A Small Size On-chip Temperature Sensor Based on a Microring Resonator
Abstract In this paper, a small size on-chip temperature sensor based on microring resonator (MRR) is introduced. The sensor consists of a small microring waveguide with a radius of 3.1 μm and a runway waveguide with the same bending radius. To a certain extent, it solves the problem that high sensi...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Hu, Cong [verfasserIn] |
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| Format: |
E-Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2021 |
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| Schlagwörter: |
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| Anmerkung: |
© Springer Nature B.V. 2021 |
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| Übergeordnetes Werk: |
Enthalten in: Silicon - Dordrecht : Springer Netherlands, 2009, 14(2021), 11 vom: 09. Sept., Seite 5847-5854 |
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| Übergeordnetes Werk: |
volume:14 ; year:2021 ; number:11 ; day:09 ; month:09 ; pages:5847-5854 |
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| DOI / URN: |
10.1007/s12633-021-01247-5 |
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SPR047835168 |
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| 520 | |a Abstract In this paper, a small size on-chip temperature sensor based on microring resonator (MRR) is introduced. The sensor consists of a small microring waveguide with a radius of 3.1 μm and a runway waveguide with the same bending radius. To a certain extent, it solves the problem that high sensitivity and small size cannot coexist in the current on-chip temperature sensor, and provides a reference scheme for the design of on-chip temperature sensor. The experimental results show that the sensitivity of the sensor is 100pm/℃, which breaks through the limit of 83pm/℃ for single microring. The free spectral range (FSR) is 39.25nm, and the resolution ratio is 0.47℃, the temperature measurement range is improved, and a better resolution ratio is obtained. The microring temperature sensor designed in this paper has high sensitivity and small size structure (only $ 360µm^{2} $), which is suitable for temperature measurement of Very Large Scale Integration (VLSI). It has great research value and application potential in the field of System-on-Chip (SoC) temperature detection. | ||
| 650 | 4 | |a Microring resonator |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a On chip sensor |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a Temperature sensor |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a Thermooptic effect |7 (dpeaa)DE-He213 | |
| 700 | 1 | |a Shi, Yunying |4 aut | |
| 700 | 1 | |a Zhou, Tian |0 (orcid)0000-0002-2685-9433 |4 aut | |
| 700 | 1 | |a Xu, Chuanpei |4 aut | |
| 700 | 1 | |a Zhu, Aijun |4 aut | |
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10.1007/s12633-021-01247-5 doi (DE-627)SPR047835168 (SPR)s12633-021-01247-5-e DE-627 ger DE-627 rakwb eng Hu, Cong verfasserin aut A Small Size On-chip Temperature Sensor Based on a Microring Resonator 2021 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer Nature B.V. 2021 Abstract In this paper, a small size on-chip temperature sensor based on microring resonator (MRR) is introduced. The sensor consists of a small microring waveguide with a radius of 3.1 μm and a runway waveguide with the same bending radius. To a certain extent, it solves the problem that high sensitivity and small size cannot coexist in the current on-chip temperature sensor, and provides a reference scheme for the design of on-chip temperature sensor. The experimental results show that the sensitivity of the sensor is 100pm/℃, which breaks through the limit of 83pm/℃ for single microring. The free spectral range (FSR) is 39.25nm, and the resolution ratio is 0.47℃, the temperature measurement range is improved, and a better resolution ratio is obtained. The microring temperature sensor designed in this paper has high sensitivity and small size structure (only $ 360µm^{2} $), which is suitable for temperature measurement of Very Large Scale Integration (VLSI). It has great research value and application potential in the field of System-on-Chip (SoC) temperature detection. Microring resonator (dpeaa)DE-He213 On chip sensor (dpeaa)DE-He213 Temperature sensor (dpeaa)DE-He213 Thermooptic effect (dpeaa)DE-He213 Shi, Yunying aut Zhou, Tian (orcid)0000-0002-2685-9433 aut Xu, Chuanpei aut Zhu, Aijun aut Enthalten in Silicon Dordrecht : Springer Netherlands, 2009 14(2021), 11 vom: 09. Sept., Seite 5847-5854 (DE-627)598789545 (DE-600)2491562-2 1876-9918 nnns volume:14 year:2021 number:11 day:09 month:09 pages:5847-5854 https://dx.doi.org/10.1007/s12633-021-01247-5 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 14 2021 11 09 09 5847-5854 |
| spelling |
10.1007/s12633-021-01247-5 doi (DE-627)SPR047835168 (SPR)s12633-021-01247-5-e DE-627 ger DE-627 rakwb eng Hu, Cong verfasserin aut A Small Size On-chip Temperature Sensor Based on a Microring Resonator 2021 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer Nature B.V. 2021 Abstract In this paper, a small size on-chip temperature sensor based on microring resonator (MRR) is introduced. The sensor consists of a small microring waveguide with a radius of 3.1 μm and a runway waveguide with the same bending radius. To a certain extent, it solves the problem that high sensitivity and small size cannot coexist in the current on-chip temperature sensor, and provides a reference scheme for the design of on-chip temperature sensor. The experimental results show that the sensitivity of the sensor is 100pm/℃, which breaks through the limit of 83pm/℃ for single microring. The free spectral range (FSR) is 39.25nm, and the resolution ratio is 0.47℃, the temperature measurement range is improved, and a better resolution ratio is obtained. The microring temperature sensor designed in this paper has high sensitivity and small size structure (only $ 360µm^{2} $), which is suitable for temperature measurement of Very Large Scale Integration (VLSI). It has great research value and application potential in the field of System-on-Chip (SoC) temperature detection. Microring resonator (dpeaa)DE-He213 On chip sensor (dpeaa)DE-He213 Temperature sensor (dpeaa)DE-He213 Thermooptic effect (dpeaa)DE-He213 Shi, Yunying aut Zhou, Tian (orcid)0000-0002-2685-9433 aut Xu, Chuanpei aut Zhu, Aijun aut Enthalten in Silicon Dordrecht : Springer Netherlands, 2009 14(2021), 11 vom: 09. Sept., Seite 5847-5854 (DE-627)598789545 (DE-600)2491562-2 1876-9918 nnns volume:14 year:2021 number:11 day:09 month:09 pages:5847-5854 https://dx.doi.org/10.1007/s12633-021-01247-5 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 14 2021 11 09 09 5847-5854 |
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10.1007/s12633-021-01247-5 doi (DE-627)SPR047835168 (SPR)s12633-021-01247-5-e DE-627 ger DE-627 rakwb eng Hu, Cong verfasserin aut A Small Size On-chip Temperature Sensor Based on a Microring Resonator 2021 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer Nature B.V. 2021 Abstract In this paper, a small size on-chip temperature sensor based on microring resonator (MRR) is introduced. The sensor consists of a small microring waveguide with a radius of 3.1 μm and a runway waveguide with the same bending radius. To a certain extent, it solves the problem that high sensitivity and small size cannot coexist in the current on-chip temperature sensor, and provides a reference scheme for the design of on-chip temperature sensor. The experimental results show that the sensitivity of the sensor is 100pm/℃, which breaks through the limit of 83pm/℃ for single microring. The free spectral range (FSR) is 39.25nm, and the resolution ratio is 0.47℃, the temperature measurement range is improved, and a better resolution ratio is obtained. The microring temperature sensor designed in this paper has high sensitivity and small size structure (only $ 360µm^{2} $), which is suitable for temperature measurement of Very Large Scale Integration (VLSI). It has great research value and application potential in the field of System-on-Chip (SoC) temperature detection. Microring resonator (dpeaa)DE-He213 On chip sensor (dpeaa)DE-He213 Temperature sensor (dpeaa)DE-He213 Thermooptic effect (dpeaa)DE-He213 Shi, Yunying aut Zhou, Tian (orcid)0000-0002-2685-9433 aut Xu, Chuanpei aut Zhu, Aijun aut Enthalten in Silicon Dordrecht : Springer Netherlands, 2009 14(2021), 11 vom: 09. Sept., Seite 5847-5854 (DE-627)598789545 (DE-600)2491562-2 1876-9918 nnns volume:14 year:2021 number:11 day:09 month:09 pages:5847-5854 https://dx.doi.org/10.1007/s12633-021-01247-5 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 14 2021 11 09 09 5847-5854 |
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10.1007/s12633-021-01247-5 doi (DE-627)SPR047835168 (SPR)s12633-021-01247-5-e DE-627 ger DE-627 rakwb eng Hu, Cong verfasserin aut A Small Size On-chip Temperature Sensor Based on a Microring Resonator 2021 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer Nature B.V. 2021 Abstract In this paper, a small size on-chip temperature sensor based on microring resonator (MRR) is introduced. The sensor consists of a small microring waveguide with a radius of 3.1 μm and a runway waveguide with the same bending radius. To a certain extent, it solves the problem that high sensitivity and small size cannot coexist in the current on-chip temperature sensor, and provides a reference scheme for the design of on-chip temperature sensor. The experimental results show that the sensitivity of the sensor is 100pm/℃, which breaks through the limit of 83pm/℃ for single microring. The free spectral range (FSR) is 39.25nm, and the resolution ratio is 0.47℃, the temperature measurement range is improved, and a better resolution ratio is obtained. The microring temperature sensor designed in this paper has high sensitivity and small size structure (only $ 360µm^{2} $), which is suitable for temperature measurement of Very Large Scale Integration (VLSI). It has great research value and application potential in the field of System-on-Chip (SoC) temperature detection. Microring resonator (dpeaa)DE-He213 On chip sensor (dpeaa)DE-He213 Temperature sensor (dpeaa)DE-He213 Thermooptic effect (dpeaa)DE-He213 Shi, Yunying aut Zhou, Tian (orcid)0000-0002-2685-9433 aut Xu, Chuanpei aut Zhu, Aijun aut Enthalten in Silicon Dordrecht : Springer Netherlands, 2009 14(2021), 11 vom: 09. Sept., Seite 5847-5854 (DE-627)598789545 (DE-600)2491562-2 1876-9918 nnns volume:14 year:2021 number:11 day:09 month:09 pages:5847-5854 https://dx.doi.org/10.1007/s12633-021-01247-5 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 14 2021 11 09 09 5847-5854 |
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10.1007/s12633-021-01247-5 doi (DE-627)SPR047835168 (SPR)s12633-021-01247-5-e DE-627 ger DE-627 rakwb eng Hu, Cong verfasserin aut A Small Size On-chip Temperature Sensor Based on a Microring Resonator 2021 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © Springer Nature B.V. 2021 Abstract In this paper, a small size on-chip temperature sensor based on microring resonator (MRR) is introduced. The sensor consists of a small microring waveguide with a radius of 3.1 μm and a runway waveguide with the same bending radius. To a certain extent, it solves the problem that high sensitivity and small size cannot coexist in the current on-chip temperature sensor, and provides a reference scheme for the design of on-chip temperature sensor. The experimental results show that the sensitivity of the sensor is 100pm/℃, which breaks through the limit of 83pm/℃ for single microring. The free spectral range (FSR) is 39.25nm, and the resolution ratio is 0.47℃, the temperature measurement range is improved, and a better resolution ratio is obtained. The microring temperature sensor designed in this paper has high sensitivity and small size structure (only $ 360µm^{2} $), which is suitable for temperature measurement of Very Large Scale Integration (VLSI). It has great research value and application potential in the field of System-on-Chip (SoC) temperature detection. Microring resonator (dpeaa)DE-He213 On chip sensor (dpeaa)DE-He213 Temperature sensor (dpeaa)DE-He213 Thermooptic effect (dpeaa)DE-He213 Shi, Yunying aut Zhou, Tian (orcid)0000-0002-2685-9433 aut Xu, Chuanpei aut Zhu, Aijun aut Enthalten in Silicon Dordrecht : Springer Netherlands, 2009 14(2021), 11 vom: 09. Sept., Seite 5847-5854 (DE-627)598789545 (DE-600)2491562-2 1876-9918 nnns volume:14 year:2021 number:11 day:09 month:09 pages:5847-5854 https://dx.doi.org/10.1007/s12633-021-01247-5 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 14 2021 11 09 09 5847-5854 |
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small size on-chip temperature sensor based on a microring resonator |
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A Small Size On-chip Temperature Sensor Based on a Microring Resonator |
| abstract |
Abstract In this paper, a small size on-chip temperature sensor based on microring resonator (MRR) is introduced. The sensor consists of a small microring waveguide with a radius of 3.1 μm and a runway waveguide with the same bending radius. To a certain extent, it solves the problem that high sensitivity and small size cannot coexist in the current on-chip temperature sensor, and provides a reference scheme for the design of on-chip temperature sensor. The experimental results show that the sensitivity of the sensor is 100pm/℃, which breaks through the limit of 83pm/℃ for single microring. The free spectral range (FSR) is 39.25nm, and the resolution ratio is 0.47℃, the temperature measurement range is improved, and a better resolution ratio is obtained. The microring temperature sensor designed in this paper has high sensitivity and small size structure (only $ 360µm^{2} $), which is suitable for temperature measurement of Very Large Scale Integration (VLSI). It has great research value and application potential in the field of System-on-Chip (SoC) temperature detection. © Springer Nature B.V. 2021 |
| abstractGer |
Abstract In this paper, a small size on-chip temperature sensor based on microring resonator (MRR) is introduced. The sensor consists of a small microring waveguide with a radius of 3.1 μm and a runway waveguide with the same bending radius. To a certain extent, it solves the problem that high sensitivity and small size cannot coexist in the current on-chip temperature sensor, and provides a reference scheme for the design of on-chip temperature sensor. The experimental results show that the sensitivity of the sensor is 100pm/℃, which breaks through the limit of 83pm/℃ for single microring. The free spectral range (FSR) is 39.25nm, and the resolution ratio is 0.47℃, the temperature measurement range is improved, and a better resolution ratio is obtained. The microring temperature sensor designed in this paper has high sensitivity and small size structure (only $ 360µm^{2} $), which is suitable for temperature measurement of Very Large Scale Integration (VLSI). It has great research value and application potential in the field of System-on-Chip (SoC) temperature detection. © Springer Nature B.V. 2021 |
| abstract_unstemmed |
Abstract In this paper, a small size on-chip temperature sensor based on microring resonator (MRR) is introduced. The sensor consists of a small microring waveguide with a radius of 3.1 μm and a runway waveguide with the same bending radius. To a certain extent, it solves the problem that high sensitivity and small size cannot coexist in the current on-chip temperature sensor, and provides a reference scheme for the design of on-chip temperature sensor. The experimental results show that the sensitivity of the sensor is 100pm/℃, which breaks through the limit of 83pm/℃ for single microring. The free spectral range (FSR) is 39.25nm, and the resolution ratio is 0.47℃, the temperature measurement range is improved, and a better resolution ratio is obtained. The microring temperature sensor designed in this paper has high sensitivity and small size structure (only $ 360µm^{2} $), which is suitable for temperature measurement of Very Large Scale Integration (VLSI). It has great research value and application potential in the field of System-on-Chip (SoC) temperature detection. © Springer Nature B.V. 2021 |
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A Small Size On-chip Temperature Sensor Based on a Microring Resonator |
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https://dx.doi.org/10.1007/s12633-021-01247-5 |
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Shi, Yunying Zhou, Tian Xu, Chuanpei Zhu, Aijun |
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Shi, Yunying Zhou, Tian Xu, Chuanpei Zhu, Aijun |
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10.1007/s12633-021-01247-5 |
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2024-07-03T15:18:34.927Z |
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| score |
7.4009285 |