Contribution of 90° Si-Core Partial Dislocation to Asymmetric Double-Rhombic Single Shockley-Type Stacking Faults in 4H-SiC Epitaxial Layers

Abstract The expanding shapes of the double-rhombic single Shockley-type stacking faults (DRSFs) from half-loop array (HLA)-type basal plane dislocations (BPDs) and non-HLA-type BPDs were investigated by combining photoluminescence imaging and ultraviolet light illumination. The expansion rate of HL...
Ausführliche Beschreibung

Gespeichert in:
Autor*in:

Nishio, Johji [verfasserIn]

Ota, Chiharu

Iijima, Ryosuke

Format:

E-Artikel

Sprache:

Englisch

Erschienen:

2023

Schlagwörter:

4H-SiC

forward degradation

single Shockley stacking fault

partial dislocation

photoluminescence imaging

Anmerkung:

© The Minerals, Metals & Materials Society 2023. Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.

Übergeordnetes Werk:

Enthalten in: Journal of electronic materials - Warrendale, Pa : TMS, 1972, 52(2023), 8 vom: 29. März, Seite 5084-5092

Übergeordnetes Werk:

volume:52 ; year:2023 ; number:8 ; day:29 ; month:03 ; pages:5084-5092

Links:

Volltext

DOI / URN:

10.1007/s11664-023-10343-8

Katalog-ID:

SPR052158519

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