The foundations of vacuum coating technology
"Getter" PumpsVacuum Chambers; Single-Chamber "Batch" Systems; Multichamber Systems (Closed Ended); Multichamber Systems (Open Ended); Multichamber Cluster Tool; Multipass Systems; Vacuum Sealing; Mercury Seals; Glass-to-Metal Seals; Greases and Lubricants; Fluid Seals; Paints; V...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Mattox, D. M. [verfasserIn] |
|---|
| Format: |
E-Book |
|---|---|
| Sprache: |
Englisch |
| Erschienen: |
Oxford: William Andrew ; 2018 |
|---|---|
| Ausgabe: |
Second edition |
| Schlagwörter: | |
|---|---|
| Formangabe: |
Electronic books |
| Anmerkung: |
Online resource; title from PDF title page (EBSCO, viewed August 29, 2018 |
|---|---|
| Umfang: |
1 Online-Ressource (1 online resource) |
| Links: | |
|---|---|
| ISBN: |
0-12-813085-7 |
| Katalog-ID: |
1685486126 |
|---|
| LEADER | 01000cam a22002652 4500 | ||
|---|---|---|---|
| 001 | 1685486126 | ||
| 003 | DE-627 | ||
| 005 | 20240503140321.0 | ||
| 007 | cr uuu---uuuuu | ||
| 008 | 191213s2018 xxk|||||o 00| ||eng c | ||
| 020 | |a 0128130857 |c electronic bk. |9 0-12-813085-7 | ||
| 035 | |a (DE-627)1685486126 | ||
| 035 | |a (DE-576)517999935 | ||
| 035 | |a (DE-599)KEP027155072 | ||
| 035 | |a (OCoLC)049974714 | ||
| 035 | |a (EBP)027155072 | ||
| 035 | |a (ELSEVIER)on1049974714 | ||
| 040 | |a DE-627 |b eng |c DE-627 |e rda | ||
| 041 | |a eng | ||
| 044 | |c XA-GB | ||
| 050 | 0 | |a TN686.5.V3 | |
| 072 | 7 | |a TEC023000 |2 bisacsh | |
| 072 | 7 | |a TEC 023000 |2 bisacsh | |
| 072 | 7 | |a TEC 023000 |2 bisacsh | |
| 100 | 1 | |a Mattox, D. M. |e verfasserin |4 aut | |
| 245 | 1 | 4 | |a The foundations of vacuum coating technology |c Donald M. Mattox |
| 250 | |a Second edition | ||
| 264 | 1 | |a Oxford |b William Andrew |c 2018 | |
| 300 | |a 1 Online-Ressource (1 online resource) | ||
| 336 | |a Text |b txt |2 rdacontent | ||
| 337 | |a Computermedien |b c |2 rdamedia | ||
| 338 | |a Online-Ressource |b cr |2 rdacarrier | ||
| 500 | |a Online resource; title from PDF title page (EBSCO, viewed August 29, 2018 | ||
| 520 | |a "Getter" PumpsVacuum Chambers; Single-Chamber "Batch" Systems; Multichamber Systems (Closed Ended); Multichamber Systems (Open Ended); Multichamber Cluster Tool; Multipass Systems; Vacuum Sealing; Mercury Seals; Glass-to-Metal Seals; Greases and Lubricants; Fluid Seals; Paints; Viscous and Hardening Seals; Rubber and Other Elastomer Seals; Metal-to-Metal Seals; Leak Detection and Residual Gas/Vapor Analysis; Vacuum Gauging; "Indicator" Gauges; Pressure Differential Gauges; Liquid Gauges; Deflection Gauges; Pirani and Thermocouple Gauge; Ionization Gauge; Viscosity Gauge; Calibration of Gauges | ||
| 520 | |a Chamber Cleaning and "Conditioning"Glow Discharge Cleaning; Cleaning by Heating (Bakeout); UV/O3 Cleaning; Recontamination; Conductance-Gas Manifold and Pumping Distribution; Fixtures, Tooling, and Vaporization Sources; Gas Handling and Reactive Deposition Processes; Partial Pressure Control; References; Further Reading; Books -- Early Vacuum Technology and Related Topics (1888-1945); Books/Articles/Chapters -- History of Vacuum Technology; 3 Plasmas and Plasma Enhanced CVD; Introduction: Plasmas; Plasma Generation; Plasma Diagnostics; Plasma Confinement; Magnetrons | ||
| 520 | |a Early Vacuum Deposition BooksBooks; Articles and Chapters; 2 Vacuum Technology; Introduction; Early History of Vacuum Technology; Vacuum Technology as an Enabling Technology for Vacuum Coating; Vacuum Pumps; Torricelli Single-Stroke Vacuum Pump; Mercurial Multistroke Piston-Type Vacuum (Air) Pumps; Mechanical Vacuum (Air) Pumps; Mechanical Piston Pumps; Rotary Pump; Dry Pumps; Vapor Jet ("Diffusion" or "Condensation") Vacuum Pumps; Turbomolecular (Turbo) Pumps (Molecular Drag Pump, Mechanical Momentum Transfer Pump); Adsorption (Sorption) Pumps and Cryopumps; Cold Surfaces; Very Cold Surfaces | ||
| 520 | |a Front Cover; The Foundations of Vacuum Coating Technology; Copyright Page; Dedication; Contents; Biography; Foreword; Preface; Further Discussion; Acknowledgments; 1 About This Book; Introduction; Terminology; Vacuum Deposition-Vacuum Coating-Physical Vapor Deposition-Chemical Vapor Deposition; "Thin Film" Versus "Coating"; Units of Pressure; Text References; Books and Book Chapters; Periodic Journals and Transaction Articles; Proceedings, Conferences, and Meetings; Patents and Copyrights; Documents/Magazine Articles, etc.; Internet-YouTube, Blogs, etc.; References; Further Reading | ||
| 520 | |a Some Applications of Plasmas in Vacuum DepositionSputtering and Sputter Deposition; Modification of Vacuum Deposited Material; Plasma Modification of Surfaces; In Situ Cleaning; Introduction: Chemical Vapor Deposition and Plasma Enhanced CVD (PECVD); Types of Conventional CVD; Atmospheric Pressure Chemical Vapor Deposition (AP-CVD); Low-Pressure CVD; Plasma Enhanced CVD (PECVD); PECVD With Ion Bombardment of Deposit; Hot Filament CVD; Atomic Layer Deposition; Plasma Polymerization (PP); Parylene Hot Zone Process; Some Applications of PECVD; Insulating Layers (Encapsulation) | ||
| 520 | |a The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and low-pressure plasma-enhanced chemical vapor deposition. The melding of these technologies has resulted in new processes and products that have greatly expanded the application of vacuum coatings for use in our everyday lives. The book is unique in that it makes extensive reference to the patent literature (mostly US) and how it relates to the history of vacuum coating. The book includes a Historical Timeline of Vacuum Coating Technology and a Historical Timeline of Vacuum/Plasma Technology, as well as a Glossary of Terms used in the vacuum coating and surface engineering industries | ||
| 650 | 0 | |a Vapor-plating | |
| 650 | 4 | |a TECHNOLOGY & ENGINEERING ; Metallurgy | |
| 650 | 4 | |a Vapor-plating | |
| 655 | 0 | |a Electronic books | |
| 655 | 4 | |a Electronic books | |
| 776 | 1 | |z 0128130849 | |
| 776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe |z 0128130849 |z 9780128130841 |
| 856 | 4 | 0 | |u https://www.sciencedirect.com/science/book/9780128130841 |m X:ELSEVIER |x Verlag |z lizenzpflichtig |3 Volltext |
| 856 | 4 | 0 | |u http://www.sciencedirect.com/science/book/9780128130841 |x Verlag |3 Volltext |
| 889 | |w (DE-627)1031901337 | ||
| 912 | |a GBV-33-Freedom |b 2022 | ||
| 912 | |a BSZ-33-EBS-HSAA | ||
| 912 | |a GBV-33-EBS-MRI | ||
| 912 | |a GBV-33-EBS-ZHB | ||
| 912 | |a GBV-33-Freedom |b 2021 | ||
| 912 | |a ZDB-33-EBS | ||
| 912 | |a ZDB-33-EGE |b 2018 | ||
| 912 | |a ZDB-33-ESD | ||
| 912 | |a GBV-33-EBS-HST | ||
| 912 | |a BSZ-33-EBS-C1UB | ||
| 912 | |a GBV_ILN_105 | ||
| 912 | |a ISIL_DE-841 | ||
| 912 | |a SYSFLAG_1 | ||
| 912 | |a GBV_KXP | ||
| 912 | |a GBV_ILN_132 | ||
| 912 | |a ISIL_DE-959 | ||
| 912 | |a GBV_ILN_185 | ||
| 912 | |a ISIL_DE-Sra5 | ||
| 912 | |a GBV_ILN_370 | ||
| 912 | |a ISIL_DE-1373 | ||
| 912 | |a GBV_ILN_2020 | ||
| 912 | |a ISIL_DE-Ch1 | ||
| 912 | |a GBV_ILN_2111 | ||
| 912 | |a ISIL_DE-944 | ||
| 951 | |a BO | ||
| 953 | |2 045F |a 669.0284 | ||
| 953 | |2 045F |a 669/.028/4 | ||
| 980 | |2 105 |1 01 |x 0841 |b 4074466597 |h OLR-ELV-TEST |k Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Die Weitergabe an Dritte sowie systematisches Downloaden sind untersagt. |k Testzugang ZHB Lübeck |y z |z 26-02-22 | ||
| 980 | |2 132 |1 01 |x 0959 |b 450000193X |h EBS Elsevier |k Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Keine Weitergabe an Dritte. Kein systematisches Downloaden durch Robots. |k Zeitlich begrenzte Lizenzierung |y k |z 13-03-24 | ||
| 980 | |2 185 |1 01 |x 3519 |b 4514749044 |h OLR-EBS |k Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Die Weitergabe an Dritte sowie systematisches Downloaden sind untersagt. |y z |z 23-04-24 | ||
| 980 | |2 370 |1 01 |x 4370 |b 4540279661 |h EBS Elsevier |k Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Keine Weitergabe an Dritte. Kein systematisches Downloaden durch Robots. |u i |y z |z 20-06-24 | ||
| 980 | |2 2020 |1 01 |x DE-Ch1 |b 4520354943 |c 00 |f --%%-- |d --%%-- |e n |j n |k Campuslizenz |y l01 |z 03-05-24 | ||
| 980 | |2 2111 |1 02 |x DE-944 |b 4046040467 |c 00 |f --%%-- |d E-Book Elsevier |e --%%-- |j n |k Elektronischer Volltext - Campuslizenz |y l01 |z 27-01-22 | ||
| 981 | |2 105 |1 01 |x 0841 |r http://www.sciencedirect.com/science/book/9780128130841 | ||
| 981 | |2 132 |1 01 |x 0959 |y Zugriff nur für Angehörige der Hochschule Osnabrück im Hochschulnetz |r https://www.sciencedirect.com/science/book/9780128130841 | ||
| 981 | |2 185 |1 01 |x 3519 |r http://www.sciencedirect.com/science/book/9780128130841 | ||
| 981 | |2 370 |1 01 |x 4370 |y E-Book: Zugriff im HCU-Netz. Zugriff von außerhalb nur für HCU-Angehörige möglich |r https://www.sciencedirect.com/science/book/9780128130841 | ||
| 981 | |2 2020 |1 01 |x DE-Ch1 |r https://www.sciencedirect.com/science/book/9780128130841 | ||
| 981 | |2 2111 |1 02 |x DE-944 |r https://www.sciencedirect.com/science/book/9780128130841 | ||
| 982 | |2 132 |1 01 |x 0959 |8 00 |a EBooks Elsevier Engineering | ||
| 995 | |2 105 |1 01 |x 0841 |a OLR-ELV-TEST | ||
| 995 | |2 132 |1 01 |x 0959 |a EBS Elsevier | ||
| 995 | |2 185 |1 01 |x 3519 |a OLR-EBS | ||
| 995 | |2 370 |1 01 |x 4370 |a EBS Elsevier | ||
| author_variant |
d m m dm dmm |
|---|---|
| matchkey_str |
book:9780128130858:2018---- |
| oclc_num |
49974714 (ELSEVIER)1049974714 |
| hierarchy_sort_str |
2018 |
| callnumber-subject-code |
TN |
| publishDate |
2018 |
| allfields |
0128130857 electronic bk. 0-12-813085-7 (DE-627)1685486126 (DE-576)517999935 (DE-599)KEP027155072 (OCoLC)049974714 (EBP)027155072 (ELSEVIER)on1049974714 DE-627 eng DE-627 rda eng XA-GB TN686.5.V3 TEC023000 bisacsh TEC 023000 bisacsh TEC 023000 bisacsh Mattox, D. M. verfasserin aut The foundations of vacuum coating technology Donald M. Mattox Second edition Oxford William Andrew 2018 1 Online-Ressource (1 online resource) Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Online resource; title from PDF title page (EBSCO, viewed August 29, 2018 "Getter" PumpsVacuum Chambers; Single-Chamber "Batch" Systems; Multichamber Systems (Closed Ended); Multichamber Systems (Open Ended); Multichamber Cluster Tool; Multipass Systems; Vacuum Sealing; Mercury Seals; Glass-to-Metal Seals; Greases and Lubricants; Fluid Seals; Paints; Viscous and Hardening Seals; Rubber and Other Elastomer Seals; Metal-to-Metal Seals; Leak Detection and Residual Gas/Vapor Analysis; Vacuum Gauging; "Indicator" Gauges; Pressure Differential Gauges; Liquid Gauges; Deflection Gauges; Pirani and Thermocouple Gauge; Ionization Gauge; Viscosity Gauge; Calibration of Gauges Chamber Cleaning and "Conditioning"Glow Discharge Cleaning; Cleaning by Heating (Bakeout); UV/O3 Cleaning; Recontamination; Conductance-Gas Manifold and Pumping Distribution; Fixtures, Tooling, and Vaporization Sources; Gas Handling and Reactive Deposition Processes; Partial Pressure Control; References; Further Reading; Books -- Early Vacuum Technology and Related Topics (1888-1945); Books/Articles/Chapters -- History of Vacuum Technology; 3 Plasmas and Plasma Enhanced CVD; Introduction: Plasmas; Plasma Generation; Plasma Diagnostics; Plasma Confinement; Magnetrons Early Vacuum Deposition BooksBooks; Articles and Chapters; 2 Vacuum Technology; Introduction; Early History of Vacuum Technology; Vacuum Technology as an Enabling Technology for Vacuum Coating; Vacuum Pumps; Torricelli Single-Stroke Vacuum Pump; Mercurial Multistroke Piston-Type Vacuum (Air) Pumps; Mechanical Vacuum (Air) Pumps; Mechanical Piston Pumps; Rotary Pump; Dry Pumps; Vapor Jet ("Diffusion" or "Condensation") Vacuum Pumps; Turbomolecular (Turbo) Pumps (Molecular Drag Pump, Mechanical Momentum Transfer Pump); Adsorption (Sorption) Pumps and Cryopumps; Cold Surfaces; Very Cold Surfaces Front Cover; The Foundations of Vacuum Coating Technology; Copyright Page; Dedication; Contents; Biography; Foreword; Preface; Further Discussion; Acknowledgments; 1 About This Book; Introduction; Terminology; Vacuum Deposition-Vacuum Coating-Physical Vapor Deposition-Chemical Vapor Deposition; "Thin Film" Versus "Coating"; Units of Pressure; Text References; Books and Book Chapters; Periodic Journals and Transaction Articles; Proceedings, Conferences, and Meetings; Patents and Copyrights; Documents/Magazine Articles, etc.; Internet-YouTube, Blogs, etc.; References; Further Reading Some Applications of Plasmas in Vacuum DepositionSputtering and Sputter Deposition; Modification of Vacuum Deposited Material; Plasma Modification of Surfaces; In Situ Cleaning; Introduction: Chemical Vapor Deposition and Plasma Enhanced CVD (PECVD); Types of Conventional CVD; Atmospheric Pressure Chemical Vapor Deposition (AP-CVD); Low-Pressure CVD; Plasma Enhanced CVD (PECVD); PECVD With Ion Bombardment of Deposit; Hot Filament CVD; Atomic Layer Deposition; Plasma Polymerization (PP); Parylene Hot Zone Process; Some Applications of PECVD; Insulating Layers (Encapsulation) The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and low-pressure plasma-enhanced chemical vapor deposition. The melding of these technologies has resulted in new processes and products that have greatly expanded the application of vacuum coatings for use in our everyday lives. The book is unique in that it makes extensive reference to the patent literature (mostly US) and how it relates to the history of vacuum coating. The book includes a Historical Timeline of Vacuum Coating Technology and a Historical Timeline of Vacuum/Plasma Technology, as well as a Glossary of Terms used in the vacuum coating and surface engineering industries Vapor-plating TECHNOLOGY & ENGINEERING ; Metallurgy Vapor-plating Electronic books Electronic books 0128130849 Erscheint auch als Druck-Ausgabe 0128130849 9780128130841 https://www.sciencedirect.com/science/book/9780128130841 X:ELSEVIER Verlag lizenzpflichtig Volltext http://www.sciencedirect.com/science/book/9780128130841 Verlag Volltext (DE-627)1031901337 GBV-33-Freedom 2022 BSZ-33-EBS-HSAA GBV-33-EBS-MRI GBV-33-EBS-ZHB GBV-33-Freedom 2021 ZDB-33-EBS ZDB-33-EGE 2018 ZDB-33-ESD GBV-33-EBS-HST BSZ-33-EBS-C1UB GBV_ILN_105 ISIL_DE-841 SYSFLAG_1 GBV_KXP GBV_ILN_132 ISIL_DE-959 GBV_ILN_185 ISIL_DE-Sra5 GBV_ILN_370 ISIL_DE-1373 GBV_ILN_2020 ISIL_DE-Ch1 GBV_ILN_2111 ISIL_DE-944 BO 045F 669.0284 045F 669/.028/4 105 01 0841 4074466597 OLR-ELV-TEST Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Die Weitergabe an Dritte sowie systematisches Downloaden sind untersagt. Testzugang ZHB Lübeck z 26-02-22 132 01 0959 450000193X EBS Elsevier Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Keine Weitergabe an Dritte. Kein systematisches Downloaden durch Robots. Zeitlich begrenzte Lizenzierung k 13-03-24 185 01 3519 4514749044 OLR-EBS Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Die Weitergabe an Dritte sowie systematisches Downloaden sind untersagt. z 23-04-24 370 01 4370 4540279661 EBS Elsevier Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Keine Weitergabe an Dritte. Kein systematisches Downloaden durch Robots. i z 20-06-24 2020 01 DE-Ch1 4520354943 00 --%%-- --%%-- n n Campuslizenz l01 03-05-24 2111 02 DE-944 4046040467 00 --%%-- E-Book Elsevier --%%-- n Elektronischer Volltext - Campuslizenz l01 27-01-22 105 01 0841 http://www.sciencedirect.com/science/book/9780128130841 132 01 0959 Zugriff nur für Angehörige der Hochschule Osnabrück im Hochschulnetz https://www.sciencedirect.com/science/book/9780128130841 185 01 3519 http://www.sciencedirect.com/science/book/9780128130841 370 01 4370 E-Book: Zugriff im HCU-Netz. Zugriff von außerhalb nur für HCU-Angehörige möglich https://www.sciencedirect.com/science/book/9780128130841 2020 01 DE-Ch1 https://www.sciencedirect.com/science/book/9780128130841 2111 02 DE-944 https://www.sciencedirect.com/science/book/9780128130841 132 01 0959 00 EBooks Elsevier Engineering 105 01 0841 OLR-ELV-TEST 132 01 0959 EBS Elsevier 185 01 3519 OLR-EBS 370 01 4370 EBS Elsevier |
| spelling |
0128130857 electronic bk. 0-12-813085-7 (DE-627)1685486126 (DE-576)517999935 (DE-599)KEP027155072 (OCoLC)049974714 (EBP)027155072 (ELSEVIER)on1049974714 DE-627 eng DE-627 rda eng XA-GB TN686.5.V3 TEC023000 bisacsh TEC 023000 bisacsh TEC 023000 bisacsh Mattox, D. M. verfasserin aut The foundations of vacuum coating technology Donald M. Mattox Second edition Oxford William Andrew 2018 1 Online-Ressource (1 online resource) Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Online resource; title from PDF title page (EBSCO, viewed August 29, 2018 "Getter" PumpsVacuum Chambers; Single-Chamber "Batch" Systems; Multichamber Systems (Closed Ended); Multichamber Systems (Open Ended); Multichamber Cluster Tool; Multipass Systems; Vacuum Sealing; Mercury Seals; Glass-to-Metal Seals; Greases and Lubricants; Fluid Seals; Paints; Viscous and Hardening Seals; Rubber and Other Elastomer Seals; Metal-to-Metal Seals; Leak Detection and Residual Gas/Vapor Analysis; Vacuum Gauging; "Indicator" Gauges; Pressure Differential Gauges; Liquid Gauges; Deflection Gauges; Pirani and Thermocouple Gauge; Ionization Gauge; Viscosity Gauge; Calibration of Gauges Chamber Cleaning and "Conditioning"Glow Discharge Cleaning; Cleaning by Heating (Bakeout); UV/O3 Cleaning; Recontamination; Conductance-Gas Manifold and Pumping Distribution; Fixtures, Tooling, and Vaporization Sources; Gas Handling and Reactive Deposition Processes; Partial Pressure Control; References; Further Reading; Books -- Early Vacuum Technology and Related Topics (1888-1945); Books/Articles/Chapters -- History of Vacuum Technology; 3 Plasmas and Plasma Enhanced CVD; Introduction: Plasmas; Plasma Generation; Plasma Diagnostics; Plasma Confinement; Magnetrons Early Vacuum Deposition BooksBooks; Articles and Chapters; 2 Vacuum Technology; Introduction; Early History of Vacuum Technology; Vacuum Technology as an Enabling Technology for Vacuum Coating; Vacuum Pumps; Torricelli Single-Stroke Vacuum Pump; Mercurial Multistroke Piston-Type Vacuum (Air) Pumps; Mechanical Vacuum (Air) Pumps; Mechanical Piston Pumps; Rotary Pump; Dry Pumps; Vapor Jet ("Diffusion" or "Condensation") Vacuum Pumps; Turbomolecular (Turbo) Pumps (Molecular Drag Pump, Mechanical Momentum Transfer Pump); Adsorption (Sorption) Pumps and Cryopumps; Cold Surfaces; Very Cold Surfaces Front Cover; The Foundations of Vacuum Coating Technology; Copyright Page; Dedication; Contents; Biography; Foreword; Preface; Further Discussion; Acknowledgments; 1 About This Book; Introduction; Terminology; Vacuum Deposition-Vacuum Coating-Physical Vapor Deposition-Chemical Vapor Deposition; "Thin Film" Versus "Coating"; Units of Pressure; Text References; Books and Book Chapters; Periodic Journals and Transaction Articles; Proceedings, Conferences, and Meetings; Patents and Copyrights; Documents/Magazine Articles, etc.; Internet-YouTube, Blogs, etc.; References; Further Reading Some Applications of Plasmas in Vacuum DepositionSputtering and Sputter Deposition; Modification of Vacuum Deposited Material; Plasma Modification of Surfaces; In Situ Cleaning; Introduction: Chemical Vapor Deposition and Plasma Enhanced CVD (PECVD); Types of Conventional CVD; Atmospheric Pressure Chemical Vapor Deposition (AP-CVD); Low-Pressure CVD; Plasma Enhanced CVD (PECVD); PECVD With Ion Bombardment of Deposit; Hot Filament CVD; Atomic Layer Deposition; Plasma Polymerization (PP); Parylene Hot Zone Process; Some Applications of PECVD; Insulating Layers (Encapsulation) The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and low-pressure plasma-enhanced chemical vapor deposition. The melding of these technologies has resulted in new processes and products that have greatly expanded the application of vacuum coatings for use in our everyday lives. The book is unique in that it makes extensive reference to the patent literature (mostly US) and how it relates to the history of vacuum coating. The book includes a Historical Timeline of Vacuum Coating Technology and a Historical Timeline of Vacuum/Plasma Technology, as well as a Glossary of Terms used in the vacuum coating and surface engineering industries Vapor-plating TECHNOLOGY & ENGINEERING ; Metallurgy Vapor-plating Electronic books Electronic books 0128130849 Erscheint auch als Druck-Ausgabe 0128130849 9780128130841 https://www.sciencedirect.com/science/book/9780128130841 X:ELSEVIER Verlag lizenzpflichtig Volltext http://www.sciencedirect.com/science/book/9780128130841 Verlag Volltext (DE-627)1031901337 GBV-33-Freedom 2022 BSZ-33-EBS-HSAA GBV-33-EBS-MRI GBV-33-EBS-ZHB GBV-33-Freedom 2021 ZDB-33-EBS ZDB-33-EGE 2018 ZDB-33-ESD GBV-33-EBS-HST BSZ-33-EBS-C1UB GBV_ILN_105 ISIL_DE-841 SYSFLAG_1 GBV_KXP GBV_ILN_132 ISIL_DE-959 GBV_ILN_185 ISIL_DE-Sra5 GBV_ILN_370 ISIL_DE-1373 GBV_ILN_2020 ISIL_DE-Ch1 GBV_ILN_2111 ISIL_DE-944 BO 045F 669.0284 045F 669/.028/4 105 01 0841 4074466597 OLR-ELV-TEST Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Die Weitergabe an Dritte sowie systematisches Downloaden sind untersagt. Testzugang ZHB Lübeck z 26-02-22 132 01 0959 450000193X EBS Elsevier Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Keine Weitergabe an Dritte. Kein systematisches Downloaden durch Robots. Zeitlich begrenzte Lizenzierung k 13-03-24 185 01 3519 4514749044 OLR-EBS Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Die Weitergabe an Dritte sowie systematisches Downloaden sind untersagt. z 23-04-24 370 01 4370 4540279661 EBS Elsevier Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Keine Weitergabe an Dritte. Kein systematisches Downloaden durch Robots. i z 20-06-24 2020 01 DE-Ch1 4520354943 00 --%%-- --%%-- n n Campuslizenz l01 03-05-24 2111 02 DE-944 4046040467 00 --%%-- E-Book Elsevier --%%-- n Elektronischer Volltext - Campuslizenz l01 27-01-22 105 01 0841 http://www.sciencedirect.com/science/book/9780128130841 132 01 0959 Zugriff nur für Angehörige der Hochschule Osnabrück im Hochschulnetz https://www.sciencedirect.com/science/book/9780128130841 185 01 3519 http://www.sciencedirect.com/science/book/9780128130841 370 01 4370 E-Book: Zugriff im HCU-Netz. Zugriff von außerhalb nur für HCU-Angehörige möglich https://www.sciencedirect.com/science/book/9780128130841 2020 01 DE-Ch1 https://www.sciencedirect.com/science/book/9780128130841 2111 02 DE-944 https://www.sciencedirect.com/science/book/9780128130841 132 01 0959 00 EBooks Elsevier Engineering 105 01 0841 OLR-ELV-TEST 132 01 0959 EBS Elsevier 185 01 3519 OLR-EBS 370 01 4370 EBS Elsevier |
| allfields_unstemmed |
0128130857 electronic bk. 0-12-813085-7 (DE-627)1685486126 (DE-576)517999935 (DE-599)KEP027155072 (OCoLC)049974714 (EBP)027155072 (ELSEVIER)on1049974714 DE-627 eng DE-627 rda eng XA-GB TN686.5.V3 TEC023000 bisacsh TEC 023000 bisacsh TEC 023000 bisacsh Mattox, D. M. verfasserin aut The foundations of vacuum coating technology Donald M. Mattox Second edition Oxford William Andrew 2018 1 Online-Ressource (1 online resource) Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Online resource; title from PDF title page (EBSCO, viewed August 29, 2018 "Getter" PumpsVacuum Chambers; Single-Chamber "Batch" Systems; Multichamber Systems (Closed Ended); Multichamber Systems (Open Ended); Multichamber Cluster Tool; Multipass Systems; Vacuum Sealing; Mercury Seals; Glass-to-Metal Seals; Greases and Lubricants; Fluid Seals; Paints; Viscous and Hardening Seals; Rubber and Other Elastomer Seals; Metal-to-Metal Seals; Leak Detection and Residual Gas/Vapor Analysis; Vacuum Gauging; "Indicator" Gauges; Pressure Differential Gauges; Liquid Gauges; Deflection Gauges; Pirani and Thermocouple Gauge; Ionization Gauge; Viscosity Gauge; Calibration of Gauges Chamber Cleaning and "Conditioning"Glow Discharge Cleaning; Cleaning by Heating (Bakeout); UV/O3 Cleaning; Recontamination; Conductance-Gas Manifold and Pumping Distribution; Fixtures, Tooling, and Vaporization Sources; Gas Handling and Reactive Deposition Processes; Partial Pressure Control; References; Further Reading; Books -- Early Vacuum Technology and Related Topics (1888-1945); Books/Articles/Chapters -- History of Vacuum Technology; 3 Plasmas and Plasma Enhanced CVD; Introduction: Plasmas; Plasma Generation; Plasma Diagnostics; Plasma Confinement; Magnetrons Early Vacuum Deposition BooksBooks; Articles and Chapters; 2 Vacuum Technology; Introduction; Early History of Vacuum Technology; Vacuum Technology as an Enabling Technology for Vacuum Coating; Vacuum Pumps; Torricelli Single-Stroke Vacuum Pump; Mercurial Multistroke Piston-Type Vacuum (Air) Pumps; Mechanical Vacuum (Air) Pumps; Mechanical Piston Pumps; Rotary Pump; Dry Pumps; Vapor Jet ("Diffusion" or "Condensation") Vacuum Pumps; Turbomolecular (Turbo) Pumps (Molecular Drag Pump, Mechanical Momentum Transfer Pump); Adsorption (Sorption) Pumps and Cryopumps; Cold Surfaces; Very Cold Surfaces Front Cover; The Foundations of Vacuum Coating Technology; Copyright Page; Dedication; Contents; Biography; Foreword; Preface; Further Discussion; Acknowledgments; 1 About This Book; Introduction; Terminology; Vacuum Deposition-Vacuum Coating-Physical Vapor Deposition-Chemical Vapor Deposition; "Thin Film" Versus "Coating"; Units of Pressure; Text References; Books and Book Chapters; Periodic Journals and Transaction Articles; Proceedings, Conferences, and Meetings; Patents and Copyrights; Documents/Magazine Articles, etc.; Internet-YouTube, Blogs, etc.; References; Further Reading Some Applications of Plasmas in Vacuum DepositionSputtering and Sputter Deposition; Modification of Vacuum Deposited Material; Plasma Modification of Surfaces; In Situ Cleaning; Introduction: Chemical Vapor Deposition and Plasma Enhanced CVD (PECVD); Types of Conventional CVD; Atmospheric Pressure Chemical Vapor Deposition (AP-CVD); Low-Pressure CVD; Plasma Enhanced CVD (PECVD); PECVD With Ion Bombardment of Deposit; Hot Filament CVD; Atomic Layer Deposition; Plasma Polymerization (PP); Parylene Hot Zone Process; Some Applications of PECVD; Insulating Layers (Encapsulation) The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and low-pressure plasma-enhanced chemical vapor deposition. The melding of these technologies has resulted in new processes and products that have greatly expanded the application of vacuum coatings for use in our everyday lives. The book is unique in that it makes extensive reference to the patent literature (mostly US) and how it relates to the history of vacuum coating. The book includes a Historical Timeline of Vacuum Coating Technology and a Historical Timeline of Vacuum/Plasma Technology, as well as a Glossary of Terms used in the vacuum coating and surface engineering industries Vapor-plating TECHNOLOGY & ENGINEERING ; Metallurgy Vapor-plating Electronic books Electronic books 0128130849 Erscheint auch als Druck-Ausgabe 0128130849 9780128130841 https://www.sciencedirect.com/science/book/9780128130841 X:ELSEVIER Verlag lizenzpflichtig Volltext http://www.sciencedirect.com/science/book/9780128130841 Verlag Volltext (DE-627)1031901337 GBV-33-Freedom 2022 BSZ-33-EBS-HSAA GBV-33-EBS-MRI GBV-33-EBS-ZHB GBV-33-Freedom 2021 ZDB-33-EBS ZDB-33-EGE 2018 ZDB-33-ESD GBV-33-EBS-HST BSZ-33-EBS-C1UB GBV_ILN_105 ISIL_DE-841 SYSFLAG_1 GBV_KXP GBV_ILN_132 ISIL_DE-959 GBV_ILN_185 ISIL_DE-Sra5 GBV_ILN_370 ISIL_DE-1373 GBV_ILN_2020 ISIL_DE-Ch1 GBV_ILN_2111 ISIL_DE-944 BO 045F 669.0284 045F 669/.028/4 105 01 0841 4074466597 OLR-ELV-TEST Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Die Weitergabe an Dritte sowie systematisches Downloaden sind untersagt. Testzugang ZHB Lübeck z 26-02-22 132 01 0959 450000193X EBS Elsevier Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Keine Weitergabe an Dritte. Kein systematisches Downloaden durch Robots. Zeitlich begrenzte Lizenzierung k 13-03-24 185 01 3519 4514749044 OLR-EBS Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Die Weitergabe an Dritte sowie systematisches Downloaden sind untersagt. z 23-04-24 370 01 4370 4540279661 EBS Elsevier Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Keine Weitergabe an Dritte. Kein systematisches Downloaden durch Robots. i z 20-06-24 2020 01 DE-Ch1 4520354943 00 --%%-- --%%-- n n Campuslizenz l01 03-05-24 2111 02 DE-944 4046040467 00 --%%-- E-Book Elsevier --%%-- n Elektronischer Volltext - Campuslizenz l01 27-01-22 105 01 0841 http://www.sciencedirect.com/science/book/9780128130841 132 01 0959 Zugriff nur für Angehörige der Hochschule Osnabrück im Hochschulnetz https://www.sciencedirect.com/science/book/9780128130841 185 01 3519 http://www.sciencedirect.com/science/book/9780128130841 370 01 4370 E-Book: Zugriff im HCU-Netz. Zugriff von außerhalb nur für HCU-Angehörige möglich https://www.sciencedirect.com/science/book/9780128130841 2020 01 DE-Ch1 https://www.sciencedirect.com/science/book/9780128130841 2111 02 DE-944 https://www.sciencedirect.com/science/book/9780128130841 132 01 0959 00 EBooks Elsevier Engineering 105 01 0841 OLR-ELV-TEST 132 01 0959 EBS Elsevier 185 01 3519 OLR-EBS 370 01 4370 EBS Elsevier |
| allfieldsGer |
0128130857 electronic bk. 0-12-813085-7 (DE-627)1685486126 (DE-576)517999935 (DE-599)KEP027155072 (OCoLC)049974714 (EBP)027155072 (ELSEVIER)on1049974714 DE-627 eng DE-627 rda eng XA-GB TN686.5.V3 TEC023000 bisacsh TEC 023000 bisacsh TEC 023000 bisacsh Mattox, D. M. verfasserin aut The foundations of vacuum coating technology Donald M. Mattox Second edition Oxford William Andrew 2018 1 Online-Ressource (1 online resource) Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Online resource; title from PDF title page (EBSCO, viewed August 29, 2018 "Getter" PumpsVacuum Chambers; Single-Chamber "Batch" Systems; Multichamber Systems (Closed Ended); Multichamber Systems (Open Ended); Multichamber Cluster Tool; Multipass Systems; Vacuum Sealing; Mercury Seals; Glass-to-Metal Seals; Greases and Lubricants; Fluid Seals; Paints; Viscous and Hardening Seals; Rubber and Other Elastomer Seals; Metal-to-Metal Seals; Leak Detection and Residual Gas/Vapor Analysis; Vacuum Gauging; "Indicator" Gauges; Pressure Differential Gauges; Liquid Gauges; Deflection Gauges; Pirani and Thermocouple Gauge; Ionization Gauge; Viscosity Gauge; Calibration of Gauges Chamber Cleaning and "Conditioning"Glow Discharge Cleaning; Cleaning by Heating (Bakeout); UV/O3 Cleaning; Recontamination; Conductance-Gas Manifold and Pumping Distribution; Fixtures, Tooling, and Vaporization Sources; Gas Handling and Reactive Deposition Processes; Partial Pressure Control; References; Further Reading; Books -- Early Vacuum Technology and Related Topics (1888-1945); Books/Articles/Chapters -- History of Vacuum Technology; 3 Plasmas and Plasma Enhanced CVD; Introduction: Plasmas; Plasma Generation; Plasma Diagnostics; Plasma Confinement; Magnetrons Early Vacuum Deposition BooksBooks; Articles and Chapters; 2 Vacuum Technology; Introduction; Early History of Vacuum Technology; Vacuum Technology as an Enabling Technology for Vacuum Coating; Vacuum Pumps; Torricelli Single-Stroke Vacuum Pump; Mercurial Multistroke Piston-Type Vacuum (Air) Pumps; Mechanical Vacuum (Air) Pumps; Mechanical Piston Pumps; Rotary Pump; Dry Pumps; Vapor Jet ("Diffusion" or "Condensation") Vacuum Pumps; Turbomolecular (Turbo) Pumps (Molecular Drag Pump, Mechanical Momentum Transfer Pump); Adsorption (Sorption) Pumps and Cryopumps; Cold Surfaces; Very Cold Surfaces Front Cover; The Foundations of Vacuum Coating Technology; Copyright Page; Dedication; Contents; Biography; Foreword; Preface; Further Discussion; Acknowledgments; 1 About This Book; Introduction; Terminology; Vacuum Deposition-Vacuum Coating-Physical Vapor Deposition-Chemical Vapor Deposition; "Thin Film" Versus "Coating"; Units of Pressure; Text References; Books and Book Chapters; Periodic Journals and Transaction Articles; Proceedings, Conferences, and Meetings; Patents and Copyrights; Documents/Magazine Articles, etc.; Internet-YouTube, Blogs, etc.; References; Further Reading Some Applications of Plasmas in Vacuum DepositionSputtering and Sputter Deposition; Modification of Vacuum Deposited Material; Plasma Modification of Surfaces; In Situ Cleaning; Introduction: Chemical Vapor Deposition and Plasma Enhanced CVD (PECVD); Types of Conventional CVD; Atmospheric Pressure Chemical Vapor Deposition (AP-CVD); Low-Pressure CVD; Plasma Enhanced CVD (PECVD); PECVD With Ion Bombardment of Deposit; Hot Filament CVD; Atomic Layer Deposition; Plasma Polymerization (PP); Parylene Hot Zone Process; Some Applications of PECVD; Insulating Layers (Encapsulation) The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and low-pressure plasma-enhanced chemical vapor deposition. The melding of these technologies has resulted in new processes and products that have greatly expanded the application of vacuum coatings for use in our everyday lives. The book is unique in that it makes extensive reference to the patent literature (mostly US) and how it relates to the history of vacuum coating. The book includes a Historical Timeline of Vacuum Coating Technology and a Historical Timeline of Vacuum/Plasma Technology, as well as a Glossary of Terms used in the vacuum coating and surface engineering industries Vapor-plating TECHNOLOGY & ENGINEERING ; Metallurgy Vapor-plating Electronic books Electronic books 0128130849 Erscheint auch als Druck-Ausgabe 0128130849 9780128130841 https://www.sciencedirect.com/science/book/9780128130841 X:ELSEVIER Verlag lizenzpflichtig Volltext http://www.sciencedirect.com/science/book/9780128130841 Verlag Volltext (DE-627)1031901337 GBV-33-Freedom 2022 BSZ-33-EBS-HSAA GBV-33-EBS-MRI GBV-33-EBS-ZHB GBV-33-Freedom 2021 ZDB-33-EBS ZDB-33-EGE 2018 ZDB-33-ESD GBV-33-EBS-HST BSZ-33-EBS-C1UB GBV_ILN_105 ISIL_DE-841 SYSFLAG_1 GBV_KXP GBV_ILN_132 ISIL_DE-959 GBV_ILN_185 ISIL_DE-Sra5 GBV_ILN_370 ISIL_DE-1373 GBV_ILN_2020 ISIL_DE-Ch1 GBV_ILN_2111 ISIL_DE-944 BO 045F 669.0284 045F 669/.028/4 105 01 0841 4074466597 OLR-ELV-TEST Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Die Weitergabe an Dritte sowie systematisches Downloaden sind untersagt. Testzugang ZHB Lübeck z 26-02-22 132 01 0959 450000193X EBS Elsevier Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Keine Weitergabe an Dritte. Kein systematisches Downloaden durch Robots. Zeitlich begrenzte Lizenzierung k 13-03-24 185 01 3519 4514749044 OLR-EBS Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Die Weitergabe an Dritte sowie systematisches Downloaden sind untersagt. z 23-04-24 370 01 4370 4540279661 EBS Elsevier Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Keine Weitergabe an Dritte. Kein systematisches Downloaden durch Robots. i z 20-06-24 2020 01 DE-Ch1 4520354943 00 --%%-- --%%-- n n Campuslizenz l01 03-05-24 2111 02 DE-944 4046040467 00 --%%-- E-Book Elsevier --%%-- n Elektronischer Volltext - Campuslizenz l01 27-01-22 105 01 0841 http://www.sciencedirect.com/science/book/9780128130841 132 01 0959 Zugriff nur für Angehörige der Hochschule Osnabrück im Hochschulnetz https://www.sciencedirect.com/science/book/9780128130841 185 01 3519 http://www.sciencedirect.com/science/book/9780128130841 370 01 4370 E-Book: Zugriff im HCU-Netz. Zugriff von außerhalb nur für HCU-Angehörige möglich https://www.sciencedirect.com/science/book/9780128130841 2020 01 DE-Ch1 https://www.sciencedirect.com/science/book/9780128130841 2111 02 DE-944 https://www.sciencedirect.com/science/book/9780128130841 132 01 0959 00 EBooks Elsevier Engineering 105 01 0841 OLR-ELV-TEST 132 01 0959 EBS Elsevier 185 01 3519 OLR-EBS 370 01 4370 EBS Elsevier |
| allfieldsSound |
0128130857 electronic bk. 0-12-813085-7 (DE-627)1685486126 (DE-576)517999935 (DE-599)KEP027155072 (OCoLC)049974714 (EBP)027155072 (ELSEVIER)on1049974714 DE-627 eng DE-627 rda eng XA-GB TN686.5.V3 TEC023000 bisacsh TEC 023000 bisacsh TEC 023000 bisacsh Mattox, D. M. verfasserin aut The foundations of vacuum coating technology Donald M. Mattox Second edition Oxford William Andrew 2018 1 Online-Ressource (1 online resource) Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier Online resource; title from PDF title page (EBSCO, viewed August 29, 2018 "Getter" PumpsVacuum Chambers; Single-Chamber "Batch" Systems; Multichamber Systems (Closed Ended); Multichamber Systems (Open Ended); Multichamber Cluster Tool; Multipass Systems; Vacuum Sealing; Mercury Seals; Glass-to-Metal Seals; Greases and Lubricants; Fluid Seals; Paints; Viscous and Hardening Seals; Rubber and Other Elastomer Seals; Metal-to-Metal Seals; Leak Detection and Residual Gas/Vapor Analysis; Vacuum Gauging; "Indicator" Gauges; Pressure Differential Gauges; Liquid Gauges; Deflection Gauges; Pirani and Thermocouple Gauge; Ionization Gauge; Viscosity Gauge; Calibration of Gauges Chamber Cleaning and "Conditioning"Glow Discharge Cleaning; Cleaning by Heating (Bakeout); UV/O3 Cleaning; Recontamination; Conductance-Gas Manifold and Pumping Distribution; Fixtures, Tooling, and Vaporization Sources; Gas Handling and Reactive Deposition Processes; Partial Pressure Control; References; Further Reading; Books -- Early Vacuum Technology and Related Topics (1888-1945); Books/Articles/Chapters -- History of Vacuum Technology; 3 Plasmas and Plasma Enhanced CVD; Introduction: Plasmas; Plasma Generation; Plasma Diagnostics; Plasma Confinement; Magnetrons Early Vacuum Deposition BooksBooks; Articles and Chapters; 2 Vacuum Technology; Introduction; Early History of Vacuum Technology; Vacuum Technology as an Enabling Technology for Vacuum Coating; Vacuum Pumps; Torricelli Single-Stroke Vacuum Pump; Mercurial Multistroke Piston-Type Vacuum (Air) Pumps; Mechanical Vacuum (Air) Pumps; Mechanical Piston Pumps; Rotary Pump; Dry Pumps; Vapor Jet ("Diffusion" or "Condensation") Vacuum Pumps; Turbomolecular (Turbo) Pumps (Molecular Drag Pump, Mechanical Momentum Transfer Pump); Adsorption (Sorption) Pumps and Cryopumps; Cold Surfaces; Very Cold Surfaces Front Cover; The Foundations of Vacuum Coating Technology; Copyright Page; Dedication; Contents; Biography; Foreword; Preface; Further Discussion; Acknowledgments; 1 About This Book; Introduction; Terminology; Vacuum Deposition-Vacuum Coating-Physical Vapor Deposition-Chemical Vapor Deposition; "Thin Film" Versus "Coating"; Units of Pressure; Text References; Books and Book Chapters; Periodic Journals and Transaction Articles; Proceedings, Conferences, and Meetings; Patents and Copyrights; Documents/Magazine Articles, etc.; Internet-YouTube, Blogs, etc.; References; Further Reading Some Applications of Plasmas in Vacuum DepositionSputtering and Sputter Deposition; Modification of Vacuum Deposited Material; Plasma Modification of Surfaces; In Situ Cleaning; Introduction: Chemical Vapor Deposition and Plasma Enhanced CVD (PECVD); Types of Conventional CVD; Atmospheric Pressure Chemical Vapor Deposition (AP-CVD); Low-Pressure CVD; Plasma Enhanced CVD (PECVD); PECVD With Ion Bombardment of Deposit; Hot Filament CVD; Atomic Layer Deposition; Plasma Polymerization (PP); Parylene Hot Zone Process; Some Applications of PECVD; Insulating Layers (Encapsulation) The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and low-pressure plasma-enhanced chemical vapor deposition. The melding of these technologies has resulted in new processes and products that have greatly expanded the application of vacuum coatings for use in our everyday lives. The book is unique in that it makes extensive reference to the patent literature (mostly US) and how it relates to the history of vacuum coating. The book includes a Historical Timeline of Vacuum Coating Technology and a Historical Timeline of Vacuum/Plasma Technology, as well as a Glossary of Terms used in the vacuum coating and surface engineering industries Vapor-plating TECHNOLOGY & ENGINEERING ; Metallurgy Vapor-plating Electronic books Electronic books 0128130849 Erscheint auch als Druck-Ausgabe 0128130849 9780128130841 https://www.sciencedirect.com/science/book/9780128130841 X:ELSEVIER Verlag lizenzpflichtig Volltext http://www.sciencedirect.com/science/book/9780128130841 Verlag Volltext (DE-627)1031901337 GBV-33-Freedom 2022 BSZ-33-EBS-HSAA GBV-33-EBS-MRI GBV-33-EBS-ZHB GBV-33-Freedom 2021 ZDB-33-EBS ZDB-33-EGE 2018 ZDB-33-ESD GBV-33-EBS-HST BSZ-33-EBS-C1UB GBV_ILN_105 ISIL_DE-841 SYSFLAG_1 GBV_KXP GBV_ILN_132 ISIL_DE-959 GBV_ILN_185 ISIL_DE-Sra5 GBV_ILN_370 ISIL_DE-1373 GBV_ILN_2020 ISIL_DE-Ch1 GBV_ILN_2111 ISIL_DE-944 BO 045F 669.0284 045F 669/.028/4 105 01 0841 4074466597 OLR-ELV-TEST Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Die Weitergabe an Dritte sowie systematisches Downloaden sind untersagt. Testzugang ZHB Lübeck z 26-02-22 132 01 0959 450000193X EBS Elsevier Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Keine Weitergabe an Dritte. Kein systematisches Downloaden durch Robots. Zeitlich begrenzte Lizenzierung k 13-03-24 185 01 3519 4514749044 OLR-EBS Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Die Weitergabe an Dritte sowie systematisches Downloaden sind untersagt. z 23-04-24 370 01 4370 4540279661 EBS Elsevier Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Keine Weitergabe an Dritte. Kein systematisches Downloaden durch Robots. i z 20-06-24 2020 01 DE-Ch1 4520354943 00 --%%-- --%%-- n n Campuslizenz l01 03-05-24 2111 02 DE-944 4046040467 00 --%%-- E-Book Elsevier --%%-- n Elektronischer Volltext - Campuslizenz l01 27-01-22 105 01 0841 http://www.sciencedirect.com/science/book/9780128130841 132 01 0959 Zugriff nur für Angehörige der Hochschule Osnabrück im Hochschulnetz https://www.sciencedirect.com/science/book/9780128130841 185 01 3519 http://www.sciencedirect.com/science/book/9780128130841 370 01 4370 E-Book: Zugriff im HCU-Netz. Zugriff von außerhalb nur für HCU-Angehörige möglich https://www.sciencedirect.com/science/book/9780128130841 2020 01 DE-Ch1 https://www.sciencedirect.com/science/book/9780128130841 2111 02 DE-944 https://www.sciencedirect.com/science/book/9780128130841 132 01 0959 00 EBooks Elsevier Engineering 105 01 0841 OLR-ELV-TEST 132 01 0959 EBS Elsevier 185 01 3519 OLR-EBS 370 01 4370 EBS Elsevier |
| language |
English |
| format_phy_str_mv |
Book |
| building |
105 132 185 370 2020:0 2111:0 |
| institution |
findex.gbv.de |
| selectbib_iln_str_mv |
105@ 132@ 185@ 370@ 2020@01 2111@01 |
| topic_facet |
Vapor-plating TECHNOLOGY & ENGINEERING ; Metallurgy |
| sw_local_iln_str_mv |
132:EBooks Elsevier Engineering 0959:EBooks Elsevier Engineering |
| isfreeaccess_bool |
false |
| authorswithroles_txt_mv |
Mattox, D. M. @@aut@@ |
| publishDateDaySort_date |
2018-01-01T00:00:00Z |
| id |
1685486126 |
| signature_iln |
2111:E-Book Elsevier DE-944:E-Book Elsevier |
| signature_iln_str_mv |
2111:E-Book Elsevier DE-944:E-Book Elsevier |
| signature_iln_scis_mv |
2111:E-Book Elsevier DE-944:E-Book Elsevier |
| genre_facet |
Electronic books |
| language_de |
englisch |
| fullrecord |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000cam a22002652 4500</leader><controlfield tag="001">1685486126</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20240503140321.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">191213s2018 xxk|||||o 00| ||eng c</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0128130857</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">0-12-813085-7</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)1685486126</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-576)517999935</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)KEP027155072</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)049974714</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(EBP)027155072</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ELSEVIER)on1049974714</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">eng</subfield><subfield code="c">DE-627</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="c">XA-GB</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TN686.5.V3</subfield></datafield><datafield tag="072" ind1=" " ind2="7"><subfield code="a">TEC023000</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="072" ind1=" " ind2="7"><subfield code="a">TEC 023000</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="072" ind1=" " ind2="7"><subfield code="a">TEC 023000</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Mattox, D. M.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="4"><subfield code="a">The foundations of vacuum coating technology</subfield><subfield code="c">Donald M. Mattox</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">Second edition</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Oxford</subfield><subfield code="b">William Andrew</subfield><subfield code="c">2018</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (1 online resource)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">Computermedien</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Online-Ressource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Online resource; title from PDF title page (EBSCO, viewed August 29, 2018</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">"Getter" PumpsVacuum Chambers; Single-Chamber "Batch" Systems; Multichamber Systems (Closed Ended); Multichamber Systems (Open Ended); Multichamber Cluster Tool; Multipass Systems; Vacuum Sealing; Mercury Seals; Glass-to-Metal Seals; Greases and Lubricants; Fluid Seals; Paints; Viscous and Hardening Seals; Rubber and Other Elastomer Seals; Metal-to-Metal Seals; Leak Detection and Residual Gas/Vapor Analysis; Vacuum Gauging; "Indicator" Gauges; Pressure Differential Gauges; Liquid Gauges; Deflection Gauges; Pirani and Thermocouple Gauge; Ionization Gauge; Viscosity Gauge; Calibration of Gauges</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Chamber Cleaning and "Conditioning"Glow Discharge Cleaning; Cleaning by Heating (Bakeout); UV/O3 Cleaning; Recontamination; Conductance-Gas Manifold and Pumping Distribution; Fixtures, Tooling, and Vaporization Sources; Gas Handling and Reactive Deposition Processes; Partial Pressure Control; References; Further Reading; Books -- Early Vacuum Technology and Related Topics (1888-1945); Books/Articles/Chapters -- History of Vacuum Technology; 3 Plasmas and Plasma Enhanced CVD; Introduction: Plasmas; Plasma Generation; Plasma Diagnostics; Plasma Confinement; Magnetrons</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Early Vacuum Deposition BooksBooks; Articles and Chapters; 2 Vacuum Technology; Introduction; Early History of Vacuum Technology; Vacuum Technology as an Enabling Technology for Vacuum Coating; Vacuum Pumps; Torricelli Single-Stroke Vacuum Pump; Mercurial Multistroke Piston-Type Vacuum (Air) Pumps; Mechanical Vacuum (Air) Pumps; Mechanical Piston Pumps; Rotary Pump; Dry Pumps; Vapor Jet ("Diffusion" or "Condensation") Vacuum Pumps; Turbomolecular (Turbo) Pumps (Molecular Drag Pump, Mechanical Momentum Transfer Pump); Adsorption (Sorption) Pumps and Cryopumps; Cold Surfaces; Very Cold Surfaces</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Front Cover; The Foundations of Vacuum Coating Technology; Copyright Page; Dedication; Contents; Biography; Foreword; Preface; Further Discussion; Acknowledgments; 1 About This Book; Introduction; Terminology; Vacuum Deposition-Vacuum Coating-Physical Vapor Deposition-Chemical Vapor Deposition; "Thin Film" Versus "Coating"; Units of Pressure; Text References; Books and Book Chapters; Periodic Journals and Transaction Articles; Proceedings, Conferences, and Meetings; Patents and Copyrights; Documents/Magazine Articles, etc.; Internet-YouTube, Blogs, etc.; References; Further Reading</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Some Applications of Plasmas in Vacuum DepositionSputtering and Sputter Deposition; Modification of Vacuum Deposited Material; Plasma Modification of Surfaces; In Situ Cleaning; Introduction: Chemical Vapor Deposition and Plasma Enhanced CVD (PECVD); Types of Conventional CVD; Atmospheric Pressure Chemical Vapor Deposition (AP-CVD); Low-Pressure CVD; Plasma Enhanced CVD (PECVD); PECVD With Ion Bombardment of Deposit; Hot Filament CVD; Atomic Layer Deposition; Plasma Polymerization (PP); Parylene Hot Zone Process; Some Applications of PECVD; Insulating Layers (Encapsulation)</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and low-pressure plasma-enhanced chemical vapor deposition. The melding of these technologies has resulted in new processes and products that have greatly expanded the application of vacuum coatings for use in our everyday lives. The book is unique in that it makes extensive reference to the patent literature (mostly US) and how it relates to the history of vacuum coating. The book includes a Historical Timeline of Vacuum Coating Technology and a Historical Timeline of Vacuum/Plasma Technology, as well as a Glossary of Terms used in the vacuum coating and surface engineering industries</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Vapor-plating</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">TECHNOLOGY & ENGINEERING ; Metallurgy</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Vapor-plating</subfield></datafield><datafield tag="655" ind1=" " ind2="0"><subfield code="a">Electronic books</subfield></datafield><datafield tag="655" ind1=" " ind2="4"><subfield code="a">Electronic books</subfield></datafield><datafield tag="776" ind1="1" ind2=" "><subfield code="z">0128130849</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe</subfield><subfield code="z">0128130849</subfield><subfield code="z">9780128130841</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://www.sciencedirect.com/science/book/9780128130841</subfield><subfield code="m">X:ELSEVIER</subfield><subfield code="x">Verlag</subfield><subfield code="z">lizenzpflichtig</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://www.sciencedirect.com/science/book/9780128130841</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="889" ind1=" " ind2=" "><subfield code="w">(DE-627)1031901337</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV-33-Freedom</subfield><subfield code="b">2022</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">BSZ-33-EBS-HSAA</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV-33-EBS-MRI</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV-33-EBS-ZHB</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV-33-Freedom</subfield><subfield code="b">2021</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-EBS</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-EGE</subfield><subfield code="b">2018</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-ESD</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV-33-EBS-HST</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">BSZ-33-EBS-C1UB</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_105</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ISIL_DE-841</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_1</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_KXP</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_132</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ISIL_DE-959</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_185</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ISIL_DE-Sra5</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_370</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ISIL_DE-1373</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ISIL_DE-Ch1</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2111</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ISIL_DE-944</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">BO</subfield></datafield><datafield tag="953" ind1=" " ind2=" "><subfield code="2">045F</subfield><subfield code="a">669.0284</subfield></datafield><datafield tag="953" ind1=" " ind2=" "><subfield code="2">045F</subfield><subfield code="a">669/.028/4</subfield></datafield><datafield tag="980" ind1=" " ind2=" "><subfield code="2">105</subfield><subfield code="1">01</subfield><subfield code="x">0841</subfield><subfield code="b">4074466597</subfield><subfield code="h">OLR-ELV-TEST</subfield><subfield code="k">Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Die Weitergabe an Dritte sowie systematisches Downloaden sind untersagt.</subfield><subfield code="k">Testzugang ZHB Lübeck</subfield><subfield code="y">z</subfield><subfield code="z">26-02-22</subfield></datafield><datafield tag="980" ind1=" " ind2=" "><subfield code="2">132</subfield><subfield code="1">01</subfield><subfield code="x">0959</subfield><subfield code="b">450000193X</subfield><subfield code="h">EBS Elsevier</subfield><subfield code="k">Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Keine Weitergabe an Dritte. Kein systematisches Downloaden durch Robots.</subfield><subfield code="k">Zeitlich begrenzte Lizenzierung</subfield><subfield code="y">k</subfield><subfield code="z">13-03-24</subfield></datafield><datafield tag="980" ind1=" " ind2=" "><subfield code="2">185</subfield><subfield code="1">01</subfield><subfield code="x">3519</subfield><subfield code="b">4514749044</subfield><subfield code="h">OLR-EBS</subfield><subfield code="k">Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Die Weitergabe an Dritte sowie systematisches Downloaden sind untersagt.</subfield><subfield code="y">z</subfield><subfield code="z">23-04-24</subfield></datafield><datafield tag="980" ind1=" " ind2=" "><subfield code="2">370</subfield><subfield code="1">01</subfield><subfield code="x">4370</subfield><subfield code="b">4540279661</subfield><subfield code="h">EBS Elsevier</subfield><subfield code="k">Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Keine Weitergabe an Dritte. Kein systematisches Downloaden durch Robots.</subfield><subfield code="u">i</subfield><subfield code="y">z</subfield><subfield code="z">20-06-24</subfield></datafield><datafield tag="980" ind1=" " ind2=" "><subfield code="2">2020</subfield><subfield code="1">01</subfield><subfield code="x">DE-Ch1</subfield><subfield code="b">4520354943</subfield><subfield code="c">00</subfield><subfield code="f">--%%--</subfield><subfield code="d">--%%--</subfield><subfield code="e">n</subfield><subfield code="j">n</subfield><subfield code="k">Campuslizenz</subfield><subfield code="y">l01</subfield><subfield code="z">03-05-24</subfield></datafield><datafield tag="980" ind1=" " ind2=" "><subfield code="2">2111</subfield><subfield code="1">02</subfield><subfield code="x">DE-944</subfield><subfield code="b">4046040467</subfield><subfield code="c">00</subfield><subfield code="f">--%%--</subfield><subfield code="d">E-Book Elsevier</subfield><subfield code="e">--%%--</subfield><subfield code="j">n</subfield><subfield code="k">Elektronischer Volltext - Campuslizenz</subfield><subfield code="y">l01</subfield><subfield code="z">27-01-22</subfield></datafield><datafield tag="981" ind1=" " ind2=" "><subfield code="2">105</subfield><subfield code="1">01</subfield><subfield code="x">0841</subfield><subfield code="r">http://www.sciencedirect.com/science/book/9780128130841</subfield></datafield><datafield tag="981" ind1=" " ind2=" "><subfield code="2">132</subfield><subfield code="1">01</subfield><subfield code="x">0959</subfield><subfield code="y">Zugriff nur für Angehörige der Hochschule Osnabrück im Hochschulnetz</subfield><subfield code="r">https://www.sciencedirect.com/science/book/9780128130841</subfield></datafield><datafield tag="981" ind1=" " ind2=" "><subfield code="2">185</subfield><subfield code="1">01</subfield><subfield code="x">3519</subfield><subfield code="r">http://www.sciencedirect.com/science/book/9780128130841</subfield></datafield><datafield tag="981" ind1=" " ind2=" "><subfield code="2">370</subfield><subfield code="1">01</subfield><subfield code="x">4370</subfield><subfield code="y">E-Book: Zugriff im HCU-Netz. Zugriff von außerhalb nur für HCU-Angehörige möglich</subfield><subfield code="r">https://www.sciencedirect.com/science/book/9780128130841</subfield></datafield><datafield tag="981" ind1=" " ind2=" "><subfield code="2">2020</subfield><subfield code="1">01</subfield><subfield code="x">DE-Ch1</subfield><subfield code="r">https://www.sciencedirect.com/science/book/9780128130841</subfield></datafield><datafield tag="981" ind1=" " ind2=" "><subfield code="2">2111</subfield><subfield code="1">02</subfield><subfield code="x">DE-944</subfield><subfield code="r">https://www.sciencedirect.com/science/book/9780128130841</subfield></datafield><datafield tag="982" ind1=" " ind2=" "><subfield code="2">132</subfield><subfield code="1">01</subfield><subfield code="x">0959</subfield><subfield code="8">00</subfield><subfield code="a">EBooks Elsevier Engineering</subfield></datafield><datafield tag="995" ind1=" " ind2=" "><subfield code="2">105</subfield><subfield code="1">01</subfield><subfield code="x">0841</subfield><subfield code="a">OLR-ELV-TEST</subfield></datafield><datafield tag="995" ind1=" " ind2=" "><subfield code="2">132</subfield><subfield code="1">01</subfield><subfield code="x">0959</subfield><subfield code="a">EBS Elsevier</subfield></datafield><datafield tag="995" ind1=" " ind2=" "><subfield code="2">185</subfield><subfield code="1">01</subfield><subfield code="x">3519</subfield><subfield code="a">OLR-EBS</subfield></datafield><datafield tag="995" ind1=" " ind2=" "><subfield code="2">370</subfield><subfield code="1">01</subfield><subfield code="x">4370</subfield><subfield code="a">EBS Elsevier</subfield></datafield></record></collection>
|
| standort_str_mv |
--%%-- |
| callnumber-first |
T - Technology |
| standort_iln_str_mv |
2020:--%%-- DE-Ch1:--%%-- 2111:--%%-- DE-944:--%%-- |
| author |
Mattox, D. M. |
| spellingShingle |
Mattox, D. M. misc TN686.5.V3 misc Vapor-plating misc TECHNOLOGY & ENGINEERING ; Metallurgy 132 EBooks Elsevier Engineering The foundations of vacuum coating technology |
| authorStr |
Mattox, D. M. |
| ppnlink_with_tag_str_mv |
@@889@@(DE-627)1031901337 |
| format |
eBook |
| delete_txt_mv |
keep |
| author_role |
aut |
| collection |
KXP GVK SWB |
| publishPlace |
Oxford |
| remote_str |
true |
| abrufzeichen_iln_str_mv |
105@OLR-ELV-TEST 132@EBS Elsevier 185@OLR-EBS 370@EBS Elsevier |
| abrufzeichen_iln_scis_mv |
105@OLR-ELV-TEST 132@EBS Elsevier 185@OLR-EBS 370@EBS Elsevier |
| callnumber-label |
TN686 |
| last_changed_iln_str_mv |
105@26-02-22 132@13-03-24 185@23-04-24 370@20-06-24 2020@03-05-24 2111@27-01-22 |
| illustrated |
Not Illustrated |
| topic_title |
TN686.5.V3 132 01 0959 00 EBooks Elsevier Engineering The foundations of vacuum coating technology Donald M. Mattox Vapor-plating TECHNOLOGY & ENGINEERING ; Metallurgy |
| publisher |
William Andrew |
| publisherStr |
William Andrew |
| topic |
misc TN686.5.V3 misc Vapor-plating misc TECHNOLOGY & ENGINEERING ; Metallurgy 132 EBooks Elsevier Engineering |
| topic_unstemmed |
misc TN686.5.V3 misc Vapor-plating misc TECHNOLOGY & ENGINEERING ; Metallurgy 132 EBooks Elsevier Engineering |
| topic_browse |
misc TN686.5.V3 misc Vapor-plating misc TECHNOLOGY & ENGINEERING ; Metallurgy 132 EBooks Elsevier Engineering |
| format_facet |
Elektronische Bücher Bücher Elektronische Ressource |
| standort_txtP_mv |
--%%-- |
| format_main_str_mv |
Text Buch |
| carriertype_str_mv |
cr |
| signature |
--%%-- E-Book Elsevier |
| signature_str_mv |
--%%-- E-Book Elsevier |
| isbn |
0128130857 9780128130858 0128130849 9780128130841 |
| edition |
Second edition |
| isfreeaccess_txt |
false |
| title |
The foundations of vacuum coating technology |
| ctrlnum |
(DE-627)1685486126 (DE-576)517999935 (DE-599)KEP027155072 (OCoLC)049974714 (EBP)027155072 (ELSEVIER)on1049974714 |
| exemplarkommentar_str_mv |
105@Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Die Weitergabe an Dritte sowie systematisches Downloaden sind untersagt. 105@Testzugang ZHB Lübeck 132@Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Keine Weitergabe an Dritte. Kein systematisches Downloaden durch Robots. 132@Zeitlich begrenzte Lizenzierung 185@Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Die Weitergabe an Dritte sowie systematisches Downloaden sind untersagt. 370@Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Keine Weitergabe an Dritte. Kein systematisches Downloaden durch Robots. 2020@Campuslizenz 2111@Elektronischer Volltext - Campuslizenz |
| title_full |
The foundations of vacuum coating technology Donald M. Mattox |
| author_sort |
Mattox, D. M. |
| callnumber-first-code |
T |
| lang_code |
eng |
| isOA_bool |
false |
| recordtype |
marc |
| genre |
Electronic books |
| publishDateSort |
2018 |
| contenttype_str_mv |
txt |
| author_browse |
Mattox, D. M. |
| selectkey |
105:z 132:k 185:z 370:z 2020:l 2111:l |
| physical |
1 Online-Ressource (1 online resource) |
| class |
TN686.5.V3 |
| format_se |
Elektronische Bücher |
| countryofpublication_str_mv |
XA-GB |
| author-letter |
Mattox, D. M. |
| title_sort |
foundations of vacuum coating technology |
| callnumber |
TN686.5.V3 |
| title_auth |
The foundations of vacuum coating technology |
| abstract |
"Getter" PumpsVacuum Chambers; Single-Chamber "Batch" Systems; Multichamber Systems (Closed Ended); Multichamber Systems (Open Ended); Multichamber Cluster Tool; Multipass Systems; Vacuum Sealing; Mercury Seals; Glass-to-Metal Seals; Greases and Lubricants; Fluid Seals; Paints; Viscous and Hardening Seals; Rubber and Other Elastomer Seals; Metal-to-Metal Seals; Leak Detection and Residual Gas/Vapor Analysis; Vacuum Gauging; "Indicator" Gauges; Pressure Differential Gauges; Liquid Gauges; Deflection Gauges; Pirani and Thermocouple Gauge; Ionization Gauge; Viscosity Gauge; Calibration of Gauges Chamber Cleaning and "Conditioning"Glow Discharge Cleaning; Cleaning by Heating (Bakeout); UV/O3 Cleaning; Recontamination; Conductance-Gas Manifold and Pumping Distribution; Fixtures, Tooling, and Vaporization Sources; Gas Handling and Reactive Deposition Processes; Partial Pressure Control; References; Further Reading; Books -- Early Vacuum Technology and Related Topics (1888-1945); Books/Articles/Chapters -- History of Vacuum Technology; 3 Plasmas and Plasma Enhanced CVD; Introduction: Plasmas; Plasma Generation; Plasma Diagnostics; Plasma Confinement; Magnetrons Early Vacuum Deposition BooksBooks; Articles and Chapters; 2 Vacuum Technology; Introduction; Early History of Vacuum Technology; Vacuum Technology as an Enabling Technology for Vacuum Coating; Vacuum Pumps; Torricelli Single-Stroke Vacuum Pump; Mercurial Multistroke Piston-Type Vacuum (Air) Pumps; Mechanical Vacuum (Air) Pumps; Mechanical Piston Pumps; Rotary Pump; Dry Pumps; Vapor Jet ("Diffusion" or "Condensation") Vacuum Pumps; Turbomolecular (Turbo) Pumps (Molecular Drag Pump, Mechanical Momentum Transfer Pump); Adsorption (Sorption) Pumps and Cryopumps; Cold Surfaces; Very Cold Surfaces Front Cover; The Foundations of Vacuum Coating Technology; Copyright Page; Dedication; Contents; Biography; Foreword; Preface; Further Discussion; Acknowledgments; 1 About This Book; Introduction; Terminology; Vacuum Deposition-Vacuum Coating-Physical Vapor Deposition-Chemical Vapor Deposition; "Thin Film" Versus "Coating"; Units of Pressure; Text References; Books and Book Chapters; Periodic Journals and Transaction Articles; Proceedings, Conferences, and Meetings; Patents and Copyrights; Documents/Magazine Articles, etc.; Internet-YouTube, Blogs, etc.; References; Further Reading Some Applications of Plasmas in Vacuum DepositionSputtering and Sputter Deposition; Modification of Vacuum Deposited Material; Plasma Modification of Surfaces; In Situ Cleaning; Introduction: Chemical Vapor Deposition and Plasma Enhanced CVD (PECVD); Types of Conventional CVD; Atmospheric Pressure Chemical Vapor Deposition (AP-CVD); Low-Pressure CVD; Plasma Enhanced CVD (PECVD); PECVD With Ion Bombardment of Deposit; Hot Filament CVD; Atomic Layer Deposition; Plasma Polymerization (PP); Parylene Hot Zone Process; Some Applications of PECVD; Insulating Layers (Encapsulation) The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and low-pressure plasma-enhanced chemical vapor deposition. The melding of these technologies has resulted in new processes and products that have greatly expanded the application of vacuum coatings for use in our everyday lives. The book is unique in that it makes extensive reference to the patent literature (mostly US) and how it relates to the history of vacuum coating. The book includes a Historical Timeline of Vacuum Coating Technology and a Historical Timeline of Vacuum/Plasma Technology, as well as a Glossary of Terms used in the vacuum coating and surface engineering industries Online resource; title from PDF title page (EBSCO, viewed August 29, 2018 |
| abstractGer |
"Getter" PumpsVacuum Chambers; Single-Chamber "Batch" Systems; Multichamber Systems (Closed Ended); Multichamber Systems (Open Ended); Multichamber Cluster Tool; Multipass Systems; Vacuum Sealing; Mercury Seals; Glass-to-Metal Seals; Greases and Lubricants; Fluid Seals; Paints; Viscous and Hardening Seals; Rubber and Other Elastomer Seals; Metal-to-Metal Seals; Leak Detection and Residual Gas/Vapor Analysis; Vacuum Gauging; "Indicator" Gauges; Pressure Differential Gauges; Liquid Gauges; Deflection Gauges; Pirani and Thermocouple Gauge; Ionization Gauge; Viscosity Gauge; Calibration of Gauges Chamber Cleaning and "Conditioning"Glow Discharge Cleaning; Cleaning by Heating (Bakeout); UV/O3 Cleaning; Recontamination; Conductance-Gas Manifold and Pumping Distribution; Fixtures, Tooling, and Vaporization Sources; Gas Handling and Reactive Deposition Processes; Partial Pressure Control; References; Further Reading; Books -- Early Vacuum Technology and Related Topics (1888-1945); Books/Articles/Chapters -- History of Vacuum Technology; 3 Plasmas and Plasma Enhanced CVD; Introduction: Plasmas; Plasma Generation; Plasma Diagnostics; Plasma Confinement; Magnetrons Early Vacuum Deposition BooksBooks; Articles and Chapters; 2 Vacuum Technology; Introduction; Early History of Vacuum Technology; Vacuum Technology as an Enabling Technology for Vacuum Coating; Vacuum Pumps; Torricelli Single-Stroke Vacuum Pump; Mercurial Multistroke Piston-Type Vacuum (Air) Pumps; Mechanical Vacuum (Air) Pumps; Mechanical Piston Pumps; Rotary Pump; Dry Pumps; Vapor Jet ("Diffusion" or "Condensation") Vacuum Pumps; Turbomolecular (Turbo) Pumps (Molecular Drag Pump, Mechanical Momentum Transfer Pump); Adsorption (Sorption) Pumps and Cryopumps; Cold Surfaces; Very Cold Surfaces Front Cover; The Foundations of Vacuum Coating Technology; Copyright Page; Dedication; Contents; Biography; Foreword; Preface; Further Discussion; Acknowledgments; 1 About This Book; Introduction; Terminology; Vacuum Deposition-Vacuum Coating-Physical Vapor Deposition-Chemical Vapor Deposition; "Thin Film" Versus "Coating"; Units of Pressure; Text References; Books and Book Chapters; Periodic Journals and Transaction Articles; Proceedings, Conferences, and Meetings; Patents and Copyrights; Documents/Magazine Articles, etc.; Internet-YouTube, Blogs, etc.; References; Further Reading Some Applications of Plasmas in Vacuum DepositionSputtering and Sputter Deposition; Modification of Vacuum Deposited Material; Plasma Modification of Surfaces; In Situ Cleaning; Introduction: Chemical Vapor Deposition and Plasma Enhanced CVD (PECVD); Types of Conventional CVD; Atmospheric Pressure Chemical Vapor Deposition (AP-CVD); Low-Pressure CVD; Plasma Enhanced CVD (PECVD); PECVD With Ion Bombardment of Deposit; Hot Filament CVD; Atomic Layer Deposition; Plasma Polymerization (PP); Parylene Hot Zone Process; Some Applications of PECVD; Insulating Layers (Encapsulation) The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and low-pressure plasma-enhanced chemical vapor deposition. The melding of these technologies has resulted in new processes and products that have greatly expanded the application of vacuum coatings for use in our everyday lives. The book is unique in that it makes extensive reference to the patent literature (mostly US) and how it relates to the history of vacuum coating. The book includes a Historical Timeline of Vacuum Coating Technology and a Historical Timeline of Vacuum/Plasma Technology, as well as a Glossary of Terms used in the vacuum coating and surface engineering industries Online resource; title from PDF title page (EBSCO, viewed August 29, 2018 |
| abstract_unstemmed |
"Getter" PumpsVacuum Chambers; Single-Chamber "Batch" Systems; Multichamber Systems (Closed Ended); Multichamber Systems (Open Ended); Multichamber Cluster Tool; Multipass Systems; Vacuum Sealing; Mercury Seals; Glass-to-Metal Seals; Greases and Lubricants; Fluid Seals; Paints; Viscous and Hardening Seals; Rubber and Other Elastomer Seals; Metal-to-Metal Seals; Leak Detection and Residual Gas/Vapor Analysis; Vacuum Gauging; "Indicator" Gauges; Pressure Differential Gauges; Liquid Gauges; Deflection Gauges; Pirani and Thermocouple Gauge; Ionization Gauge; Viscosity Gauge; Calibration of Gauges Chamber Cleaning and "Conditioning"Glow Discharge Cleaning; Cleaning by Heating (Bakeout); UV/O3 Cleaning; Recontamination; Conductance-Gas Manifold and Pumping Distribution; Fixtures, Tooling, and Vaporization Sources; Gas Handling and Reactive Deposition Processes; Partial Pressure Control; References; Further Reading; Books -- Early Vacuum Technology and Related Topics (1888-1945); Books/Articles/Chapters -- History of Vacuum Technology; 3 Plasmas and Plasma Enhanced CVD; Introduction: Plasmas; Plasma Generation; Plasma Diagnostics; Plasma Confinement; Magnetrons Early Vacuum Deposition BooksBooks; Articles and Chapters; 2 Vacuum Technology; Introduction; Early History of Vacuum Technology; Vacuum Technology as an Enabling Technology for Vacuum Coating; Vacuum Pumps; Torricelli Single-Stroke Vacuum Pump; Mercurial Multistroke Piston-Type Vacuum (Air) Pumps; Mechanical Vacuum (Air) Pumps; Mechanical Piston Pumps; Rotary Pump; Dry Pumps; Vapor Jet ("Diffusion" or "Condensation") Vacuum Pumps; Turbomolecular (Turbo) Pumps (Molecular Drag Pump, Mechanical Momentum Transfer Pump); Adsorption (Sorption) Pumps and Cryopumps; Cold Surfaces; Very Cold Surfaces Front Cover; The Foundations of Vacuum Coating Technology; Copyright Page; Dedication; Contents; Biography; Foreword; Preface; Further Discussion; Acknowledgments; 1 About This Book; Introduction; Terminology; Vacuum Deposition-Vacuum Coating-Physical Vapor Deposition-Chemical Vapor Deposition; "Thin Film" Versus "Coating"; Units of Pressure; Text References; Books and Book Chapters; Periodic Journals and Transaction Articles; Proceedings, Conferences, and Meetings; Patents and Copyrights; Documents/Magazine Articles, etc.; Internet-YouTube, Blogs, etc.; References; Further Reading Some Applications of Plasmas in Vacuum DepositionSputtering and Sputter Deposition; Modification of Vacuum Deposited Material; Plasma Modification of Surfaces; In Situ Cleaning; Introduction: Chemical Vapor Deposition and Plasma Enhanced CVD (PECVD); Types of Conventional CVD; Atmospheric Pressure Chemical Vapor Deposition (AP-CVD); Low-Pressure CVD; Plasma Enhanced CVD (PECVD); PECVD With Ion Bombardment of Deposit; Hot Filament CVD; Atomic Layer Deposition; Plasma Polymerization (PP); Parylene Hot Zone Process; Some Applications of PECVD; Insulating Layers (Encapsulation) The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and low-pressure plasma-enhanced chemical vapor deposition. The melding of these technologies has resulted in new processes and products that have greatly expanded the application of vacuum coatings for use in our everyday lives. The book is unique in that it makes extensive reference to the patent literature (mostly US) and how it relates to the history of vacuum coating. The book includes a Historical Timeline of Vacuum Coating Technology and a Historical Timeline of Vacuum/Plasma Technology, as well as a Glossary of Terms used in the vacuum coating and surface engineering industries Online resource; title from PDF title page (EBSCO, viewed August 29, 2018 |
| collection_details |
GBV-33-Freedom BSZ-33-EBS-HSAA GBV-33-EBS-MRI GBV-33-EBS-ZHB ZDB-33-EBS ZDB-33-EGE ZDB-33-ESD GBV-33-EBS-HST BSZ-33-EBS-C1UB GBV_ILN_105 ISIL_DE-841 SYSFLAG_1 GBV_KXP GBV_ILN_132 ISIL_DE-959 GBV_ILN_185 ISIL_DE-Sra5 GBV_ILN_370 ISIL_DE-1373 GBV_ILN_2020 ISIL_DE-Ch1 GBV_ILN_2111 ISIL_DE-944 |
| title_short |
The foundations of vacuum coating technology |
| url |
https://www.sciencedirect.com/science/book/9780128130841 http://www.sciencedirect.com/science/book/9780128130841 |
| ausleihindikator_str_mv |
105 132 185 370 2020:n 2111:- |
| remote_bool |
true |
| ppnlink |
1031901337 |
| callnumber-subject |
TN - Mining Engineering and Metallurgy |
| mediatype_str_mv |
c |
| isOA_txt |
false |
| hochschulschrift_bool |
false |
| callnumber-a |
TN686.5.V3 |
| up_date |
2024-07-04T16:14:53.435Z |
| _version_ |
1803665741906444288 |
| fullrecord_marcxml |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01000cam a22002652 4500</leader><controlfield tag="001">1685486126</controlfield><controlfield tag="003">DE-627</controlfield><controlfield tag="005">20240503140321.0</controlfield><controlfield tag="007">cr uuu---uuuuu</controlfield><controlfield tag="008">191213s2018 xxk|||||o 00| ||eng c</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0128130857</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">0-12-813085-7</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-627)1685486126</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-576)517999935</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)KEP027155072</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)049974714</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(EBP)027155072</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ELSEVIER)on1049974714</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-627</subfield><subfield code="b">eng</subfield><subfield code="c">DE-627</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="c">XA-GB</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TN686.5.V3</subfield></datafield><datafield tag="072" ind1=" " ind2="7"><subfield code="a">TEC023000</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="072" ind1=" " ind2="7"><subfield code="a">TEC 023000</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="072" ind1=" " ind2="7"><subfield code="a">TEC 023000</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Mattox, D. M.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="4"><subfield code="a">The foundations of vacuum coating technology</subfield><subfield code="c">Donald M. Mattox</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">Second edition</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Oxford</subfield><subfield code="b">William Andrew</subfield><subfield code="c">2018</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (1 online resource)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">Computermedien</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Online-Ressource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Online resource; title from PDF title page (EBSCO, viewed August 29, 2018</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">"Getter" PumpsVacuum Chambers; Single-Chamber "Batch" Systems; Multichamber Systems (Closed Ended); Multichamber Systems (Open Ended); Multichamber Cluster Tool; Multipass Systems; Vacuum Sealing; Mercury Seals; Glass-to-Metal Seals; Greases and Lubricants; Fluid Seals; Paints; Viscous and Hardening Seals; Rubber and Other Elastomer Seals; Metal-to-Metal Seals; Leak Detection and Residual Gas/Vapor Analysis; Vacuum Gauging; "Indicator" Gauges; Pressure Differential Gauges; Liquid Gauges; Deflection Gauges; Pirani and Thermocouple Gauge; Ionization Gauge; Viscosity Gauge; Calibration of Gauges</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Chamber Cleaning and "Conditioning"Glow Discharge Cleaning; Cleaning by Heating (Bakeout); UV/O3 Cleaning; Recontamination; Conductance-Gas Manifold and Pumping Distribution; Fixtures, Tooling, and Vaporization Sources; Gas Handling and Reactive Deposition Processes; Partial Pressure Control; References; Further Reading; Books -- Early Vacuum Technology and Related Topics (1888-1945); Books/Articles/Chapters -- History of Vacuum Technology; 3 Plasmas and Plasma Enhanced CVD; Introduction: Plasmas; Plasma Generation; Plasma Diagnostics; Plasma Confinement; Magnetrons</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Early Vacuum Deposition BooksBooks; Articles and Chapters; 2 Vacuum Technology; Introduction; Early History of Vacuum Technology; Vacuum Technology as an Enabling Technology for Vacuum Coating; Vacuum Pumps; Torricelli Single-Stroke Vacuum Pump; Mercurial Multistroke Piston-Type Vacuum (Air) Pumps; Mechanical Vacuum (Air) Pumps; Mechanical Piston Pumps; Rotary Pump; Dry Pumps; Vapor Jet ("Diffusion" or "Condensation") Vacuum Pumps; Turbomolecular (Turbo) Pumps (Molecular Drag Pump, Mechanical Momentum Transfer Pump); Adsorption (Sorption) Pumps and Cryopumps; Cold Surfaces; Very Cold Surfaces</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Front Cover; The Foundations of Vacuum Coating Technology; Copyright Page; Dedication; Contents; Biography; Foreword; Preface; Further Discussion; Acknowledgments; 1 About This Book; Introduction; Terminology; Vacuum Deposition-Vacuum Coating-Physical Vapor Deposition-Chemical Vapor Deposition; "Thin Film" Versus "Coating"; Units of Pressure; Text References; Books and Book Chapters; Periodic Journals and Transaction Articles; Proceedings, Conferences, and Meetings; Patents and Copyrights; Documents/Magazine Articles, etc.; Internet-YouTube, Blogs, etc.; References; Further Reading</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Some Applications of Plasmas in Vacuum DepositionSputtering and Sputter Deposition; Modification of Vacuum Deposited Material; Plasma Modification of Surfaces; In Situ Cleaning; Introduction: Chemical Vapor Deposition and Plasma Enhanced CVD (PECVD); Types of Conventional CVD; Atmospheric Pressure Chemical Vapor Deposition (AP-CVD); Low-Pressure CVD; Plasma Enhanced CVD (PECVD); PECVD With Ion Bombardment of Deposit; Hot Filament CVD; Atomic Layer Deposition; Plasma Polymerization (PP); Parylene Hot Zone Process; Some Applications of PECVD; Insulating Layers (Encapsulation)</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and low-pressure plasma-enhanced chemical vapor deposition. The melding of these technologies has resulted in new processes and products that have greatly expanded the application of vacuum coatings for use in our everyday lives. The book is unique in that it makes extensive reference to the patent literature (mostly US) and how it relates to the history of vacuum coating. The book includes a Historical Timeline of Vacuum Coating Technology and a Historical Timeline of Vacuum/Plasma Technology, as well as a Glossary of Terms used in the vacuum coating and surface engineering industries</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Vapor-plating</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">TECHNOLOGY & ENGINEERING ; Metallurgy</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Vapor-plating</subfield></datafield><datafield tag="655" ind1=" " ind2="0"><subfield code="a">Electronic books</subfield></datafield><datafield tag="655" ind1=" " ind2="4"><subfield code="a">Electronic books</subfield></datafield><datafield tag="776" ind1="1" ind2=" "><subfield code="z">0128130849</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe</subfield><subfield code="z">0128130849</subfield><subfield code="z">9780128130841</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://www.sciencedirect.com/science/book/9780128130841</subfield><subfield code="m">X:ELSEVIER</subfield><subfield code="x">Verlag</subfield><subfield code="z">lizenzpflichtig</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://www.sciencedirect.com/science/book/9780128130841</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="889" ind1=" " ind2=" "><subfield code="w">(DE-627)1031901337</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV-33-Freedom</subfield><subfield code="b">2022</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">BSZ-33-EBS-HSAA</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV-33-EBS-MRI</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV-33-EBS-ZHB</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV-33-Freedom</subfield><subfield code="b">2021</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-EBS</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-EGE</subfield><subfield code="b">2018</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-ESD</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV-33-EBS-HST</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">BSZ-33-EBS-C1UB</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_105</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ISIL_DE-841</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">SYSFLAG_1</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_KXP</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_132</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ISIL_DE-959</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_185</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ISIL_DE-Sra5</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_370</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ISIL_DE-1373</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2020</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ISIL_DE-Ch1</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV_ILN_2111</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ISIL_DE-944</subfield></datafield><datafield tag="951" ind1=" " ind2=" "><subfield code="a">BO</subfield></datafield><datafield tag="953" ind1=" " ind2=" "><subfield code="2">045F</subfield><subfield code="a">669.0284</subfield></datafield><datafield tag="953" ind1=" " ind2=" "><subfield code="2">045F</subfield><subfield code="a">669/.028/4</subfield></datafield><datafield tag="980" ind1=" " ind2=" "><subfield code="2">105</subfield><subfield code="1">01</subfield><subfield code="x">0841</subfield><subfield code="b">4074466597</subfield><subfield code="h">OLR-ELV-TEST</subfield><subfield code="k">Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Die Weitergabe an Dritte sowie systematisches Downloaden sind untersagt.</subfield><subfield code="k">Testzugang ZHB Lübeck</subfield><subfield code="y">z</subfield><subfield code="z">26-02-22</subfield></datafield><datafield tag="980" ind1=" " ind2=" "><subfield code="2">132</subfield><subfield code="1">01</subfield><subfield code="x">0959</subfield><subfield code="b">450000193X</subfield><subfield code="h">EBS Elsevier</subfield><subfield code="k">Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Keine Weitergabe an Dritte. Kein systematisches Downloaden durch Robots.</subfield><subfield code="k">Zeitlich begrenzte Lizenzierung</subfield><subfield code="y">k</subfield><subfield code="z">13-03-24</subfield></datafield><datafield tag="980" ind1=" " ind2=" "><subfield code="2">185</subfield><subfield code="1">01</subfield><subfield code="x">3519</subfield><subfield code="b">4514749044</subfield><subfield code="h">OLR-EBS</subfield><subfield code="k">Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Die Weitergabe an Dritte sowie systematisches Downloaden sind untersagt.</subfield><subfield code="y">z</subfield><subfield code="z">23-04-24</subfield></datafield><datafield tag="980" ind1=" " ind2=" "><subfield code="2">370</subfield><subfield code="1">01</subfield><subfield code="x">4370</subfield><subfield code="b">4540279661</subfield><subfield code="h">EBS Elsevier</subfield><subfield code="k">Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Keine Weitergabe an Dritte. Kein systematisches Downloaden durch Robots.</subfield><subfield code="u">i</subfield><subfield code="y">z</subfield><subfield code="z">20-06-24</subfield></datafield><datafield tag="980" ind1=" " ind2=" "><subfield code="2">2020</subfield><subfield code="1">01</subfield><subfield code="x">DE-Ch1</subfield><subfield code="b">4520354943</subfield><subfield code="c">00</subfield><subfield code="f">--%%--</subfield><subfield code="d">--%%--</subfield><subfield code="e">n</subfield><subfield code="j">n</subfield><subfield code="k">Campuslizenz</subfield><subfield code="y">l01</subfield><subfield code="z">03-05-24</subfield></datafield><datafield tag="980" ind1=" " ind2=" "><subfield code="2">2111</subfield><subfield code="1">02</subfield><subfield code="x">DE-944</subfield><subfield code="b">4046040467</subfield><subfield code="c">00</subfield><subfield code="f">--%%--</subfield><subfield code="d">E-Book Elsevier</subfield><subfield code="e">--%%--</subfield><subfield code="j">n</subfield><subfield code="k">Elektronischer Volltext - Campuslizenz</subfield><subfield code="y">l01</subfield><subfield code="z">27-01-22</subfield></datafield><datafield tag="981" ind1=" " ind2=" "><subfield code="2">105</subfield><subfield code="1">01</subfield><subfield code="x">0841</subfield><subfield code="r">http://www.sciencedirect.com/science/book/9780128130841</subfield></datafield><datafield tag="981" ind1=" " ind2=" "><subfield code="2">132</subfield><subfield code="1">01</subfield><subfield code="x">0959</subfield><subfield code="y">Zugriff nur für Angehörige der Hochschule Osnabrück im Hochschulnetz</subfield><subfield code="r">https://www.sciencedirect.com/science/book/9780128130841</subfield></datafield><datafield tag="981" ind1=" " ind2=" "><subfield code="2">185</subfield><subfield code="1">01</subfield><subfield code="x">3519</subfield><subfield code="r">http://www.sciencedirect.com/science/book/9780128130841</subfield></datafield><datafield tag="981" ind1=" " ind2=" "><subfield code="2">370</subfield><subfield code="1">01</subfield><subfield code="x">4370</subfield><subfield code="y">E-Book: Zugriff im HCU-Netz. Zugriff von außerhalb nur für HCU-Angehörige möglich</subfield><subfield code="r">https://www.sciencedirect.com/science/book/9780128130841</subfield></datafield><datafield tag="981" ind1=" " ind2=" "><subfield code="2">2020</subfield><subfield code="1">01</subfield><subfield code="x">DE-Ch1</subfield><subfield code="r">https://www.sciencedirect.com/science/book/9780128130841</subfield></datafield><datafield tag="981" ind1=" " ind2=" "><subfield code="2">2111</subfield><subfield code="1">02</subfield><subfield code="x">DE-944</subfield><subfield code="r">https://www.sciencedirect.com/science/book/9780128130841</subfield></datafield><datafield tag="982" ind1=" " ind2=" "><subfield code="2">132</subfield><subfield code="1">01</subfield><subfield code="x">0959</subfield><subfield code="8">00</subfield><subfield code="a">EBooks Elsevier Engineering</subfield></datafield><datafield tag="995" ind1=" " ind2=" "><subfield code="2">105</subfield><subfield code="1">01</subfield><subfield code="x">0841</subfield><subfield code="a">OLR-ELV-TEST</subfield></datafield><datafield tag="995" ind1=" " ind2=" "><subfield code="2">132</subfield><subfield code="1">01</subfield><subfield code="x">0959</subfield><subfield code="a">EBS Elsevier</subfield></datafield><datafield tag="995" ind1=" " ind2=" "><subfield code="2">185</subfield><subfield code="1">01</subfield><subfield code="x">3519</subfield><subfield code="a">OLR-EBS</subfield></datafield><datafield tag="995" ind1=" " ind2=" "><subfield code="2">370</subfield><subfield code="1">01</subfield><subfield code="x">4370</subfield><subfield code="a">EBS Elsevier</subfield></datafield></record></collection>
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