A highly smart MEMS acetone gas sensors in array for diet-monitoring applications

Abstract In the present work, gas sensor arrays consisted of four different sensing materials based on CuO and their depositions on the MEMS microheaters were designed, fabricated and characterized. The sensor array is consisted with CuO, CuO with Pt NPs, ZnO–CuO and ZnO–CuO with Au NPs and their ga...
Ausführliche Beschreibung

Gespeichert in:
Autor*in:

Lee, Jae Eun [verfasserIn]

Lim, Chan Kyu [verfasserIn]

Song, Hyunjoon [verfasserIn]

Choi, Sung-Yool [verfasserIn]

Lee, Dae-Sik [verfasserIn]

Format:

E-Artikel

Sprache:

Englisch

Erschienen:

2021

Schlagwörter:

Acetone

MEMS heater

CuO-based sensor array

Pattern recognition

Diet monitoring

PCA

Anmerkung:

© The Author(s) 2021

Übergeordnetes Werk:

Enthalten in: Micro and Nano Systems Letters - Berlin : SpringerOpen, 2013, 9(2021), 1 vom: 30. Okt.

Übergeordnetes Werk:

volume:9 ; year:2021 ; number:1 ; day:30 ; month:10

Links:

Volltext

DOI / URN:

10.1186/s40486-021-00136-1

Katalog-ID:

SPR045447799

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