Condition assessment and fault prognostics of microelectromechanical systems
• Review of microelectromechanical systems (MEMS) reliability and failure mechanisms. • Introduction to the Prognostics and Health Management (PHM) concept. • Challenges and requirements when applying PHM on MEMS. • Proposition of a PHM method. • Application to a microgripper (condition assessment a...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Medjaher, K. [verfasserIn] |
|---|
| Format: |
E-Artikel |
|---|---|
| Sprache: |
Englisch |
| Erschienen: |
2014 |
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| Umfang: |
9 |
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| Übergeordnetes Werk: |
Enthalten in: Fixed-time neural control for output-constrained synchronization of second-order chaotic systems - Yao, Qijia ELSEVIER, 2023, Amsterdam [u.a.] |
|---|---|
| Übergeordnetes Werk: |
volume:54 ; year:2014 ; number:1 ; pages:143-151 ; extent:9 |
| Links: |
|---|
| DOI / URN: |
10.1016/j.microrel.2013.09.013 |
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• Review of microelectromechanical systems (MEMS) reliability and failure mechanisms. • Introduction to the Prognostics and Health Management (PHM) concept. • Challenges and requirements when applying PHM on MEMS. • Proposition of a PHM method. • Application to a microgripper (condition assessment and remaining useful life estimation). |
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