A micro resonant pressure sensor with adjustable quality factor

Abstract Being an important component of micro-electro-mechanical system (MEMS), the micro resonant sensor offers advantages such as the compact size, high accuracy, ease of integration with the test circuit, fast response time, and resistance to frequency signal distortion. Moreover, the tool has b...
Ausführliche Beschreibung

Gespeichert in:
Autor*in:

Ren, Jianhua [verfasserIn]

Hou, Dezhi

Shi, Xufei

Fu, Xiaorui

Format:

E-Artikel

Sprache:

Englisch

Erschienen:

2024

Schlagwörter:

Mico-resonant sensors

Adjustable quality factor

MEMS

Pressure sensor

Anmerkung:

© The Korean Society of Mechanical Engineers and Springer-Verlag GmbH Germany, part of Springer Nature 2024

Übergeordnetes Werk:

Enthalten in: Journal of mechanical science and technology - Berlin : Springer, 2005, 38(2024), 1 vom: Jan., Seite 347-356

Übergeordnetes Werk:

volume:38 ; year:2024 ; number:1 ; month:01 ; pages:347-356

Links:

Volltext

DOI / URN:

10.1007/s12206-023-1228-5

Katalog-ID:

SPR054370345

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