Reduction of Dislocation Density in HgCdTe on Si by Producing Highly Reticulated Structures
Abstract HgCdTe, because of its narrow band gap and low dark current, is the infrared detector material of choice for several military and commercial applications. CdZnTe is the substrate of choice for HgCdTe as it can be lattice matched, resulting in low-defect-density epitaxy. Being often small an...
Ausführliche Beschreibung
Gespeichert in:
| Autor*in: |
Stoltz, A. J. [verfasserIn] |
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| Format: |
E-Artikel |
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| Sprache: |
Englisch |
| Erschienen: |
2011 |
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| Schlagwörter: |
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| Anmerkung: |
© TMS (outside the USA) 2011 |
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| Übergeordnetes Werk: |
Enthalten in: Journal of electronic materials - Warrendale, Pa : TMS, 1972, 40(2011), 8 vom: 28. Juni, Seite 1785-1789 |
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| Übergeordnetes Werk: |
volume:40 ; year:2011 ; number:8 ; day:28 ; month:06 ; pages:1785-1789 |
| Links: |
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| DOI / URN: |
10.1007/s11664-011-1697-7 |
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| Katalog-ID: |
SPR021498954 |
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| 245 | 1 | 0 | |a Reduction of Dislocation Density in HgCdTe on Si by Producing Highly Reticulated Structures |
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| 520 | |a Abstract HgCdTe, because of its narrow band gap and low dark current, is the infrared detector material of choice for several military and commercial applications. CdZnTe is the substrate of choice for HgCdTe as it can be lattice matched, resulting in low-defect-density epitaxy. Being often small and not circular, layers grown on CdZnTe are difficult to process in standard semiconductor equipment. Furthermore, CdZnTe can often be very expensive. Alternative inexpensive large circular substrates, such as silicon or gallium arsenide, are needed to scale production of HgCdTe detectors. Growth of HgCdTe on these alternative substrates has its own difficulty, namely a large lattice mismatch (19% for Si and 14% for GaAs). This large mismatch results in high defect density and reduced detector performance. In this paper we discuss ways to reduce the effects of dislocations by gettering these defects to the edge of a reticulated structure. These reticulated surfaces enable stress-free regions for dislocations to glide to. In the work described herein, HgCdTe-on-Si diodes have been produced with R0A0 of over 400 Ω $ cm^{2} $ at 78 K and cutoff of 10.1 μm. Further, these diodes have good uniformity at 78 K at both 9.3 μm and 10.14 μm. | ||
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| 650 | 4 | |a plasma processing |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a threading dislocation |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a gettering |7 (dpeaa)DE-He213 | |
| 650 | 4 | |a reticulation |7 (dpeaa)DE-He213 | |
| 700 | 1 | |a Benson, J. D. |4 aut | |
| 700 | 1 | |a Carmody, M. |4 aut | |
| 700 | 1 | |a Farrell, S |4 aut | |
| 700 | 1 | |a Wijewarnasuriya, P. S. |4 aut | |
| 700 | 1 | |a Brill, G. |4 aut | |
| 700 | 1 | |a Jacobs, R. |4 aut | |
| 700 | 1 | |a Chen, Y. |4 aut | |
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10.1007/s11664-011-1697-7 doi (DE-627)SPR021498954 (SPR)s11664-011-1697-7-e DE-627 ger DE-627 rakwb eng Stoltz, A. J. verfasserin aut Reduction of Dislocation Density in HgCdTe on Si by Producing Highly Reticulated Structures 2011 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © TMS (outside the USA) 2011 Abstract HgCdTe, because of its narrow band gap and low dark current, is the infrared detector material of choice for several military and commercial applications. CdZnTe is the substrate of choice for HgCdTe as it can be lattice matched, resulting in low-defect-density epitaxy. Being often small and not circular, layers grown on CdZnTe are difficult to process in standard semiconductor equipment. Furthermore, CdZnTe can often be very expensive. Alternative inexpensive large circular substrates, such as silicon or gallium arsenide, are needed to scale production of HgCdTe detectors. Growth of HgCdTe on these alternative substrates has its own difficulty, namely a large lattice mismatch (19% for Si and 14% for GaAs). This large mismatch results in high defect density and reduced detector performance. In this paper we discuss ways to reduce the effects of dislocations by gettering these defects to the edge of a reticulated structure. These reticulated surfaces enable stress-free regions for dislocations to glide to. In the work described herein, HgCdTe-on-Si diodes have been produced with R0A0 of over 400 Ω $ cm^{2} $ at 78 K and cutoff of 10.1 μm. Further, these diodes have good uniformity at 78 K at both 9.3 μm and 10.14 μm. HgCdTe (dpeaa)DE-He213 ICP (dpeaa)DE-He213 ECR (dpeaa)DE-He213 plasma processing (dpeaa)DE-He213 threading dislocation (dpeaa)DE-He213 gettering (dpeaa)DE-He213 reticulation (dpeaa)DE-He213 Benson, J. D. aut Carmody, M. aut Farrell, S aut Wijewarnasuriya, P. S. aut Brill, G. aut Jacobs, R. aut Chen, Y. aut Enthalten in Journal of electronic materials Warrendale, Pa : TMS, 1972 40(2011), 8 vom: 28. Juni, Seite 1785-1789 (DE-627)324918739 (DE-600)2032868-0 1543-186X nnns volume:40 year:2011 number:8 day:28 month:06 pages:1785-1789 https://dx.doi.org/10.1007/s11664-011-1697-7 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 40 2011 8 28 06 1785-1789 |
| spelling |
10.1007/s11664-011-1697-7 doi (DE-627)SPR021498954 (SPR)s11664-011-1697-7-e DE-627 ger DE-627 rakwb eng Stoltz, A. J. verfasserin aut Reduction of Dislocation Density in HgCdTe on Si by Producing Highly Reticulated Structures 2011 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © TMS (outside the USA) 2011 Abstract HgCdTe, because of its narrow band gap and low dark current, is the infrared detector material of choice for several military and commercial applications. CdZnTe is the substrate of choice for HgCdTe as it can be lattice matched, resulting in low-defect-density epitaxy. Being often small and not circular, layers grown on CdZnTe are difficult to process in standard semiconductor equipment. Furthermore, CdZnTe can often be very expensive. Alternative inexpensive large circular substrates, such as silicon or gallium arsenide, are needed to scale production of HgCdTe detectors. Growth of HgCdTe on these alternative substrates has its own difficulty, namely a large lattice mismatch (19% for Si and 14% for GaAs). This large mismatch results in high defect density and reduced detector performance. In this paper we discuss ways to reduce the effects of dislocations by gettering these defects to the edge of a reticulated structure. These reticulated surfaces enable stress-free regions for dislocations to glide to. In the work described herein, HgCdTe-on-Si diodes have been produced with R0A0 of over 400 Ω $ cm^{2} $ at 78 K and cutoff of 10.1 μm. Further, these diodes have good uniformity at 78 K at both 9.3 μm and 10.14 μm. HgCdTe (dpeaa)DE-He213 ICP (dpeaa)DE-He213 ECR (dpeaa)DE-He213 plasma processing (dpeaa)DE-He213 threading dislocation (dpeaa)DE-He213 gettering (dpeaa)DE-He213 reticulation (dpeaa)DE-He213 Benson, J. D. aut Carmody, M. aut Farrell, S aut Wijewarnasuriya, P. S. aut Brill, G. aut Jacobs, R. aut Chen, Y. aut Enthalten in Journal of electronic materials Warrendale, Pa : TMS, 1972 40(2011), 8 vom: 28. Juni, Seite 1785-1789 (DE-627)324918739 (DE-600)2032868-0 1543-186X nnns volume:40 year:2011 number:8 day:28 month:06 pages:1785-1789 https://dx.doi.org/10.1007/s11664-011-1697-7 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 40 2011 8 28 06 1785-1789 |
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10.1007/s11664-011-1697-7 doi (DE-627)SPR021498954 (SPR)s11664-011-1697-7-e DE-627 ger DE-627 rakwb eng Stoltz, A. J. verfasserin aut Reduction of Dislocation Density in HgCdTe on Si by Producing Highly Reticulated Structures 2011 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © TMS (outside the USA) 2011 Abstract HgCdTe, because of its narrow band gap and low dark current, is the infrared detector material of choice for several military and commercial applications. CdZnTe is the substrate of choice for HgCdTe as it can be lattice matched, resulting in low-defect-density epitaxy. Being often small and not circular, layers grown on CdZnTe are difficult to process in standard semiconductor equipment. Furthermore, CdZnTe can often be very expensive. Alternative inexpensive large circular substrates, such as silicon or gallium arsenide, are needed to scale production of HgCdTe detectors. Growth of HgCdTe on these alternative substrates has its own difficulty, namely a large lattice mismatch (19% for Si and 14% for GaAs). This large mismatch results in high defect density and reduced detector performance. In this paper we discuss ways to reduce the effects of dislocations by gettering these defects to the edge of a reticulated structure. These reticulated surfaces enable stress-free regions for dislocations to glide to. In the work described herein, HgCdTe-on-Si diodes have been produced with R0A0 of over 400 Ω $ cm^{2} $ at 78 K and cutoff of 10.1 μm. Further, these diodes have good uniformity at 78 K at both 9.3 μm and 10.14 μm. HgCdTe (dpeaa)DE-He213 ICP (dpeaa)DE-He213 ECR (dpeaa)DE-He213 plasma processing (dpeaa)DE-He213 threading dislocation (dpeaa)DE-He213 gettering (dpeaa)DE-He213 reticulation (dpeaa)DE-He213 Benson, J. D. aut Carmody, M. aut Farrell, S aut Wijewarnasuriya, P. S. aut Brill, G. aut Jacobs, R. aut Chen, Y. aut Enthalten in Journal of electronic materials Warrendale, Pa : TMS, 1972 40(2011), 8 vom: 28. Juni, Seite 1785-1789 (DE-627)324918739 (DE-600)2032868-0 1543-186X nnns volume:40 year:2011 number:8 day:28 month:06 pages:1785-1789 https://dx.doi.org/10.1007/s11664-011-1697-7 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 40 2011 8 28 06 1785-1789 |
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10.1007/s11664-011-1697-7 doi (DE-627)SPR021498954 (SPR)s11664-011-1697-7-e DE-627 ger DE-627 rakwb eng Stoltz, A. J. verfasserin aut Reduction of Dislocation Density in HgCdTe on Si by Producing Highly Reticulated Structures 2011 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © TMS (outside the USA) 2011 Abstract HgCdTe, because of its narrow band gap and low dark current, is the infrared detector material of choice for several military and commercial applications. CdZnTe is the substrate of choice for HgCdTe as it can be lattice matched, resulting in low-defect-density epitaxy. Being often small and not circular, layers grown on CdZnTe are difficult to process in standard semiconductor equipment. Furthermore, CdZnTe can often be very expensive. Alternative inexpensive large circular substrates, such as silicon or gallium arsenide, are needed to scale production of HgCdTe detectors. Growth of HgCdTe on these alternative substrates has its own difficulty, namely a large lattice mismatch (19% for Si and 14% for GaAs). This large mismatch results in high defect density and reduced detector performance. In this paper we discuss ways to reduce the effects of dislocations by gettering these defects to the edge of a reticulated structure. These reticulated surfaces enable stress-free regions for dislocations to glide to. In the work described herein, HgCdTe-on-Si diodes have been produced with R0A0 of over 400 Ω $ cm^{2} $ at 78 K and cutoff of 10.1 μm. Further, these diodes have good uniformity at 78 K at both 9.3 μm and 10.14 μm. HgCdTe (dpeaa)DE-He213 ICP (dpeaa)DE-He213 ECR (dpeaa)DE-He213 plasma processing (dpeaa)DE-He213 threading dislocation (dpeaa)DE-He213 gettering (dpeaa)DE-He213 reticulation (dpeaa)DE-He213 Benson, J. D. aut Carmody, M. aut Farrell, S aut Wijewarnasuriya, P. S. aut Brill, G. aut Jacobs, R. aut Chen, Y. aut Enthalten in Journal of electronic materials Warrendale, Pa : TMS, 1972 40(2011), 8 vom: 28. Juni, Seite 1785-1789 (DE-627)324918739 (DE-600)2032868-0 1543-186X nnns volume:40 year:2011 number:8 day:28 month:06 pages:1785-1789 https://dx.doi.org/10.1007/s11664-011-1697-7 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 40 2011 8 28 06 1785-1789 |
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10.1007/s11664-011-1697-7 doi (DE-627)SPR021498954 (SPR)s11664-011-1697-7-e DE-627 ger DE-627 rakwb eng Stoltz, A. J. verfasserin aut Reduction of Dislocation Density in HgCdTe on Si by Producing Highly Reticulated Structures 2011 Text txt rdacontent Computermedien c rdamedia Online-Ressource cr rdacarrier © TMS (outside the USA) 2011 Abstract HgCdTe, because of its narrow band gap and low dark current, is the infrared detector material of choice for several military and commercial applications. CdZnTe is the substrate of choice for HgCdTe as it can be lattice matched, resulting in low-defect-density epitaxy. Being often small and not circular, layers grown on CdZnTe are difficult to process in standard semiconductor equipment. Furthermore, CdZnTe can often be very expensive. Alternative inexpensive large circular substrates, such as silicon or gallium arsenide, are needed to scale production of HgCdTe detectors. Growth of HgCdTe on these alternative substrates has its own difficulty, namely a large lattice mismatch (19% for Si and 14% for GaAs). This large mismatch results in high defect density and reduced detector performance. In this paper we discuss ways to reduce the effects of dislocations by gettering these defects to the edge of a reticulated structure. These reticulated surfaces enable stress-free regions for dislocations to glide to. In the work described herein, HgCdTe-on-Si diodes have been produced with R0A0 of over 400 Ω $ cm^{2} $ at 78 K and cutoff of 10.1 μm. Further, these diodes have good uniformity at 78 K at both 9.3 μm and 10.14 μm. HgCdTe (dpeaa)DE-He213 ICP (dpeaa)DE-He213 ECR (dpeaa)DE-He213 plasma processing (dpeaa)DE-He213 threading dislocation (dpeaa)DE-He213 gettering (dpeaa)DE-He213 reticulation (dpeaa)DE-He213 Benson, J. D. aut Carmody, M. aut Farrell, S aut Wijewarnasuriya, P. S. aut Brill, G. aut Jacobs, R. aut Chen, Y. aut Enthalten in Journal of electronic materials Warrendale, Pa : TMS, 1972 40(2011), 8 vom: 28. Juni, Seite 1785-1789 (DE-627)324918739 (DE-600)2032868-0 1543-186X nnns volume:40 year:2011 number:8 day:28 month:06 pages:1785-1789 https://dx.doi.org/10.1007/s11664-011-1697-7 lizenzpflichtig Volltext GBV_USEFLAG_A SYSFLAG_A GBV_SPRINGER GBV_ILN_11 GBV_ILN_20 GBV_ILN_22 GBV_ILN_23 GBV_ILN_24 GBV_ILN_31 GBV_ILN_32 GBV_ILN_39 GBV_ILN_40 GBV_ILN_60 GBV_ILN_62 GBV_ILN_63 GBV_ILN_65 GBV_ILN_69 GBV_ILN_70 GBV_ILN_73 GBV_ILN_74 GBV_ILN_90 GBV_ILN_95 GBV_ILN_100 GBV_ILN_105 GBV_ILN_110 GBV_ILN_120 GBV_ILN_138 GBV_ILN_150 GBV_ILN_151 GBV_ILN_152 GBV_ILN_161 GBV_ILN_170 GBV_ILN_171 GBV_ILN_187 GBV_ILN_213 GBV_ILN_224 GBV_ILN_230 GBV_ILN_250 GBV_ILN_281 GBV_ILN_285 GBV_ILN_293 GBV_ILN_370 GBV_ILN_602 GBV_ILN_636 GBV_ILN_702 GBV_ILN_2001 GBV_ILN_2003 GBV_ILN_2004 GBV_ILN_2005 GBV_ILN_2006 GBV_ILN_2007 GBV_ILN_2008 GBV_ILN_2009 GBV_ILN_2010 GBV_ILN_2011 GBV_ILN_2014 GBV_ILN_2015 GBV_ILN_2020 GBV_ILN_2021 GBV_ILN_2025 GBV_ILN_2026 GBV_ILN_2027 GBV_ILN_2031 GBV_ILN_2034 GBV_ILN_2037 GBV_ILN_2038 GBV_ILN_2039 GBV_ILN_2044 GBV_ILN_2048 GBV_ILN_2049 GBV_ILN_2050 GBV_ILN_2055 GBV_ILN_2057 GBV_ILN_2059 GBV_ILN_2061 GBV_ILN_2064 GBV_ILN_2065 GBV_ILN_2068 GBV_ILN_2070 GBV_ILN_2086 GBV_ILN_2088 GBV_ILN_2093 GBV_ILN_2106 GBV_ILN_2107 GBV_ILN_2108 GBV_ILN_2110 GBV_ILN_2111 GBV_ILN_2112 GBV_ILN_2113 GBV_ILN_2116 GBV_ILN_2118 GBV_ILN_2119 GBV_ILN_2122 GBV_ILN_2129 GBV_ILN_2143 GBV_ILN_2144 GBV_ILN_2147 GBV_ILN_2148 GBV_ILN_2152 GBV_ILN_2153 GBV_ILN_2188 GBV_ILN_2190 GBV_ILN_2232 GBV_ILN_2336 GBV_ILN_2446 GBV_ILN_2470 GBV_ILN_2472 GBV_ILN_2507 GBV_ILN_2522 GBV_ILN_2548 GBV_ILN_4035 GBV_ILN_4037 GBV_ILN_4046 GBV_ILN_4112 GBV_ILN_4125 GBV_ILN_4242 GBV_ILN_4246 GBV_ILN_4249 GBV_ILN_4251 GBV_ILN_4305 GBV_ILN_4306 GBV_ILN_4307 GBV_ILN_4313 GBV_ILN_4322 GBV_ILN_4323 GBV_ILN_4324 GBV_ILN_4325 GBV_ILN_4326 GBV_ILN_4328 GBV_ILN_4333 GBV_ILN_4334 GBV_ILN_4335 GBV_ILN_4336 GBV_ILN_4338 GBV_ILN_4393 GBV_ILN_4700 AR 40 2011 8 28 06 1785-1789 |
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J.</subfield><subfield code="e">verfasserin</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Reduction of Dislocation Density in HgCdTe on Si by Producing Highly Reticulated Structures</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">2011</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">Text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">Computermedien</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">Online-Ressource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">© TMS (outside the USA) 2011</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Abstract HgCdTe, because of its narrow band gap and low dark current, is the infrared detector material of choice for several military and commercial applications. CdZnTe is the substrate of choice for HgCdTe as it can be lattice matched, resulting in low-defect-density epitaxy. Being often small and not circular, layers grown on CdZnTe are difficult to process in standard semiconductor equipment. Furthermore, CdZnTe can often be very expensive. Alternative inexpensive large circular substrates, such as silicon or gallium arsenide, are needed to scale production of HgCdTe detectors. Growth of HgCdTe on these alternative substrates has its own difficulty, namely a large lattice mismatch (19% for Si and 14% for GaAs). This large mismatch results in high defect density and reduced detector performance. In this paper we discuss ways to reduce the effects of dislocations by gettering these defects to the edge of a reticulated structure. These reticulated surfaces enable stress-free regions for dislocations to glide to. In the work described herein, HgCdTe-on-Si diodes have been produced with R0A0 of over 400 Ω $ cm^{2} $ at 78 K and cutoff of 10.1 μm. 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Stoltz, A. J. |
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Stoltz, A. J. misc HgCdTe misc ICP misc ECR misc plasma processing misc threading dislocation misc gettering misc reticulation Reduction of Dislocation Density in HgCdTe on Si by Producing Highly Reticulated Structures |
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Reduction of Dislocation Density in HgCdTe on Si by Producing Highly Reticulated Structures HgCdTe (dpeaa)DE-He213 ICP (dpeaa)DE-He213 ECR (dpeaa)DE-He213 plasma processing (dpeaa)DE-He213 threading dislocation (dpeaa)DE-He213 gettering (dpeaa)DE-He213 reticulation (dpeaa)DE-He213 |
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Reduction of Dislocation Density in HgCdTe on Si by Producing Highly Reticulated Structures |
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Reduction of Dislocation Density in HgCdTe on Si by Producing Highly Reticulated Structures |
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Stoltz, A. J. Benson, J. D. Carmody, M. Farrell, S Wijewarnasuriya, P. S. Brill, G. Jacobs, R. Chen, Y. |
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reduction of dislocation density in hgcdte on si by producing highly reticulated structures |
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Reduction of Dislocation Density in HgCdTe on Si by Producing Highly Reticulated Structures |
| abstract |
Abstract HgCdTe, because of its narrow band gap and low dark current, is the infrared detector material of choice for several military and commercial applications. CdZnTe is the substrate of choice for HgCdTe as it can be lattice matched, resulting in low-defect-density epitaxy. Being often small and not circular, layers grown on CdZnTe are difficult to process in standard semiconductor equipment. Furthermore, CdZnTe can often be very expensive. Alternative inexpensive large circular substrates, such as silicon or gallium arsenide, are needed to scale production of HgCdTe detectors. Growth of HgCdTe on these alternative substrates has its own difficulty, namely a large lattice mismatch (19% for Si and 14% for GaAs). This large mismatch results in high defect density and reduced detector performance. In this paper we discuss ways to reduce the effects of dislocations by gettering these defects to the edge of a reticulated structure. These reticulated surfaces enable stress-free regions for dislocations to glide to. In the work described herein, HgCdTe-on-Si diodes have been produced with R0A0 of over 400 Ω $ cm^{2} $ at 78 K and cutoff of 10.1 μm. Further, these diodes have good uniformity at 78 K at both 9.3 μm and 10.14 μm. © TMS (outside the USA) 2011 |
| abstractGer |
Abstract HgCdTe, because of its narrow band gap and low dark current, is the infrared detector material of choice for several military and commercial applications. CdZnTe is the substrate of choice for HgCdTe as it can be lattice matched, resulting in low-defect-density epitaxy. Being often small and not circular, layers grown on CdZnTe are difficult to process in standard semiconductor equipment. Furthermore, CdZnTe can often be very expensive. Alternative inexpensive large circular substrates, such as silicon or gallium arsenide, are needed to scale production of HgCdTe detectors. Growth of HgCdTe on these alternative substrates has its own difficulty, namely a large lattice mismatch (19% for Si and 14% for GaAs). This large mismatch results in high defect density and reduced detector performance. In this paper we discuss ways to reduce the effects of dislocations by gettering these defects to the edge of a reticulated structure. These reticulated surfaces enable stress-free regions for dislocations to glide to. In the work described herein, HgCdTe-on-Si diodes have been produced with R0A0 of over 400 Ω $ cm^{2} $ at 78 K and cutoff of 10.1 μm. Further, these diodes have good uniformity at 78 K at both 9.3 μm and 10.14 μm. © TMS (outside the USA) 2011 |
| abstract_unstemmed |
Abstract HgCdTe, because of its narrow band gap and low dark current, is the infrared detector material of choice for several military and commercial applications. CdZnTe is the substrate of choice for HgCdTe as it can be lattice matched, resulting in low-defect-density epitaxy. Being often small and not circular, layers grown on CdZnTe are difficult to process in standard semiconductor equipment. Furthermore, CdZnTe can often be very expensive. Alternative inexpensive large circular substrates, such as silicon or gallium arsenide, are needed to scale production of HgCdTe detectors. Growth of HgCdTe on these alternative substrates has its own difficulty, namely a large lattice mismatch (19% for Si and 14% for GaAs). This large mismatch results in high defect density and reduced detector performance. In this paper we discuss ways to reduce the effects of dislocations by gettering these defects to the edge of a reticulated structure. These reticulated surfaces enable stress-free regions for dislocations to glide to. In the work described herein, HgCdTe-on-Si diodes have been produced with R0A0 of over 400 Ω $ cm^{2} $ at 78 K and cutoff of 10.1 μm. Further, these diodes have good uniformity at 78 K at both 9.3 μm and 10.14 μm. © TMS (outside the USA) 2011 |
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Reduction of Dislocation Density in HgCdTe on Si by Producing Highly Reticulated Structures |
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https://dx.doi.org/10.1007/s11664-011-1697-7 |
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Benson, J. D. Carmody, M. Farrell, S Wijewarnasuriya, P. S. Brill, G. Jacobs, R. Chen, Y. |
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Benson, J. D. Carmody, M. Farrell, S Wijewarnasuriya, P. S. Brill, G. Jacobs, R. Chen, Y. |
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| score |
7.3985376 |