserin aut Enthalten in MRS online proceedings library Warrendale, Pa. : MRS, 1998 276(1992), 1 vom: 01. Juli, Seite 221-226 (DE-627)57782046X (DE-600)2451008-7 1946-4274 nnns volume:276 year:1992 number:1 day:01 month:07 pages:221-226 https://dx.doi.org/10.1557/PROC-276-221 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_2005 AR 276 1992 1 01 07 221-226
allfields_unstemmed	10.1557/PROC-276-221 doi (DE-627)SPR041773810 (SPR)PROC-276-221-e DE-627 ger DE-627 rakwb eng 670 ASE Ferrari, Mauro verfasserin aut Determination of Eigenstresses from Curvature Data 1992 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract Curvature measurements are generally employed in conjunction with elementary structural analysis to estimate deposition stresses in miniaturized electro-mechanical systems. In this paper the validity of this procedure is discussed by presenting a closed form solution for a bilayer subject to nonuniform intrinsic straining, and comparing the exact stress-curvature relations with the oft-used formulae of Stoney and Brenner-Senderoff. Weber, Marie verfasserin aut Enthalten in MRS online proceedings library Warrendale, Pa. : MRS, 1998 276(1992), 1 vom: 01. Juli, Seite 221-226 (DE-627)57782046X (DE-600)2451008-7 1946-4274 nnns volume:276 year:1992 number:1 day:01 month:07 pages:221-226 https://dx.doi.org/10.1557/PROC-276-221 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_2005 AR 276 1992 1 01 07 221-226
allfieldsGer	10.1557/PROC-276-221 doi (DE-627)SPR041773810 (SPR)PROC-276-221-e DE-627 ger DE-627 rakwb eng 670 ASE Ferrari, Mauro verfasserin aut Determination of Eigenstresses from Curvature Data 1992 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract Curvature measurements are generally employed in conjunction with elementary structural analysis to estimate deposition stresses in miniaturized electro-mechanical systems. In this paper the validity of this procedure is discussed by presenting a closed form solution for a bilayer subject to nonuniform intrinsic straining, and comparing the exact stress-curvature relations with the oft-used formulae of Stoney and Brenner-Senderoff. Weber, Marie verfasserin aut Enthalten in MRS online proceedings library Warrendale, Pa. : MRS, 1998 276(1992), 1 vom: 01. Juli, Seite 221-226 (DE-627)57782046X (DE-600)2451008-7 1946-4274 nnns volume:276 year:1992 number:1 day:01 month:07 pages:221-226 https://dx.doi.org/10.1557/PROC-276-221 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_2005 AR 276 1992 1 01 07 221-226
allfieldsSound	10.1557/PROC-276-221 doi (DE-627)SPR041773810 (SPR)PROC-276-221-e DE-627 ger DE-627 rakwb eng 670 ASE Ferrari, Mauro verfasserin aut Determination of Eigenstresses from Curvature Data 1992 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Abstract Curvature measurements are generally employed in conjunction with elementary structural analysis to estimate deposition stresses in miniaturized electro-mechanical systems. In this paper the validity of this procedure is discussed by presenting a closed form solution for a bilayer subject to nonuniform intrinsic straining, and comparing the exact stress-curvature relations with the oft-used formulae of Stoney and Brenner-Senderoff. Weber, Marie verfasserin aut Enthalten in MRS online proceedings library Warrendale, Pa. : MRS, 1998 276(1992), 1 vom: 01. Juli, Seite 221-226 (DE-627)57782046X (DE-600)2451008-7 1946-4274 nnns volume:276 year:1992 number:1 day:01 month:07 pages:221-226 https://dx.doi.org/10.1557/PROC-276-221 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_2005 AR 276 1992 1 01 07 221-226
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title_auth	Determination of Eigenstresses from Curvature Data
abstract	Abstract Curvature measurements are generally employed in conjunction with elementary structural analysis to estimate deposition stresses in miniaturized electro-mechanical systems. In this paper the validity of this procedure is discussed by presenting a closed form solution for a bilayer subject to nonuniform intrinsic straining, and comparing the exact stress-curvature relations with the oft-used formulae of Stoney and Brenner-Senderoff.
abstractGer	Abstract Curvature measurements are generally employed in conjunction with elementary structural analysis to estimate deposition stresses in miniaturized electro-mechanical systems. In this paper the validity of this procedure is discussed by presenting a closed form solution for a bilayer subject to nonuniform intrinsic straining, and comparing the exact stress-curvature relations with the oft-used formulae of Stoney and Brenner-Senderoff.
abstract_unstemmed	Abstract Curvature measurements are generally employed in conjunction with elementary structural analysis to estimate deposition stresses in miniaturized electro-mechanical systems. In this paper the validity of this procedure is discussed by presenting a closed form solution for a bilayer subject to nonuniform intrinsic straining, and comparing the exact stress-curvature relations with the oft-used formulae of Stoney and Brenner-Senderoff.
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