Modulating nanostructures in metals by magneton sputtering

Here, we report an effective nanostructures modulation strategy by W alloying and annealing treatment in Cu films deposited by magnetron sputtering. The as-deposited Cu and Cu–W films exhibit nanograins with comparable grain sizes. After annealing, nanograins in the Cu film are substantially coarsen...
Ausführliche Beschreibung

Gespeichert in:
Autor*in:

Mao, Pengyan [verfasserIn]

Cheng, Zhao

Yu, Zhi

Zhao, Hui

Li, Hongda

Tai, Kaiping

Format:

E-Artikel

Sprache:

Englisch

Erschienen:

2023

Schlagwörter:

Thin film

Alloy

Annealing

Nanostructure

Anmerkung:

© The Author(s), under exclusive licence to The Materials Research Society 2023. Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.

Übergeordnetes Werk:

Enthalten in: MRS communications - Berlin : Springer, 2011, 13(2023), 3 vom: 10. Mai, Seite 492-499

Übergeordnetes Werk:

volume:13 ; year:2023 ; number:3 ; day:10 ; month:05 ; pages:492-499

Links:

Volltext

DOI / URN:

10.1557/s43579-023-00366-x

Katalog-ID:

SPR052102068

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