Broadband Frequency-Tunable Micromechanical Oscillator Promises to Extend the Applicability of Microelectromechanical Systems (MEMS)

Gespeichert in:

Autor*in:	Kaldor, Steffen K. [verfasserIn]

Format:	E-Artikel
Sprache:	Englisch

Erschienen:	2000

Übergeordnetes Werk:	Enthalten in: MRS bulletin - Berlin : Springer, 1982, 25(2000), 12 vom: Dez., Seite 5-5
Übergeordnetes Werk:	volume:25 ; year:2000 ; number:12 ; month:12 ; pages:5-5

Links:	Volltext

DOI / URN:	10.1557/mrs2000.235

Katalog-ID:	SPR041952758

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