A micro resonant pressure sensor with adjustable quality factor
Abstract Being an important component of micro-electro-mechanical system (MEMS), the micro resonant sensor offers advantages such as the compact size, high accuracy, ease of integration with the test circuit, fast response time, and resistance to frequency signal distortion. Moreover, the tool has b...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Ren, Jianhua [verfasserIn] |
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| Format: |
E-Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2024 |
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| Schlagwörter: |
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| Anmerkung: |
© The Korean Society of Mechanical Engineers and Springer-Verlag GmbH Germany, part of Springer Nature 2024 |
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| Übergeordnetes Werk: |
Enthalten in: Journal of mechanical science and technology - Berlin : Springer, 2005, 38(2024), 1 vom: Jan., Seite 347-356 |
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| Übergeordnetes Werk: |
volume:38 ; year:2024 ; number:1 ; month:01 ; pages:347-356 |
| Links: |
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| DOI / URN: |
10.1007/s12206-023-1228-5 |
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| Katalog-ID: |
SPR054370345 |
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| 100 | 1 | |a Ren, Jianhua |e verfasserin |4 aut | |
| 245 | 1 | 2 | |a A micro resonant pressure sensor with adjustable quality factor |
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| 520 | |a Abstract Being an important component of micro-electro-mechanical system (MEMS), the micro resonant sensor offers advantages such as the compact size, high accuracy, ease of integration with the test circuit, fast response time, and resistance to frequency signal distortion. Moreover, the tool has broad market prospects. In order to improve the performance of sensors and reduce production costs, in this paper, a micro-resonant pressure sensor, with an adjustable quality factor, is proposed to achieve the measurement of pressure by the electrostatic excitation-capacitive detection. Furthermore, the vibration theory of the sensor in the presence of multi-field coupling, including electrostatic force, molecular force, and air damping force is deduced, and the principle of the adjustable quality factor is analyzed. Then, a sample of the sensor with an adjustable quality factor is developed by using the micromachining method, and a high-precision detection circuit, based on a 90° feedback loop, is constructed to manufacture the sensor quality factor adjustment experiment. The results show that the quality factor is 16.89 when the gain M is zero. When the gain is equal to 1.07·$ 10^{6} $, the quality factor of the sensor increases by a factor of 4.73 to reach 79.94. It can significantly improve the detection sensitivity and accuracy of such sensors. Finally, this approach can meet different testing requirements and significantly reduce the cost of equipment fabrication and reduce the experimental expenses. | ||
| 650 | 4 | |a Mico-resonant sensors |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a Adjustable quality factor |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a MEMS |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a Pressure sensor |7 (dpeaa)DE-He213 | |
| 700 | 1 | |a Hou, Dezhi |4 aut | |
| 700 | 1 | |a Shi, Xufei |4 aut | |
| 700 | 1 | |a Fu, Xiaorui |4 aut | |
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10.1007/s12206-023-1228-5 doi (DE-627)SPR054370345 (SPR)s12206-023-1228-5-e DE-627 ger DE-627 rakwb eng Ren, Jianhua verfasserin aut A micro resonant pressure sensor with adjustable quality factor 2024 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © The Korean Society of Mechanical Engineers and Springer-Verlag GmbH Germany, part of Springer Nature 2024 Abstract Being an important component of micro-electro-mechanical system (MEMS), the micro resonant sensor offers advantages such as the compact size, high accuracy, ease of integration with the test circuit, fast response time, and resistance to frequency signal distortion. Moreover, the tool has broad market prospects. In order to improve the performance of sensors and reduce production costs, in this paper, a micro-resonant pressure sensor, with an adjustable quality factor, is proposed to achieve the measurement of pressure by the electrostatic excitation-capacitive detection. Furthermore, the vibration theory of the sensor in the presence of multi-field coupling, including electrostatic force, molecular force, and air damping force is deduced, and the principle of the adjustable quality factor is analyzed. Then, a sample of the sensor with an adjustable quality factor is developed by using the micromachining method, and a high-precision detection circuit, based on a 90° feedback loop, is constructed to manufacture the sensor quality factor adjustment experiment. The results show that the quality factor is 16.89 when the gain M is zero. When the gain is equal to 1.07·$ 10^{6} $, the quality factor of the sensor increases by a factor of 4.73 to reach 79.94. It can significantly improve the detection sensitivity and accuracy of such sensors. Finally, this approach can meet different testing requirements and significantly reduce the cost of equipment fabrication and reduce the experimental expenses. Mico-resonant sensors (dpeaa)DE-He213 Adjustable quality factor (dpeaa)DE-He213 MEMS (dpeaa)DE-He213 Pressure sensor (dpeaa)DE-He213 Hou, Dezhi aut Shi, Xufei aut Fu, Xiaorui aut Enthalten in Journal of mechanical science and technology Berlin : Springer, 2005 38(2024), 1 vom: Jan., Seite 347-356 (DE-627)58714016X (DE-600)2467571-4 1976-3824 nnns volume:38 year:2024 number:1 month:01 pages:347-356 https://dx.doi.org/10.1007/s12206-023-1228-5 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 38 2024 1 01 347-356 |
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10.1007/s12206-023-1228-5 doi (DE-627)SPR054370345 (SPR)s12206-023-1228-5-e DE-627 ger DE-627 rakwb eng Ren, Jianhua verfasserin aut A micro resonant pressure sensor with adjustable quality factor 2024 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © The Korean Society of Mechanical Engineers and Springer-Verlag GmbH Germany, part of Springer Nature 2024 Abstract Being an important component of micro-electro-mechanical system (MEMS), the micro resonant sensor offers advantages such as the compact size, high accuracy, ease of integration with the test circuit, fast response time, and resistance to frequency signal distortion. Moreover, the tool has broad market prospects. In order to improve the performance of sensors and reduce production costs, in this paper, a micro-resonant pressure sensor, with an adjustable quality factor, is proposed to achieve the measurement of pressure by the electrostatic excitation-capacitive detection. Furthermore, the vibration theory of the sensor in the presence of multi-field coupling, including electrostatic force, molecular force, and air damping force is deduced, and the principle of the adjustable quality factor is analyzed. Then, a sample of the sensor with an adjustable quality factor is developed by using the micromachining method, and a high-precision detection circuit, based on a 90° feedback loop, is constructed to manufacture the sensor quality factor adjustment experiment. The results show that the quality factor is 16.89 when the gain M is zero. When the gain is equal to 1.07·$ 10^{6} $, the quality factor of the sensor increases by a factor of 4.73 to reach 79.94. It can significantly improve the detection sensitivity and accuracy of such sensors. Finally, this approach can meet different testing requirements and significantly reduce the cost of equipment fabrication and reduce the experimental expenses. Mico-resonant sensors (dpeaa)DE-He213 Adjustable quality factor (dpeaa)DE-He213 MEMS (dpeaa)DE-He213 Pressure sensor (dpeaa)DE-He213 Hou, Dezhi aut Shi, Xufei aut Fu, Xiaorui aut Enthalten in Journal of mechanical science and technology Berlin : Springer, 2005 38(2024), 1 vom: Jan., Seite 347-356 (DE-627)58714016X (DE-600)2467571-4 1976-3824 nnns volume:38 year:2024 number:1 month:01 pages:347-356 https://dx.doi.org/10.1007/s12206-023-1228-5 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 38 2024 1 01 347-356 |
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10.1007/s12206-023-1228-5 doi (DE-627)SPR054370345 (SPR)s12206-023-1228-5-e DE-627 ger DE-627 rakwb eng Ren, Jianhua verfasserin aut A micro resonant pressure sensor with adjustable quality factor 2024 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © The Korean Society of Mechanical Engineers and Springer-Verlag GmbH Germany, part of Springer Nature 2024 Abstract Being an important component of micro-electro-mechanical system (MEMS), the micro resonant sensor offers advantages such as the compact size, high accuracy, ease of integration with the test circuit, fast response time, and resistance to frequency signal distortion. Moreover, the tool has broad market prospects. In order to improve the performance of sensors and reduce production costs, in this paper, a micro-resonant pressure sensor, with an adjustable quality factor, is proposed to achieve the measurement of pressure by the electrostatic excitation-capacitive detection. Furthermore, the vibration theory of the sensor in the presence of multi-field coupling, including electrostatic force, molecular force, and air damping force is deduced, and the principle of the adjustable quality factor is analyzed. Then, a sample of the sensor with an adjustable quality factor is developed by using the micromachining method, and a high-precision detection circuit, based on a 90° feedback loop, is constructed to manufacture the sensor quality factor adjustment experiment. The results show that the quality factor is 16.89 when the gain M is zero. When the gain is equal to 1.07·$ 10^{6} $, the quality factor of the sensor increases by a factor of 4.73 to reach 79.94. It can significantly improve the detection sensitivity and accuracy of such sensors. Finally, this approach can meet different testing requirements and significantly reduce the cost of equipment fabrication and reduce the experimental expenses. Mico-resonant sensors (dpeaa)DE-He213 Adjustable quality factor (dpeaa)DE-He213 MEMS (dpeaa)DE-He213 Pressure sensor (dpeaa)DE-He213 Hou, Dezhi aut Shi, Xufei aut Fu, Xiaorui aut Enthalten in Journal of mechanical science and technology Berlin : Springer, 2005 38(2024), 1 vom: Jan., Seite 347-356 (DE-627)58714016X (DE-600)2467571-4 1976-3824 nnns volume:38 year:2024 number:1 month:01 pages:347-356 https://dx.doi.org/10.1007/s12206-023-1228-5 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 38 2024 1 01 347-356 |
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10.1007/s12206-023-1228-5 doi (DE-627)SPR054370345 (SPR)s12206-023-1228-5-e DE-627 ger DE-627 rakwb eng Ren, Jianhua verfasserin aut A micro resonant pressure sensor with adjustable quality factor 2024 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © The Korean Society of Mechanical Engineers and Springer-Verlag GmbH Germany, part of Springer Nature 2024 Abstract Being an important component of micro-electro-mechanical system (MEMS), the micro resonant sensor offers advantages such as the compact size, high accuracy, ease of integration with the test circuit, fast response time, and resistance to frequency signal distortion. Moreover, the tool has broad market prospects. In order to improve the performance of sensors and reduce production costs, in this paper, a micro-resonant pressure sensor, with an adjustable quality factor, is proposed to achieve the measurement of pressure by the electrostatic excitation-capacitive detection. Furthermore, the vibration theory of the sensor in the presence of multi-field coupling, including electrostatic force, molecular force, and air damping force is deduced, and the principle of the adjustable quality factor is analyzed. Then, a sample of the sensor with an adjustable quality factor is developed by using the micromachining method, and a high-precision detection circuit, based on a 90° feedback loop, is constructed to manufacture the sensor quality factor adjustment experiment. The results show that the quality factor is 16.89 when the gain M is zero. When the gain is equal to 1.07·$ 10^{6} $, the quality factor of the sensor increases by a factor of 4.73 to reach 79.94. It can significantly improve the detection sensitivity and accuracy of such sensors. Finally, this approach can meet different testing requirements and significantly reduce the cost of equipment fabrication and reduce the experimental expenses. Mico-resonant sensors (dpeaa)DE-He213 Adjustable quality factor (dpeaa)DE-He213 MEMS (dpeaa)DE-He213 Pressure sensor (dpeaa)DE-He213 Hou, Dezhi aut Shi, Xufei aut Fu, Xiaorui aut Enthalten in Journal of mechanical science and technology Berlin : Springer, 2005 38(2024), 1 vom: Jan., Seite 347-356 (DE-627)58714016X (DE-600)2467571-4 1976-3824 nnns volume:38 year:2024 number:1 month:01 pages:347-356 https://dx.doi.org/10.1007/s12206-023-1228-5 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 38 2024 1 01 347-356 |
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10.1007/s12206-023-1228-5 doi (DE-627)SPR054370345 (SPR)s12206-023-1228-5-e DE-627 ger DE-627 rakwb eng Ren, Jianhua verfasserin aut A micro resonant pressure sensor with adjustable quality factor 2024 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © The Korean Society of Mechanical Engineers and Springer-Verlag GmbH Germany, part of Springer Nature 2024 Abstract Being an important component of micro-electro-mechanical system (MEMS), the micro resonant sensor offers advantages such as the compact size, high accuracy, ease of integration with the test circuit, fast response time, and resistance to frequency signal distortion. Moreover, the tool has broad market prospects. In order to improve the performance of sensors and reduce production costs, in this paper, a micro-resonant pressure sensor, with an adjustable quality factor, is proposed to achieve the measurement of pressure by the electrostatic excitation-capacitive detection. Furthermore, the vibration theory of the sensor in the presence of multi-field coupling, including electrostatic force, molecular force, and air damping force is deduced, and the principle of the adjustable quality factor is analyzed. Then, a sample of the sensor with an adjustable quality factor is developed by using the micromachining method, and a high-precision detection circuit, based on a 90° feedback loop, is constructed to manufacture the sensor quality factor adjustment experiment. The results show that the quality factor is 16.89 when the gain M is zero. When the gain is equal to 1.07·$ 10^{6} $, the quality factor of the sensor increases by a factor of 4.73 to reach 79.94. It can significantly improve the detection sensitivity and accuracy of such sensors. Finally, this approach can meet different testing requirements and significantly reduce the cost of equipment fabrication and reduce the experimental expenses. Mico-resonant sensors (dpeaa)DE-He213 Adjustable quality factor (dpeaa)DE-He213 MEMS (dpeaa)DE-He213 Pressure sensor (dpeaa)DE-He213 Hou, Dezhi aut Shi, Xufei aut Fu, Xiaorui aut Enthalten in Journal of mechanical science and technology Berlin : Springer, 2005 38(2024), 1 vom: Jan., Seite 347-356 (DE-627)58714016X (DE-600)2467571-4 1976-3824 nnns volume:38 year:2024 number:1 month:01 pages:347-356 https://dx.doi.org/10.1007/s12206-023-1228-5 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2056 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4126 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 38 2024 1 01 347-356 |
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Ren, Jianhua @@aut@@ Hou, Dezhi @@aut@@ Shi, Xufei @@aut@@ Fu, Xiaorui @@aut@@ |
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Ren, Jianhua |
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Ren, Jianhua misc Mico-resonant sensors misc Adjustable quality factor misc MEMS misc Pressure sensor A micro resonant pressure sensor with adjustable quality factor |
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micro resonant pressure sensor with adjustable quality factor |
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A micro resonant pressure sensor with adjustable quality factor |
| abstract |
Abstract Being an important component of micro-electro-mechanical system (MEMS), the micro resonant sensor offers advantages such as the compact size, high accuracy, ease of integration with the test circuit, fast response time, and resistance to frequency signal distortion. Moreover, the tool has broad market prospects. In order to improve the performance of sensors and reduce production costs, in this paper, a micro-resonant pressure sensor, with an adjustable quality factor, is proposed to achieve the measurement of pressure by the electrostatic excitation-capacitive detection. Furthermore, the vibration theory of the sensor in the presence of multi-field coupling, including electrostatic force, molecular force, and air damping force is deduced, and the principle of the adjustable quality factor is analyzed. Then, a sample of the sensor with an adjustable quality factor is developed by using the micromachining method, and a high-precision detection circuit, based on a 90° feedback loop, is constructed to manufacture the sensor quality factor adjustment experiment. The results show that the quality factor is 16.89 when the gain M is zero. When the gain is equal to 1.07·$ 10^{6} $, the quality factor of the sensor increases by a factor of 4.73 to reach 79.94. It can significantly improve the detection sensitivity and accuracy of such sensors. Finally, this approach can meet different testing requirements and significantly reduce the cost of equipment fabrication and reduce the experimental expenses. © The Korean Society of Mechanical Engineers and Springer-Verlag GmbH Germany, part of Springer Nature 2024 |
| abstractGer |
Abstract Being an important component of micro-electro-mechanical system (MEMS), the micro resonant sensor offers advantages such as the compact size, high accuracy, ease of integration with the test circuit, fast response time, and resistance to frequency signal distortion. Moreover, the tool has broad market prospects. In order to improve the performance of sensors and reduce production costs, in this paper, a micro-resonant pressure sensor, with an adjustable quality factor, is proposed to achieve the measurement of pressure by the electrostatic excitation-capacitive detection. Furthermore, the vibration theory of the sensor in the presence of multi-field coupling, including electrostatic force, molecular force, and air damping force is deduced, and the principle of the adjustable quality factor is analyzed. Then, a sample of the sensor with an adjustable quality factor is developed by using the micromachining method, and a high-precision detection circuit, based on a 90° feedback loop, is constructed to manufacture the sensor quality factor adjustment experiment. The results show that the quality factor is 16.89 when the gain M is zero. When the gain is equal to 1.07·$ 10^{6} $, the quality factor of the sensor increases by a factor of 4.73 to reach 79.94. It can significantly improve the detection sensitivity and accuracy of such sensors. Finally, this approach can meet different testing requirements and significantly reduce the cost of equipment fabrication and reduce the experimental expenses. © The Korean Society of Mechanical Engineers and Springer-Verlag GmbH Germany, part of Springer Nature 2024 |
| abstract_unstemmed |
Abstract Being an important component of micro-electro-mechanical system (MEMS), the micro resonant sensor offers advantages such as the compact size, high accuracy, ease of integration with the test circuit, fast response time, and resistance to frequency signal distortion. Moreover, the tool has broad market prospects. In order to improve the performance of sensors and reduce production costs, in this paper, a micro-resonant pressure sensor, with an adjustable quality factor, is proposed to achieve the measurement of pressure by the electrostatic excitation-capacitive detection. Furthermore, the vibration theory of the sensor in the presence of multi-field coupling, including electrostatic force, molecular force, and air damping force is deduced, and the principle of the adjustable quality factor is analyzed. Then, a sample of the sensor with an adjustable quality factor is developed by using the micromachining method, and a high-precision detection circuit, based on a 90° feedback loop, is constructed to manufacture the sensor quality factor adjustment experiment. The results show that the quality factor is 16.89 when the gain M is zero. When the gain is equal to 1.07·$ 10^{6} $, the quality factor of the sensor increases by a factor of 4.73 to reach 79.94. It can significantly improve the detection sensitivity and accuracy of such sensors. Finally, this approach can meet different testing requirements and significantly reduce the cost of equipment fabrication and reduce the experimental expenses. © The Korean Society of Mechanical Engineers and Springer-Verlag GmbH Germany, part of Springer Nature 2024 |
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A micro resonant pressure sensor with adjustable quality factor |
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https://dx.doi.org/10.1007/s12206-023-1228-5 |
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Hou, Dezhi Shi, Xufei Fu, Xiaorui |
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Hou, Dezhi Shi, Xufei Fu, Xiaorui |
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10.1007/s12206-023-1228-5 |
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| score |
7.399728 |