Broadband Low Reflection Surfaces with Silicon Nanopillar Hexagonal Arrays for Energy Harvesting in Photovoltaics
Abstract In this study, optimization of the silicon nanopillar arrays and thin films coated on silicon substrate has been investigated in order to minimize the optical reflection loss from the silicon substrate surface. Nanopillars’s filling ratio, pillar height, pillars diameter, sidewall incline a...
Ausführliche Beschreibung
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| Autor*in: |
Tut, Turgut [verfasserIn] |
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| Format: |
E-Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2022 |
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| Schlagwörter: |
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| Anmerkung: |
© The Author(s), under exclusive licence to Springer Nature B.V. 2022 |
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| Übergeordnetes Werk: |
Enthalten in: Silicon - Dordrecht : Springer Netherlands, 2009, 14(2022), 18 vom: 25. Juni, Seite 12781-12788 |
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| Übergeordnetes Werk: |
volume:14 ; year:2022 ; number:18 ; day:25 ; month:06 ; pages:12781-12788 |
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| DOI / URN: |
10.1007/s12633-022-01977-0 |
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SPR049035282 |
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| 520 | |a Abstract In this study, optimization of the silicon nanopillar arrays and thin films coated on silicon substrate has been investigated in order to minimize the optical reflection loss from the silicon substrate surface. Nanopillars’s filling ratio, pillar height, pillars diameter, sidewall incline angle, and step coverage with dielectric thin film thickness are systematically optimized together for the first time with these type of nanostructures. Full-field Finite Difference Time Domain method is used to simulate electro-magnetic fields and calculate the reflection from the modified nanostructured substrate surfaces in 400-1100 nm spectral range. Optimization recipe is clearly presented and this is not only useful for hexagonal arrays but also for regular arrays of nanopillars in general. We also further decrease the reflection by using step coverage concept which is the result of nonconformal coating on steps and trenches of thin films. We obtained approximately 2% of weighted average reflection in the 400-1100 nm range for perpendicular incident solar radiation which is one of the best results reported for this type of nanostructured surfaces in the literature. | ||
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10.1007/s12633-022-01977-0 doi (DE-627)SPR049035282 (SPR)s12633-022-01977-0-e DE-627 ger DE-627 rakwb eng Tut, Turgut verfasserin (orcid)0000-0002-4589-201X aut Broadband Low Reflection Surfaces with Silicon Nanopillar Hexagonal Arrays for Energy Harvesting in Photovoltaics 2022 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © The Author(s), under exclusive licence to Springer Nature B.V. 2022 Abstract In this study, optimization of the silicon nanopillar arrays and thin films coated on silicon substrate has been investigated in order to minimize the optical reflection loss from the silicon substrate surface. Nanopillars’s filling ratio, pillar height, pillars diameter, sidewall incline angle, and step coverage with dielectric thin film thickness are systematically optimized together for the first time with these type of nanostructures. Full-field Finite Difference Time Domain method is used to simulate electro-magnetic fields and calculate the reflection from the modified nanostructured substrate surfaces in 400-1100 nm spectral range. Optimization recipe is clearly presented and this is not only useful for hexagonal arrays but also for regular arrays of nanopillars in general. We also further decrease the reflection by using step coverage concept which is the result of nonconformal coating on steps and trenches of thin films. We obtained approximately 2% of weighted average reflection in the 400-1100 nm range for perpendicular incident solar radiation which is one of the best results reported for this type of nanostructured surfaces in the literature. Nanopillars (dpeaa)DE-He213 Hexagonal array (dpeaa)DE-He213 Nonconformal deposition (dpeaa)DE-He213 Low reflection (dpeaa)DE-He213 Enthalten in Silicon Dordrecht : Springer Netherlands, 2009 14(2022), 18 vom: 25. Juni, Seite 12781-12788 (DE-627)598789545 (DE-600)2491562-2 1876-9918 nnns volume:14 year:2022 number:18 day:25 month:06 pages:12781-12788 https://dx.doi.org/10.1007/s12633-022-01977-0 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 14 2022 18 25 06 12781-12788 |
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10.1007/s12633-022-01977-0 doi (DE-627)SPR049035282 (SPR)s12633-022-01977-0-e DE-627 ger DE-627 rakwb eng Tut, Turgut verfasserin (orcid)0000-0002-4589-201X aut Broadband Low Reflection Surfaces with Silicon Nanopillar Hexagonal Arrays for Energy Harvesting in Photovoltaics 2022 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © The Author(s), under exclusive licence to Springer Nature B.V. 2022 Abstract In this study, optimization of the silicon nanopillar arrays and thin films coated on silicon substrate has been investigated in order to minimize the optical reflection loss from the silicon substrate surface. Nanopillars’s filling ratio, pillar height, pillars diameter, sidewall incline angle, and step coverage with dielectric thin film thickness are systematically optimized together for the first time with these type of nanostructures. Full-field Finite Difference Time Domain method is used to simulate electro-magnetic fields and calculate the reflection from the modified nanostructured substrate surfaces in 400-1100 nm spectral range. Optimization recipe is clearly presented and this is not only useful for hexagonal arrays but also for regular arrays of nanopillars in general. We also further decrease the reflection by using step coverage concept which is the result of nonconformal coating on steps and trenches of thin films. We obtained approximately 2% of weighted average reflection in the 400-1100 nm range for perpendicular incident solar radiation which is one of the best results reported for this type of nanostructured surfaces in the literature. Nanopillars (dpeaa)DE-He213 Hexagonal array (dpeaa)DE-He213 Nonconformal deposition (dpeaa)DE-He213 Low reflection (dpeaa)DE-He213 Enthalten in Silicon Dordrecht : Springer Netherlands, 2009 14(2022), 18 vom: 25. Juni, Seite 12781-12788 (DE-627)598789545 (DE-600)2491562-2 1876-9918 nnns volume:14 year:2022 number:18 day:25 month:06 pages:12781-12788 https://dx.doi.org/10.1007/s12633-022-01977-0 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_101 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 14 2022 18 25 06 12781-12788 |
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Broadband Low Reflection Surfaces with Silicon Nanopillar Hexagonal Arrays for Energy Harvesting in Photovoltaics |
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Abstract In this study, optimization of the silicon nanopillar arrays and thin films coated on silicon substrate has been investigated in order to minimize the optical reflection loss from the silicon substrate surface. Nanopillars’s filling ratio, pillar height, pillars diameter, sidewall incline angle, and step coverage with dielectric thin film thickness are systematically optimized together for the first time with these type of nanostructures. Full-field Finite Difference Time Domain method is used to simulate electro-magnetic fields and calculate the reflection from the modified nanostructured substrate surfaces in 400-1100 nm spectral range. Optimization recipe is clearly presented and this is not only useful for hexagonal arrays but also for regular arrays of nanopillars in general. We also further decrease the reflection by using step coverage concept which is the result of nonconformal coating on steps and trenches of thin films. We obtained approximately 2% of weighted average reflection in the 400-1100 nm range for perpendicular incident solar radiation which is one of the best results reported for this type of nanostructured surfaces in the literature. © The Author(s), under exclusive licence to Springer Nature B.V. 2022 |
| abstractGer |
Abstract In this study, optimization of the silicon nanopillar arrays and thin films coated on silicon substrate has been investigated in order to minimize the optical reflection loss from the silicon substrate surface. Nanopillars’s filling ratio, pillar height, pillars diameter, sidewall incline angle, and step coverage with dielectric thin film thickness are systematically optimized together for the first time with these type of nanostructures. Full-field Finite Difference Time Domain method is used to simulate electro-magnetic fields and calculate the reflection from the modified nanostructured substrate surfaces in 400-1100 nm spectral range. Optimization recipe is clearly presented and this is not only useful for hexagonal arrays but also for regular arrays of nanopillars in general. We also further decrease the reflection by using step coverage concept which is the result of nonconformal coating on steps and trenches of thin films. We obtained approximately 2% of weighted average reflection in the 400-1100 nm range for perpendicular incident solar radiation which is one of the best results reported for this type of nanostructured surfaces in the literature. © The Author(s), under exclusive licence to Springer Nature B.V. 2022 |
| abstract_unstemmed |
Abstract In this study, optimization of the silicon nanopillar arrays and thin films coated on silicon substrate has been investigated in order to minimize the optical reflection loss from the silicon substrate surface. Nanopillars’s filling ratio, pillar height, pillars diameter, sidewall incline angle, and step coverage with dielectric thin film thickness are systematically optimized together for the first time with these type of nanostructures. Full-field Finite Difference Time Domain method is used to simulate electro-magnetic fields and calculate the reflection from the modified nanostructured substrate surfaces in 400-1100 nm spectral range. Optimization recipe is clearly presented and this is not only useful for hexagonal arrays but also for regular arrays of nanopillars in general. We also further decrease the reflection by using step coverage concept which is the result of nonconformal coating on steps and trenches of thin films. We obtained approximately 2% of weighted average reflection in the 400-1100 nm range for perpendicular incident solar radiation which is one of the best results reported for this type of nanostructured surfaces in the literature. © The Author(s), under exclusive licence to Springer Nature B.V. 2022 |
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Broadband Low Reflection Surfaces with Silicon Nanopillar Hexagonal Arrays for Energy Harvesting in Photovoltaics |
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https://dx.doi.org/10.1007/s12633-022-01977-0 |
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10.1007/s12633-022-01977-0 |
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