Determination of Impurities in Single-Crystal Silicon Carbide by Inductively Coupled Plasma Mass Spectrometry
Autor*in: |
Kozuka, Shoji [verfasserIn] |
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Format: |
E-Artikel |
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Sprache: |
Englisch |
Erschienen: |
1993 |
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Schlagwörter: |
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Anmerkung: |
© The Japan Society for Analytical Chemistry 1993 |
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Übergeordnetes Werk: |
Enthalten in: Analytical sciences - [Cham] : Springer International Publishing, 1985, 9(1993), 5 vom: Okt., Seite 735-736 |
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Übergeordnetes Werk: |
volume:9 ; year:1993 ; number:5 ; month:10 ; pages:735-736 |
Links: |
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DOI / URN: |
10.2116/analsci.9.735 |
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Katalog-ID: |
SPR047561025 |
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10.2116/analsci.9.735 doi (DE-627)SPR047561025 (SPR)analsci.9.735-e DE-627 ger DE-627 rakwb eng Kozuka, Shoji verfasserin aut Determination of Impurities in Single-Crystal Silicon Carbide by Inductively Coupled Plasma Mass Spectrometry 1993 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © The Japan Society for Analytical Chemistry 1993 Silicon carbide (dpeaa)DE-He213 single crystal (dpeaa)DE-He213 acid pressure decomposition (dpeaa)DE-He213 inductively coupled plasma mass spectrometry (dpeaa)DE-He213 Hayashi, Masaru aut Matsunaga, Hideki aut Enthalten in Analytical sciences [Cham] : Springer International Publishing, 1985 9(1993), 5 vom: Okt., Seite 735-736 (DE-627)300895925 (DE-600)1483376-1 1348-2246 nnns volume:9 year:1993 number:5 month:10 pages:735-736 https://dx.doi.org/10.2116/analsci.9.735 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_250 GBV_ILN_285 GBV_ILN_293 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 9 1993 5 10 735-736 |
spelling |
10.2116/analsci.9.735 doi (DE-627)SPR047561025 (SPR)analsci.9.735-e DE-627 ger DE-627 rakwb eng Kozuka, Shoji verfasserin aut Determination of Impurities in Single-Crystal Silicon Carbide by Inductively Coupled Plasma Mass Spectrometry 1993 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © The Japan Society for Analytical Chemistry 1993 Silicon carbide (dpeaa)DE-He213 single crystal (dpeaa)DE-He213 acid pressure decomposition (dpeaa)DE-He213 inductively coupled plasma mass spectrometry (dpeaa)DE-He213 Hayashi, Masaru aut Matsunaga, Hideki aut Enthalten in Analytical sciences [Cham] : Springer International Publishing, 1985 9(1993), 5 vom: Okt., Seite 735-736 (DE-627)300895925 (DE-600)1483376-1 1348-2246 nnns volume:9 year:1993 number:5 month:10 pages:735-736 https://dx.doi.org/10.2116/analsci.9.735 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_250 GBV_ILN_285 GBV_ILN_293 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 9 1993 5 10 735-736 |
allfields_unstemmed |
10.2116/analsci.9.735 doi (DE-627)SPR047561025 (SPR)analsci.9.735-e DE-627 ger DE-627 rakwb eng Kozuka, Shoji verfasserin aut Determination of Impurities in Single-Crystal Silicon Carbide by Inductively Coupled Plasma Mass Spectrometry 1993 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © The Japan Society for Analytical Chemistry 1993 Silicon carbide (dpeaa)DE-He213 single crystal (dpeaa)DE-He213 acid pressure decomposition (dpeaa)DE-He213 inductively coupled plasma mass spectrometry (dpeaa)DE-He213 Hayashi, Masaru aut Matsunaga, Hideki aut Enthalten in Analytical sciences [Cham] : Springer International Publishing, 1985 9(1993), 5 vom: Okt., Seite 735-736 (DE-627)300895925 (DE-600)1483376-1 1348-2246 nnns volume:9 year:1993 number:5 month:10 pages:735-736 https://dx.doi.org/10.2116/analsci.9.735 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_250 GBV_ILN_285 GBV_ILN_293 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 9 1993 5 10 735-736 |
allfieldsGer |
10.2116/analsci.9.735 doi (DE-627)SPR047561025 (SPR)analsci.9.735-e DE-627 ger DE-627 rakwb eng Kozuka, Shoji verfasserin aut Determination of Impurities in Single-Crystal Silicon Carbide by Inductively Coupled Plasma Mass Spectrometry 1993 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © The Japan Society for Analytical Chemistry 1993 Silicon carbide (dpeaa)DE-He213 single crystal (dpeaa)DE-He213 acid pressure decomposition (dpeaa)DE-He213 inductively coupled plasma mass spectrometry (dpeaa)DE-He213 Hayashi, Masaru aut Matsunaga, Hideki aut Enthalten in Analytical sciences [Cham] : Springer International Publishing, 1985 9(1993), 5 vom: Okt., Seite 735-736 (DE-627)300895925 (DE-600)1483376-1 1348-2246 nnns volume:9 year:1993 number:5 month:10 pages:735-736 https://dx.doi.org/10.2116/analsci.9.735 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_250 GBV_ILN_285 GBV_ILN_293 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 9 1993 5 10 735-736 |
allfieldsSound |
10.2116/analsci.9.735 doi (DE-627)SPR047561025 (SPR)analsci.9.735-e DE-627 ger DE-627 rakwb eng Kozuka, Shoji verfasserin aut Determination of Impurities in Single-Crystal Silicon Carbide by Inductively Coupled Plasma Mass Spectrometry 1993 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © The Japan Society for Analytical Chemistry 1993 Silicon carbide (dpeaa)DE-He213 single crystal (dpeaa)DE-He213 acid pressure decomposition (dpeaa)DE-He213 inductively coupled plasma mass spectrometry (dpeaa)DE-He213 Hayashi, Masaru aut Matsunaga, Hideki aut Enthalten in Analytical sciences [Cham] : Springer International Publishing, 1985 9(1993), 5 vom: Okt., Seite 735-736 (DE-627)300895925 (DE-600)1483376-1 1348-2246 nnns volume:9 year:1993 number:5 month:10 pages:735-736 https://dx.doi.org/10.2116/analsci.9.735 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_95 GBV_ILN_105 GBV_ILN_110 GBV_ILN_151 GBV_ILN_161 GBV_ILN_170 GBV_ILN_213 GBV_ILN_230 GBV_ILN_250 GBV_ILN_285 GBV_ILN_293 GBV_ILN_602 GBV_ILN_2014 GBV_ILN_4012 GBV_ILN_4037 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4249 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4338 GBV_ILN_4367 GBV_ILN_4700 AR 9 1993 5 10 735-736 |
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Kozuka, Shoji @@aut@@ Hayashi, Masaru @@aut@@ Matsunaga, Hideki @@aut@@ |
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Determination of Impurities in Single-Crystal Silicon Carbide by Inductively Coupled Plasma Mass Spectrometry Silicon carbide (dpeaa)DE-He213 single crystal (dpeaa)DE-He213 acid pressure decomposition (dpeaa)DE-He213 inductively coupled plasma mass spectrometry (dpeaa)DE-He213 |
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Determination of Impurities in Single-Crystal Silicon Carbide by Inductively Coupled Plasma Mass Spectrometry |
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Determination of Impurities in Single-Crystal Silicon Carbide by Inductively Coupled Plasma Mass Spectrometry |
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determination of impurities in single-crystal silicon carbide by inductively coupled plasma mass spectrometry |
title_auth |
Determination of Impurities in Single-Crystal Silicon Carbide by Inductively Coupled Plasma Mass Spectrometry |
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© The Japan Society for Analytical Chemistry 1993 |
abstractGer |
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title_short |
Determination of Impurities in Single-Crystal Silicon Carbide by Inductively Coupled Plasma Mass Spectrometry |
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